BAK1101+501_01.10.07:1101
12.7.2008
13:32 Uhr
Page 1
Cost effective volume production with
BAK
1101
LEDs Optics Photovoltaics Power Devices Metallization SAW Sensors Optics Photovoltaics SAW Power Devices Metallization MEMS LEDs Optics Photovo Metallization MEMS LEDs Sensors SAW Photovoltaics Power MEMS Devices LEDs Optics Power Devices Metallization MEMS Sensors LEDs Optics SAW Metallization MEMS LEDs Optics SAW Photovoltaics Power Devices Sensors SAW Metallization Power Devices Metallization Sensors LEDs Optics SAW Ph Dev Photovoltaics MEMS LEDs Optics SAW Photovoltaics Power Devices Me Sensors Optics SAW Photovoltaics Power Devices Metallization MEMS LEDs tovoltaics Power Devices Metallization MEMS Sensors LEDs SAW Photovolta Metallization MEMS Sensors LEDs Optics Power Devices Metallization MEMS SAW Photovoltaics Metallization MEMS LEDs Optics SAW Photovoltaics MEM MEMS Sensors Optics LEDs SAW Photovoltaics Power Devices Metallization SAW Photovoltaics Power Devices Metallization MEMS LEDs Optics SAW Pho ptics SAW Photovoltaics Metallization MEMS Sensors LEDs SAW LEDs Photo LEDs Sensors Power Devices Metallization MEMS Sensors LEDs Optics Pow Devices Metallization Sensors Optics SAW Photovoltaics Power Devices Met
www.evatecnet.com
BAK1101+501_01.10.07:1101
12.7.2008
13:32 Uhr
Page 2
Complete range of process components
Evatec Ltd. Lochriet CH-8890 Flums Switzerland Telephone + 41 81 720 1080 Telefax + 41 81 720 1081 info@evatecnet.com ■ ■ ■ ■
Whatever you process, now or in the future, the flexible system can be configured and reconfigured time after time. Up to three EBS500 electron beam guns Thermal sources Inductively coupled and chimney sources Ion and plasma sources for etch or assisted deposition Back and front side heating Special sources and feed systems for thick layers Full range of substrate holder and handling systems
BAK
Complete process control From pump down to system vent, Evatec’s user friendly Khan platform ensures all process sequences conform within strict limits for best overall repeatabilities and yields. ■ Quartz and Optical Monitoring including broadband ■ RGA integration ■ Full SECS GEM compatibility
■
Substrate size
Capacity *
2 inch
Up to 216
3 inch
Up to 104
4 inch
Up to 64
6 inch
Up to 24
8 inch
Up to 12
Document No: 133406
1101 ■ ■
* with segmented calotte
www.evatecnet.com