Abundant Possibilities in a Shrinking World
About the Cover Image The SEM image reveals heavily-charged tiny spheres of a polymer material. The globe superimposed on the polymer sample represents FEI’s global markets and the ability of its tools to open worlds within our world for nanoscale exploration, discovery and development. The sample image is supplied as courtesy of German glass manufacturer, Schott.
Discoveries and innovations are increasingly being made at smaller and smaller scales. Without the right tools and solutions, researchers, developers and manufacturers working at the nanoscale face daunting challenges. After all, how can the unseen be explored, harnessed and built?
The world discovers more, creates faster and lives better with FEI’s Tools for Nanotech.
Accelerated discovery…
World Headquarters 5350 NE Dawson Creek Drive Hillsboro, Oregon 97124 USA Ph: +1.503.726.7500 FEI Europe Achtseweg Noord 5 5651 GG eindhoven The Netherlands Ph: +31.40.23.56000 FEI Japan Nss-II Bldg 4F 13-34 Kohnan 2-chome minato-ku, tokyo 108-0075, Japan ph: +81.3.3740.0970
for pressing challenges…
FEI’s enabling Tools for
Opening Worlds Within Our World
Nanotech™ are helping to make once unimagined possibilities a reality by delivering breakthrough results to diverse users. better, safer products…
FEI Asia pacific Shanghai exhibition center 1/F ADMINISTRATION BUILDING 1000 Yan an Road (Middle) shanghai 200040 People’s republic of china Ph: +86.21.6122.5988
© 2007. We are constantly improving the performance of our products, so all specifications are subject to change without notice. The FEI logo and Tools for Nanotech are trademarks of the FEI Company. Print code 01OB-OT0111 7/2007
enhanced connectivity…
and better health.
FEI has more than sixty years of technology leadership
solutions for imaging,
As the recognized leader
and field expertise for a
characterization, analysis and
in innovative tools for
wide variety of applications
modification have allowed us
researchers and developers
including the advanced study
to become a trusted partner
working down to the atomic
and development of new
to world-class customers.
level, FEI is committed to
materials, nanoscale process
We have more than seven
helping our customers
control and the development
thousand systems installed at
succeed in solving some
of new nano-enabled
thirty-five hundred customer
of the greatest challenges
products. Our best-in-class
sites worldwide.
of our time.
Abundant Possibilities in a Shrinking World
About the Cover Image The SEM image reveals heavily-charged tiny spheres of a polymer material. The globe superimposed on the polymer sample represents FEI’s global markets and the ability of its tools to open worlds within our world for nanoscale exploration, discovery and development. The sample image is supplied as courtesy of German glass manufacturer, Schott.
Discoveries and innovations are increasingly being made at smaller and smaller scales. Without the right tools and solutions, researchers, developers and manufacturers working at the nanoscale face daunting challenges. After all, how can the unseen be explored, harnessed and built?
The world discovers more, creates faster and lives better with FEI’s Tools for Nanotech.
Accelerated discovery…
World Headquarters 5350 NE Dawson Creek Drive Hillsboro, Oregon 97124 USA Ph: +1.503.726.7500 FEI Europe Achtseweg Noord 5 5651 GG eindhoven The Netherlands Ph: +31.40.23.56000 FEI Japan Nss-II Bldg 4F 13-34 Kohnan 2-chome minato-ku, tokyo 108-0075, Japan ph: +81.3.3740.0970
for pressing challenges…
FEI’s enabling Tools for
Opening Worlds Within Our World
Nanotech™ are helping to make once unimagined possibilities a reality by delivering breakthrough results to diverse users. better, safer products…
FEI Asia pacific Shanghai exhibition center 1/F ADMINISTRATION BUILDING 1000 Yan an Road (Middle) shanghai 200040 People’s republic of china Ph: +86.21.6122.5988
© 2007. We are constantly improving the performance of our products, so all specifications are subject to change without notice. The FEI logo and Tools for Nanotech are trademarks of the FEI Company. Print code 01OB-OT0111 7/2007
enhanced connectivity…
and better health.
FEI has more than sixty years of technology leadership
solutions for imaging,
As the recognized leader
and field expertise for a
characterization, analysis and
in innovative tools for
wide variety of applications
modification have allowed us
researchers and developers
including the advanced study
to become a trusted partner
working down to the atomic
and development of new
to world-class customers.
level, FEI is committed to
materials, nanoscale process
We have more than seven
helping our customers
control and the development
thousand systems installed at
succeed in solving some
of new nano-enabled
thirty-five hundred customer
of the greatest challenges
products. Our best-in-class
sites worldwide.
of our time.
