• • • •
€
θ= θ=
Ω
Ω
−
−
Δ
120
SiO2, 0.60 mW
110
SiO2, 1.35 mW
Intensity (cps)
100
SiO2, 3.00 mW
90
SiO2, 6.00 mW
80
metal phase
70 60 50 40 30 20
insulating phase
10 0 100
200
300
400
500
600
700
800
Wavenumber (cm-1)
900 1000 1100 1200
Permanent magnet coil
N
S
S
N
α ν
Φ
ν
Φ
θ
Gas inlet Permanent magnets
Plasma electrode
Extraction electrode
Ground electrode
N-type connecter
152 mm
Planar Al target 85 mm Magnet for planar magnetron
Permanent magnets View port
Extraction current [mA]
Iext : w/o Ta sheet Iext : with Ta sheet IF.C. : w/o Ta sheet IF.C. : with Ta sheet
5 4 3
200 150 100
2
50
1 0
250
0.0
0.5
1.0 1.5 2.0 PE bias voltage [V]
2.5
3.0
0
Faraday cup current [ď A]
6