Global Thin Layer Deposition Equipment Industry

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Global Thin Layer Deposition Equipment Industry Published on August 2011

Report Summary This report analyzes the worldwide markets for Thin Layer Deposition Equipment in US$ Million. Analytics provided in the report are for equipment incorporating two major deposition techniques ' Physical Vapor Deposition (PVD), and Chemical Vapor Deposition (CVD). Market analysis is provided for each of these equipment types by their respective end-use sectors - Physical Vapor Deposition (PVD) Equipment (Microelectronics, Cutting Tools, Industrial & Energy, Specialty Packaging, Data Storage, Optics, & Medical), and Chemical Vapor Deposition (CVD) Equipment (Microelectronics, Cutting Tools, Industrial, & Medical). The report provides separate comprehensive analytics for the US, Canada, Japan, Europe, Asia-Pacific, and Rest of World. Annual estimates and forecasts are provided for the period 2009 through 2017. Also, a six-year historic analysis is provided for these markets. The report profiles 77 companies including many key and niche players such as AIXTRON, Applied Materials, Inc., ASM International N.V., Canon ANELVA Corporation, CHA Industries, CVD Equipment Corporation, Denton Vacuum, LLC, Edwards Limited, Ionbond AG, Jusung Engineering Co., Ltd., KDF Electronic & Vacuum Services, Inc., Kokusai Semiconductor Equipment Corporation, Novellus Systems, Inc., OC Oerlikon Corporation AG, OEM Group, RIBER SA, Seki Technotron USA, Silicon Genesis Corporation, Tecvac Limited, Ti-Coating, Inc., Tokyo Electron Limited, Ultramet, ULVAC Technologies, Inc., Vapor Technologies, Inc., and Veeco Instruments. Market data and analytics are derived from primary and secondary research. Company profiles are mostly extracted from URL research and reported select online sources.

Table of Content

1. INTRODUCTION, METHODOLOGY & PRODUCT DEFINITIONS Study Reliability and Reporting Limitations Disclaimers

1 2

Data Interpretation & Reporting Level

3

Quantitative Techniques & Analytics

3

Product Definitions and Scope of Study

3

Physical Vapor Deposition (PVD)

3

Chemical Vapor Deposition (CVD)

4

End-Use Sectors - An Overview

5

Microelectronics Industry Cutting Tools

5 5

Industrial & Energy

5

Specialty Packaging Optics Industry Medical Technology Applications 2. INDUSTRY OVERVIEW

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5 6 6 7

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7

Technology & Timing: The 'King Makers'

7

Putting all Eggs in One Basket'

7

Thin Film Coating: Bouquet of Advantages

8

CVD Vs PVD Market Risks

8 8

Current Market Scenario

9

Market Reels Under the Economic Pressure

9

World Beyond Recession

10

Steady Demand for Copper Deposition Equipment in Memory Devices Market

10

Growth To Recover Post Recession

10

Table 1: High-Performance Ceramic Coating Technologies Market in North America (2009): Percentage Market share Breakdown by Technology (includes corresponding Graph/Chart) Outlook

11 11

Bright Future Ahead for Atomic Layer Deposition Equipment 3. COMPETITIVE SCENARIO

12

13

Established Majors Rule Thin Film Deposition Market

13

Co-Existing Technologies Defer Positioning

13

Teamwork Gaining Momentum

13

Table 2: Leading Players in World Deposition Equipment Market (2010) - Percentage Market Share Breakdown of Leading Players (includes corresponding Graph/Chart)

14

Table 3: Global MOCVD Market (2010): Percentage Share Breakdown of Dollar Sales by Leading Players (includes corresponding Graph/Chart)

14

Table 4: World Sputtering Equipment Market (2010) Percentage Share Breakdown of Revenue by Leading Players (includes corresponding Graph/Chart)

14

Table 5: World Chemical Vapor Deposition (CVD) Equipment Market (2010) - Percentage Share Breakdown of Revenue by Leading Players (includes corresponding Graph/Chart)

14

Table 6: World Plasma Enhanced CVD Market (2010) Percentage Market Share Breakdown of Leading Players (includes corresponding Graph/Chart)

15

Table 7: World High Density Plasma CVD Market (2010) Percentage Market Share Breakdown of Leading Players

15

Table 8: World Low Pressure CVD Market (2009) - Percentage Market Share Breakdown pf Leading Players (includes

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15

4. END USE MARKETS - APPLICATIONS & TRENDS

16

A Peek into TFD Materials & Technologies for Various Industry Segments

16

Microelectronics Industry

17

Driven by IT

17

Integrated Metrology: A Rising Trend

17

Primary Segments

17

Semiconductor Industry

17

Applications of CVD and PVD Technologies

18

Design Rule Upgrades Bring Cheer to CVD Equipment Makers in Semiconductor Segment

18

Key TFD Technologies Employed

18

Opto-electronic Components

18

Applications of TFD Equipment

19

CVD Equipment & Thin Film Materials for the FPD Industry Key Technologies Trends

19

19 20

Digital/HDLCD TVs Spike PECVD Systems' Use in Flat Panel Display Industry

20

OLED: 'The Future' of TFD in FPDs

20

Data Storage Trends

20 20

High-Volume End Use Applications Shape the Data Storage Industry's Demand

20

High-Density Thin Films Improve Areal Densities of Magnetic Recording Heads

21

Medical Technology

21

Surgical Tools - A Host of Performance Parameters to Satisfy

21

Orthopedic Prostheses - A Quest for Higher Quality of Life Biocompatibility - A Key Stipulation TFD Techniques Used