FEI’s Core Technologies and Products
Accelerating Nanoscale Discovery and Product Commercialization
Nova™ NanoSEM
V600 FIB
Quanta™ SEM Series
Morgani™ TEM
Inspect™ SEM Series
Tecnai™ TEM Series
Phenom™
Titan™ S/TEM
Core Technologies Single column systems
- Focused Ion Columns & Sources - Electron Columns & Sources - Operating & Applications Software
DualBeams™ (FIB/SEM)
Quanta™ 3D Series
DA300 Nova™ NanoL ab
Expida™ Series Helios™ NanoL ab
Tecnai™ TEM Series
NanoResearch & Industry
FEI’s powerful technology and expertise allow researchers to accelerate discovery, development and manufacturing of nano-enabled products with groundbreaking results. Revolutionary capabilities enable our customers to lead their fields through unexplored territory while saving time and reducing costs. - Powerful, innovative technology - Industry-leading performance - Shared expertise and collaborative spirit - Scientific and technical leadership
3D nanofiber reconstruction (4 µm)
Wet plaster crystal growth (0.5 µm)
NanoElectronics NanoBiology
FEI tools allow life scientists to visualize structures from the cellular to the atomic scale—the critical range in which molecular machines of living systems operate. 3D imaging yields crucial insights into structure and function while automation supports the high throughput characterization. - Clearly resolve sub-cellular and macromolecular detail - Investigate function and interaction in three dimensions - Manage large sample sets quickly and easily - Preserve natural structure with cryo techniques
3D cowpea mosaic virus reconstruction (~5 nm)
Drug-laden liposomes (~100 nm each)
Electronics manufacturers ramp to volume faster and enhance yields with FEI™ solutions. They improve design validation with faster, more precise circuit editing, and they speed-up process development and control with high-throughput sample preparation, and imaging and analysis of nano- and atomic-scale images. - Faster data acquisition, lower cost - Precise and flexible circuit editing - Faster S/TEM sample prep - Superior imaging & analysis - Superb return on investment
Critical layer at transistor level (65 nm)
High aspect ratio via contact window (500 nm)
High Resolution 3D Characterization & Analysis – Metrology – Defect & Failure Analysis – NanoFabrication, Milling & Deposition
fei.com
Expertise and Value Beyond Technical Specifications Today’s acceleration of scientific advances and funding is fueling the development and commer
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New markets – some of which have never worked at such scales – are opening in a wide
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Innovative solutions from FEI are enabling nanoscale advancements in diverse and growing markets around the world.
variety of industries including forensics, biosciences, energy, metals, and more. Every day FEI tools are enabling nanoscale
“ There are no compromises with FEI. What I want is what I get... I believe FEI will help us succeed in this nanotechnology world.”
advancements and products, and creating new markets.
3D titanium alloy precipitate widths (250-500 nm)1
Terry Moore Headway Technologies, USA
Advanced patterning, fresnel lens (smallest ring ~50 nm)
Pyruvate Dehydrogenase (50 nm) 2
TEM sample prep of DRAM contacts (90 nm)
From basic research to final
Combined with our technology
FEI’s focus on usage models,
production, FEI’s deep appli
leadership, applications support
best practices, and customer
cations expertise lets us con
and world-class service, we
value redefines the customer/
tinuously track evolving
provide uniquely competitive
supplier relationship and ensures
requirements. As a result,
value to those we serve in
that our market-leading solutions
FEI delivers complete user-
NanoResearch and Industry,
are continually on the forefront
focused solutions that set
NanoBiology and NanoElectronics.
of innovation.
new performance standards.
1
2
Hamish Fraser, Center for the Accelerated Maturation of Materials, Ohio State University. From the work of Jacqueline Milne and Sriram Subramaniam, National Cancer Institute, NIH.
Leading Solutions, Unparalleled Support Our customers are relentless in their pursuit of enabling solutions. FEI’s powerful suite of focused ion beam (FIB), scanning and transmission electron microscopes (SEM/TEM) and proprietary software empowers their success.
Robust web resources and user workshops keep customers connected and support their success.
