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VD84

100 - 1.0 x 10-3 M6ap 75 -1.0 x 10-3 Topp

VD85

1200 - 5.0 x 10 -4 M6ap 900 - 5.0 x 10 -4 Topp

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3a-mop.' cepmm END: amommHmeabie C gy OT 63 go 630 MM N cpnaHLAamm ISO, ANSI; npocraft m Hamm-lac! KOHCTpyKLALIFI C nHeemarmtnecKmm LtinnmHgpom B roppe; BbICOKBA HagewHocrb — pecypc pa6orbi 100000 WelK.110B OTKPb1T14F1/3BKPb1T1,151; FIM3K1/11%lyp0BeHb HareKaHms — He 6onee 2*10 9 m6ap*.n/c; BO3MO)KHOCTb yCTB1-10BK1,1 BCflOMOraTellbHbIX noproa; maKcmmanbHHO nepenag gaeneHmq — 3 6ap; KpmoaaKyymHbix mgeanbHo nogxogmr 6narogap9 o r111OCKO6D KOHCTpyKLAMM gincl4y3moHHbix HacocoB; aeromarwiecKoe 3aKpbrrme npm orKa3e nmraHms.

• • • • •

• • •

VIM

3areopu cepmm BEL: • • •

• • •

aniommmeable c gy OT 63 go 250 MM N cpnaHqamin ISO, ANSI i CF; WTOK LtmninHgpa y11110THFIeTCA CBapHbIM C11111bCPOHOM, LITO o6ecne4Neaer noebiweHHyK) Hage>Kmocrb — pecypc pa6orbi 1000000 W4K110B OTKpbITIN/3aKpb1T1451; F11,13011%1 yPOBeHb HareKaHma — He 6onee 2*10 -9 m6ap*n/c; merannw-lecKoe ini BI4TOHOBOB ynnorHeHme cegna; maKcinmanbHurn nepenag gaeneHmsi — 3 6ap; aeromarmLiecKoe 3aKpbri-me npm orKa3e nmraHma.

3areopu cepmm Mini SS: -

• • •

Hepwaaeiou.te0 cram C gy or 16 go 50 MM N cOnaHLtamm NW in CF; BbICOKBA Flage)KHOCTb — pecypc pa6orbi 250000 W1K110B OTKPbITIN/3aKpb11- 1151; 1-11,13101171ypoBeHb HareKaHma — He 6onee 2*10 9 m6ap*n/c; aneKrponHeamartn4ecKm0 npmeog; maKcinmanbHuin nepenag gaaneHmR — 3 6ap; cmcrema 6bicrporo 3aKpbmna npm orKa3e nwraHma. 113

Ox/o/sAssI.1..0^Y....." Kananka Ay AO 630 00, 150 0xnascsse0ail mrsop (onynosanbso)

Oxnamc,eaembie 3a.reopu: • •

Ynno.rilsiowee KOAIDLIO

• •

amommHmeable (B03M0)KHbl 1,13 Hep)Kaaeloutein cranm) C qy OT 63 go 630 MM C cpnaHLAamin nio6oro rmna; HM31(110 ypoBeHb HareKaHma — He 6onee 10 9 m6ap*.n/c; anerrponHeamarmLiecKmin 11111,13neKrpomexaHo4ecK10 npmaog; maKcmmanbHurn nepenag gaaneHma — go 10 6ap.

gpyrme TNnbl 3anopmoil apMaTypbl: ymoabie KnanaHbi C gy or 63 go 500 MM (ISO, ANSI); npsimoyranbHbie 3aTB0pb1 C npoxogHum ceyeHmem OT 25*160 go 100*609 MM; cnewnanbHue 3aTB0pb1 TWA t< 11DA3HbDO) npoueccoe, ycroinwable K arpeccineHbim cpegam 1,1a6pa3mBHum Hacrmom C gy or 50 go 630 MM (ISO, ANSI, JIS). 6blX0A xn'aoarepra

• coo wooarewra

11P0Mblili/1EHHblE HACOCbI KomnaHms Shinko Seiki HaLiana cBoe cywec -rBoBaHme B 1 949 c pa3pa6o-rKm npombiwneHHbix 30110THI4KOBbIX HaCOCOB. B HacToswee Bpems Shinko Seiki npom3Bogwr wmpoKmiA cneK -rp npombiwneHHoro BaKyymHoro 06opygoBaHms - OT BbICOKOrlp0143B0,0,14TellbHbIX 30.110THMKOBbIX HaCOCOB 6e3macnsHbix 6yc-repHux HaCOCOB Py-rca Ha MarH14THOM nogBece. Cambie coBpemeHHbie TeXH01101-1414 pa3pa6o-rKm 14 npom3Bogc-rsa BaKyymHoro 060pyROBaHl4R flO3BOTIFIFOT Shinko Seiki o6ecne4mBaTb BbicoyaOwyio Harte>KHOCTb npogyntmm, 01-11144Hble TexHmHecKme xaparrepmc -rmw COOTBeTCTBOBaTb >KeCTK14M Tpe6oBaHmsm, npegbsBnsembim K npombiwneHHomy o6opygoBaHmic .

30110THMKOBblE HACOCbI BO MH01-14X OTPaCrIFIX 11p0MbIWIleHHOCT14 Tpe6yeTcs npoBogm -rb orKaHKy 60.111,11.114X o6bemoB go BaKyyMa my6mHoin" nopsgKa 10 3 MM.pT.CT. (TOpp). nnq 3-114X 4enevi mgeanbHbim peweHmem 6ygeT mcnonb3oBaHme 60.11bW14X MaC1151HbIX 30110THIIKOBbIX BaKyymHbix HaCOCOB. BaKyyMHble 30J10THOKOBble HaCOCbl npegHa3HaHeHbi gns co3gaHms cpegHero N rny6oKoro BaKyyMa. CpeRa gns OTKa4K14: Bo3gyx, HearpeccmBHbie ra3bl, npegBapmTenbHo oHmuteHHbie OT nbinm, aap03oneVi, KanenbHoi,i cpa3bi. B 6onbumx BaKyymHbix cmc-remax BaKyymHbie 30110TH14KOBble HaCOCbl TaloKe npmmeHsioTcs /A11 51 npegBapmTenbHo0 OTKa4K14 nepeg 0TKaLIKOV1 BbICOKOBaKyyMHbIM14 Hacocamm. Pomp 30.110TH14KOBbIX HaCOCOB cmeu.teH OT Llem-panbHoCA ocm cTaTopa, me)Kgy po -ropom N cTaTopom o6pa3yeTcs macnsHas nneHKa, KoTopas pa6oTaer KaK ynno-rmirenb. OT.1114414TellbH0r4 4epT0C4 30110THMKOBbIX HaCOCOB FIB.1100TCSI flOCTOPIHHble xapKTepmc-rium o-i-KaHm OT armoccpepHoro gaBneHms go npegenbHoro BaKyyMa. Hacocbi Shinko Seiki npegHa3HaHeHbi qnA KpyrnocroyHo6 HenpepuBHo6 pa6oTbi B WeCTK14X YC.110B14F1X 3KcnnyaTaL4Nm B rlp14.110)KeHl4AX, rge Tpe6yeTcs oi-KaHKa 60nbwmx o6bemoB. Hacocbl OT.11144aeT BbICOKOe KaHec-rBo y3.110B 14 ge-rane0. oTKaHKe 3anbineHHoro BO3gyXa KIM ra3a npegycmo-rpm -re yCTaHOBKy cpmnbTpa Ha Bxoge BaKyymHoro 30110THI4K0B01-0 Hacoca. oTKaHKe ra3a C 6onbwmm cogep>KaHmem napoB, napoBoO cipa3bi, KanenbHoi/ cipa3bi npegycmoTpmTe yCTaHOBKy KoHgeHcaTopa Ha BX0121,e B Hacoc.

MoRenb SR-500 SR-800 SR-1500B SR-20B11 SR-25B11 SR-30B11 SR-37B11 SR-60B11 SR-75B11 SRP15000B

BbICTPOTa

gei;ic-rBms, m 3/4 33 48 92,4 122,4 151,2 182,4 224,4 370,8 459,6 918

ElpegenbHHO BaKyym C 3aKpb1TbIM ra3o6annacTom, M6ap 6,710-3 (6,710) 6,710 -3 (6,7*10 - ) 6,710 -3 (6,710 - ') 6,710-3 (6,710- ) 6,710 -3 (6,710 - ) 6,710-3 (6,710- ) 6,710-3 (6,710-) 5,310-3 (5,310- ) 5,3*10 (5,310) 5,310-3 (5,310- )

(OTKpb1Tb1M)

K0.11144eCTBO

Florpeonsemas

macna, n 2,5 3 4 5 5 11 11 20 20 54

MOLLHOCTb, KBT

0,75 1,5 2,2 3,7 3,7 3,7 5,5 7,5 11 22

74 105 210 260 260 400 400 725 725 1560

Macca,

&YCTEPHbIE HACOCbI PYTCA Byc-repHbie HaCOCbl rIpl4MeH5110TCFIgns yBermHeHms 11130143BOANTeflbHOCTI4 14 npegenbHoro BaKyyma (KaK npaBmno, Ha 110INIROK cipopBaKyymHbix HaCOCOB. E1p14H1.11411 geOCT BMA Hacoca PyTCa COCT014T B TOM, LITO oTKaHKa npomcxogmT nocpegcTBom geyx c6anaHcmpoBaHHblx, napannenbHo pacnonmeHHbix poTopoB, mmelowmx copy LAmcippbi 8, BpawaKmilmxcs B npormBononowHbie CT0p0Hbl. f1pN BpaateHfrim poTopoB orKa4mBaembi6 ra3 nonagaeT B 110.110CTb MeKEI,Y pOTOPOM 14 CTaTOpOM, nepemea.taems B HanpaBneHmm Bblxnona. Hacoc PyTCa SIM 51eTCF1 6eCKOHTaKTHbIM, TO eCTb meKgy po-ropamm m cTaTopom noggepKmBaems 110CTOFIHHbli4 MI4H14MarlbHb11713a3op. 3T0 o6ecne4mBaeT OTCyTCTBI1e macrisHbix napoB B BaKyymHoiA Kamepe OT Hacoca PyTca. Bef114414Hbl)

EyCTepHble HaCOCbl ceptim

• •

• • • •

SMB-D:

BpauteHme pompa COCTaBibleT 2900 o6/mmH, Hem o6ecne4mBaKn-cs 0-11114 1-1Hble xapaKTepmc-rman Hacoca no oTKaHKe „doors.* ra3OB npN He60.11bW14X ra6apm-mbix pa3mepax HaCOCOB. cnnaBoB 3Ha414TellbH0 ymeHbwaer Bec 1/1C110.11630BaHl/le afIOMNHNeBbIX *.‘ Hacoca. / Yg06Has KoHm-pyKutis Ting cnviBa N 3ameHbi Macna. Bc-rpoeHHbu%i BbipaBHmsa -renb RaBneHI1 mcKnEoHae -r yTeHm macna. noBbiwaeT 3Ha414TellbH0 ynnoTHmTeneVi Ka1eCTBeHHbIX HanmHme repme-rmHHocTb HaCOCOB. 14 CneqmanbHblii MeT0,0, CMa3101 yBermymBaer CPOK cny)K6b1 macna macna N BHyrpeHHmx y3/10B 3Ha414TerlbHblc1 HarpeB npego-repatitaeT BaKyymH01-0 6ycTepHoro Hacoca. 10

SHINKO SEIKI BycTepHble HaCOCbl CapHH SMB DM: • B gaHHoii cepmi 6ycTepHbix Hacocoe ticnonb3yeTcq marmiTHoe cu,enneHme pampa Hacoca C nBvraTenem, LITO o6ecne4meaeT BO3MO)KHOCTb 3anycKa Hacoca OT aTmoccPepbi. • EflatOgapF1 BO3MO)KHOCTII 3anycKa 6ycTepHoro Hacoca OT aTMOCCPapb1 epemq OTKa4K11 COCTeMbl c TaKLIM 6ycTepHbim HacocoM ymeHbwaeTc51 Ha 50%. • BafinaccHbie nHHNN , nepeKnioHaTerni gasneHms, eaKyymHbie pene He Tpe6yLoTcs, LITO noebiwaeT 06L.L.4yio HagewHocTb CVICTeMbl, H 51B1151eTCA 3CPCI3eKT1413HbIM peweHmem C TOLIKlel 3pel-1119 CTOL1MOCTI4 no OTHOWaHliK) K npotimogw-renbHocTo eceii CleICTeMbl IIpH 3TOM BO3MO)KHO Henocpegc-reeHHoe no,qcoegmeHme 6ycTepHoro Hacoca K -

C130pBaKyyMHOMy HaC0Cy.