22

Process Fallacies to be Addressed

22

Other Areas of Application

22

Major Influencers Cutting Tools Trends

21

22

22 23 23

Cost-Efficiency Expands the Volume of Cutting Tools Coated Chromium Nitride Emerges as Preferred Coating

23

Thin Film Diamond Coatings for the 'Cutting Edge'

23

Dry Cutting Props TFD Coatings Industrial & Energy Market

24 24

Key TFD Technologies Used

24

Automotive & Architectural Glass - A Major End Use

24

High Concentration of Glass Manufacturers - Depriving Margins Industrial Machining - High Volume Applications Critical Requirements of Tool Coatings

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25

Major Influencers

25

Specialty Packaging

25

Typical Structure of a Flexible Package

26

Package Productivity Rises with Thin Film Coating Market Drivers

26

26

Demand for Consumer Goods & State of Economy

26

Package Innovations & Consumer Preferences for Package Convenience and Shelf Life

26

Package's Visual Appeal

27

E-Commerce

27

Labeling Requirements

27

Recyclability of Package

27

Optics Industry

27

5. PRODUCT/TECHNOLOGY OVERVIEW

28

Thin Layer Deposition: An Introduction

28

Role of Evaporation in Thin Layer Deposition

28

Deposition Techniques by Technology Type

28

Physical Vapor Deposition (PVD): A Technical Run-through Advantages Disadvantages

29

Sputtering: An Enabling PVD Process

29

Sputtering Materials

30

Types of Sputtering

30

DC Diode Sputtering

30

Radio-Frequency RF Diode Sputtering

30

DC and RF Magnetron Sputtering

30

Ion Beam Sputtering

30

Chemical Vapor Deposition (CVD): A Technical Overview Advantages Types

28

29

30

31 31

Atmospheric Pressure Chemical Vapor Deposition (APCVD)

31

Low Pressure Chemical Vapor Deposition (LPCVD)

32

Rapid Thermal Chemical Vapor Deposition (RTCVD)

32

Plasma Enhanced Chemical Vapor Deposition (PECVD)

32

High-Density Plasma Chemical Vapor Deposition (HDPCVD) Metal Organic Chemical Vapor Deposition (MOCVD) Atomic Layer Deposition (ALD)

33

Advantages of ALD

33

End-Use Application Areas

33

Capacitor layers

33

Gate dielectrics

34

Interconnects

34

Non-Semiconductor Applications

34

Electrochemical Deposition (ECD)

34

Other Deposition Techniques Epitaxy

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35

Ion Beam Deposition (IBD)

35

Ion Implantation

35

Types of Ion Implantation Tools

36

Pulsed Plasma Doping: A Generation-X Ion Implantation Technology

36

A Quick Primer on Etching

36

Chemical Etch

37

Plasma Etch

37

6. RECENT INDUSTRY ACTIVITY

38

Plasma-Therm Takes Over Majority Stake in Advanced Vacuum

38

AIXTRON SE Receives a New Order for MOCVD Reactor from Saturn JSC 38 AIXTRON Supplies QXP-8300 ALD Deposition Tool to Korean Manufacturer

38

AIXTRON to Install New MOCVD Reactor for University of Technology Eindhoven

39

PARC Purchases Close Coupled Showerhead MOCVD System from AIXTRON 39 AIXTRON SE Bags Order for AIX 2800G4-R MOCVD Reactor from Finisar 39 Oerlikon Solar Receives KAI Equipment Order from Dong Xu AIXTRON to Supply MOCVD Systems for ISCAS

39 40

SPTS Receives Sigma速 fxPTM Physical Vapor Deposition System Order from CEA-Leti

40

Altatech Semiconductor Bags AltaCVD System Order from Fraunhofer Research Center

41

Shanghai Epilight Technology Places Multi-Tool Supply Order with Veeco Instruments

41

Enraytek Optoelectronics Selects Veeco as Chosen Supplier of MOCVD Systems

41

Oerlikon Balzers to Acquire hartec Anlagenbau

42

CVD Equipment and Graphene Laboratories Ink Exclusive Distribution Agreement

42

ULVAC and OPTORUN Enter into Agreement

42

BluGlass and SPP Process Technology Systems Ink Joint Venture Agreement

43

Guardian Industries and Intermolecular Ink CDP and Technology Licensing Agreement

43

Altatech Semiconductor Bags New Order for 300 mm CVD System

44

Veeco Receives MOCVD System Order from Seoul Optodevice for Capacity Expansion

45

Cambridge NanoTech Establishes ALD Center of Excellence in Collaboration with Stanford University

45

AIXTRON AG Receives Novel Order for MOCVD Reactor from APOLLO Precision

46

Cambridge NanoTech to Develop ALD System for FlexTech Alliance AIXTRON Bags ULED Order for MOCVD Systems Veeco Receives Multi-tool Order from Epistar

46 47

Veeco Instruments Bags Multi-Tool Order from Hangzhou Silan

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47

Elec-Tech Prefers Veeco's TurboDisc(R) K465i Systems as Tool of Choice

48

AIXTRON Receives its First Order from INCOTEX

48

Applied Materials Expands Manufacturing Center to Improve PECVD & PVD Production

48

Tegal Divests PVD and Thin-Film Etch Product Lines to OEM Group 48 Novellus Ties Up with IBM for 3-D Semiconductor TSV Process

