Design for Industry Alignment stages offer micron repeatability

Four new high resolution, high repeatability XY Alignment Stages, the AU200120x120 Alignment Stages, feature 120 mm (4.724 in.) of travel in both the X and Y axes. These low profile 87 mm (3.425 in.) high XY stages, have a 188 mm x 188 mm (7.401 in. x 7.401 in.) open aperture. Easy integration of tooling and fixtures is facilitated through a precision series of threaded mounting holes.

The AU200-120x120-01 XY Stage is stepper motor driven, featuring a resolution of two microns when using a 10 micro-steps-per-step micro-stepper motor driver and one micron repeatability. The AU200-120x120-02 Stage is supplied with threephase brushless servo motors and quadrature incremental encoders, and AU200120x120-03 has DC servo motors with quadrature incremental encoders. The two closed loop servo motor options o er greater resolution, repeatability, positional accuracy, higher travel speeds, and greater throughput. The AU200-120x120-04 has the knobs on the stepper motors replaced with quadrature incremental encoders for position verification.

Typical applications include: alignment, inspection, testing, scanning, laser drilling, machining, semiconductor handling, sampling, assembly, and optical applications in industrial, medical and research applications. The AU200-120x120 alignment stages can be ordered as a complete plug-and-play system with compatible motion controllers with PC interface, joystick and keypad. DW OES