•

ManiliTHoe cgenneHme me>Kgy ELBLiraTenem N poTopom Hacoca aB -roma-niHecKLi ymeHbwae-r MTh yBenLiHmEsaeT CKOpOCTb BpaLL.LeHmi nocnegHero B 3aBliCMMOCTVI OT ra3osoii Harpy3KLi Ha exoge. OTCyTCTBIle ?KeCTKOM mexaHwiecKoro cgenneHmq npegoTepaLgaer BbIXO/ 6ycTepHoro Hacoca k13 CTP0A, gawe ecnv Hacoc pa6oTaeT pe>Kiime neperpy3Km (now BbICOKOM gasneHmi Ha exogHom cOnaHL.Le). HaCOCbl cepa,' SMB: B bICOKaA 1100143BOPY1TellbHOCTb - go 22000 m 3/4. HagewHasi KoHci- pyKwisi H 11P0Mb1W1leHHblil g1,13a0H o6ecne4mBaLoT graiTenbHoe epemq 6ecnepe6oiiHoii pa6oTbic yHe -rom HenpepbieHoi;L oKcnnya -rawiLi.

Bycreptibie • •

Mogenb SMB-100D (DM) SMB-300D (DM) SMB-600D (DM) SMB-200 SMB-006 SMB-C15 SMB-C25 SMB-5000 SMB-10000 SMB-20000

561c-rpm-a geOcTelisl, m 3/4 75 215 430 160 500 1250 2100 4800 10500 22000

PeKomeHgyembiii nOTOK oxnaxgaLoweii aogbi, .11/MI4H 3 3 3 3 3 3 3 3 -

Konwiec-rao macna,

flo-rpe6nsiemaci

MOLLAHOCTb, KBT

0,2 0,34 0,6 0,4 1,2 1,5 2 6 350 500

0,75 1,5 2,2 1,5 2,2 3,7 7,5 11 22 37

Macca, Kr 20,4 35 57,6 120 160 270 400 730 2500 4000

B0/40KOI1bLIEBblE HACOCbI BO/A0K0.11bL4BBble eaKyymHbie HaCOCbl no npe>KHemy npogorpKatoT SIBTIATbC51 011 -111MallbHbIM pewee g.11F1 MHOIL1X o6nac-reii

nplimeHemiq, Tpe6yfoLwix H1/13K01-0 BaKyyma B Xl/M1,14aCKOL%1 N pogc-reeHHbix eVi oTpacnsix nepepa6a -rbieaLoweii npombiwneHHoc -rm. 06L1.afl Hage>KHOCTb, H413Kkle Tpe6oeamici K o6cnyx<weamiLo, maniple ypoaHli em6pawili N wyma B KOM11.11aKCe C yHV1KallbHOCI C110C06HOCTbK3 pa6oTa-rb C Blla>KHblMiel ra3amw cnoco6cTepor nonynsipHocTii 3T010 Hacoca. BOAOKOTIbLieBble • • •

• •

Mogenb SW-25AS SW-50AS SW-100AS SW-200AS SW-300AS SW-25SC SW-50SC SW-100IISC SW-150SC SW-300SC SW-600SC

BbICTp0Ta

AeikTEisi,

m3/4 22,2 42 81 132 222 22,2 42 75 126 276 600

Hacocbi Shinko Seiki:

BbicoKaq 1100143BOMITeflbHOCTb nom oTKaHKe Bna'KHbIX ra3oe; Reyxc-ryneHHaTaq KoHci- pyKwici HacocoB o6ecneHmaaeT BbICOKy10 11P0143B0P,11TallbHOCTb now gaanemiqx Hfrme 300 M6ap; MOtyT OTKa41,113aTbCA eocnnameHFLiowLiecsi NnN arpecclieHble ra3bl; Tmxasa pa6oTa H H113KaFIBLi6pawisl; gOCTyllHbl Hacoced 1,13 Hep*aBeLoweci CTa.111/1 11111/1 gpyri4X KOpp03110HHOCTOC;IKPIX maTepwanoe.

IlpegenbHbal eaKYYNI, M6ap 23 23 23 23 23 40 40 40 40 40 40

Pacxoi aogbi, n/mLiH 6 8 12 16 35 19 21 35 53 120 270 11

lloTpe6n5emasi

MOULAHOCTb,

Macca,

KBT

1,5 2,2 5,5 7,5 15 1,5 2,2 3,7 5,5 11 30

50 58 180 185 350 135 150 255 310 770 1650

5E3MAC/151HblE HACOCbI 1be3macnBHbie cpep,c-rBa OTKa4K14 FIBTIFIFOTCP ORHOMI4 143 cambix BOCTpe6OBaHHbIX V1HCTpyMeHTOB g.1151 o6ecne1eHinq Bakyyma B coBpemeHHbix npvino>keHosix BakyymHoin TeXH14K14. OHM 0611analOT L.1e.1161M psigom npemmyulecTi3 no OTHOLlieHV1F0 K T0a,0,141..1140HHbIM cpegcTBam: •

•

pa604mx xangkocTeiA no3BonBeT o6ecne4oBaTb BbICOKyK) HIACTOTy fa30B00 CpeRbl B pa6oYein KaMepe, HTO no3Bon5er BbIBO,E1,14Tb Ha HOBbIH ypoBeHb TexHonorinyeckme npoueccbi, Tpe6poigine Hanw-ime 6ecnpvimecHoin fa301300 Cperibl — occnegoBarenbckine N 3kcnepomeHranbHbie 3aga4un FigepHoin dDin3inko, yckoporenbHo-HakonviTenbHoVi TeXHV1KV1, CIN43V1K14 TBepgoro Tena, cocTem aHanin3a H mogenopoBaHosi Ha aTomapHom ypoBHe, HaHOTeXH0.11011414, KOCM14HeCKOH TeXHI4K14; 11014 oTkayke aKTHBHbIX, arpeccvBHblx WW1 Bpep,Hbix fa3OB HeT Heo6xoginmocTin 041414aTb 141114 yT14.1114314p0BaTb pa6oyyk-.) )1<14P,KOCTb, HTO gaeT BO3M0)KHOCTb V1X aKTMBH01 -0 14C110.111:330B8H1451 B 110.11y1100BOrFHMKOBbIX npogeccax, xviminYeckom npoin3Bogcl- Be H T. n.; OTCyTCTI314e Heo6xoginmocrin criegin -rb 3a cocToBHvem pa6o4vix >K14,0,KOCTeM 1103B0.11FleT BHegpm- b OTKaHHble cpegcTBa B HOBble cermeHTbi, rge npe)kge HX incnonb3oBaHine 6bino 3aTpyRHeHo. OTCyTCTBMe CMa30K H

Be3macrwmbie d3opBakyymHbie

HaCOCbl

Hanbell ygoBneTBopmcr cambim

*eCTKV1M Tpe6oBaHmBm H 06ecne4oBaEoT OTKaLIKY B Pa311144HbIX nponoweHosix,

rge Tpe6yeTcg HenpepbisHaB Hage>kHaq pa6oTa C yyeTom CaMbIX TpygHbix ycnomnin akcnnya -raumn — arpeccm3Hbie ra3bl, Haninyine B orkayinBaemom ra3e TBepgbix Hac-rval, BbICOKa51 Temneparypa oTkaymBaemoro ra3a H T. 11. AKTMBHag MHOIalleTH5151 3kcnnyaTawnq HaCOCOB Hanbell B TaK14X npinno>keHoBx KaK nonynpoBogHinkoBaB 1100MblWileHHOCTb, HPOH3BORCTBO nnockonaHenbHblx nmcrineeB, BbipaiwnBaHme kpemHinsi, BakyymHaq meTannyproci 1103B011HFOT KOMnaHHH ygepkinBaTb nmgoppou.Line n03viumn B gaHHbIX cermeHTax Ha npegnpincirvmx TainBaHci, KinTaB, KopeH H gpyrvix cTpaH 1-010-BOCTOLIHOM A31414.

HANIE4

Nour.V §00111111

•

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• • •

•

OCHOBHble

xa aKTe PICTHICH 6e3MaCTISHbIX CbOPBaKVVMHbIX HaCOCOB HANBELL.

Xapaxrepmcrtaxa

PS80

PS160

PS180

PS602

PS1202

PS1802

130

150

500

1000

1500

BbicTpoTa rte0c-revis (50 rt.t), m 3/LI FlperienbHbici BaKyyM, m6ap

9,9x10 -4

.9,9x10 -3 4,47

2,98

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8,2

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Swagelok 1/4" RS232/485, USB, Ethernet, SEMI E73-0299 5-40 90% KF50 ISO100 KF40 895x410 940x420 814x380 895x410 x678 x689 x887 x943 300 320 450 520

cpegbi

Bxoppoi;ichnaHeLt BbixogHoVi cl)naHet4 814x380 x642 280

Ea6apiimbie pa3mepu, mm Macca, Kr YpoBeHb wyma, REA

<68

180 160 140

<70

1800 1600

—PS180 (50 FM)

.c 1200 1000

80 cif

800 600

400

200

1,E-02

1,E-01

<70

1400

100

1,E-03

<70

- - PS602 (IiHeeproi — PS1202 (VIHBepTI p) —PS1802 (wHBep-n P)

2000

- PS80 (50 FLO — PS160 (50 FLO -

120 .c

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940x420 x1044 550

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1,E+01

1,E+02

1,E+03

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SPring-8, o6opygoBaHme OSAKA VACUUM

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TYPSOMO/lEKY/151PHb1E HACOCbI OSAKA VACUUM CEPVIll TG 10.

•

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•

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•

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•

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•

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TG5500

2800

3200

200

2400

2500

150

1X10 8

1x10 8

3x10 4

4x10 3

1x10"

6x10 3 -9 1x10 8 1x10

1x10'

2444

543

2000

543

10-15

4-6

25-30

4-6

0,08

0,4

2,7

5,5

4,8

1S0160 CF160

1S0200 CF200

1S0250

1S0320

1S0500

KF40

KF50

100

250

TG203

TG553

TG1003

TG1303

TG1810

200

550

1000

1300

1800

150

370

1000

1100

1x10 8

4x10 3 9 1x10

4x10 3 -9 1x10

4x10 3 1x10'

3x10 3 -9 1x10

1x10"

3x10 3 -9 1x10 -8 1x10

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1x10'

543

1500

2715

4-6

8-13

9-12

11-16

4-6

8-11

9-13

23-28

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0,8

0,4

0,7

0,5

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5,5

4,8

1S0100 CF100

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• •

•

• •

1,..:•■•■■■_4

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330

450

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1100

1400

2400

160

210

240

650

720

750

1100

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1x10

1x10 -8

1x10

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-9

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1x10

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400

500

860

450

1500

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1-1,2

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5-7

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12-15

15-18

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0,5

0,2

0,9

0,6

0,3

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2,6

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1S0250

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•

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• • • • •

• •

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•

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Xapax-repHcrkwa 661CTp0Ta /4e t- ic-mm, o/c

340

400

900

1100

1300

2400

3200

290

300

1050

820

1200

1100

2700

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1 X1 0 8

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2000

1000

2000

1000

Bpems 3anycxa,

TG900M TG1300M TG2400M TG3260M TG1121M TG1300MI TG1300MU TG900MI TG900MU -XHV TG2400MI TG3251M1 TG1300ML TG900ML

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1x10 6

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3000

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15 1S0160 CF160

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KomnaHinsi Suzuki Shokan, opraHmoaaHHa53 B 1905 ropy, BilOalleaCTI31/11/1 cTana H no cev geHb RallFleTCR nvgepom B odnacTin flp0MbILLIcleHHbIX fa3OBbIX cincrem. Suzuki Shokan — nvoHep F1110HCK010 puma KpVICIFeHH010 o6opygoBaHv1, 4b51 geATerlbHOCTb B gaHHoin o6nacTin HaHanacb B 1970 ropy C pa3pa6oTKin renveabix Kpl/101-eHHbIX cincTem Tinci npinnowevmin nonynpoi3ogHinKosoin npombiwneHHocrm, KOCMW-leCKOVi V1 aBinawnoHHoci TeXHVIKVI. Suzuki Shokan sianvercq OCHOBHbIM nocTaawinKom renveBbix K13001eHHbIX cincTem A.119 flnoHCKoro npoeKTa noe3ga Ha Mal- 1-11/1THOM nogaece (JR, Japan RailRoad), npinHoin gsvi>KeHmq KoToporo OCHOBaH Ha neBinTawnv, gocTinraemoin C 1-10MOLLAblO ci3expnpoaogsiwinx MaIHVITOB. Suzuki Shokan — On0H H3 ningepoa mmpoBoro pbiHKa ci3epxnpoi3ogHinKola o6nacTin caepxnpoeogmiAmx cucTem B HnOHHH V1 A3MVI.

