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Introducing. . .
Yield Management Solutions Welcome to our new publication Yield Management Solutions — Yield Enhancement and Process Control Strategies for the Semiconductor Industry. This magazine is dedicated to bringing you valuable information about new ideas, trends and developments in yield management and process control — areas which are critical to the success of the semiconductor industry worldwide. Our industry is increasingly driven by the dual demands of economic value and technology advancement. Requirements for faster time-to-market, higher performance and greater productivity drive decision making at all levels. While KLA-Tencor has built its business on innovating and delivering high performance inspection and measurement systems, we recognize that superior systems are no longer enough. As the industry has evolved and changed, so too has our focus. Today, we are dedicated to providing integrated yield management solutions that translate vast amounts of complex yield data into the information critical for decision making throughout the fab. KLA-Tencor strives to build business partnerships with our customers to
enhance fab processes, increase productivity and achieve faster return on investment. With a unique combination of advanced technologies and fab-wide expertise, we’re focused on helping you monitor and improve your yield. Over the years, we have provided a forum for discussion of key yield management issues at seminars held around the world. This publication now provides an additional opportunity to address these important topics. We hope you find it stimulating and informative. If there are issues or ideas you would like to see addressed, please let us know. KLA-Tencor is dedicated to advancing yield management and process control technology — and sharing our knowledge with you.
Yield Management Solutions EDITOR-IN-CHIEF Roberta Emerson MANAGING EDITOR Judy Dale CONTRIBUTING EDITORS Kern Beare Carol Johnson Kavitha Kannan Robert Mendoza Holly Nielsen A S S O C I AT E E D I T O R Lars Ahntholz E D I T O R I A L A S S I S TA N T S Kevin Clover Petra Donnelly Janet Ely ART DIRECTOR AND PRODUCTION MANAGER Shirley Short D E S I G N C O N S U LTA N T Carlos Hueso C I R C U L AT I O N Cathy Correia
KLA-Tencor Worldwide C O R P O R AT E H E A D Q U A R T E R S
KLA-Tencor Corporation 160 Rio Robles San Jose, California 95134 408.875.4200 I N T E R N AT I O N A L O F F I C E S
KLA-Tencor France SARL Evry Cedex, France 011 33 16 936 6969 KLA-Tencor GmbH Munich, Germany 011 49 89 8902 170 KLA-Tencor (Israel) Corporation Migdal Ha’Emek, Israel 011 972 6 6449450 KLA-Tencor Japan Ltd. Yokohama, Japan 011 81 45 335 8200 KLA-Tencor Korea Inc. Seoul, Korea 011 822 41 50555 KLA-Tencor (Malaysia) Sdn. Bhd. Johor, Malaysia 011 607 557 1946 KLA-Tencor (Singapore) Pte. Ltd. Singapore 011 65 782 6788
Ken Schroeder President and Chief Operating Officer
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Summer 1998
Roberta Emerson Vice President, Corporate Communications
Yield Management Solutions
KLA-Tencor Taiwan Branch Hsinchu, Taiwan 011 886 35 335163 KLA-Tencor Limited Wokingham, United Kingdom 011 44 118 936 5700