Semicon08.Notebook.pdf 21/3/2008 3:22:07 PM
First in Motion Partner to the Electronics Industry
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Semicon08.Notebook_p2.pdf 24/3/2008 11:22:12 PM
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Why Festo?
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- Miniaturisation - range of products for the electronics industry combines the miniaturisation, high performance density and functional integration whilst meeting international quality standard.
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Introduction Pneumatic is an indispensable control technology in automation as the result of a long process of industrialisation. For more than 50 years, Festo has played an important part as a partner to industrial automation worldwide, where electronics industry is not an exception to it.
- Clean room technology compliance to ISO class 4 , which is applicable to clean room and suitable for semiconductor, food, pharmaceutical, medical technology, optical industry, microsystems technology, environmental technology, etc. - Proctection against ESD - ESD free products that offer antistatic or dissipative material.
- Customised solution with customer as focus; tailor-made, costeffective and functional solution are offered to perfectly match the application needs. - Easy assembly services - with one order, one package, one delivery, the product is ready for assembly. Save time and money in your assembly proccess. - Cost effective - minimizing operation cost yet assurance in maximum productivity and quality.
Semicon08.Notebook_p3.pdf 24/3/2008 11:12:48 PM
Rodless Micro parallel
Air Service Unit Rotary
Short Stroke
Swivel
Micro radial
Air Dryer Slide Unit C
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Air Preparation Unit
Pneumatic Drive
Gripper
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Smart Cubic
Precision Slide
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Vacuum Generator
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Spindle
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High speed tooth belt Suction Cup
Vacuum Sensor
Vacuum Technology
Motor & Controller
Electrical Drive
Valves
Compact
Miniature
Valve & Valve Terminal
Sub-assembly
Vision System
Cylinders Pressure / Vacuum Filter Regulator
Optical
Customised control box Flow
Sensor & Vision System
Electrical axis
Clean Room
System Services
CMP
Back-End Test-Assembly-Packaging Equipment
Front-End Process Facilities Equipment
Front-End Process Equipment
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Oxidation / Diffusion / LPCVD Reactors
Spin / Coat / Develop / Bake Systems
Stand-Alone Tool or Multi-Process / Multi-Chamber Cluster Tool Variations of ALD, CVD, PVD, Etch, Strip, Pre-Clean, Post-Clean, Electroplating and Electroless Deposition
Gate and Slit Valves
Cluster Tool CWH / EFEM (wafer and flat panel glass substrates) / SMIF / Pod Loaders
Ion Implantation Tools
Lithography Tools
CMP Tools
Liquid Chemicals / Slurry Mixing and Delivery
Specialty Process Gas Cabinets
Facility Process Gas Delivery
Process Tool Point-of-Use Exhaust Scrubbers
Wafer / Substrate Probe / Test
Die Attach
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Final Test
Wire Bonding
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Encapsulation / Packaging
Test
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Wire Bonding
Die Attach
Wafer substrate Cleaning
Dicing
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Wafer Lapping and Polishing
Passivation
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Multi-Axis Positioning and Transfer Systems
ChemicalVaporDeposition
Crystal Pulling
Integrated Control Systems Cabinets and Power Boxes
Application
Process
Grinding -Polish
Oxidation
Integrated Systems
Wafer Slicing
Cleaning
Product / Application Matrix
Crystal Growing
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Fittings and Flow Controls
Air Preparation
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Tubing
Coating
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Molding
Air Pressure Filter Regulators
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Pilot Valves and Valves Manifolds
Valves & Valve Manifolds
Developbake
TrimmingForming
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ElectroMechanical Actuators
Marking
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Position Sensors
Sensors and Feedback Devices
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MultiPosition Controllers
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Air Logic Arrays
Operator Interfaces, Controls, and I/O Devices
PhysicalVaporDeposition
Ion Implantation
Final
Tape-Reel
Illustrations supplied and reproduced with permission from SEMI, San Jose, CA.
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Pneumatic Actuators and Cylinders
Actuators and Cylinders
Etch