6onee Hem 37-neTHinM onbir Suzuki Shokan pa3pa6orKin H npoin3aogcn3a Kpinopectopm>KepaTopoa 1103B011ReT o6ecneHmaarb BbicoLiainwinin ypoBeHb KatlecTBa, winpoKyio Homemmarypy V1 HenpeBaoi?igeHHbie TexHinHecKme xapaKrepocTinKin KpooreHHoro KpooBaKyymHoro o6opygoaaHmq, KOTOpOe 11011b3yeTCR 3acny)KeHHo0 nonyn5=ipHocrb[o B pa3TIVI4HbIX oTpaccipx, TaKVIX KaK nonynpoi3ogHmKoBaq inFigycTpinsg, cbminKal-103KVIX remneparyp, yCTaHOBKV1mogerimpoBaHinsi KOCM0HeCKHX ycnoBinin H T. n. KomnaHinsi Suzuki Shokan npegnaraeT KpooBaKymHbie Hacocbl c Ay or 100 go 800 MM gnq pa3nin4vbix o6nacTeci npomeHeHinsi, BbICOK011001/13B0,0,VITenbHble V1 minHinanopHble KpinopecOpmeparopbi, Komnpeccopbi, KpV10.110ByWKVI vl gpyroe KpinoreHHoe o6opygoBaHme gflA o6ecne4eHinsi npoueccoi3 BbICOKOTeXH0110104HbIX flp01/13BOnCTB H HayLiFibix occnegoaaHvO. C pa3B1/1T1/1eM nonynpoBogvinKoBoM npombiwneHHocrm Suzuki Shokan cKom_ieHTpmpoBanacb Ha gaHHOM cermeHTe, LITO no3Boncier eN 10B0p1/1Tb 0 nvginpyrowein panin B gaHHoCA 06nacTin B 51noHinv in A31/10 — OK0110 80% 300 MM «cba6oB» B S=InoHinin yKomnneKroBaHbi KpinoHacocamv Suzuki Shokan, Hanpvmep: Yamagata NEC, Toshiba Yottukaichi, Fujitsu Mie, Matsushita Uodu, Toshiba Oita, SONY Ku mamoto, SONY Nagasaki. KpinoBaKyymHble

Suzuki Shokan ABTIFIFOTCA OnHOMVI 03 HeMHOIVIX KpinoHacocoi3 Ha KoTopbie MeHRK)T HaCOCbl 0,D,H01-0 amepinKaHcKoro npoin3BoginTenci nawe B HOBbIX ycTaHoEsKax gflA nonynpoBogmmKoBoin npombiwneHHocTin amepinKaHcKoro >Ke npov3BogcTaa gflA pbIHKOB FInomnin H A300. genae-rcq 3T0 noromy, 4TO KpinoHacocbi Suzuki Shokan inmeEoT cyw,ecTBeHHo nyHwine TexHinvecKme xapaKrepvcrinKin H odnagaioT 6onee BbICOKOVi Hage>KHOCTIDIO. HaCOCbl

OLleHb VI3BeCTHOM

2001 rogy TOTlbK0 Ha cpa6pinKax UMC (Tak3aHb) 6onee HOBbIX 30 HaCOCOBVI3BeCTHORD amepinKaHcKoro flpON3BOAVITe1151 yCTaHOBKaX VIOHH00 inmnnaHTaumvi 6binv 3ameHeHbr Ha 6onee npoin3aoginTenbhibie H vagewHbie Hacocbl Suzuki Shokan C aHaf1011/14HbIM ginameTpom. KpoMe TOM, KomnaHm5R-npov3BoginTenb yCTaHOBOK 6bina npoinHcpopminpoaaHa 0 Heo6xoginmocTin nocTaBKH 3TVIX cmcrem C npegycTaHoanemHbimm Hacocamm Suzuki Shokan, H Tenepb ace yCTaHOBKV1 nocTaBncaoTcp yKOM1111eKTOBaHHble o6opygoBaHmem Suzuki Shokan. TaK, B B

BAKYYMHbIE KPIIOHACOCbI SUZUKI SHOKAN SPACETORR KomnaHmi Suzuki Shokan npegnaraer winpoKylo ninve0Ky KpinoaaKyymHbix HacocoB C Ay OT 100 no 800 MM HIlp0143BOTAVITellbHOCTbE0 OT 360 go 28000 nic no ao3gyxy (a3oTy). Pqg yH1/1KaflbHbIX peweHmin B 06nacTin KpooaaKyymHoin TeXHVKVI 1103B0.11ReT KOMIlaHVIVI ygep>Kmaarb ninginpyK -Awne n03inuinin Ha pbIHKaX F1110FIV11/1 VI A31,10 KaK B o6nacTH o6opygoBaHinq npoMbiwneHHocTH, TaK H B abepe caepxnpov3BoginTenbHbix flonynpoBogHoKoBoO BaKyymHbix cincTem, me veo6xorivimo OTKaLIVIBaTb Kamepbi 60nbwinx 06-bemoB. TaK, KpmoHacocbi SpaceTorr cepmm "E" o6ecne4vaaFoT 11p01/13B0g1/1TeflbHOCTb Ha 50% (!!!) BblWe aHanoroB C TeM >Ke ginameTpom yallOBH0f0 npoxoga - Hanpinmep, 11001,13BORVITellbHOCTb KpooHacoca Suzuki Shokan SAl2SI-01E (c cOnaHLiem 320 MM) cocTaiangeT 4500 n/c, B To Bpemq KaK aHanorw-mbie peweHmq gpyrinx npoo3BoriviTenein 3Toro pa3mepa inmeEoT flp0M3B0rAVITailbHOCTb 3000 n/c. flpH 3TOM ga>Ke cTaHgaprHbie KpooHacocbi Suzuki Shokan Tpe6yR-.)T cywecTBeHHo meHbwe apemeHin gnsi 3axana>KmBaHinsi (go 50%), Hem aHanorink-mbie peweHmq gpyrinx npommoginTeneci. Anci ygoBneTiaopeHinq >KeCTKVIX Tpe6oBaHm0 nonynpoBogHmKoBbix TeXH0110r0V1 K ypOBHIC KpmaaaKyymHom o6opygoBaHvin Suzuki Shokan BA6paPVIVI, B .100 gBinrareno cneLtmanbHoin CVIHXpOHHble npinmeHmoTcsi E+1 KOHCTpyKLAVIVI, yp0BeHb ain6pau,vv1 KOTOpbIX COCTa13115ReT OK0110 xapaKTepincrinK 06614HbIX gBinraTenern. 3TO 10% OT aninsiHme KpinoBaKyymHoin f103BOngeT 3Ha4VITellbH0 CH1/131/1Tb sin6pawnin alleMeHTb1 LlyBCTBVITellbHble K nogcmcTembi Ha REAL G (HanpvlMep, cincTembi nonynpoaogvinKoBoro o6opygoaaHmsR n03mL4woHmpoBaHinq 110,0,110)KKVI, 0 T. n.). rii iii11 X1 ' FlpogyntinFo KomnaHmin Suzuki Shokan OTTIVILlaFOT BbICOLIal;IWaR Hage>KHocTb H p,110TellbHb16 pecypc pa6oTbi: 100000 HacoB HenpepbnaHoin pa6oTbi gn i HaCOCOB c Ay go 250 MM H 80000 —.100 E+1 0.8SEC Liacoa Henpepbmvoi>1 pa6oTbi p,f1F1 HaCOCOB C Ay OT 320 go 800 ' {

1 1 111 11 1 1'1 1 1, 11

Ki310HaCOC C f101114)1SeHHtrIM

CTaHApaTH 611;1

yposeHem em6pawnin

lipootiacoc

MM.

SUZUKI SHOKAN noc-i-aam BK.I1K)4aeT B ce6s KpmoHacoc, Komnpeccop ( C -rpaHccpopmaTopom), renmeabie .1114H1414 3 M, mHgviKa-rop TemnepaTypbi V1 gaaneHms ET000 (vinvi KoHipannep SELCON-AC P.11S1 CVCTM C ycKopeHHoM pereHepaume0) N sce Heo6xogmmbie Ka6enin. CTaHgaIDTHb11%1 KOMIlfleKT

HY>KHO OTMeTl4Tb, LITO rta)Ke 6a3OBbli4 KOM11.11eKT noc-rasKin BK.11104aBT B ce6s 1-1011HOCTbK) KOHTOOT1.11BObl, no3BonstoLume pea111/130BblB8Tb coapemeHHble aa-roma-rmt-tecKoe ynpaaneHme. TaK whip/war-op TemnepaTypbi ET000 1103B0.11ABT 1:18BaTb r101-1630BaTeilK) mvicl:topmaumio o Temneparype En-opoM cTyneHm (ace KpvioHacocbi Suzuki Shokan Komnnerrytoi-cs SID TemneparypHum ceHcopoM), 110,E1K.11104aTb gaP-11/1K gaaneHms ( He BX0,0,14T B KomnneKT) nporpammmpoaarb no 2 KOHTO0.11bHbIX TO4K14 no -remnepaType gaaneHmkt gns ynpaaneHms BHeW1-114M14 npvt6opamm. mmee-r ac-rpoeHHbie pene V1Hgv1KaTop Temneparypu 6.110K141DOBK14,

KOTOPble

MOrYT

1_ 1

IMP

BK11FO4aTb/BbIK.11104aTb

yc-rpoMc-raa nonb3oaaTen5 npvt gOCTIOKeH1414 onpegeneHHbix Temneparyp/gaaneHmM, 3anporpammviposaHHbix nonb3oaaTenem Vl BO3M0)KHOCT14 yganeHHoro ynpaaneHms.

BAKYYMHbIE KPI1OHACOCbl SUZUKI SHOKAN SPACETORR C CMCTEMOii YCKOPEHHOR PEFEHEPALWIll Kolirponnep SELCON-AC

KpmoHacocbi Suzuki Shokan SpaceTorr c cinc -remoM ycKopeHHoVi pereHepaumm flO3B0.11910T CYLLIeCTI3eFIHO CF114314Tb BOOMA, 1-1e06X0r114MOB ,C0151 BOCCTal-101311BH145,1

pa6oTocnoco6Hoc-rm KpmoHacoca nocne pereHepaumm. Hanpvimep, grm Hacocoa SpaceTorr c ycKopeHHo0 pereHepaumm c fly 250 MM spew nonHoro LiviKna pereHepaumm «cold to cold» (oT Hat-ona Harpeea go nonHoro 3axona)KmeaHms V1 abixoga Ha pa6o4mM pewinm) coc-raanser meHee 100 MVIHyT, a gns HacocoB c fly 320 MM — acero 102 M14HYTbl ( apems gaHo grill LlaCTOTbl 3neK-rp0ce-rm 50 ru). aro nony-ropa pa3 6bicrpee cambix coapemeHHbix aHanorw-mbix peweHmM Ha pbiHKe! OCHOBHble XapaKTePHCTHKH K HOHBCOCOB CTaHile THOH KOH 14

Mogenb (Ay B MM)

BbICTIDOTa AelACTB14f1,

A3OT

SA04(100) SA06(160) SA08(200) SA10(250) SAl2(320) SA16(400) SA20(500) SA24(630) SA30(800)

360 800 1700 2400 4500 6000 12000 17000 28000

AproH 300 660 1400 2000 3500 5000 10000 14000 23000

n/c

Bogopog 500 1200 2700 4000 6500 10000 20000 27000 38000

Boa 1100 2500 4600 7000 10000 17000 29000 42000 67000

Bpems 3axonax<maaHvis c-raHgapi-Hb11%1 (ycKopeHHas pereHepaums), Ml4H 55/47* 55 (40) 70 (45) 80/65* (50) 80 (65) 110/108* (85) 150 180 200