49

Ledian Tianwei Commissions Polysilicon Manufacturing Plant

49

MTC Inks Exclusive Distribution Deal with Kennametal Sintec Applied Materials Acquires Semitool

49

50

Veeco Bags Order from Bridgelux for Supply of MOCVD System

50

Dynamic Engineering Receives Supply Contract from GCL Solar

50

II-VI Incorporated forms Joint Venture with Supower

51

Cambridge NanoTech Partners with M. Braun

51

AIXTRON Partners with Ovonyx to Develop AVDR Technology

51

GT Legend to Takeover US Wheel Exchange

52

Sumitomo Precision Acquires Aviza Technologies

52

Tegal Acquires Product Lines of Alcatel Micro Machining Systems 53 ASM International Inks Licensing Deal with Tokyo Electron

53

Arkema to Enter Partnership with Kibing for a CVD Project Expansion

53

IHI Plans to Set up a New Sub-subsidiary

53

Intermolecular Inks a Collaboration and License Agreement with Elpida for Advanced ICs

54

IHI Acquires Hauzer Techno Coating

54

Veeco Acquires Mill Lane Engineering

54

Oerlikon Balzers Completes Acquisition of Suomen Plasmapinta Applied Materials Acquires Baccini

54

54

AIXTRON to Supply GaAs MOCVD System to Korea Advanced Nano Fab Center

55

Tegal Corporation Wins an Order for Endeavor AT PVD Tool

55

Oerlikon and PT. Artoda Form Joint Venture for New Coating Center in Jakarta

55

Tegal Selects WESI for Distribution of PVD and Plasma Etch Products

56

Next Solar to Build Thin-Film Solar Module Facility

56

Tokyo Electron Enters into a Joint Venture with Sharp

57

ASMI Receives Indicative Unsolicited Offer from Applied Materials 57 GT Solar Enters into a Contract with The Silicon Mine

57

Beneq Takes Over Planar Systems' ALD Business

57

INFICON Completes Acquisition of Maxtek

57

EPOD Acquires Majority Stake in ICP Solar Technologies

58

SANYO Completes Acquisition of AIXTRON MOCVD System

58

Plastic Logic Acquires AIXTRON Gen 3.5 Deposition Tool Aixtron Takes Over Nanoinstruments

58

59

Oerlikon Balzers Opens Coating Centers in Turkey and Romania CVD Inks Contract to Expand First Nano Laboratory

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60

Tegal to Supply Endeavor to Major Accelerometer & Inertial Sensor Maker

60

Tegal Receives Repeat Order for Endeavor from U.S. Customer

60

InterCrossIP Enters into Licensing Agreements with Ceimig and SFU 61 Williams Advanced Materials Sets Up New Facility in Czech Republic

61

Applied Materials Sets Up a New Wafer Reclaim Facility in Taiwan 62 ASM Obtains Order for Multiple System Contract

62

Tegal Wins Order for Endeavor PVD System from Major MEMS Foundry 62 JUSUNG Signs Agreement with CEA for Joint Development of Solar Cells

63

CSP Partners with ULVAC for Thin Film Solar Cells

63

Sunner Solar Partners with ULVAC to Produce Thin Film Solar Cells 63 Amtech Enters into a License Deal with PST

63

GE Global Research Enters into a Joint Agreement with TOKKI

64

7. PRODUCT INNOVATIONS/INTRODUCTIONS

65

Picosun Introduces Picoplasma-based Plasma Enhanced ALD Systems 65 Veeco Instruments Launches TurboDisc速 MaxBright' Gallium Nitride MOCVD Multi-Reactor System

65

Applied Materials Extends RF PVD Technology by Depositing Nickel-Platinum (NiPt) Alloys

66

Veeco Instruments Launches MaxBright MOCVD Multi-Reactor System 66 Veeco Instruments Launches NEXUS速 TAMR Physical Vapor Deposition System

67

Veeco Instruments Rolls Out TurboDisc速 K465i' Gallium Nitride MOCVD System

67

sp3 Diamond Technologies Introduces New CVD Diamond Reactor Applied Materials Unveils New CVD Technology

67

68

Henniker Scientific Introduces 'Prevac CLAM II' Thin Film Deposition System

68

First Nano Launches New CVD R&D Tool Platform

69

Novellus Introduces VECTOR速 Extreme' TEOS xT' system Novellus Systems Develops New CFD Technology

69 69

Veeco Releases TurboDisc K465i GaN MOCVD System for Production of HB-LEDs

70

Novellus Introduces a New Copper Seed PVD Process for TSV Packaging

70

Fujitsu Develops Technology for Direct Formation of Graphene Transistors Using CVD

71

CVD Equipment Launches New EasyTube Platform for Polysilicon & Thin Film Materials

71

MTC Launches New CVD SiC Wafer Carriers for MOCVD Processing Veeco Unveils Nexus CVD System

72

73

Premier Expands Bayview Collection with PVD Technology Kitchen Products

73

sp3 Diamond Expands Model 650 Series with CVD Diamond Coating

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73

Cambridge NanoTech Launches Novel ALD System

74

Altatech Introduces New Deposition Systems

74

Swagelok® Launches New ALD Liquid Injection Valve

74

Oerlikon Balzers Introduces Low-temperature PVD Coatings Tokyo Electron Introduces Trias' HP Ti

75

75

Applied Materials Launches Applied Producer® BLOk' II PECVD System

75

ASM International Launches Eagle® XP Platform

76

Applied Materials Introduces Applied SunFab' Thin Film Line

76

Applied Materials Launches Applied Producer® ACE' ACVD® System Axcelis Launches Optima XE High Energy Ion Implanter

