Rf Mems Switches And Integrated Switching Circuits
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Introduction.- Lateral DC Contact Switch.- Broadband Capacitive Switch.- Micromachined Coplanar Waveguide (CPW) Transmission Line.- Integrated Micromachined Switch Circuits.- Tunable Electromagnetic Bandgap (EBG) Bandstop Filter.- Tunable Bandpass Filter.- Deep Etching and Wafer Bonding Process.- Surface Micromachining Process.- Mechanical Design and Properties of RF Switches.- Dynamic Analysis and Modeling of RF Switches.- Conclusions.- Index. EAN/ISBN : 9780387462622 Publisher(s): Springer, Berlin, Springer Science & Business Media Format: ePub/PDF Author(s): Liu, Ai-Qun
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