Precision Optics Coating systems that think for themselves
Coating systems that think for themselves… Achieve maximum yields for even the most complex optical stack designs using “real time re-optimisation software”. The spectrum recorded after each layer of the stack is deposited is analysed in just a few seconds and in case of significant deviations new thicknesses and target spectra for the remaining layers are calculated and adjustments made to the rest of the coating process automatically. ›› Recover wayward processes ›› Achieve enhanced yields
…so you can find time for the next task!
Turn your production vision into reality using Evatec’s knowhow in optical thin film production. We deliver hardware, processes and the most advanced control systems ever to manage development and production of complex optical coating processes. Develop your process with ease Use our integration package to take you all the way from initial thin film design through layer monitoring strategy and recipe generation on the coater itself. Run your process with confidence Our systems will make “real time” adjustments throughout the coating process to reduce errors and maximise yields.
Process Start
1. Layer deposition
The reoptimisation loop
2. Check spectrum
3. Recalculate remaining layers or continue without changes
Optical Thin Film Powerhouse
Process End
Thin Film Design
Monitorin Strategy
A choice of coating technologies Choose from evaporation, PIAD, sputter or PECVD. You can be confident that we use all our own platforms, source designs and software systems to ensure perfect integration of hardware, sources and system operation. Our process specialists are on hand to help you choose the best technology for your substrate type and application and run sampling.
Thermal Evaporation Standard and custom designs for complex substrate geometries and a large variety of coating materials
E Guns From 1 to 64 pocket, single or co-evap, for dielectrics, metals and TCOs
PIAD Improved film qualities, lower process temperatures and shorter process times
Sputter Metals, dielectrics and TCOs. Closed loop reactive processes. Co-sputter for complex materials
ng y
Recipe Generator
Coa Exec
A choice of platform types With over 1400 systems in production around the world, the BAK evaporator remains a firm favourite for production of optical coatings, but its now available in more variants than ever with custom solutions for extended throw, load lock and split chamber. Sputter is now well established for high quality optical coatings and we offer the MSP dedicated batch tool with a proven track record in optics production or the Radiance sputter tool with cassette to cassette handling for the ultimate in automation.
BAK Evaporators
MSP Sputter
Platform sizes from 0.5 to 1.4m. Evaporation, PIAD and Ion Plating.
Outstanding optical and mechanical stabilities, Process repeatabilitiesT50 ± <0.2%*.
Radiance (cassette to cassette)
Custom engineering
Integrate sputter, PECVD and plasma etch processes on a single tool for precision optics.
From custom “ flip” systems to robot substrate handling and cassette to cassette solutions.
*For Fabry Perot filter, T50, falling edge 567nm, 6 non consecutive runs.
oating ecution
Mass Production
Fast track from development to production “Optics Toolbox” integrates all steps from the first thin film design using industry standard design packages like Filmstar™, Essential Macleod™ and Optilayer™ all the way to the final coating in one seamless series. The choice is yours quartz or broadband optical monitoring, evaporation or sputter.
Optics Toolbox From theoretical design to final recipe with ease. Avoid transcribing errors between design steps & reduce development times
Quartz Monitoring Single or 6 way quartz with increased sampling rates for termination accuracy
Optical Monitoring UV to IR, monochromatic or broadband, test glasses or direct substrate measurement
Optical Pyrometry Outstanding control of temperature distribution across coating zone for hot IR coating processes
Hardware | Processes | Advanced Control Systems
The Optical Thin Film Powerhouse
About Evatec Evatec offers complete solutions for thin film deposition and etch in the optical and semiconductor markets. Evatec engineers are able to offer practical production advice from R&D to prototyping and mass production. We recognize that no single technique offers the answer to all problems. With a technology portfolio including standard and enhanced evaporation as well as sputter, we are ready to offer sampling services and custom engineering to meet our customers individual needs. We provide sales and service through our global network of local offices. For more information visit us online at www.evatecnet.com or contact our head office.
Evatec Ltd. Lochrietstrasse 14 CH-8890 Flums Switzerland Tel: + 41 81 720 1080 Fax: + 41 81 720 1081 info@evatecnet.com www.evatecnet.com
Product descriptions, photos and data are supplied within the brochure for general information only and may be superseded by any data contained within Evatec quotations, manuals or specifications.