14 C clicTemok y CKOpeHHON EMKOCTb,

AproH 300 250 1200 1500 2100 2100 5000 7000 6000

ci-g.

ereHe awn'

PeKomeHgyembi0 nepmog pemamem-Horo 06C.11Y)K14BBF11451, Hacoa HenpepbiaHoM pa6oTbi Hacoc KoMnpeccop He -rpe6yercs 16000 He -rpe6ye-rcs 16000 He Tpe6ye-rcs 16000 16000 He -rpe6yercs 16000 40000 16000 40000 16000 40000 16000 30000 16000 30000

Bogopog 3,5 4 12 12 24 24 130 130 130

*apems 4epe3 gpo6b — inmepeHo B AKTAH, (380 B, 50 RA)

MYTIbTl1HACOCHblE CliCTEMbl BbICOKOTIO0143B0/114TellbHble Komnpeccopbi Suzuki Shokan 1103130.11ROT 0131aF11430BblBaTb MYTIbT14HaCOCHble KoHdwrypaumm, Korga ogmH KoMnp eccop ogHoa emeHHo ynpaBnseT N o6ecne4maaer nOnHOLLeHH MynurviKomnpeccop C200G M (3,5 KBT) Myrib-rmkomnpeccop C300H M (6,1 KBT) -

SAO8 (gy 200 MM)*3 SA10 (,thy 250 MM)*2 + SA08 (gy 200 MM)*1 SAl2 (Ay 320 MM)*1 SA16 (gy 400 MM)*1

SAO8 (gy 200 MM)*4 SA10 250 MM)*4 SAl2 (gy 320 MM)*2; SAl2 (gy 320 MM)*1 + SA10 (gy 250 MM)*2 SA16 (gy 400 MM)*2; SA16 (gy 400 MM)*1 + SA10 (gy 250 MM)*2

(ny

KPI#10110BYWKI1 KpvionoaywKm Suzuki Shokan Ha 6a3e Kpmopecbpm>Kepa -ropoe rviclx1Dopga-MaKmaroHa nO3B0F15110T KoHgeHcmpytouimecs npm -remnepaType 80 K (napbl BO/Abl, ymeaogopogbi 14 T. n.) C11130143BORWTellbHOCTbK) OT 1100 n/c (Ay 100 MM) go 96000 n/c (gy 900 MM). OTKa414BaTb fa3b1,

BAKYYMHblE KflAilAHbl B TeLienvivi HeCK011bK14X geCATKOB neT gaTcKa9 KomnaHmq Danfoss npom3Borwr BbICOKOKaLleCTBeHHble KflaflaHbl g.1151 MHOIVIX oTpacne0 11P0MblailleHHOCTVI. BaKyymHbie KnanaHbi Danfoss oTrivHae-r BbicoHaVwee KaHeci- Bo nro-roaneHmi N yHliKaflbHble TexHw-lecKve xaparrepvicTvw. TaK, Hapa6o-rKa Ha OTKa3 p,1151 alleKTp0MalThIVITHbIX BaKyyMHbIX KnanaHoe cocTaansleT 2 Mf1H. 1.114KTIOB 1/1 10 MTIH. 14111K.11013 ,n,nq nHeBma-rwiecKfrix BaKyyMHbIX KnanaHoB ()0y 16, 25, 5 mnH. — gnq Ay 40, 50). MHorme BegyuAve npovi3BogyTenki BaKyyMHbIX 14.1114 flarlyilp0B0gHl4K08b1X

cfricTeM Bbl6pany BaKyymHbie KflanaHbl Danfoss ,q11F1 Hav6onee OTBeTCTBeHHbIX y3.110B BbinycKaemoro vmm o6opyp,oBaHvq. Komnamv BbinycKaer yMOBble Vl nmHeVHbie KnanaHbi c pa3mepamv cl:maHLlee NW16, NW25, NW40, NW50. Kopnyc: cranbHo6 aill0M1/1HVleBb11). lipVIBOrt: pyHHoV, nHeBmani4ecKvi0 v1111/1311eKTp0MaiHMTHb114.

06upie ceep,emin: •

pa3pa6oTaHbi anFiBbICOKOBaKyyMHbIX flp14.110)KeH140

•

OCHOBHOcl aKi.teHT cgenaH Ha KaHecTBe BaKyyMHbIX KrIallaHOB

• •

na3epHaq mapKvipoma 3au4V1rHas1 BbIT04Ka Ha crinaHL4ax

KIIAIIAHbI HAIIYCKA ATMOCOEPbI (cpoTo cneBa): • •

KomnaKTHaq N nerKap KoHcTpynonq 6.narogapq 3anaTeHToBaHHoV cinc -reme cepBonpvBona HopmanbHo 3aKPb1Tb11%11/1 OTKpb1Tb10 Bapinawrbi

•

1-11/13KaSinoTpe6nclemasi MOLLAHOCTb

• •

6onee 500 000 L11,1K110B Cpa6aTblBaHl4F1 amommHineBbiV Kopnyc, BHyrpeHHve Hacnii — Hep>xaBeroulasi cTanb

IIPIIHAW1EWHOCTI4 /11151 BAKYYMHbIX KTIATIAHOB 3neKTpomarmiTHbiH KnanaH /Ann ynpaaneHHH nHeamaTHHecKlim npmeogom • • •

3nerrpoynpaBneHvie BaKyymHbimm KnanaHamvi c nHeBroaTvLiecKvim npvBogom • Hanpq>KeHoe min-am/is': 24B nocT. ToKa, 24B 50/60E14, 115B 50/601 - q, 230B 50/601- q Tvn: 3-x xon,oBoO, H3 .somnnerr noc -raBKA BK.moHaeT: KnanaH, B03,EtyLLJHb10 rnywwrenb, pacnpegeninTenbHaq Kopo6Ka, ynnoTHeHme, ureKep, K 60.11Tbl

I4H,qHKaTop nonoweHmn

OCHOBHbIE TEXHMLIECKME XAPAKTENICTI/K11 IlpHcoe,w4Hemie

ny, MM BHyTpeHHoe YTeHKL,I, m6ap n/c, He HapywHble yret-Ran, m6ap n/c, He MaKC. TemnepaTypa oKp. cpegbi, eC MV1H. Temneparypa op. cpeRbi, eC MaKC. TemnepaTypa HarpeBa, eC MaTepinan Kopnyca MaTepvian mem6paHbi KarlbLieBble ynnoTHeHvici

KF16

KF25

KF40

KF50

50 < 10-9 < 10-9 60 (100% Harpy3Ka KarywKii) 0 80 AlMgS11 Hep>KaBeioutas; cTanb HermaBelowasi cTanb FKM (Bvi -roH) 16

•

V1HpyiKa -rop nano>KeHmi nperAcTaBncter 1,13 ce6v repKoHoBoe pene c BcTpoeHHbIM cBeTonvorlom prnsi B1/13yallbH010 KOHTP0.1151 3neKTpwHecKoiii gnq flpegHa3HaHeH cvrHany13aqvun COCTOCIHOS=1 (oTKpbn-/3aKpbn- ) BaKyyMHbIX KnanaHoB npvi yCTaHOBKe cneqvanbHb10 BHeLLIFIV10 BXOP, KnanaHa KnanaHamvi c Elpv1meHcieTc9 C BaKyymHbimv arleKTp0MaiHkITHbIM 1,4 nHeBmaToHecKvm npviBogtom C BCTpOeHHbIM Mal- FIV1TOM HOMI4HaflbH0e HanpmKeHme noTaHwq 24 B nOCT TOKa

DAN FOSS BAKYYMHbIE KilArlAHbl C 3I1EKTPOMArlitiTHb1M TIPPIBOAOM • •

• •

BbicoKan Hage)KHOCTb >5 MJ1H.1.1,11K110B H1,13KaA noTpe6nsema5 MOLLAHOCTb <300/8 BT HopmanbHo 3aKpb1Tb10 N OTKpb1TbIVI Bapplawrbi, KarywKa 3ameHse -rcs -6e3 pa36opKvi KnanaHa, BcTpoeman cOyHKL11,151 ynpaBnemin CkliHaflOM 9 - 30B, pa6oTaiou4an KaK C NPN TaK M C PNP cywHanamm, LITO MO>KeT 6b1Tb PIC110.11b30BaHO R1151 npsmoro ynpaBneffins

•

HeLlyBCTBLITellbHOCTb K nageHMIO Hanpswei-mg

• •

Bc-rpoeHHan namn-rb Bo3Bpau.4aer KnanaH B vicxogHoe COCTOSIHMe nocne nponagaHmn nm -raHpin 25 - 50 YHmKanbHan naTewroBaHHan cinc -rema cepBonpmBoga gnn KnanaHoB C pa3mep0B no 3aKa3y B03MOWHa yCTaHOBKa sHgviKaTopa nonowewn

•

VV213B 16

Tin KnanaHa

VV243B 50

40 50 1,2 2 OT 10-8 M6ap go 3 6ap (a6c.) 200 200 100 200 200 200 70 14,5 49,5 20,2 25,7 7,2 cepeo cepeo cepeo BN (Knacc 3aL111111,1 IP 65) 115B Hn14230 B nepemeHHoro roKa 300 8

25 1 4 or 10-8 M6ap go 5 6ap (a6c.)

MaKC. nepenag gaeneHms B HanpaeneHmi 3aKpbn - HH, 6ap Patio ii gmana3oH gaeneHHO Bpems 3aKpbrrms, MC

100

200 5,5 3,4 npsmoci

Bpems OTKpb1T1151, MC MoneKynspHas nponycKHas cnoco6Hocrb yrnoeux KnanaHoe, n/c MoneKynspHas nponycKHas C110C06HOCTbIll4H61HbIX KnanaHoe, n/c flpinHumn geincrems Tin Karywnl HanpsweHme nwraHms Karywm floTpeSn1eMai MOLLAHOCTb, BT nycKoBaH ygemmeatow,as MaKcHmanbHaH Hacrora cpa6arbleaHHH y111(11013 B Llac YnpaensFouoici cHrHan

VV243B 40

VV243B 25

AY, mm

360 9 - 30B110CTOAHH010 TOKa, 15 MA 0 - 4B flOCTOAHH010 TOKa repKoHoeoe pene

aKT1113HbliA

naccineHbii4 14HgtiKarop nom:mei-4ns

BAKYYMHbIE KTIAllAHbl C 11HEBMATMECKIIIM 11P11130/10M •

BbICOKaA HagewHocm >5 MJ1H. LtliK110B

• •

Bm3yanbHoe onpegenewe nonmemin Mai-me-rHoe ynnomeHme npliBogia

•

BeCWOBHIAVI C1,111bCPOH

•

0111.41,10HHO - ycTaHoaKa viHrwaTopa nonoweHvin (C repKOHOBbIM pene) M ynpaanniomero 3.11eKTp0MaIHMTH010 KnanaHa

IlHeBm8Tv4ecKm0 npviBog, npnmoro ger/lc -I- m/1n 111111 C ynpaBneHmem OT 3nerrp0ma1-wn- Horo KnanaHa VV213P 16

Tian KnanaHa Ay, MM MaKC. nepenag gaeneHms B HanpaeneHHH 3aKpbrrms, 6ap MaKC. nepenag gaeneHms B HanpaBneHmi orKpbrrms, 6ap Pa6o4inci gmana3oH gam-lei-1HO

16 4 2 OT 10-8

VV213P 25

BpeM513aKO61 -11,151, MC

100

BpeMA OTKpb1TWA, MC

200

100 200

5,5 3,4

14,5 7,2

Ynpaensiowee Hanpsweive, 6ap MoneKynspHas nponycKHas Crl0006HOCTb y1110BbIX KnanaHoe, n/c MoneKynspHas nponycKHas C110C06HOCTb nwHeiiiibix KnanaHoe, n/c 1-1pHcoegmeHme ynpaensiowero gam -lei-1ms MarepHan ynnorHeHmii V1HgvKarop110.110N<B1-11,131 cramapTHO

M5 xis

BbICOKaB HagewHoci- b >100 000141/W10B 311.1114 5 cpmcfripobaHHbix nono)KeHm6

•

BeCWOBHIDIVIC1/11bC130H

Wary OTKOIDITI4A, %

77 28,2

B03,EWWHbIX WflaHrOBbIX CIDPITI41-110B

B11,0,11MbIll

repKoHoeoe pene (CM. CTp. 11)

Tin KnanaHa 16 Ay, MM MaKC. nepenag ga13.11e1-114FIB HanpaeneHHH 3aKpbrrms, 6ap 4 MaKc. nepenag gaeneHHH B Hanpaenernim OTKpbIT1151, 6ap 2 Pa6oHmiA gwana3oH RaBnemici MoneKynspHas nponycKHas C110C06HOCTb ymoebix KnanaHoe, n/c MoneKynspHas nponycKHas CrIOCO6HOCTb1114HeriHbIX KnanaHoe, n/c Hage*Hocrb MarepHan ynnorHeHi4H"

49,5 20,2 FKM (eHroH)

BAKYYMHbIE KflArIAHbl C PYLIHbIM •

VV213P 50

50 40 2 2 2 1.2 or 10-8 m6ap go 3 6ap (a6c.) 200 200 200 200 4-7

onwoHanbHo

•

VV213P 40

25 4 2 M6ap go 5 6ap (a6c.)