76

77

First Nano Launches ET2000-SS and ET3000-SS Solid Source Deposition System

77

Novellus Launches VECTOR Extreme' PECVD System

77

Denton Launches Discovery 785 Deposition System

78

Tokyo Electron Rolls out Trias' High-k CVD System

78

Novellus Systems Unveils Vector Express

78

Veeco Unveils TurboDisc K-series MOCVD Platform

79

Veeco Instruments Introduces New Vapor Deposition System Applied Materials Unveils AKT-PiVot Deposition System

79 79

Veeco Launches PV-Series of Thermal Deposition Sources

79

Applied Materials Introduces Advanced Strain Engineering Technology

79

Oerlikon Balzers Introduces BALINIT® ALDURA Coatings for Cutting Tools

80

ASM Announces Availability of Pulsar® ALCVD' Module for Volume Production

80

Novellus Introduces Enhancement for INOVA® 300 mm System Novellus Introduces Vector Express with AHM' Technology 8. FOCUS ON SELECT PLAYERS

82

AIXTRON SE (Germany) Applied Materials, Inc. (USA)

82 82

ASM International N.V. (The Netherlands)

83

Canon ANELVA Corporation (Japan)

83

CHA Industries (USA)

83

CVD Equipment Corporation (USA)

84

Denton Vacuum, LLC (USA) Edwards Limited (UK) Ionbond AG (Switzerland)

84 85 85

Jusung Engineering Co., Ltd. (Korea)

86

KDF Electronic & Vacuum Services, Inc. (USA)

86

Kokusai Semiconductor Equipment Corporation (USA) Novellus Systems, Inc. (USA)

86

87

OC Oerlikon Corporation AG (Switzerland)

87

OEM Group (USA)

88

RIBER SA (France)

88

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88

Silicon Genesis Corporation (USA) Tecvac Ltd (UK)

89 89

Ti-Coating, Inc. (USA)

89

Tokyo Electron Limited (Japan) Ultramet (USA)

90 90

ULVAC Technologies, Inc. (USA)

91

Vapor Technologies, Inc. (USA)

91

Veeco Instruments (USA)

91

9. GLOBAL MARKET PERSPECTIVE

92

Table 9: World Recent Past, Current & Future Analysis for Thin Layer Deposition Equipment by Geographic Region - US, Canada, Japan, Europe, Asia-Pacific (excluding Japan), and Rest of World Markets Independently Analyzed with Annual Sales Figures in US$ Million for Years 2009 through 2017 (includes corresponding Graph/Chart)

92

Table 10: World Historic Review for Thin Layer Deposition Equipment by Geographic Region - US, Canada, Japan, Europe, Asia-Pacific (excluding Japan), and Rest of World Markets Independently Analyzed with Annual Sales Figures in US$ Million for Years 2003 through 2008 (includes corresponding Graph/Chart)

93

Table 11: World 15-Year Perspective for Thin Layer Deposition Equipment by Geographic Region - Percentage Breakdown of Dollar Sales for US, Canada, Japan, Europe, Asia-Pacific (excluding Japan), and Rest of World Markets for Years 2003, 2010 & 2017 (includes corresponding Graph/Chart)

94

Table 12: World Recent Past, Current & Future Analysis for Thin Layer Deposition Equipment by Technology - Physical Vapor Deposition (PVD) and Chemical Vapor Deposition (CVD) Markets Independently Analyzed with Annual Sales Figures in US$ Million for Years 2009 through 2017 (includes corresponding Graph/Chart)

95

Table 13: World Historic Review for Thin Layer Deposition Equipment by Technology - Physical Vapor Deposition (PVD) and Chemical Vapor Deposition (CVD) Markets Independently Analyzed with Annual Sales Figures in US$ Million for Years 2003 through 2008 (includes corresponding Graph/Chart)

96

Table 14: World 15-Year Perspective for Thin Layer Deposition Equipment by Technology - Percentage Breakdown of Dollar Sales for Physical Vapor Deposition (PVD) and Chemical Vapor Deposition (CVD) Markets for Years 2003, 2010 & 2017 (includes

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96

Table 15: World Recent Past, Current & Future Analysis for Physical Vapor Deposition Equipment by Geographic Region - US, Canada, Japan, Europe, Asia-Pacific (excluding Japan), and Rest of World Market Independently Analyzed with Annual Sales Figures in US$ Million for Years 2009 through 2017 (includes corresponding Graph/Chart)

97

Table 16: World Historic Review for Physical Vapor Deposition Equipment by Geographic Region - US, Canada, Japan, Europe, Asia-Pacific (excluding Japan), and Rest of World Markets Independently Analyzed with Annual Sales Figures in US$ Million for Years 2003 through 2008 (includes corresponding Graph/Chart)

98

Table 17: World 15-Year Perspective for Physical Vapor Deposition Equipment by Geographic Region - Percentage Breakdown of Dollar Sales for US, Canada, Japan, Europe, Asia-Pacific (excluding Japan), and Rest of World Markets for Years 2003, 2010 & 2017 (includes corresponding Graph/Chart)

99

Table 18: World Recent Past, Current & Future Analysis for Physical Vapor Deposition Equipment by End-Use Segment Microelectronics, Cutting Tools, Industrial & Energy, Specialty Packaging, Data Storage, Optics, and Medical Markets Independently Analyzed with Annual Sales Figures in US$ Million for Years 2009 through 2017 (includes corresponding Graph/Chart)

