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Page 36
3.3 Chambers and components / Components / Viewports / ISO-KF, ISO-K, ISO-F, CF Viewports
3.3 Chambers and components / Components / Viewports / ISO-KF, ISO-K, ISO-F, CF Viewports
ISO-KF Viewport, Borosilicate
Aluminum frame with integrated FKM O-ring, installation without additional seal Circumferential rim for outer centering on the ISO-KF connector flange Not suitable for installation on base plate Heat up and cool down speed: max. 5 K/min Pressure range: 1 · 10-8 hPa to 500 hPa over pressure Temperature range: -15 to 150 °C
Components
Dimensions
B
Ø A
Aluminum/Borosilicate Nominal diameter
A [mm]
B [mm]
Order number
DN 25 KF
26
10
110GSG025
DN 40 KF
41
10
110GSG040
DN 50 KF
52
10
110GSG050
Caution! Risk of injury by glass splinters. Do not use viewports which show apparent damage.
ISO-KF Viewport, Fused Silica (Synthetic Amorphous Quartz)
Stainless Steel frame; glass soldered Transmission in UV spectrum to 200 nm Heat up and cool down speed: max. 5 K/min Pressure range: 1 · 10-8 hPa to 500 hPa over pressure Temperature range: -100 to 200 °C
B
Dimensions
Ø A Stainless Steel/Fused Silica (Synthetic Amorphous Quartz), UV Nominal diameter
A [mm]
B [mm]
Order number
DN 25 KF
16
9.9
120GSG025-silica-uv
DN 40 KF
36
13.7
120GSG040-silica-uv
Caution! Risk of injury by glass splinters. Do not use viewports which show apparent damage. Flanges according to ISO 2861
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3.3 Chambers and components / Components / Viewports / ISO-KF, ISO-K, ISO-F, CF Viewports
ISO-KF Viewport, Sapphire
Stainless steel frame; glass soldered Transmission in IR spectrum to 4500 nm Heat up and cool down speed: max. 5 K/min Pressure range: 1 · 10-8 hPa to 500 hPa over pressure Temperature range: -100 to 350 °C
B
Components
Dimensions
ØA Stainless Steel/Sapphire Nominal diameter
A [mm]
B [mm]
Order number
DN 16 KF
15
12.7
120GSG016-saphir
DN 40 KF
24
13
120GSG040-saphir
Caution! Risk of injury by glass splinters. Do not use viewports which show apparent damage. Flanges according to ISO 2861
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Page 196 Part 3.3 / Page 201
3.3 Chambers and components / Components / Viewports / ISO-KF, ISO-K, ISO-F, CF Viewports
ISO-KF Glass Blank Flange
Installation with outer centering ring and elastomer seal Fastening elements: Clamping ring made from plastic (no usage of metal connection elements) Heat up and cool down speed: max. 5 K/min Pressure range: 1 · 10-8 hPa to 500 hPa over pressure
Components
B
Dimensions
Ø A Note These flanges are manufactured without seal grooves for centering rings. Borosilicate Temperature range: -15 to 150 °C Nominal diameter
A [mm]
B [mm]
Order number
DN 16 KF
30
5
160FBL016
DN 25 KF
40
5
160FBL025
DN 40 KF
55
5
160FBL040
DN 50 KF
75
5
160FBL050
Caution! Risk of injury by glass splinters. Do not use Glass Blank Flange which show apparent damage.
Quartz Temperature range: -15 to 200 °C Nominal diameter
A [mm]
B [mm]
Order number
DN 16 KF
30
5
180FBL016
DN 25 KF
40
5
180FBL025
DN 40 KF
55
5
180FBL040
DN 50 KF
75
5
180FBL050
Caution! Risk of injury by glass splinters. Do not use Glass Blank Flange which show apparent damage.
