SINGULUS Clustertool for R&D of CIS/CIGS Solar Cells
Smart Solutions to Drive the Future.
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SINGULUS TECHNOLOGIES Solar Success with Innovative Technologies
The new CIS-CIGS Clustertool is a development tool for the production and thermal treatment of semiconductor layers based on copper, indium and gallium for photovoltaic applications. With the CIS-CIGS Clustertool economic research of new manufacturing processes for CIS-CIGS semiconductor films can be realized. In this way, the highest level of efficiency of thin-film solar modules compared to existing concepts can be achieved. With the process results on the basis of the findings from the demonstration plant, industrial manufacturing processes can be developed and optimized, enabling higher cell performances as well as a significant reduction of manufacturing costs for thin-film photovoltaic modules per watt peak.
The engineers at SINGULUS TECHNOLOGIES develop new, efficiently operating solar production machines with a high depth of integration for high-performance solar cells. In order to improve the efficiency of solar cells and to reduce costs at the same time, SINGULUS TECHNOLOGIES cooperates with leading solar cell manufacturers. At the SINGULUS TECHNOLOGIES site in
Kahl/Main, Germany, machine concepts for vacuum deposition, cathode sputtering and selenization processes are developed and assembled. At our subsidiary SINGULUS STANGL SOLAR GmbH in F端rstenfeldbruck, Germany, we focus on machines for wet-chemical processes, i.e. cleaning, etching and coating machines for the manufacturing of silicon and thin-film solar cells.
The CIS-CIGS Clustertool contains a central transportation station and several process stations. In the process stations the thermal treatment of the secluded precursor layers is conducted. With the combination of all available options for the CIS-CIGS Clustertool, a full inline R&D thin-film solar cell can be manufactured.
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SINGULUS Clustertool for R&D of CIS/CIGS Solar Cells 3
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1. Loading/Unloading Section 2. Central Handling 3. Sputtering Unit for Absorber Layer
4. Selen Evaporator 5. Rapid Thermal Process, Section 1
6. Rapid Thermal Process, Section 2 7. TENUIS Buffer Layer
The system is designed in the following configurations for glass substrates up to 300Â mm x 300 mm:
absorber coatings on glass substrates through thermal processing of CIG precursors under H2S/ H2Se.
Central Transportation: The Central Transportation describes the basic equipped CIS-CIGS Cluster Tool, which is expandable for further process options.
Option 3: RTP 1 included Thermal Chamber The Inline Selenization Equipment CISARIS is designed for the formation of CIGSSe absorber material on glass substrates through thermal processing of CIG precursors under H2S atmosphere.
Option 1: Sputtering Unit The R&D vertical inline sputtering system is designed to apply all required layers for a CIS/CIGS coating, e.g. Mo, CIGS and top layer. Option 2: Selenium Evaporator The Selenization Equipment RTP lab tool is designed for the formation of
Option 4: RTP 2 Station The option of the second RTP station could be interesting for further application such as the formation of the H2Se layer in a gas atmosphere.
Option 5: Elementar Selenium or Sulfer Evaporator A further option is the application of selenium or sulfer evaporation under vacuum condition. Option 6: Wet Process Equipment TENUIS GEN 2 The Wet Process Equipment TENUIS GEN 2 Lab manual set-up is designed as manual coating tool for CdS/ alternatives and an optional KCNEtching function for buffer layers on glass substrates. Option 7: P1, P2, P3 Laser Scriber The implementation of a laser scriber for P1, P2 and P3 does fulfill all requirements for a inline thin-film cell manufacturing.
Headquarters SINGULUS TECHNOLOGIES AG Hanauer Landstrasse 103 D - 63796 Kahl, Germany Tel. +49 6188 440-0 Fax +49 6188 440-110 sales@singulus.de www.singulus.de
China SINGULUS MANUFACTURING GUANGZHOU LTD. Tel. +86-20-34885010 frank@singulus.com.cn France SINGULUS TECHNOLOGIES FRANCE S.A.R.L. Tel. +33 3 893111-29 singulus@club-internet.fr Germany SINGULUS STANGL SOLAR GMBH Tel. +49 8141 3600-0 stangl@singulus.de
Great Britain SINGULUS TECHNOLOGIES UK LTD. Tel. +44 1793 7842-00 brian.walsh@singulusuk.com Italy SINGULUS TECHNOLOGIES ITALIA S.R.L. Tel. +39 071 79303-12 info@singulus.it Latin America SINGULUS TECHNOLOGIES LATIN AMERICA LTDA. Tel. +55 1121 6524-10 rodolfo.mignone@singulus.com.br Netherlands SINGULUS TECHNOLOGIES AG Branch Office SINGULUS MASTERING Tel. +31 40 7501-400 mastering@singulus.de
Singapore SINGULUS TECHNOLOGIES ASIA PACIFIC PTE LTD. Tel. +65 674 119-12 sales@singulus.com.sg Spain SINGULUS TECHNOLOGIES IBERICA S.L. Tel. +34 936 7500-25 singulus@singulusib.com Taiwan SINGULUS TECHNOLOGIES TAIWAN LTD. Tel. +886 2 2748-3366 sales@singulus.com.tw United States and Canada SINGULUS TECHNOLOGIES INC. Tel. +1 860 68380-00 sales@singulus.com
5/2012-MetaCom Printed in Germany - Technical alterations reserved
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