100

Table 19: World Historic Review for Physical Vapor Deposition Equipment by End-Use Segment - Microelectronics, Cutting Tools, Industrial & Energy, Specialty Packaging, Data Storage, Optics, and Medical Markets Independently Analyzed with Annual Sales Figures in US$ Million for Years 2003 through 2008 (includes corresponding Graph/Chart)

101

Table 20: World 15-Year Perspective for Physical Vapor Deposition Equipment by End-Use Segment - Percentage Breakdown of Dollar Sales for Microelectronics, Cutting Tools, Industrial & Energy, Specialty Packaging, Data Storage, Optics, and Medical Markets for Years 2003, 2010 & 2017 (includes corresponding Graph/Chart)

102

Table 21: World Recent Past, Current & Future Analysis for Chemical Vapor Deposition Equipment by Geographic Region - US, Canada, Japan, Europe, Asia-Pacific (excluding Japan), and Rest of World Markets Independently Analyzed with Annual Sales

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103

Table 22: World Historic Review for Chemical Vapor Deposition Equipment by Geographic Region - US, Canada, Japan, Europe, Asia-Pacific (excluding Japan), and Rest of World Markets Independently Analyzed with Annual Sales Figures in US$ Million for Years 2003 through 2008 (includes corresponding Graph/Chart)

104

Table 23: World 15-Year Perspective for Chemical Vapor Deposition Equipment by Geographic Region - Percentage Breakdown of Dollar Sales for US, Canada, Japan, Europe, Asia-Pacific (excluding Japan), and Rest of World Markets for Years 2003, 2010 & 2017 (includes corresponding Graph/Chart)

105

Table 24: World Recent Past, Current & Future Analysis for Chemical Vapor Deposition Equipment by End-Use Segment Microelectronics, Cutting Tools, Industrial & Energy and Medical Markets Independently Analyzed with Annual Sales Figures in US$ Million for Years 2009 through 2017 (includes corresponding Graph/Chart)

106

Table 25: World Historic Review for Chemical Vapor Deposition Equipment by End-Use Segment - Microelectronics, Cutting Tools, Industrial & Energy and Medical Markets Independently Analyzed with Annual Sales Figures in US$ Million for Years 2003 through 2008 (includes corresponding Graph/Chart)

107

Table 26: World 15-Year Perspective for Chemical Vapor Deposition Equipment by End-Use Segment - Percentage Breakdown of Dollar Sales for Microelectronics, Cutting Tools, Industrial & Energy and Medical Markets for Years 2003, 2010 & 2017 (includes corresponding Graph/Chart)

108

10. THE UNITED STATES Market Analysis

109 109

Table 27: US Recent Past, Current & Future Analysis for Thin Layer Deposition Equipment by Technology - Physical Vapor Deposition (PVD) and Chemical Vapor Deposition (CVD) Markets Independently Analyzed with Annual Sales Figures in US$ Million for Years 2009 through 2017 (includes corresponding Graph/Chart)

109

Table 28: US Historic Review for Thin Layer Deposition Equipment by Technology - Physical Vapor Deposition (PVD) and Chemical Vapor Deposition (CVD) Markets Independently Analyzed with Annual Sales Figures in US$ Million for Years

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110

Table 29: US 15-Year Perspective for Thin Layer Deposition Equipment by Technology - Percentage Breakdown of Dollar Sales for Physical Vapor Deposition (PVD) and Chemical Vapor Deposition (CVD) Markets for Years 2003, 2010 & 2017 (includes corresponding Graph/Chart)

110

Table 30: US Recent Past, Current & Future Analysis for Physical Vapor Deposition Equipment by End-Use Segment Microelectronics, Cutting Tools, Industrial & Energy, Specialty Packaging, Data Storage, Optics, and Medical Markets Independently Analyzed with Annual Sales Figures in US$ Million for Years 2009 through 2017 (includes corresponding Graph/Chart)

111

Table 31: US Historic Review for Physical Vapor Deposition Equipment by End-Use Segment - Microelectronics, Cutting Tools, Industrial & Energy, Specialty Packaging, Data Storage, Optics, and Medical Markets Independently Analyzed with Annual Sales Figures in US$ Million for Years 2003 through 2008 (includes corresponding Graph/Chart)

112

Table 32: US 15-Year Perspective for Physical Vapor Deposition Equipment by End-Use Segment - Percentage Breakdown of Dollar Sales for Microelectronics, Cutting Tools, Industrial & Energy, Specialty Packaging, Data Storage, Optics, and Medical Markets for Years 2003, 2010 & 2017 (includes corresponding Graph/Chart)

113

Table 33: US Recent Past, Current & Future Analysis for Chemical Vapor Deposition Equipment by End-Use Segment Microelectronics, Cutting Tools, Industrial & Energy and Medical Markets Independently Analyzed with Annual Sales Figures in US$ Million for Years 2009 through 2017 (includes corresponding Graph/Chart)

114

Table 34: US Historic Review for Chemical Vapor Deposition Equipment by End-Use Segment - Microelectronics, Cutting Tools, Industrial & Energy and Medical Markets Independently Analyzed with Annual Sales Figures in US$ Million for Years 2003 through 2008 (includes corresponding Graph/Chart)

115

Table 35: US 15-Year Perspective for Chemical Vapor Deposition Equipment by End-Use Segment - Percentage Breakdown of Dollar Sales for Microelectronics, Cutting Tools, Industrial & Energy and Medical Markets for Years 2003, 2010 & 2017 (includes corresponding Graph/Chart)

