Product / Application Matrix
Product / Application Matrix
Integrated Systems
A Preparation Air
Process
Integrated Control Systems Cabinets and Power Boxes
FFittings and Tubing Air Pressure Pilot Valves Filter and Valves F Flow Regulators Manifolds C Controls
Application
Multi-Axis Positioning and Transfer Systems
Valves & Valve Manifolds
Actuators and Cylinders
Sensors Operator Interfaces, and Controls, and I/O Feedback Devices Devices
ElectroMechanical Actuators
Position Sensors
Pneumatic Actuators and Cylinders
MultiAir Logic Position Arrays Controllers
Crystal Pulling Wafer Lapping and Polishing Wafer substrate Cleaning Oxidation / Diffusion / LPCVD Reactors Spin / Coat / Develop / Bake Systems
Front-End Process Equipment
Stand-Alone Tool or Multi-Process / Multi-Chamber Cluster Tool Variations of ALD, CVD, PVD, Etch, Strip, Pre-Clean, Post-Clean, Electroplating and Electroless Deposition Gate and Slit Valves Cluster Tool CWH / EFEM (wafer and flat panel glass substrates) / SMIF / Pod Loaders Ion Implantation Tools Lithography Tools CMP Tools Liquid Chemicals / Slurry Mixing and Delivery
Front-End Process Facilities Equipment
Specialty Process Gas Cabinets Facility Process Gas Delivery Process Tool Point-of-Use Exhaust Scrubbers Wafer / Substrate Probe / Test
Back-End Test-AssemblyPackaging Equipment
Die Attach Wire Bonding Encapsulation / Packaging Final Test Illustrations supplied and reproduced with permission from SEMI, San Jose, CA.
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