VV213H 16

npmBogom

VV213H 25

25 40 4 2 2 2 or 10-8 m6ap go 5 6ap (a6c.) 5,5 14,5 3,4 7,2 He meHee 100 000 LAPIKTIOB FKM (ewroH) 10, 20, 30, 50, 10, 20, 30, 50, 100 100

VV213H 40

VV213H 50

50 2 1.2 or 10-8 M6ap go 3 6ap (a6c.) 49,5 77 20,2 28,2

10, 50, 100

BAKYYM H bl E HEAOPOrtlE HALIENCHblE BAKYYMHbIE KllArlAHbl AKTAH AKTAH npegcTasnset- Heopporme BaxyymHbie KnanaHbt 3KOHOMIINHOL71 Ce131114. Hapsgy C HeBbicoxoci CTOVIMOCTb10 gaHHble xnanaHbi oanagaior BbICOKOlil Hage)KHOCTb10 (Hapa6o-rxa Ha OTKa3 — 1 500 000 141K110B OTKObITLIA/3aKpb11 - 11A), wmpoxoin 1114Her/IKOVI goc-rynHux pa3mepoB (Ay OT 16 go 250 MM) N pa3HEnmin Tmnamm npmsogos. Bce KnanaHbl 1131-0Ta13.1114BalOTCA 1,13 BbICOKOKa4eCTBeHI-106 HepAaBelou.tein cranin (304 SS), mmeloT CliclbC1301-1H0e ynnoTHeHme WTOKa (cBapHble C11.111430Hbl 1131-0Taa1111BalOTCA 113 Hep)KaBelOWel%1 cranes AM350 piny 316 SS) H 3nacTomepHoe ynnoTHeHme cegna (Viton, Kalrez m T. n.). noc-ry nique ont.onm: • 14HgnaTop no3mt.mm (12-240 B nepemeHHoro TOKa, 12-24 B flOCTOAHH010 Toxa); • ConeHomg 110/220 B nepemeHHoro Toxa, 12/24 B 110CTOAHHOr0 roxa; • Pa3Hble maTepmanbi gFIFI cBapHoro cmnbcpoHa, y11.110THAIOLLte10 WTOK; • Pa3Hble maTepmanbi rtns 3nacTomepHoro KOrlbLia, ynnorHsFou.tero ceRno; • Pa3Hble 1- 1411b1clanaHuee mnin 6e3 1-11,1X (nog BapKy); • CneumanbHoe mcnormeHme g.1151 BbICOKOLIPICTbIX npmnoxemni,i, mcnonb3poLI4mx cEsepx ■-uncTue fa3b1 II T. 11.

XapaKTepNCTNKN BaK MHbIX KnanaHoe

AY, mm rlocTynHoe ricnonHeHme

YMOBOO, rlIDAMOTO4Hb11%1

100

160

200

250

YMOBOV1

tDnaHmea

KF, CF, 6e3 cl3naHLtel3

ISO, CF, 6e3 cl3namtee

lipmeog

PyinHoM, aneoponHel3marmtnecionin (nHemmo — OTKObITIle, npy)KmHa —3axpbm-me)

arleKTO0111-1eBMaTLILleCK146 ,41300H010 geVic-rsms — nHesmo OTKpbITL1e H 3axpbrrme

MaKcHmanbmzaci ypoeem, HaTeKamin, m6ap*.n/c

1)(10

-9

MaKcHmanbmkai nepenazi xtaenemiiii, 6ap Amana3oH pa6o4mx AaeneHmia, m6ap

-8 1x10 ...5000

BOBMA OTKObITHA/3aKpbITHR

100/200

KnanaHoe C Hem/Hi-lbw npmeoLlom, MC MaKcHmanbHan TemnepaTypa Harpeea Viton/Kalrez,

150/170

rtaeneHme B nmeemocHcTeme, 6ap Hapa6oTKa Ha OTKa3, LIHK.BOB OTKpb1T1151/3aKpb1THS1

4...5,5 1 500 000

Py4Hble 11pSIMOTO4Hble wapoebie Knanaiibi: RY OT 16 go 50 mm, clDnaHLIbi KF vinm 6e3 (PnaHLIel3; • n,pocTas HagewHas KOHCTOyKWIA gns 0113A3HbIXD npogecco3; Bucoxas npoBogmmocTb — r1011HOCTbK) OTKPb1T0e onTmtnecol npo3pa4Hoe • ceLneHme KnanaHa; g1ana3oH pa6o4inx gasnemm0 1x10 -6 ...6000 M6ap; •

•

11113KaA CTOI/IMOCTb;

• •

Pa36opHa1 KOHCTOyKIVIA o6nemaeT TexHintneme o6c.nywymaHme; VlgeanbHbi B Ka4ecT3e monmppowero KnanaHa cpopsaxyymHoro Hacoca. ABTOMaTINeCKNe OTCe4Hble KnanaHbi: •

•

flpocTal HagewHas KOHCTOyKLAVIA, OCHOBaHHaA Ha TOM, 4TO KnanaH 3axpbsaercs nog B03geinummem nepenaga gaBneHms — Korga nepenag CTaHOBMTCA cmnbHee, Hem npyxonHa — KnanaH 3axpbu3aeTcs. Ygo6Ho 11C110111330BaTb B KaLlecTse OTCe41-101-0 KnanaHa 43opsaxyymHoro Hacoca ( ecnH HeT Bc-rpoeHHoro) gns npegompaw,eHms nageHms gasneHms B Kamepe m npegoTBpaweHms B Hee nonagaHms macna; Wmpoxmin Bbi6op gmameTpol3 N cOnaHLIeB, pa36opHa1 KOHCTOyKLVIA, HeBbICOKaA CTOHMOCTb. 22

KOMT1OHEHTbl alELIMATIbHblE N 101H,4liBilaYAI1bHblE PEWEHMS1 NEOMA KomnaHm51 Neoma Ha ripoTsmeHinvi 6onee 20 neT 5113.11AeTCFI ogHvim V3 J114gepOB a3VaTckoro pbiHKa B odnacTvi cnewnaribHbix viHgvemgyanbHbix peweHVV. Cpegy flOCTOAHHbIX 3aKa34VKOB npogyKuvivi TaKyle 03BeCTHble KomnaHfrivi FInomm V KopeV KaK Jeol Active Co., Ltd., Ulvac, Samsung, LG Philips vi gpyrme. flpogyKumq KomnaH1414 Neoma xapaK -repv3yeTcci 6ecKomnpompiccHbim '<avec-mom V npvic-ranbHum aHinmaHmem KO 'Kam, gawe CdMbIM He3Ha414TellbHbIM n05KanaHwqm noTpe6mTensi.

J11O6bIE eaKyymHbie Kamepbi •

1,13

Hep)KaaekmAeil cTarni Ha 3aKa3:

eaKyymHbix KaMep, C110)Kable KOHCOrypaL11414 cambia 143FOTOB11CleMble no miginevigyanbHomy 3aKa3y — OT cpopaaKyymHbix caepxBbicoKoaaKyymHbix Kamep gflA BbICOKOTeXH0101- 144HbIX V Har-lHbIX npvino>KeHm0; bonbwoe K0.11144eCTB0 gocTynHbix ont.46 V gononHeHAO — CNCTeMbl Harpeaa/oxna>KgeHvisi, BaKyymHbie OKHa V gaepvi, flpOT04K14 eHy-rpvi CTeHOK Kamepum T. n.; Pa3Hble T1411b1 Hep>KaBeFouvx c-raneCi — 304 SS, 316 SS, AM 350 V T. n.; noeepxHoc-rei;i nanwpoaKa, ma-roBbie -11411b1 061Da60TKI4 Pa3Hble noaepxHoc-rm; OT gonef;i nvi -rpa Ky6ome-rpoe. flpV 3TOM fllo6ble pa3mepbi o6ecne4friaaim-c9 flOCTOCIHHbie BbICOKNe xapaK-rewc-rviKfrl nonyvaemoro BaKyyMa;

Flio6bie,

BaKyymHbie Kamepbi grIP

yCTaHOBOK

chfri3viKfri of a3mbi

BbicoKosaKyymHaq Kamepa qnA Hay4HbIX viccnegoaaH140

CneumanbHaH eaKyymHble KnanaHbl 14 apmaTypa

•

KnanaHbl, paccytn -raHHbie ogHoepemeHHo Ha eaKyymHbie 1436bITO4Hb1M14

•

I:panel-114qm

F11314.110>KeH149 V

•

KnanaHbl gnsi npvinoweHm0, rge Tpe6yKxrcsi cneumanbHbie xaparrepvicTvKin no Harpesa; Pa3Hble TI4r1b1 npvieogoe gnq KnanaHoB acex pa3mep0a — pytmbie, aneKTponHeema -rw-lecKvie, aneK -rpomexaHvNecKvie; 110BOIDOTHble 33TBOIDIDI Tvina Butterfly C pa3HbIMv Tvinamvi npvieoga; • Tpo0Hbie 3aKyymHbie KnanaHbl grIA peano3aLmin 6a1;inaccHoi;1 orKaLiKvi; • KnanaHbl AIN Mc11- K010)) c-rap-ra OTKa4K14. BO3MO)KHOCTV

•

Ha pa6oTy

fa30B;

BAKYYMHbIE KAMEPbI CBEPXBbICOKOBAKYYMHbIE KAMEPbI (10PPI3OHTAJ1bHblE N KY5114ECKPIE) BaKyymHbie Kamepbi gaHHoVi cepmv pa3pa6oTaHbl Rn i HI/IX

BaKyyma Hvi>Ke 10 9 Topp ( MM. pT.

npvino>KeHocix, npegbFlansiFoLgox v my6vme BaKyyma. V31-0TOBIleHbl I/13

BbICOKVIe

Tpe6oBaHvg no

LIVICTOTe

gaHHOO

CepVIV

BaKyyMHble Kamepu

HepKaaeFoLgeVi

CO3ABHI/IFI B

CT.). ViC110.11b3y1-0TCA B

CT8.111/1 V VIMBFOT

meTannmHecKoe

ynnoTHeHvie gaepvi.

gng

gaHHOO

g011011H14TellbHbIX

Kamepu flOOTOB C

peKomeHgye -mq

1/1310TOBIleHOB

cpnaHLtamvi ConFlat.

BbICOKOBAKYYMHbIE KAMEPbI BbICOKOBBKyyMHble

Kamepu cepmo AC-VHE

(ropvi3oHTanbHble)

5=1B119K)TCF1 OrtHI/IMVI I/13

(BBOTVIKarlbHble) w

Havi6onee

cepvm AC-HHE

3KOHOMVI4HbIX

Kamep Ha

pbIHKe. l/1cn0nb3yForcq wig npono)KeHmiii oagero xapaKTepa, Tpe6yKpumx co3gaHme BaKyyma nopFigKa in .- 7 caepxcKopoc-rHoVi CTpyeH menmx Sanaa goporve

10 6 TOW. CTB1-1K1/1

CTBK.115:1HHbIX

10p1/130HTBIlbHble

Kamepu

110.11V1p0BaHbl

wapviKoa.