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117 117

Table 36: Canadian Recent Past, Current & Future Analysis for Thin Layer Deposition Equipment by Technology - Physical Vapor Deposition (PVD) and Chemical Vapor Deposition (CVD) Markets Independently Analyzed with Annual Sales Figures in US$ Million for Years 2009 through 2017 (includes corresponding Graph/Chart)

117

Table 37: Canadian Historic Review for Thin Layer Deposition Equipment by Technology - Physical Vapor Deposition (PVD) and Chemical Vapor Deposition (CVD) Markets Independently Analyzed with Annual Sales Figures in US$ Million for Years 2003 through 2008 (includes corresponding Graph/Chart)

118

Table 38: Canadian 15-Year Perspective for Thin Layer Deposition Equipment by Technology - Percentage Breakdown of Dollar Sales for Physical Vapor Deposition (PVD) and Chemical Vapor Deposition (CVD) Markets for Years 2003, 2010 & 2017 (includes corresponding Graph/Chart)

118

Table 39: Canadian Recent Past, Current & Future Analysis for Physical Vapor Deposition Equipment by End-Use Segment Microelectronics, Cutting Tools, Industrial & Energy, Specialty Packaging, Data Storage, Optics, and Medical Markets Independently Analyzed with Annual Sales Figures in US$ Million for Years 2009 through 2017 (includes corresponding Graph/Chart)

119

Table 40: Canadian Historic Review for Physical Vapor Deposition Equipment by End-Use Segment - Microelectronics, Cutting Tools, Industrial & Energy, Specialty Packaging, Data Storage, Optics, and Medical Markets Independently Analyzed with Annual Sales Figures in US$ Million for Years 2003 through 2008 (includes corresponding Graph/Chart)

120

Table 41: Canadian 15-Year Perspective for Physical Vapor Deposition Equipment by End-Use Segment - Percentage Breakdown of Dollar Sales for Microelectronics, Cutting Tools, Industrial & Energy, Specialty Packaging, Data Storage, Optics, and Medical Markets for Years 2003, 2010 & 2017 (includes corresponding Graph/Chart)

121

Table 42: Canadian Recent Past, Current & Future Analysis for Chemical Vapor Deposition Equipment by End-Use Segment Microelectronics, Cutting Tools, Industrial & Energy and Medical Markets Independently Analyzed with Annual Sales Figures in US$ Million for Years 2009 through 2017 (includes

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122

Table 43: Canadian Historic Review for Chemical Vapor Deposition Equipment by End-Use Segment - Microelectronics, Cutting Tools, Industrial & Energy and Medical Markets Independently Analyzed with Annual Sales Figures in US$ Million for Years 2003 through 2008 (includes corresponding Graph/Chart)

123

Table 44: Canadian 15-Year Perspective for Chemical Vapor Deposition Equipment by End-Use Segment - Percentage Breakdown of Dollar Sales for Microelectronics, Cutting Tools, Industrial & Energy and Medical Markets for Years 2003, 2010 & 2017 (includes corresponding Graph/Chart) 12. JAPAN A.Market Analysis Current & Future Analysis

124

125 125 125

Table 45: Sputtering Equipment Market in Japan (2010) Percentage Share Breakdown of Revenue by Leading Players (includes corresponding Graph/Chart) B.Market Analytics

125 126

Table 46: Japanese Recent Past, Current & Future Analysis for Thin Layer Deposition Equipment by Technology - Physical Vapor Deposition (PVD) and Chemical Vapor Deposition (CVD) Markets Independently Analyzed with Annual Sales Figures in US$ Million for Years 2009 through 2017 (includes corresponding Graph/Chart)

126

Table 47: Japanese Historic Review for Thin Layer Deposition Equipment by Technology - Physical Vapor Deposition (PVD) and Chemical Vapor Deposition (CVD) Markets Independently Analyzed with Annual Sales Figures in US$ Million for Years 2003 through 2008 (includes corresponding Graph/Chart)

127

Table 48: Japanese 15-Year Perspective for Thin Layer Deposition Equipment by Technology - Percentage Breakdown of Dollar Sales for Physical Vapor Deposition (PVD) and Chemical Vapor Deposition (CVD) Markets for Years 2003, 2010 & 2017 (includes corresponding Graph/Chart)

127

Table 49: Japanese Recent Past, Current & Future Analysis for Physical Vapor Deposition Equipment by End-Use Segment Microelectronics, Cutting Tools, Industrial & Energy, Specialty Packaging, Data Storage, Optics, and Medical Markets Independently Analyzed with Annual Sales Figures in US$ Million for Years 2009 through 2017 (includes corresponding Graph/Chart)

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>> Get this Report Now by email! Table 50: Japanese Historic Review for Physical Vapor Deposition Equipment by End-Use Segment - Microelectronics, Cutting Tools, Industrial & Energy, Specialty Packaging, Data Storage, Optics, and Medical Markets Independently Analyzed with Annual Sales Figures in US$ Million for Years 2003 through 2008 (includes corresponding Graph/Chart)

129

Table 51: Japanese 15-Year Perspective for Physical Vapor Deposition Equipment by End-Use Segment - Percentage Breakdown of Dollar Sales for Microelectronics, Cutting Tools, Industrial & Energy, Specialty Packaging, Data Storage, Optics, and Medical Markets for Years 2003, 2010 & 2017 (includes corresponding Graph/Chart)

