Micro And Nanomanufacturing
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Principles of Micro- and Nanofabrication.- Microfabriaction Using X-Ray Lithography.- Manufacturing High Aspect Ration Microstructures.- Meso-Micromachining.- Mechanical Micromachining.- Microgrinding.Diamond Micro Cutting Tools.- Laser Micro- and Nanofabrication.- Micromachining Using Water Droplets.- Diamond Nanogrinding.- Nanomachining.- Micro-and Nanomanufacturing. EAN/ISBN : 9780387261324 Publisher(s): Springer, Berlin, Springer US Discussed keywords: Mikrotechnik, Nanotechnologie Format: ePub/PDF Author(s): Jackson, Mark J.
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