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3.3 Chambers and components / Components / Viewports / ISO-KF, ISO-K, ISO-F, CF Viewports
ISO-K Viewport
Frame with integrated FKM O-ring, installation without additional seal Circumferential rim for outer centering on the ISO-K counterflange Not suitable for mounting on base plate or with ISO-F flange Heat up and cool down speed: max. 5 K/min Pressure range: 1 · 10-8 hPa to 500 hPa over pressure (at temperatures > 60 °C only to ambient pressure); DN 200 to ambient pressure Temperature range: -15 to 150 °C; DN 200 to 60 °C
Components
Dimensions
B
Ø A
Stainless Steel/Borosilicate Nominal diameter
A [mm]
B [mm]
Pressure range
DN 63 ISO-K
72
13.5
1 · 10-8 hPa to 322GSG063 500 hPa over pressure
Order number
DN 100 ISO-K
104
15
1 · 10-8 hPa to 322GSG100 500 hPa over pressure
DN 160 ISO-K
153
17.5
1 · 10-8 hPa to 322GSG160 500 hPa over pressure
DN 200 ISO-K
210
17.5
1 · 10-8 hPa to ambient pressure
322GSG200
Caution! Risk of injury by glass splinters. Do not use viewports which show apparent damage.
Aluminum/Borosilicate Nominal diameter
A [mm]
B [mm]
Pressure range
Order number
-8
DN 63 ISO-K
72
13.5
1 · 10 hPa to PF 410 011-T 500 hPa over pressure
DN 100 ISO-K
104
15.5
1 · 10-8 hPa to PF 411 011-T 500 hPa over pressure
DN 160 ISO-K
153
17.2
1 · 10-8 hPa to PF 412 011-T 500 hPa over pressure
Caution! Risk of injury by glass splinters. Do not use viewports which show apparent damage.
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Page 198 Part 3.3 / Page 203
3.3 Chambers and components / Components / Viewports / ISO-KF, ISO-K, ISO-F, CF Viewports
CF Viewport Always use washers for installation Pressure range: 1 · 10-11 hPa to ambient pressure Dimensions
Components
Ø A
Note Item no. suffix -PB: Lead glass for x-ray protection; glass thickness: 5 mm; provides the same protection as 1.5 mm of lead at 100 kV or 1 mm at 200 kV. Stainless Steel/Kodial Heat up and cool down speed: max. 3 K/min Temperature range: -20 to 200 °C, bakeable up to 350 °C Nominal diameter
A [mm]
Order number
DN 16 CF
16
420GSG016
DN 40 CF
38
420GSG040
DN 63 CF
63
420GSG063
DN 100 CF
89
420GSG100
DN 160 CF
135
420GSG160
DN 200 CF
135
420GSG200
Caution! Risk of injury by glass splinters. Do not use viewports which show apparent damage. Please use annealed copper gaskets or elastomer seals to minimize stress inside the glass. Flange sizes DN16 to DN250 according to ISO 3669 and compatible with ISO/TS 3669-2
Stainless Steel/Kodial with Lead Glass Shielding Heat up and cool down speed: max. 3 K/min Temperature range: -20 to 200 °C, bakeable to 350 °C Nominal diameter
A [mm]
Order number
DN 16 CF
16
420GSG016-PB
DN 40 CF
33
420GSG040-PB
DN 63 CF
63
420GSG063-PB
DN 100 CF
89
420GSG100-PB
DN 160 CF
135
420GSG160-PB
Caution! Risk of injury by glass splinters. Do not use viewports which show apparent damage. Please use annealed copper gaskets or elastomer seals to minimize stress inside the glass. Flange sizes DN16 to DN250 according to ISO 3669 and compatible with ISO/TS 3669-2
Stainless Steel/Sapphire Heat up and cool down speed: max. 5 K/min Temperature range: -100 to 300 °C, bakeable up to 450 °C Nominal diameter
A [mm]
Order number
DN 16 CF
12
420GSG016-saphir
DN 40 CF
24
420GSG040-saphir
DN 63 CF
49
420GSG063-saphir
Caution! Risk of injury by glass splinters. Do not use viewports which show apparent damage. Please use annealed copper gaskets or elastomer seals to minimize stress inside the glass. Flange sizes DN16 to DN250 according to ISO 3669 and compatible with ISO/TS 3669-2
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3.3 Chambers and components / Components / Viewports / ISO-KF, ISO-K, ISO-F, CF Viewports