130

Table 52: Japanese Recent Past, Current & Future Analysis for Chemical Vapor Deposition Equipment by End-Use Segment Microelectronics, Cutting Tools, Industrial & Energy and Medical Markets Independently Analyzed with Annual Sales Figures in US$ Million for Years 2009 through 2017 (includes corresponding Graph/Chart)

131

Table 53: Japanese Historic Review for Chemical Vapor Deposition Equipment by End-Use Segment - Microelectronics, Cutting Tools, Industrial & Energy and Medical Markets Independently Analyzed with Annual Sales Figures in US$ Million for Years 2003 through 2008 (includes corresponding Graph/Chart)

132

Table 54: Japanese 15-Year Perspective for Chemical Vapor Deposition Equipment by End-Use Segment - Percentage Breakdown of Dollar Sales for Microelectronics, Cutting Tools, Industrial & Energy and Medical Markets for Years 2003, 2010 & 2017 (includes corresponding Graph/Chart) 13. EUROPE Market Analysis

133

134 134

Table 55: European Recent Past, Current & Future Analysis for Thin Layer Deposition Equipment by Technology - Physical Vapor Deposition (PVD) and Chemical Vapor Deposition (CVD) Markets Independently Analyzed with Annual Sales Figures in US$ Million for Years 2009 through 2017 (includes corresponding Graph/Chart)

134

Table 56: European Historic Review for Thin Layer Deposition Equipment by Technology - Physical Vapor Deposition (PVD) and Chemical Vapor Deposition (CVD) Markets Independently Analyzed with Annual Sales Figures in US$ Million for Years 2003 through 2008 (includes corresponding Graph/Chart)

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>> Get this Report Now by email! Table 57: European 15-Year Perspective for Thin Layer Deposition Equipment by Technology - Percentage Breakdown of Dollar Sales for Physical Vapor Deposition (PVD) and Chemical Vapor Deposition (CVD) Markets for Years 2003, 2010 & 2017 (includes corresponding Graph/Chart)

136

Table 58: European Recent Past, Current & Future Analysis for Physical Vapor Deposition Equipment by End-Use Segment Microelectronics, Cutting Tools, Industrial & Energy, Specialty Packaging, Data Storage, Optics, and Medical Markets Independently Analyzed with Annual Sales Figures in US$ Million for Years 2009 through 2017 (includes corresponding Graph/Chart)

137

Table 59: European Historic Review for Physical Vapor Deposition Equipment by End-Use Segment - Microelectronics, Cutting Tools, Industrial & Energy, Specialty Packaging, Data Storage, Optics, and Medical Markets Independently Analyzed with Annual Sales Figures in US$ Million for Years 2003 through 2008 (includes corresponding Graph/Chart)

138

Table 60: European 15-Year Perspective for Physical Vapor Deposition Equipment by End-Use Segment - Percentage Breakdown of Dollar Sales for Microelectronics, Cutting Tools, Industrial & Energy, Specialty Packaging, Data Storage, Optics, and Medical Markets for Years 2003, 2010 & 2017 (includes corresponding Graph/Chart)

139

Table 61: European Recent Past, Current & Future Analysis for Chemical Vapor Deposition Equipment by End-Use Segment Microelectronics, Cutting Tools, Industrial & Energy and Medical Markets Independently Analyzed with Annual Sales Figures in US$ Million for Years 2009 through 2017 (includes corresponding Graph/Chart)

140

Table 62: European Historic Review for Chemical Vapor Deposition Equipment by End-Use Segment - Microelectronics, Cutting Tools, Industrial & Energy and Medical Markets Independently Analyzed with Annual Sales Figures in US$ Million for Years 2003 through 2008 (includes corresponding Graph/Chart)

141

Table 63: European 15-Year Perspective for Chemical Vapor Deposition Equipment by End-Use Segment - Percentage Breakdown of Dollar Sales for Microelectronics, Cutting Tools, Industrial & Energy and Medical Markets for Years 2003, 2010 & 2017 (includes corresponding Graph/Chart)

Global Thin Layer Deposition Equipment Industry (From Issuu)

142

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>> Get this Report Now by email! 14. ASIA-PACIFIC A.Market Analysis

143 143

Current & Future Analysis

143

Table 64: Sputtering Equipment Market in Taiwan (2010) Percentage Share Breakdown of Revenue by Leading Players (includes corresponding Graph/Chart) B.Market Analytics

143 144

Table 65: Asia-Pacific Recent Past, Current & Future Analysis for Thin Layer Deposition Equipment by Technology Physical Vapor Deposition (PVD) and Chemical Vapor Deposition (CVD) Markets Independently Analyzed with Annual Sales Figures in US$ Million for Years 2009 through 2017 (includes corresponding Graph/Chart)

144

Table 66: Asia-Pacific Historic Review for Thin Layer Deposition Equipment by Technology - Physical Vapor Deposition (PVD) and Chemical Vapor Deposition (CVD) Markets Independently Analyzed with Annual Sales Figures in US$ Million for Years 2003 through 2008 (includes corresponding Graph/Chart)

145

Table 67: Asia-Pacific 15-Year Perspective for Thin Layer Deposition Equipment by Technology - Percentage Breakdown of Dollar Sales for Physical Vapor Deposition (PVD) and Chemical Vapor Deposition (CVD) Markets for Years 2003, 2010 & 2017 (includes corresponding Graph/Chart)