BaKyymHbie Kamepbr cepovi AC-HHS npegHa3Ha4eHbi

p115,1

co3gaHOSI BaKyyma 1X1 8

Topp.

aaKyymHble

Ky6w4ecKve Kamepu

cepvm AC-CHS vimeroT KOHKypeHTOC110C06HyFO

LAeHy, npegnoLrro -renbHbi BO MH011/IX

npvino>KeHosix

CLIeT BO3M0>KHOCTO

6onee ygo6Horo pacnonoweHosi o6pa6a -rboaembix geTaneV V1fV1 ma -repvanoa aHy-rpvi Ky6oHecKoro npocTpaHc -raa.

Bb111011HeHbl V13

HepKaaeFoigeVi c -ranv.

ElpegHa3Ha4eHbi gnsi co3gaHvici BaKyyma nopqgKa 1 0 -7 - 1 0 -8 Topp.

00PBAKYYMHblE KAMEPbI

Mbl

TaloKe floc-mans:2m Kamepu Ha gvana3oH go 1...10 -3 Topp,

oinoHgvipLiecKve ( aep -rviKanbHble me-rannyHecKoV

KObILIJKOV Vl

MTV 10p1/130HTBIlbHble), C

npo3pa4Humo c -reHKamo

me-rannoyecKomv c-reHKamo N np03pa4m00

KpbILLIKOV,

1/1.111/1 C

Ky6o4ecKvie.

BAKYYMHblE KOMnoHEHTbl BAKYYMHblE OKHA, /413EP14 N KOM1110HEHTb1 143 CTEKTIA MDC VACUUM AKTAH npeacTaermeT wmpoKvV) cnerrp

KOM110HeHTOB

eaKyymvibix cvic-rem 143 cTeKna, eaKyymHble OKHa w geepvi pa3.11W4FIbIX

paamepoe 14 T1411013.

Onatnibi C eaKyymEnAmm oKriamm: •

OKHa, 14310TOBJleHHble 143 60P0C141114KaTHOM CTeKrla

(Pyrex), keapqa,

canctwpa; •

•

PaaHble T14116114 paamepu clinaFwee — CF, pmameTpamvi yallOBH01-0 KF, ISO C npoxopa OT 16 go 500 MM; BO3M0>KHOCTb nDorpeea go 450°C vi oxnaKgeHmsR p0 -200°C;

E•bicTpopamemHble gBeplI C eaKyymHbuni OKHarolli: • (1).navaAbi o -r CF40 p0 CF320; • BO3MOWHOCTb nporpeea go 150°C; mexa-mam 1103B0.11BeT flerKC w 6b1CTp0 • BIDICTOOpa3beMHblii1 OTKpb1BaTb/3aKpb1BaTb peepb.

KOMr1OHOHTbl 113 cTeKna:

• • •

Cneumanbi-ible y3f1b1 griq npvcoegvii-revivq CTBKIWIHHbIX KOM1-10HeHT0B BaKyymHbix cmc -rem K me-rammyecKom eakyymHum -rparram; PaaHbie evgbi w paamepu ciDnaHLtee — KF, ISO, CF C gviame -rpamm yarlOBH010 npoxopa OT 16 go 100 MM; flytAwee pewevioq grip yCTaHOBOK, rpe Tpe6yeTcc oi-Kayka CTeKTIAHHbIX nanom-e0 c nocnegyrow0 vix o-rnakoi%i — oHcppaKpacHbie CeHCopbI, npv60pu HOLIHOM evigeFivm w T. rl.

BAKYYMHA51 APMATYPA

AKTAH nocTaermeT BaKyymHble KOM110HeHTbl amepviKaHcKoci KomnaHvivi MDC Vacuum: ctinaHubi Bcex cTaHgapToB (ISO, Klamp Flange 6bicTpopa3bemHbie coegvmeHmR, ConFlat — no megHylo npoKnagq), nepexogHmi C ogHoro pa3mepa Ha gpyroi;i pa3mep, nepexogHoKvi C OgH01-0 cTaHgapTa Ha gpyroVi, 3arnywKvi, X0MyTbl, Tp0HHHK111, KpecTbi, BaKyymHbie KoneHa, C1/111bCOOHbl, ynaBrimBaTenvi napoB macna (nporpeBaeMble, pa36opHbie, Hepa36opHbie), BaKyymHble OKHa (CO creKnom, KBapuem, canampom), repmoBBogbi (3neKTpvi4ecKme BBOgbl: viHurpymeHranbHbie MHOFOLLITblObKOBble, KOaKCHallbHble (Anq BbICOKOHaCTOTH010

Hanpq>KeHmq), C1/1.11bHOTOLIHble (B TOM Hvicne C BOggHbIM oxna)K.geHvem), BbICOKOIO HanpsweHmq (go geCATKOB KB), BBORbI g.I1A nogaLivi )KvigKocTe0, fa30B, wvigKoro a3OTa B BaKyymHpo KaMepy, BBOabl gBvpKeHvici (FIMHBHHble, Bpau4aTenbHble, Kom6v1HwpoBaHHbie). Af1CI 1-10CT0OBHIASI pa3HeceHHbix B npocTpaHcTBe Ha 60/1bLIJNe paccTopiHm53 BaKyymHbix cvicTem Mb! nocTaBom Tpy6bi N3 HepKaBeEoLue0 CTa1114 pa3mepom OT 1/4 g0 10 gE01-4MOB (mviHvimanbHaq gnviHa 30 cm). Tpy6bi vimefoT 3neKTpoxymvi4ecKpo nonvipoBKy BHyTpeHHeiA noBepxHocTvi N vigeanbHo nogoOgyr griq MOHTaKa BbICOKOBaKyyMHbIX cm-rem. [1.1151 nourpoeHvisi cpopBaKyymHbix cvicTem Mbl nocTaBom apmvpoBaHHbie meTannwHecKoci npy>KviHoiA EIBX wroHm. EC111/1 6[0g)KeT griq co3gaHvm BaKyymHoVi cvicTembl He no3BonfleT 1-1131406peCTI/1 KOMnneicrpowyte moxem npegno>KviTb npoBepeHHble, amepmKaHcKmx vinv eBponeOcKvix npovi3BogyTenei4, Mbl KaHecTBeHHbie KOMI1OHBHTbI gnq nom- poem/15i BaKyymHbix cmcrem a3viaTcKvix npovi3Bogwrene0. B 3TOM cny.ae 14eHbl Ha cl3naHubi, C1411140Hbl, KnanaHbl, BaKyymHbie OKHa N gpyrvie BaKyymHbie KOM110HeHTb1 6yRyT gewesne 6onee Hem Ha 30%. BaKyymHbie KOM110HeHTbl SIB115110TCF1 KJ1KNeBbIM arleMeHTOM RJ1A flOCTpOeHHFI HagewHoi;i H KaHecTBeHHoVi BaKyymHoi;i CVICTeMbl , OT na6opaTopHbix yCTaHOBOK HCC.FlegOBaH1/19 HacTviu go npombiumeHHbix BaKyymHbix Hallb1.1114TellbHbIX yCTaHOBOK. lipegenbHuVi BaKyyM, nonyHaembh) B TaKHX ycTaHoBKax, onpegen5ReTcq KaKgbIM 311eMeHTOM, BX0AcILL4HM B AX cocTaB: OT pe314H0B010 01114 megHoro yr1TIOTHMTe1151 RO CBepXCJ10)KHbIX Kamep npegBapyTenbHo0 3arpy3Kvi AIM BbICOKOBaKyyMHbIX 3aTBOPOB C B0g,C1Hb1M oxna>KgeHmem. BbICOKOKaLleCTBeHHble

06pau.00 -recb, m Mbl Haingem on -rwmanbiloe peweHme gnn BaweVI 3aga4vi.

BAKYYMHbIE BBOAbl Komnal-wm Solid Sealing Technology Limeer 6onee Hem 100-neTHmin onbrr npoinalogurBa KepammHecKmx merannoKepammHecKmx monciropoB 14 npom3B0glir nonHblin cnerrp BaKyymHbix BBOROB. Solid Sealing Technology HTO HapFigy C BbICOMMIll TexHiiHeciunmin KaHecrBo npogyKumm, HaLe)KHOCTb lel o6ecne4mBaer BbicoHainwLie aKcnnyaTau,moHHbimli xaparrepmcniKamm 1103B0.11FleT 3aHl/MaTb nLiginpyioame n03mwit4 Ha mmpoBom pbIHKe B TaKI1X o6nacrsix KaK: ElanynpoBo,4Ht4KoBoe N aHanwrminecKoe o6opygoBaHme; • • HaHeceHme TOHKVIX nneHoK; Elp0MbILLIFIeHHbie na3epbl; • • CI,ICTeMbl pagliaLAWOHHOM KOHTPOTISI N 6e3onacHocrm; PeHrreHoBcKme CIACTeMbl BbICOKOVI MOLLAHOCTI4; • MegmumHcKoe o6opygoBaHme; • •

HaHOTeXH0110111111;

•

ABIllaW4OHHblellKocmm4ecKLie cmcrembi;

•

3Hepremp4ecKme CliCTeMbl BbICOKOTeXH0.1101114eCK14e cBepxnporitogRuAme ycraHoBKL4 nepegaHm 3Heprinm, cmc -rembi C 3K0.11011/14eCKIll 4leICTb1M11 aflbTePHaTI4BHb1M1/1 14CTOHHMKaM14 3Heprini1, anermoaHeprennKa Ha OCHOBe mmKpo- N MHI-111TO11.111,1BHUX alleMeHTOB;

• •

TeneKommyHmKawm; 41:43i4Ka BbICOKV1X 3HeP1161. pa3pa6oTKL4 N TexHonormi4 Solid Sealing Technology npom3B0gwrb BeCb cnerrp coBpemeHHbix BaKyymHbix repmerLigHbix BBOROB, ygOBJleTB0pRKAWX cambim WeCTKVIM rpe6oBaHmsm K yCf1013L151M aKcnnyaTaumm: Amana3oH pa6o4mx remneparyp OT 4 go 723 K (-269 — 450 C); • • Hanpsmemisl — CBblWe 200 KB; 3nerrpm4ecKme TOK14 — CBblWe 1000 A; • B03MOWHOCTbliC11011630BaHlifl HeMailiVITHbIX marepmanoB; • BbICOK11X • BO3M0>KHOCTb pa6orbi npin CBePXBbICOKOM BaKyyme N gaBneHm9x.

YHIIKaflbHble BO3B0.11HIOT

Komnavivm AKTAH B KparHainwme CPOK1,1 N 110 BblrOgHbIM ugHam nom-am-icier Becb cneap npogyntmm Solid Sealing Technology: • BaKyymHbie MylibTLIKOHTaKTHble 3nermm4ecK41e BBOgbl ( B TOM Hmcne BbICOKOHaCTOTHble ) N COBAMHVITe.1114 — Hanp9>KeHm9 cgo 30 KB, TOKIel go 1000 A, gmana3oH pa6oHmx gaBneHmM OT 10 1 TOPP go 240 aTM, gmana30H pa6o4mx TemnepaTyp OT -269 go 450 C, go 12 KOHTaKTOB Ha ogHom BBoge m go 50 — Ha coegmmiTene, nto6bie T1,11161113naHLteB N npmcoegmineHm0. • BbICOKOBallbTHble 1,13011FITOPb1 — HanpmKeHL451 go 65 KB ( no cneLmanbHomy 3aKa3y — CBblWe 200 KB), gmana3oH pa6o4L4x gaBneHL4M OT 10 10 ropp go 70 aTM, gmana3oH pa6o4mx Temneparyp OT -269 go 450 C, mo6bie T1411bIclinaHues m npLicoegmHeHL4M. • KoaKcmanbHble anerrpmyecKme BBOgbl — HanpmKeHt4si go 20 KB 110CTOAHH010 TOKa, TOK1/1g0 16,5 A, gmana3oH pa6oHmx gaBneiniiin OT 10 10 Topp go 270 aTM, gmana3oH pa6oHmx remneparyp OT -269 go 450 C, nio6bie TNnbI cianaHLteB npmcoegmHeHmin. • TepmonapHbie BBOgbl Pa3HbIX rinnoB: T (Megb-KOHCTaHTaHOBble), K (xpomenb-aniomeneBbie), J (WeJle30-KOHCTaHTaHOBble), R/S (nnarL4Hopogmin- nnarinHoBbie), C (Bonbcppam-peHmeBbi q E (xpomenbKOHCTaHTaHOBble) — gmana3oH pa6oHmx gaBfleF1161 OT 10 Topp go 240 arm, gmana3oH pa6o4mx remneparyp or -269 go 450 C, go 5 nap KOHTaKTOB Ha ogHom BB0Re, ni06bie TNnbi cpnaHupB LI npincoegmHeHmin. • KpmcrannmHecKine ceHcopu — gmana3oH pa6o4mx remneparyp or -25 go 205 C, moue T11111,1c1DnaHt.tee m npmcoegmHeHmin. • nepwarenin - gmana3oH pa6o4mx gaBneHmii OT 10-10 Topg13aM,mnH pa6o4mx Temneparyp OT 25 go 205 C. • BBORIDI >KligKOCTI4 — ginana3oH pa6oHinx gaBneHm0 OT 10 - 10 Topp ,4o 350 aTM, gmana3oH pa6oHmx remneparyp OT -200 go 450 C, coegmHemisi gn9 noriBoga >KLigKoc -rm — Tpy6Ka 1/4"(go 2 wryK Ha ogHom BBoge), Swagelok mrim VCR, nio6bie TNnbl cOnaHL4eB14 npLicoegmHeiniii71. • 110J1HbIcl cnerrp BCeX Heo6xogimmbix aKceccyapoB Ka6enm, coegLiHmTenm, pa3beMbl N T. n. 27