Stainless Steel/Fused Silica, UV Heat up and cool down speed: max. 5 K/min Temperature range: -100 to 200 °C Nominal diameter
A [mm]
Order number
DN 16 CF
16
420GSG016-silica-uv
DN 40 CF
36
420GSG040-silica-uv
DN 63 CF
68
420GSG063-silica-uv
DN 100 CF
99
420GSG100-silica-uv
Components
Caution! Risk of injury by glass splinters. Do not use viewports which show apparent damage. Please use annealed copper gaskets or elastomer seals to minimize stress inside the glass. Flange sizes DN16 to DN250 according to ISO 3669 and compatible with ISO/TS 3669-2
ISO-F Viewport
Sight glasses with replaceable safety glass, especially suitable for coating systems With integrated FKM O-ring; installation without additional seal Including claw clamps, bolts, washers and nuts for installation Heat up and cool down speed: max. 5 K/min Pressure range: 1 · 10-8 hPa to 500 hPa over pressure (at temperatures > 60 °C only to ambient pressure) Temperature range: -15 to 150 °C Dimensions
Black Anodized Aluminum/Borosilicate Nominal diameter
A [mm]
B [mm]
C [mm]
Order number
DN 63 ISO-F
20
60
70
PF 410 013-T
DN 100 ISO-F
22
92
100
PF 411 013-T
DN 160 ISO-F
30
142
154
PF 412 013-T
Caution! Risk of injury by glass splinters. Do not use viewports which show apparent damage
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Page 200 Part 3.3 / Page 205
3.3 Chambers and components / Components / Viewports / CF Shutter
3.3 Chambers and components / Components / Viewports / CF Shutter
CF Shutter, Manual
Components
Hermetically sealed, suitable for UHV Bellows-sealed feedthrough Handwheel with snap-in stages Bakeout temperature: up to 250 °C Operating temperature: up to 80 °C Tightness: < 1 · 10-11 Pa m3/s Angle of rotation: 0 to 90 ° with snap-in stages in 10 ° increments Pressure range: 1 · 10-9 hPa to ambient pressure Service life: 500000 cycles Mounting orientation: any
Dimensions
C
D
B
A Stainless Steel Nominal diameter
A [mm]
B [mm]
C [mm]
D [mm]
Order number
DN 40 CF
152
22
30
42
420MBL040
DN 63 CF
171
37
51
42
420MBL063
DN 100 CF
186
65
90
42
420MBL100
DN 160 CF
212
111
123
42
420MBL160
Flange sizes DN16 to DN250 according to ISO 3669 and compatible with ISO/TS 3669-2
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3.3 Chambers and components / Components / Viewports / CF Shutter
CF Shutter, Pneumatic Hermetically sealed, suitable for UHV Bellows-sealed feedthrough Pneumatically operated; double-acting Opening and closing speed adjustable Connection: (compressed air) 6 mm hose connection Bakeout temperature: up to 250 °C, pneumatic drive (removable) up to 60 °C Operating temperature: up to 60 °C Tightness: < 1 · 10-11 Pa m3/s Angle of rotation: 0 to 90 ° (final position adjustable) Pressure range: 1 · 10-9 hPa to ambient pressure Compressed air (overpressure) max.: 0.7 MPa Compressed air (overpressure) min.: 0.15 MPa Service life: 500000 cycles Mounting orientation: any
Components
Dimensions
C
D
B
A Stainless Steel Nominal diameter
A [mm]
B [mm]
C [mm]
D [mm]
Order number
DN 40 CF
214
22
30
59
420MBL040-p
DN 63 CF
234
37
51
59
420MBL063-p
DN 100 CF
249
65
90
59
420MBL100-p
DN 160 CF
276
111
123
59
420MBL160-p
Flange sizes DN16 to DN250 according to ISO 3669 and compatible with ISO/TS 3669-2
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Page 202 Part 3.3 / Page 207
3.3 Chambers and components / Components / Viewports / ISO-KF, ISO-K, CF Glass Retainers
3.3 Chambers and components / Components / Viewports / ISO-KF, ISO-K, CF Glass Retainers
ISO-KF, ISO-K, CF Glass Retainers These retainers can be used for vacuum-tight installation of 1" (24.8 to 25.8 mm) or 2" (49.8 to 51 mm) optical glasses. These are the standard sizes offered by many manufacturers in optical quality. We offer a wide range of the most commonly used optical glasses as accessories.