“ FEI has a good ear for what customers really want... I can clearly see that their customer focus is working to help us. It’s dynamic.” Peter Peters, PhD Netherlands Cancer Institute, NL
FEI’s European NanoPort
From Titan™ – the world’s most
lifecycle FEI’s sales, applications,
world. Our NanoPorts in Europe,
powerful commercially available
and service professionals in more
North America and Asia provide
scanning/transmission electron
than fifty countries on six con
a unique environment for equip
microscope (S/TEM) to the
tinents are ready to assist. They
ment evaluation, applications
versatile Phenom™ – a new
help customers select the right
development, and ongoing
class of microscope that bridges
tool for their needs and the right
training. What’s more, FEI’s new
the gap between light and
service programs to support their
RAPID remote diagnostics helps
electron microscopy – FEI tools
operations. And, they provide
keep systems operating with less
give users the ability to pursue
ongoing applications counsel.
interruption to user schedules.
FEI also makes the world smaller
Market-leading tools. Deep
for our users. An exclusive online
applications expertise. Dedicated
community – FEI Connect –
customer support. They add up
provides a forum for customers
to compelling value for FEI’s
to share their experiences, latest
growing family of customers.
the shrinking dimensions found in science and manufacturing. But the ultimate value of any solution lies in the collaboration and support that come with it. From initial meetings and
applications, and breakthroughs
throughout a system’s full
with their peers around the
A Spirit of Innovation That Doesn’t Rest Since our founding in 1971,
incorporating both a scanning
in transmission electron micro
FEI has persistently advanced its
electron column and a focused
scopes (TEMs). Following the
core technologies. The result is a
ion beam. Introduced nearly ten
acquisition of Philips Electron
unique, unsurpassed technology
years before any competing
Optics, FEI pioneered the
base that provides users with
system, the DualBeam was a
Tecnai™ TEM. As the world’s
groundbreaking results.
development that changed
first fully integrated TEM,
forever how researchers would
it provided new levels of
work. We are still the only
productivity and ease-of-use.
company with both ion beam
Most recently, FEI’s Titan™
and electron beam solutions in-
has graphically demonstrated
house, allowing us to develop
how we continuously raise
more functionally-integrated
the performance bar. With its
solutions for our customers.
sub-Ångström resolution, the
Through a partnership with the former Philips Electron Optics division – a part of FEI since 1997 – we pioneered the world’s first DualBeam™ system,
Our heritage also includes industry-leading innovations
Helios™ NanoL ab
Titan™ is the most powerful system of its type on the commercial market.
Phenom™
Technology Milestones
1949 First production TEM system released 1966 Solid-State 5 Ångström TEM delivered 1977 High-Resolution SEM introduced
Array of gold atoms (0.28 nm each)
1986 Computerized CM TEM Series introduced 1989 World’s first Environmental SEM introduced 1993 World’s First DualBeam™ (FIB/SEM) by FEI 1998 All-in-One Integrated Tecnai™ TEM 2003 World’s first DualBeam dedicated to automated defect analysis and metrology 2004 FEI TEM breaks the 1 Ångström barrier 2005 FEI’s all-new Titan™ S/TEM introduced with sub-Ångström resolution 2006 First Department of Energy TEAM (Transmission Electron Aberration-Corrected Microscope) project instruments shipped for 0.5 Ångström resolution
Titan™ S/TEM
Customer Confidence – FEI’s Promise for the Long Term We are driven to help our cus
the biggest ideas of the century
and development, talented
tomers solve some of the world’s
into reality.
professionals, and our customer
most challenging problems in the fields of energy, water, food, the environment, disease, elec tronics, crime, and more. Our continued leadership in exciting growth markets has the world’s most demanding organizations turning to FEI for the enabling tools they require.
FEI’s commitment to customers is reflected in our structure. Organized around key customer segments – NanoBiology, NanoElectronics, NanoIndustry, and NanoResearch – we are
relationships. Because we con tinually deliver the innovations customers need, we are privileged to partner with our customers for the long-term and support their success in nanoscale discovery, develop
able to track and build an intimate understanding of user
ment and manufacturing.
requirements. This gives us
With an unwavering commit
From our product development
unsurpassed agility in bringing
ment to understanding
to our applications labs, and
focused solutions to their
customer challenges, a robust
throughout our service
applications challenges.
technology foundation, and
organization, our approach to serving customers is helping researchers and manufacturers around the world turn some of
In the past decade FEI has nearly tripled in size, enabling us to constantly invest in research
a spirit of innovation that never stops, FEI delivers Tools for Nanotech that customers can own with confidence.
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“ FEI has to be given a lot of credit for their recent developments. For quite some time we will be a prominent player, even on an international level, because of our new FEI instruments.”
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FEI’s sales and service operations reach more than 50 countries worldwide.
