Summer98 p27

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Q&A

Answers to your critical support and maintenance questions from KLA-Tencor’s Worldwide Support Operations (WSO).

Q

My KLA-Tencor equipment is used in high-volume production applications where tool availability is critical. What is the best YieldSupport option for me?

A

The YieldOne maintenance agreement was designed specifically for your needs. This agreement guarantees a high level of equipment availability by combining peak-performance capabilities: 4-hour on-site response by an assigned engineer, extended hour coverage, 24 hours a day/7 days a week CRC support, on-line technical expert and on-site applications support. It also includes ProActive Maintenance, software releases and hardware enhancements throughout the life of your agreement to ensure the highest degree of operational performance from your system.

Q

What option is best if a particular tool is important to my operation, but not “mission critical”?

A

In this case, the YieldTwo maintenance agreement will more closely meet your needs. During standard hours of operation, this agreement will still include many of the same support capabilities as YieldOne:

standard hour on-site coverage, 4-hour on-site response, ProActive Maintenance, Customer Response Center support, software releases and hardware enhancements.

recovery times — often solving problems in minutes, not hours. They can also assist with parts ordering, technical issues and customer support engineer dispatch, if needed.

Q

Q

What is ProActive Maintenance and why would I want it?

A

Consider ProActive Maintenance a “health check” for your system. It helps ensure consistent system performance by anticipating and correcting potential problems before they occur. ProActive Maintenance is performed at your site by KLA-Tencor customer support engineers (CSEs) and includes all recommended periodic maintenance procedures and required supplies. It also provides a discount on parts identified during the health check as requiring replacement.

Q

Why should I call the CRC instead of my local customer support engineer (CSE)?

A

KLA-Tencor Customer Response Centers are staffed 24 hours a day, 7 days a week, to provide immediate phone access and troubleshooting assistance. The CRCs are directly linked to product experts to assure the highest system availability and fastest Summer 1998

In a cost-constrained environment, how can KLA-Tencor help me drive costs down?

A

Over the life of inspection and metrology systems and across multiple systems within a mask shop or fab, maintenance and support costs can generate significant operating expense. KLA-Tencor service professionals work to achieve the highest possible system performance while improving productivity through FE training, infrastructure improvements (e.g., parts logistics) and utilization of technology (e.g., system diagnostics, remote support). Service delivery is tailored to closely match customer needs through a wide range of support options.

For more information, contact your service representative or contact the CRC at: 1.800.600.2829 U.S. 0800.174728 U.K. (045).9857500 Japan

Yield Management Solutions

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