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Joining Forces AMRAY SEM Defect Review Expands Integrated Line Monitoring Solution
In April, AMRAY, Inc., a leading provider of scanning electron microscope (SEM) systems, joined forces with KLA-Tencor. The addition of the AMRAY product line enhances KLA-Tencor’s highly integrated line monitoring solution for semiconductor manufacturing by combining highresolution SEM capabilities with advanced patterned wafer inspection tools and automated defect classification (ADC) software. As semiconductor device geometries continue to shrink, SEM-based defect review will play an increasingly vital role in meeting inspection requirements. The AMRAY acquisition fits well with KLA-Tencor’s portfolio of products and services for production of the most advanced devices. Time-Tested Technology AMRAY, founded in 1958 as Advanced Metals Research Corporation (AMR), originally provided consulting services related to the use of electron optics for research and manufacturing applications. Seeing a market for electron optical instrumentation, AMR introduced its first commercially available SEM in 1969. The company has since introduced over 30 models of electron microscopes for a variety of applications, including material science and analytical chemistry, as well as semiconductor manufacturing.
Over the years, AMRAY has been credited with introducing many innovative features to improve low voltage imaging performance, to allow more precise measurement of sub-micron features, and to deliver reliable performance and minimum downtime. Enabling Superior Classification Yield monitoring is increasingly critical to achieving high productivity and profitability for semiconductor manufacturers. The ability to rapidly classify captured defects is essential in accelerating yield ramps and correcting defect excursions. With defect review capabilities of 0.25 µm and below, the AMRAY defect review systems complement KLA-Tencor’s existing Integrated Line Monitor (ILM) offering. Together with the company’s IMPACT/Online ADC, defect information can be processed more quickly for rapid correction of yield excursions. KLA-Tencor also offers confocal laser defect classification and review through its CRS system.
The AMRAY division facility in Bedford, Massachusetts.
Leveraging Strengths The combination of the two companies gives customers access to the AMRAY review systems through the established KLA-Tencor worldwide support network. In addition, research and development efforts can be better leveraged to focus on more rapid product development. KLA-Tencor already had very strong SEM-based solutions in advanced defect inspection and critical dimension (CD) measurement. The company also had a portfolio of leading defect classification and review capabilities. With the addition of AMRAY, KLA-Tencor is now in a unique position to pursue advances in both SEM technology and defect classification, important areas for the future.
The AMRAY SEM reveals yield critical defects on 0.25 µm devices and below.
Summer 1998
Yield Management Solutions
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