HAIL bill liTEJlbH bl E YCTAHOBKM HACTOJ1bHbIE BAYYMHbIE HAilb1/1101TEJ1bHblE YCTAHOBKII DESK IV BaKyymHaq yc -raHoma X0110gH010 pacnbineHvm DESK IV npeRHa3HaHeHa Ansi HanbineHmq TOHKAX ToKonpoBogqi_umx cnoea Ha o6pa3ubi nepeg vx mccnegoBaHmem Ha pacTpoBbix 3lleKTp0HHbIX MviKpocKonax, npegBapvirenbHoVI OLIVCTKOLA noaepxHoc-rvi C 110M01.11bK) TpaaneHvq. OCHOBb1BaC1Cb 6onee Hem Ha 40 nemem onbrre, KomnaHmq Denton Vacuum npov3Bogm -r HaCT011bHble ( 3aHmmaemaA nnoLuagb 65x45 CM) BaKyymHbie Hallb1.1114TallbHble yCTaHOBK14 AJ1 HanbineHmq o6pa3uo6 nepeg mccnegoBaHmem Ha cKaHoppoLuem 141114 npocaeHvBaEoLgem 3.fleKTIDOHHOM mviKpocKone. 11011HOCTb10 aB-roma-mHecKve, OLleHb Hage*Hbie H yg06Hbie B pa6oTe, gaHHbie Hanbinv -renbHble yCTaHOBKI/1 mcn0nb3yF0 -rcq BO MH01- 14X HayyHbix na6oparopvisix BO 'Kam mvpe. YCTaHOBKa 3a 3 MVH. o6ecneHvBaeT HanbineHme npoBoggLuero cnoci TOTIL1414H0i4 100A, vmeFoLuero meriKo3epHvicTyK) CTpyKTypy. YnyHweHHa51 KoHurpyKym54 marHerpoHa, coegmHeHHaq C 3ana -reHToBaHHoCi aHORHOC;1 CeTKOA, npego-rapaLuaer 6om6aprImpoaKy aneKTpoHamm o6pa3L4a, 6naroRapi HeMy goc-rmrae-rcsi geACT814TellbH0 qxonogHoe» pacnbineHme.

KpaTKoe ornicamie yCTaHOBKV1. BaKyymHbiVi Hac0C, ynpaansiroLuaq anerrpoHma, ga -mviKm m BaKyymHbie KflarlaHbl — BCe 3T0 pacnonaraeTc9 BHy-rpvi Kopnyca ycraHoBKm. BaKyyMHai KaMepa H3 c-reKna vinyl HepwaBeioLueVi cranes C OTKaLIKOA Typ6omoneKyrisipHbim H3COCOM ( mogenb TSC). YCTaHOBKa cHa6>KeHa aBTOMaTHHeCKHM KnanaHom HanycKa armoccPepb1, cocToqHme KOTOPOIO (OTKpbIT 14.1114 3aKpbIT) 3aBl4C14T OT COCTOFIHVM cpopBaKyymHoro Hacoca (BK.1110 1-1eH A.1114 BbIKTIFOLleH). B Kamepe vimeeTcq perynopyembi'M no BbICOTe CT0.1114K AfA KpenneHAq o6pa3uoa. ,{1,0110.11H14TeflbH0 MO>KeT flOCTaBIWITbCq C BO3M0>KHOCTb10 BpatileHvici H HaK110Ha. PyLlHaA 3aCTIOHKa ycTaHaBrimBae-rc9 C 1.1ellbF0 3aL1114Tbl KaTOga OT 3arp5:13HeHmq BO Bpemq 0414CTKI4 o6pa3ua C 110MOLgbF0 TpaBneHmq. B03M0>KHOCTb TpaBneHmq 14 BpauleHmq nogno>KKogep>KaTenq mmeKxrcq He BO BCeX yCTaHOBKaX 14 g0110.11FINTellbH0 o6roBapvBa10rcs--1 BO BpeMA 3aKa3a. Elporpammvpyembli;i .normHecKviVi KoH -rponnep yripaansier aB-roma-rvHecKoV pa6o-roVi. cmc-rembi . CeHcopHbIL gvicnneVi H rpacpvHecKoe nporpammHoe o6ecneHeHme cgenaFoT pa6oTy c yc-raHoBKoVi nerKoVi 14 111314c1THOO. KoHcOmpypaqpiR BaKyymHbux HanurniTenbribix yCTaHOBOK DESK IV DESK IV

DESK IV XLS

DESK IV TSC

Kamepa 143 creKna 015cm Pacnbinsier gparoueHHbie me -rannbi He Tpe6yeT nogaw ra3a

KaMepa v3 CTeKna 025CM Pacnbincier gparoueHHbie me -rannbi He Tpe6yeT nogaHo ra3a 15 vinvi 20 cm nogno>KKogep>KaTenb

KaMepa H3 Hepx.c-ranv 015cm C OKHOM PacnbinqeT BCe me-rannbr Tpe6yeTcsi nogaya ra3a Typ6omoneKy.nqpHbi0 Hacoc

Onumm, KoTopbie moryT cogepKaTb Bce mogenv DESK IV: v3mepvrrenb WW1 HATO), BpaLgeHme, ogHoBpemeHHoe H3K110H H BpaLgeHme.

TO1lLgl4Hbl

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HACTOJ1bHbIE BAKYYMHbIE HAilb11111TEJ1bHblE YCTAHOBK101 DESK PRO marHeTpoHHoro pacnbineHmq HayHHbix 1.1erisix. OT.1114LIATellbH014 ee KOMIlaKTHOCTb, 3aHvmaemaq OCO6eHHOCTb10 yCTaHOBK1,4 F113.1151eTC51 nnow,agb coc -raansieT Bcero 79x80 CM. Pa6oTaer B aB -romaTvHecKom pewyme nog ynpaBneHmem nporpaMMbl, vimerou4e0 ygo6HbiO uBeTHo6 rpacpmyecKm0 vm -repcpei;ic. YCTaHOBKa MO>KeT 6bITb yKomnneKToBaHa 0gH14M 141114 glaymq marHeTpoHamv 05cm, Ko -ropbie 1114Ta1OTCCI OT 6noKa nvn-aHmg npqmoro TOKa RPM BbICOKOLlaCTOTH010 reHeparopa, a TaK>Ke Typ6omoneKyncipHbim HacocoM CO CKOpOCTE10 OTKaLIKO 65 11/C. 01114140HHO MO>KeT flOCTaBINTbC51 C n0110.11H1/1TellbHb1M14 marHm -ramm ,41151 pacnbineHvq cpeppomamv -mbix maTepvanoB. gnci npvtrio>KeHmin, Tpe6yrow4mx 6onbwoV1 OK0p0C-114 OTKaL1K14 napoa BO QbI, yc -raHoBKa npeRHa3HaHeHa

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DENTON VACUUM KomnaHmq Denton Vacuum pa3pa6arbieaeT M EIP0143BORMT Hallb11114TellbHble CVICTeMbl gnq HaHeceHmA CBerATOHKOX nneHoK meTannoa V P,14311eKTpMKOB. 4aHHble TeXH01101- 1414 V nriemn 1.111/100K0 14C1-1011b3yFOTCA 41-1S1 HayHi-ibix uene0 V BO MHOINX OTPaCflAX npombiumeHHocm: 011TM4eCKOM, nanynpoaogHmKoeo6, 3pM npov3aogcTae megvuvHcKmx m3genmi/i, gmcnneea, C011He4HbIX 6aTapev, P,J1FlynpoHHeHmq V ynyHtgeHmsi CBOMCTB 141-ICTPyMeHTOB. 11P14 npoinaogcTee CBepXTORKI4X nneHoK, TOnLLVHa KOTOpbIX MO>KeT 6bITb ecero HeCK011bK0 aTomHbIX cnoeB, Heo6xogmmo go6vaa -rbcq MX 04eHb BbICOKOV 414CTOTbl, 4TO Tpe6yeT npoaegeHmsi npoueccoe TepmidHecKoro 1/1CflapeH1451 B rry6oKom eaKyyme. ,Lt.11A nanyHeHmq CBOOCTB C 3apaHee 38,0,aHHb1M14 cao0c-reamm KomnaHvici Denton Vacuum npegnowyrr Han6onee nogxogsligmM npouecc V onTvmanbHpo yc -raHoaKy, -raK KaK c1131151eTC51 KomnaHme0 C 60.1lee Hem copoKanel- Hvm 011bIT010 B npovi3eogcTae eaKyymHbix Hailb11114TaflbHbIX cmc-rem.110Tpe6yeTC5=1 marHe-rpoHHoro mcnapeHvq, C nN BaM yCTaHOBKa gflA HaHeceHmci TOHKVX nneHoK C 110MOL14bK) pe314CTMBH010 MPH marHeTpoHHoro vicnapeHms" C gonanHmTenbHo0 o6pa6o-i- Ko0 140-1011630BaHMeM 3lleKTPOHHO-Py4eB010 VICHap141 -efl5=1 11.1114 110BepXHOCTI4 VOHHbIM nyHKom, Kom6mHvpoaaHHa1 YCTaHCBKa C HeCK0116104M14 Tmnamv mcnapeHmsi (pacnbineHmq), 06parvn -ecb K Ham V HawV cneumanmeTbi COBMeCTHO co cneuvanmci-amm KomnaHmm Denton Vacuum npegnowar HagewHyie BaKyymHyic Hanbinv-renbHyro yCTaHOBKy C allP0614P0BaHHOO TexHonorme0.

INTEGRITY® - YCTAHOBKA BAKYYMH0r0 HAHECEHMA TOHKI4X IMEHOK 3/1EKTPOHHO-11YLIEBbIM METOjOM g11510r1TilKil. YcTaHOBKa cepmv Integrity® siarmeTcsi clonarmaHom Arm HaHecei-mq on -rm4ecKm0 noKpbiTi40. Pa3Mep KaMep B 3TVX yCTaHOBKaX eapbmpyeTcsi OT 65 CM RO 2 M. flogaanqFoulee 60.11bLUMHCTBO BaKyymHbix Hallblf1MTeJlbHbIX cmc-rem cepvm Integrity® nom- am-mei- cc c ACTOHHIAKaM14 gclq HanbineHMA C accmc-rmpoaaHmem MOHHbIM nyyKom V onToyecKomm moHoTopamm, HTo n03i3onsgeT VX npmmeHm - b B cambix OTBeTCTBeHHbIX npvinowei-wx. MO>KeT TaK>Ke 6bITb nocTaaneHa C pe3IACTI4BHb1M mcnapeHmem L4.110 gil5=1 oca>K,n,eHinq TOHKVX nneHom meTogom PECVD. BaKyymHaq oi - KaHHaq cmc-rema nog6mpaercA, vcxogq V3 maTepmana nogno*Km, nocTa3neHHblx 3aga4 Tpe60BaHm0 K KoHeHHomy npogyKry, KOTOPEDle, eCTeCTBeHHO, 01 -11144Hbl OT Tpe6oBaHvi0 rip c-raHgap-rHo0 eaKyymHo0 meTannv3auvm. BbICOK14e Tpe6oBaHmq K KoHeHHomy npogyKTy BbIg131/11-aFOT BbICOKL4e Tpe6oBaHvci K ypOBHEO ae -romaTv3aumm. TvrivHFibie npmno>KeHmp gnsi gaHH014 YCTaHOBKV1: npoTmaooTpa>KaFoupie noKpbiTmci, COMPbT0b1 C y3Kvm nponycKaHmem cneKTpa, cneumanbHbie oTpa>KaEoulve 110KpbIT14ft 3epKana C Kopperrvp0aKo6 cneKTpa o-rpa>KeHH010 ceeTa.