Components
Simple replacement of glasses Accessories: Face wrench, optical glasses Glass not included Pressure range: 1 · 10-8 hPa to 500 hPa over pressure Temperature range: -15 to 150 °C
KF Flange with Viewport Retainer/Stainless Steel Dimensions
Ø B
Ø C Ø A Nominal diameter
A [mm]
B [mm]
C [mm]
Glass thickness [mm]
Order number
DN 40 KF
55
24.8-25.8
16
3-7
120GAG040-25
Flanges according to ISO 2861
ISO-K Flange with Viewport Retainer/Stainless Steel Dimensions
Ø C
Ø B Ø A Nominal diameter
A [mm]
B [mm]
C [mm]
Glass thickness [mm]
Order number
DN 63 ISO-K
95
49.8-51
40
3.8-8
320GAG063-50
Flanges according to ISO 1609
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3.3 Chambers and components / Components / Viewports / Glasses for Retainers
CF Flange with Viewport Retainer/Stainless Steel Dimensions
ØA
Components
ØB
ØC Nominal diameter
A [mm]
B [mm]
C [mm]
Glass thickness [mm]
Order number
DN 40 CF
69.9
24.8-25.8
16
3-7
420GAG040-25
DN 63 CF
113.5
49.8-51
40
3.8-8
420GAG063-50
Flange sizes DN16 to DN250 according to ISO 3669 and compatible with ISO/TS 3669-2
Accessories for Glass Retainers Adjustable face wrench Tool to tighten and loosen the threaded insert of the glass retainer Face Wrench
3.3 Chambers and components / Components / Viewports / Glasses for Retainers
Materials
Order number
Steel, bronzed
GAG-SLS
Borosilicate Float Glass
Transmission range: 0.35 to 2 μm Extremely temperature-resistent; low thermal expansion coefficient Chemical-resistant Temperature range: up to 350 °C
Borosilicate Glass diameter [mm]
Glass thickness [mm]
Order number
25.4
3.8
GSG025-Boroflo
50.8
5.5
GSG050-Boroflo
Caution! Risk of injury by glass splinters. Do not use glasses which show apparent damage.
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Page 204 Part 3.3 / Page 209
3.3 Chambers and components / Components / Viewports / Glasses for Retainers
Calcium Fluoride
Transmission range: 0.2 to 6 μm Parallelism: 3 arc minutes Planarity: 2 wavelengths at 633 nm Surface quality: 40/20 scratch/dig Temperature range: up to 200 °C
Components
Calcium Fluoride Glass diameter [mm]
Glass thickness [mm]
Order number
25.4
3
GSG025-CaF2
50.8
5
GSG050-CaF2
Caution! Risk of injury by glass splinters. Do not use glasses which show apparent damage.
Fused Silica (Synthetic Amorphous Quartz)
Transmission range: 0.2 to 2 μm Parallelism: 3 arc minutes Planarity: 1 wavelength at 633 nm Surface quality: 40/20 scratch/dig Temperature range: up to 350 °C
Optical Glass, Fused Silica (Synthetic Amorphous Quartz) Glass diameter [mm]
Glass thickness [mm]
Order number
25.4
3
GSG025-Silica-UV
50.8
5
GSG050-Silica-UV
Caution! Risk of injury by glass splinters. Do not use glasses which show apparent damage.
Zinc Selenide
Transmission range: 0.7 to 15 μm Parallelism: 3 arc minutes Planarity: 1/20 wavelength at 10.6 μm Surface quality: 60/40 scratch/dig Temperature range: up to 200 °C
Zinc Selenide Glass diameter [mm]
Glass thickness [mm]
Order number
25.4
3
GSG025-ZnSe
50.8
5
GSG050-ZnSe
Caution! Risk of injury by glass splinters. Do not use glasses which show apparent damage.
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Components
3.3 Chambers and components / Components / Viewports / Glasses for Retainers
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Page 206 Part 3.3 / Page 211