146

Table 68: Asia-Pacific Recent Past, Current & Future Analysis for Physical Vapor Deposition Equipment by End-Use Segment - Microelectronics, Cutting Tools, Industrial & Energy, Specialty Packaging, Data Storage, Optics, and Medical Markets Independently Analyzed with Annual Sales Figures in US$ Million for Years 2009 through 2017 (includes corresponding Graph/Chart)

147

Table 69: Asia-Pacific Historic Review for Physical Vapor Deposition Equipment by End-Use Segment - Microelectronics, Cutting Tools, Industrial & Energy, Specialty Packaging, Data Storage, Optics, and Medical Markets Independently Analyzed with Annual Sales Figures in US$ Million for Years 2003 through 2008 (includes corresponding Graph/Chart)

148

Table 70: Asia-Pacific 15-Year Perspective for Physical Vapor Deposition Equipment by End-Use Segment - Percentage Breakdown of Dollar Sales for Microelectronics, Cutting Tools, Industrial & Energy, Specialty Packaging, Data Storage, Optics, and Medical Markets for Years 2003, 2010 & 2017 (includes corresponding Graph/Chart)

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149

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>> Get this Report Now by email! Table 71: Asia-Pacific Recent Past, Current & Future Analysis for Chemical Vapor Deposition Equipment by End-Use Segment - Microelectronics, Cutting Tools, Industrial & Energy and Medical Markets Independently Analyzed with Annual Sales Figures in US$ Million for Years 2009 through 2017 (includes corresponding Graph/Chart)

150

Table 72: Asia-Pacific Historic Review for Chemical Vapor Deposition Equipment by End-Use Segment - Microelectronics, Cutting Tools, Industrial & Energy and Medical Markets Independently Analyzed with Annual Sales Figures in US$ Million for Years 2003 through 2008 (includes corresponding Graph/Chart)

151

Table 73: Asia-Pacific 15-Year Perspective for Chemical Vapor Deposition Equipment by End-Use Segment - Percentage Breakdown of Dollar Sales for Microelectronics, Cutting Tools, Industrial & Energy and Medical Markets for Years 2003, 2010 & 2017 (includes corresponding Graph/Chart) 15. REST OF WORLD Market Analysis

152

153 153

Table 74: Rest of World Recent Past, Current & Future Analysis for Thin Layer Deposition Equipment by Technology Physical Vapor Deposition (PVD) and Chemical Vapor Deposition (CVD) Markets Independently Analyzed with Annual Sales Figures in US$ Million for Years 2009 through 2017 (includes corresponding Graph/Chart)

153

Table 75: Rest of World Historic Review for Thin Layer Deposition Equipment by Technology - Physical Vapor Deposition (PVD) and Chemical Vapor Deposition (CVD) Markets Independently Analyzed with Annual Sale Figures in US$ Million for Years 2003 through 2008 (includes corresponding Graph/Chart)

154

Table 76: Rest of World 15-Year Perspective for Thin Layer Deposition Equipment by Technology - Percentage Breakdown of Dollar Sales for Physical Vapor Deposition (PVD) and Chemical Vapor Deposition (CVD) Markets for Years 2003, 2010 & 2017 (includes corresponding Graph/Chart)

155

Table 77: Rest of World Recent Past, Current & Future Analysis for Physical Vapor Deposition Equipment by End-Use Segment - Microelectronics, Cutting Tools, Industrial & Energy, Specialty Packaging, Data Storage, Optics, and Medical Markets Independently Analyzed with Annual Sales Figures in US$ Million for Years 2009 through 2017 (includes

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156

Table 78: Rest of World Historic Review for Physical Vapor Deposition Equipment by End-Use Segment - Microelectronics, Cutting Tools, Industrial & Energy, Specialty Packaging, Data Storage, Optics, and Medical Markets Independently Analyzed with Annual Sales Figures in US$ Million for Years 2003 through 2008 (includes corresponding Graph/Chart)

157

Table 79: Rest of World 15-Year Perspective for Physical Vapor Deposition Equipment by End-Use Segment - Percentage Breakdown of Dollar Sales for Microelectronics, Cutting Tools, Industrial & Energy, Specialty Packaging, Data Storage, Optics, and Medical Markets for Years 2003, 2010 & 2017 (includes corresponding Graph/Chart)

158

Table 80: Rest of World Recent Past, Current & Future Analysis for Chemical Vapor Deposition Equipment by End-Use Segment - Microelectronics, Cutting Tools, Industrial & Energy and Medical Markets Independently Analyzed with Annual Sales Figures in US$ Million for Years 2009 through 2017 (includes corresponding Graph/Chart)

159

Table 81: Rest of World Historic Review for Chemical Vapor Deposition Equipment by End-Use Segment - Microelectronics, Cutting Tools, Industrial & Energy and Medical Markets Independently Analyzed with Annual Sales Figures in US$ Million for Years 2003 through 2008 (includes corresponding Graph/Chart)

160

Table 82: Rest of World 15-Year Perspective for Chemical Vapor Deposition Equipment by End-Use Segment - Percentage Breakdown of Dollar Sales for Microelectronics, Cutting Tools, Industrial & Energy and Medical Markets for Years 2003, 2010 & 2017 (includes corresponding Graph/Chart)

161

COMPETITIVE LANDSCAPE Total Companies Profiled: 77 (including Divisions/Subsidiaries - 88) -----------------------------------------Region/Country

Players

-----------------------------------------The United States Canada

51 2

Japan

11

Europe

17

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2 2

The United Kingdom Rest of Europe

3 10

Asia-Pacific (Excluding Japan) Middle-East

6

1

------------------------------------------

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