FEI’s Core Technologies and Products
Accelerating Nanoscale Discovery and Product Commercialization
Nova™ NanoSEM
V600 FIB
Quanta™ SEM Series
Morgani™ TEM
Inspect™ SEM Series
Tecnai™ TEM Series
Phenom™
Titan™ S/TEM
Core Technologies Single column systems
- Focused Ion Columns & Sources - Electron Columns & Sources - Operating & Applications Software
DualBeams™ (FIB/SEM)
Quanta™ 3D Series
DA300 Nova™ NanoL ab
Expida™ Series Helios™ NanoL ab
Tecnai™ TEM Series
NanoResearch & Industry
FEI’s powerful technology and expertise allow researchers to accelerate discovery, development and manufacturing of nano-enabled products with groundbreaking results. Revolutionary capabilities enable our customers to lead their fields through unexplored territory while saving time and reducing costs. - Powerful, innovative technology - Industry-leading performance - Shared expertise and collaborative spirit - Scientific and technical leadership
3D nanofiber reconstruction (4 µm)
Wet plaster crystal growth (0.5 µm)
NanoElectronics NanoBiology
FEI tools allow life scientists to visualize structures from the cellular to the atomic scale—the critical range in which molecular machines of living systems operate. 3D imaging yields crucial insights into structure and function while automation supports the high throughput characterization. - Clearly resolve sub-cellular and macromolecular detail - Investigate function and interaction in three dimensions - Manage large sample sets quickly and easily - Preserve natural structure with cryo techniques
3D cowpea mosaic virus reconstruction (~5 nm)
Drug-laden liposomes (~100 nm each)
Electronics manufacturers ramp to volume faster and enhance yields with FEI™ solutions. They improve design validation with faster, more precise circuit editing, and they speed-up process development and control with high-throughput sample preparation, and imaging and analysis of nano- and atomic-scale images. - Faster data acquisition, lower cost - Precise and flexible circuit editing - Faster S/TEM sample prep - Superior imaging & analysis - Superb return on investment
Critical layer at transistor level (65 nm)
High aspect ratio via contact window (500 nm)
High Resolution 3D Characterization & Analysis – Metrology – Defect & Failure Analysis – NanoFabrication, Milling & Deposition
fei.com
Abundant Possibilities in a Shrinking World
About the Cover Image The SEM image reveals heavily-charged tiny spheres of a polymer material. The globe superimposed on the polymer sample represents FEI’s global markets and the ability of its tools to open worlds within our world for nanoscale exploration, discovery and development. The sample image is supplied as courtesy of German glass manufacturer, Schott.
Discoveries and innovations are increasingly being made at smaller and smaller scales. Without the right tools and solutions, researchers, developers and manufacturers working at the nanoscale face daunting challenges. After all, how can the unseen be explored, harnessed and built?
The world discovers more, creates faster and lives better with FEI’s Tools for Nanotech.
Accelerated discovery…
World Headquarters 5350 NE Dawson Creek Drive Hillsboro, Oregon 97124 USA Ph: +1.503.726.7500 FEI Europe Achtseweg Noord 5 5651 GG eindhoven The Netherlands Ph: +31.40.23.56000 FEI Japan Nss-II Bldg 4F 13-34 Kohnan 2-chome minato-ku, tokyo 108-0075, Japan ph: +81.3.3740.0970
for pressing challenges…
FEI’s enabling Tools for
Opening Worlds Within Our World
Nanotech™ are helping to make once unimagined possibilities a reality by delivering breakthrough results to diverse users. better, safer products…
FEI Asia pacific Shanghai exhibition center 1/F ADMINISTRATION BUILDING 1000 Yan an Road (Middle) shanghai 200040 People’s republic of china Ph: +86.21.6122.5988
© 2007. We are constantly improving the performance of our products, so all specifications are subject to change without notice. The FEI logo and Tools for Nanotech are trademarks of the FEI Company. Print code 01OB-OT0111 7/2007
enhanced connectivity…
and better health.
FEI has more than sixty years of technology leadership
solutions for imaging,
As the recognized leader
and field expertise for a
characterization, analysis and
in innovative tools for
wide variety of applications
modification have allowed us
researchers and developers
including the advanced study
to become a trusted partner
working down to the atomic
and development of new
to world-class customers.
level, FEI is committed to
materials, nanoscale process
We have more than seven
helping our customers
control and the development
thousand systems installed at
succeed in solving some
of new nano-enabled
thirty-five hundred customer
of the greatest challenges
products. Our best-in-class
sites worldwide.
of our time.