항온가압오토클레이브-일신오토클레이브

Page 1

HIGH PRESSURE OVEN 등방향으로 가압되는 설비로 적층 성형공정에 적용되며 터치패널, 핸드폰 액정, 모니터용 LCD나 PDP등 유리기판에 필름을 붙이는 공정이나 반도체 패키징 공정에 사용합니다.

Removal of Void (Film, Carbon/Epoxy)

Laminated Films (Anisotropic Conductive Film, Flip Chip)

Pathway of gas or water vapor

Ai

Void

Au

Ni

Heat & Pressure

ACF

Autoclave Vessel 3.5

Flex

1350

Tensile strength / MPa

Void content / %

Experimental data Fitting curve

1400

2.5

2.0

1.5

Vv = 3.33exp(-2.57P)

1.0

1300 1250

Autoclave Process

1200

S=1443exp(-0.074r)) 1150

0.5

0 0.0

Cu

1450

Experimental data Fitting curve

3.0

Conducing Particles

Die

Composite Lay-up

1100 1050 0.1

0.2

0.3

0.4

0.5

0.6

0

0.5

1.0

Cure Pressure / MPa

1.5

2.0

2.5

3.0

3.5

Void content / %

Before

After

Ref. J. Mater. Sci. Technol., 27(1), (2011) 69-73

Ref. Mater. Sci. Eng. B., 98, (2003) 255-264

Adhesive layer(부착층) 소결 및 압착 진행

PET Film

온도 (200℃)

경화공정 가능

압력 [60 ㎏/㎠]

Ferrite

내부순환팬 및 모터 Chamber

Adhesive layer

Separator

등방향 가압 [접착강도 및 밀도증가]

Top and Bottom Die

Touch Screen

Ferrite

Adhesive layer

Before

Clutch Door

PET Film

Separator

After Die Attach Film/Paste

Air Bubbles (기포)

Dieelectric

Solderball Epoxy Undrfill

Silicon IC

Mold Cap

Air Bubbles

Solder Ball (63Sn/37Pb)

우. 305-510

FR-5 Substrate

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