Product News Archer 10
Latest in KLA-Tencor’s suite of optical metrology overlay tools, the Archer 10 incorporates several significant improvements in automation, throughput, productivity and precision over previous generation systems. This system is one of the industry’s most competitive cost-of-ownership overlay solutions for 300 mm manufacturing at the sub-0.13-micron node. The Archer 10 provides the increased precision and accuracy lithography process engineers need to control their overlay error budget for sub-0.13-micron device production. Its industry-leading throughput of up to 150 200 mm wafers per hour and 120 300 mm wafers per hour represents a 30 percent increase over previous generation tools. Features include new optics components such as a digital camera, improved algorithms, better optics lenses and a fragmented optics sensor.
PROLITH 7.0
PROLITH 7.0, the latest version of KLA-Tencor’s industry-leading PROLITH lithography simulation software, contains many enhancements to functionality, ease of use, execution speed and accurate lithography simulation from mask to wafer. PROLITH 7.0’s new Simulation Queue allows monitoring and parameter adjustment mid-process without affecting the entire simulation, as well as naming and saving the complete simulation set for future work. Connection to Klarity ProDATA V.12 AutoTune(tm) module produces more precise, accurate analysis of experimental data using PROLITH 7.0 models as the data-fitting function, fine-tuning uncertain simulation parameters to match measured results to a given lithographic process. With these significant new process analysis and lithography modeling capabilities, PROLITH 7.0 provides the increased speed and accuracy to optimize the simulation process and reduce time to market, maximize yields and increase lithography capital utilization.
Klarity ProDATA AutoTune™
AutoTune, the new auto-calibration analysis module option for KLA-Tencor’s Klarity ProDATA software, combines ProDATA’s data-fitting and analysis capabilities with the physically correct lithographic model simulations of PROLITH 7.0. This package gives users a model with enough physical relevance to ensure the applicability of simulation results for developing and optimizing the most advanced lithography processes. By automatically adjusting and fine-tuning uncertain simulation parameters for the best match between PROLITH 7.0 simulations and a given set of experimental lithographic data, AutoTune more accurately simulates the lithography process. Extrapolation from one data set to another is reliably straightforward and can be done without the need and expense of running every case experimentally. This extendibility provides enormous time and money savings for the industry. Spring 2001
Yield Management Solutions
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