BAKYYMHAA YCTAHOBKA PE311CTIIBH0r0 HArlbIJ1EHMA CEPP111 DV-502B HanbineHmq cepmv DV-502B ABIlMOTC5=1 HOBOM, ynyHtneHHoM Bepcve0 xopowo 3apeKomeHgoaaatgeM. yCTaHOBOK DV-502. C 1964 roga TbIC51414 gaHHbix yCTaHOBOK V1HCTarlf1V1p0BaHbl Bce6si yHmaepcm -re-rax M vccnegoaaTenbcKmx 1.4eHTpax no acemy MVpy. V1cnonb3yEou.taqcsi B cepmm DV-502B coepemeHHaq 3neKTpoHVKa, yny4LueHHas=1 BaKyymHaA cxema M coapemeHHbie BaKyymHbie KOMPOHeHTbl BenyLLAAX MVPOBbIX 1 -100V13B0P,14TelleM 06ecne4maai-o-r 6bicTpyie M HeORHOKPaTHY10 OTKaLiKy OT aTmocciDepu AO BbICOK01-0 eaKyyma. B 4vicT00 V o6e3ra>KeHHoM BaKyyMHOc1 :3 c-r e m e npv 14C110.11630BaHV1V1KonnaKa gvameTpom 30 CM 14 BbICOTOM 30 CM oTKayKa RO ga13.11BH1/1q 10 4 TOpp npoincxogyT 3a 3 MVH, g0 AaerieHvisi 2 x10 5 Topp — 3a 4-5 MVHyT. ECIll4 BaKyymHaq cmcrema noRgep)KmaaeTcsi B HACTOM COCTOFIH1414 V garl>l<Hb1M o6pa3om aKcnnyaTmpyeTcA 06cny>KmeaeTcci, HVIKaKMX 3aMeTHbIX 3arpp3HeHmM BO apemq HarlblfleHL45:1 He o6pa3yeTcq. bnoK nvTaHmq pe3fricTmaHoro 14CT04HL4Ka vicnapeHm3 MOLL4HOCTIDI-0 1 KBA 1103BOTIAeT mcnapwrb 60.11bLIJI4HCTBO maTepvanoa, mcnanb3yembix Ant 110,BIOTOBK14 o6pa3uoe g.n9 aneKTPOHHOO MIAKOON0111414, eKnioHasi yrnepog, 30110TO, CnnaB 3onoTo-nannagmiA, nnamHy V 7A ., a Tame pyre maTepvanbi, mcnonb3yembie gnsi meTannv3aumm, onTmHecKmx nOKpbITMLI V gpyrmx npm.no)KeHmiii. B Hallblf1V1TeflbHbIX yCTaHOBKaX cepviv DV502B CTOSIT rIPOV13133AL4TellbHble OTKaHHble cpegcTaa, goc -raToHHbie Ar1A peigeHmn 60.11bLIJI4HCTBa 3aga4, LA TO 1103B0.1151eT MM 3C.IX4eKTMBHO pa6OTaTb CO ecemv cTaHgapTHbimvi aKCeCCyapaMM Denton, aKnEoHasi KonnaK gmamerpom 35CM V BbICOTOM 45 CM. Onumv: • pyHHoe, C npm- maoeecom, VIM nHeamaToHecKoe nogHsiTve KonnaKa • ocHacTKa g.1151mcnapeHmi yrnepoga VIM C110MOLLAbK) HVTV HaKanvaaHmsi • moHm -rop griFi inmepeHmq TonLLW1Hbl Hanbirmemoro 011051 • 6.110K nv -raHvsi 1 KBA 0.110 2 KBA, C BO3M0>KHOCT610 nepeKmoHeHmci me>Kgy 14CTOHHIAKaM14 mcnapeHmq • apaulaembi0 lorwo>KKogepwaTenb • apatgeHme ncgno>KKogep>KaTensi no yrnom K ocv apatgeHmq • Typ6omoneKyns=ipHbiM HaCOC 11100143BOBVITellbHOCTb1e 210 n/c C BO3gyLLIHb1M oxna>KgeHviern • KonnaK 6onbuero pa3mepa YCTaHOBKV pe314CTI4BH010

1114HeMK14 Hailb1110TellbHbIX

•

Ha rpeB o6pa3la (noAno>Koi)

•

a30THag /10BYLLIKa

HAllbinliTE11bHblE YCTAHOBKII EXPLORER® — YHMBEPCA/lbHAFI ABTOMATVILIECKAA YCTAHOBKA BAKYYMH0r0 HAHECEHMA TOHKIIX IMEHOK METOLIAM11: ►

3neKTpoHHo-nyHeeoro Hcnapemisi

►

Pe3PICTIII3H010 HCnapeHHA

Po. MarHeTpoHHoro HanblrleH1111 ► ila3MOXPIM1/14eCK01-0 ocamcgemin 113 ra3oeori (PECVD) ► kloHHoro pacnbineHHH (Ion Plating) ► HanbineHHH C accmcmpoeamiem PIOHHbIM (Ion Assisted Deposition) oPa6oLlein nowagKoViD N cTabigap -mbim Bbl6opoM ,q1151 HayHHovicanegoBaTenbcKvix pa6oT B o6nac-rvi HaHeceHMA TOHK14X nneHoK BaKyymHbimin me-m/3,am) slansieTcci yCTaHOBKa Explorer®. gaHHaFi BaKyymHaq HanbinviTenbHaq yc -raHoBKa moweT 6b1Tb cKoHcOvirypopoBaHa g.11F1 Bcex BbiwenepeLananeHHbix me -rogoB HanbineHinci 141-114 14X pa3.11144HbIX Kom614Hawnin. YCTaHOBKa Explorer oTriviyaeTcp O-leHb BbICOKOC/1" Han1e*HOCTbK) 6bina pa3pa6oTaHa AFIA npoomogc-ma 1114.110THbIX o6pa3LloB npogynonvi V1 grici HayHHo-viccnegoBaTenbcKinx pa6oT B caMbix BbICOKOTeXH0f10114 1-1HbIX oTpaanqx npombiwneHHocTin: nonynpoBogHviKoBoO, on -rinHecKoin, a Tame grlA myyeinvici Tpin6anorinHecionx N gpyrox CBOiACTB noBepxHocTvi. B yCTaHOBKy Explorer mH -rerpinpoBaHa xopowo 3apeKomeHgoBaBwas) ce65) cocrema ynpaBneHinq, incnonb3powasicsi B BaKyymHbix HanbInVlTenbHblX yCTaHOBKaX Discovery 14 Integrityy, HO C ynytAweHHai COyHKLt140HanbHOCTbE0, npincywet) HayL1H0 pa6OTaM. Arm Bb1COKOBaKyyMHOL71 OTKa4K14 B 14CIlen0BaTbKM Harlbln14TeflbH0r4 ancTeme Explorer MO)KeT 14011011630BaTbCA KpinoBaKyymHuVi, TypbomoneKynslpHbiVi 14.111/1 gincl-.)0y3m0HHblin K 3agHei1 cTopoHe HaCOC, nogcoegmHqembie cHv13y vinvi BaKyymHoin Kamepbi. flOCTaBflgeMb1171 B CTaHnapTH0171 KoHc1Nrypaum (PopBaKyymbiblin MaCJ1SHb16 flnaCT141-14aT0 - 130TOpHbli;1 HaCOC mower 6bITb 3ameHeH Ha 6e3MaCTIRHIDIO cnvipanbHblin. CTeK11151HHID11%1 KOnflaK BX0n14T B cTaHgap -rHyKD KOMFIfleKTa1114K) yCTaHOBKI4, 0111.4140HHO MO>KeT 6bITb yCTaH013111eHa Kamepa 143 HepKaBe)owei) CTa111/1 winpinHoi) 35 CM ( BbICOTa onpegansieTcs OT incnonb3yembix CpenCTB OTKa4K14 Vl npinnowebivisi). pa6oLieVi Kamepe Vt yripaaruirowe0 cToinKe, goc -ryn K Bce y3Ilbl 14 KOM110HeHTb1 yCTaHOBK14 rpaMOTHO CMOHT14p0BaHb1 B ynpaBrisllowinm anemeH -ram yg06Hbirt, nporpammHoe o6ecneyeHme 14HTy141-14BHO noH5TrHoe 14 He Tpe6yeT HI4KaK14X cnewnanbHbix npegBapviTenbHbix 3HaH14171 110 pa6oTe c KomnbEcrepom. EnI4HCTBeHH0e, Han Hem oc-raeTcq nyMaTb occnegoBaTenio — Hag 3anaLlaM14 B 06/11aCTI4 HanblfleHl4F1 TOHK14X nneHoK, a BaKyymHaq Hallb1/11/1TenbHag ancTema Explorer 6yieT emy B 3TOM nyLiwinm 110MOLL1H14KOM!

BaKyymHasi HanbinwrenbHaq ycTaHoBKa Explorer® grim ... Baum( npoyeccoB! To6bi BaKyymHasi Hanbinin -renbHasi yCTaHOBKa 11011HOCTbF0 nOnX0/114.111a 1:1,119 6onbwoe K0f114 1-1eCTBO flOCTaBileHHbIX 3aga4, cywec -rByeT peweHinq KoHcpvirypau,viin V1 °non)) naHHOill Hallb11114TerlbH0i4 yCTaHOBK14. A1151 Bb160pa 011T14MallbH010 Bapviawra CB51>K14TeCb CO cneumanincramvi KomnaHvivi ACTAN. 3ananHeHHaq cpopma, KoToppo HONCHO cKaLiarb C Hawero cavTa, nomower BaM Vl Ham cgena-rb npaBinnbHbici Bbi6op Hanb11114TellbH0ii1 yCTaHOBK14. Bce Hallb1.1114TellbHble yCTaHOBKV1 Explorer nocTaansiEurcq C nporpammvipyembim KoKrponnepom (PLC), KOTOpb1c4 o6ecneyviBaer 110.11HOCT61-0 aBromannvecKoe ynpaaneHine cincTemo0, no3Bonsm 11p0143BOR14Tb BeCb 1.1,14K.11 OTKa4K14, HanbineHinq Vi KOHT00111A pocTa nneHK14 HawaTinem OTI,H0c4 KHOIIK14 Crap-r». HanbinvyrenbHaq yCTaHOBKa moweT nporpammHbim flOCTa13.11FITbC511 C o6ecneyeHmem ProcessPro, LITO swczonal no3BansieT ygo6Ho nporpamminpoBaTb L-4 orgenbHbie 3-ranbi HanbineHmq, o6ecne4inBaeT ynpaB.neHine N KoH -rponb npouecca HanbineHinsi no ce-rin, Vl npegnarae -r becHvicneHHoe MHO>KeCTBO onLonin npin \If' co3g8mnin o peLtenTa» HanbineHinsi. CBF13b BaKyymHoin Hanb11114TenbH0ii1 Cl4CTeMbl mogem B pexAme peanbHoro BpemeHin n03BonviT inH)KeHepam KomnaHvivi imp ripoin3Bogv1renq BmecTe C Bawl OTC.flen14Tb napame-rpbi pa6oTbi yCTaHOBKO V1 II = 1 . ‘pIrtrere 14 ',Tr 4J npegnowvirb B8M TexHin‘necKylo noggepwy.

DENTON VACUUM BaxyymHan HanbirwurenbHan ycTaHoma Explorer® ,141111 marHeTpoHHoro Hanbinemisi. Korga Bbl ebi6mpae-re eaKyymHyro MafHeTIDOHHP0 HanbinvrenbHy[o ycTaHomy Explorer KomnaHmo Denton, Bbl nonyHae-re gocTyn K orpomHomy OfIbITY MHOMX neT no VIC11011b30BaH141-0 TeXH0.110114V1 eaKyymHbIX 11P0143B0,1=1CTBy Hanbinemnp V MafHeTPOHHOF0 MafHeTPOHHbIX Hallblf1141-eflbHbIX yCTaHOBOK.

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criegpow,omo

ma -repvanamo: g14311eKTpl4K1/1 •

DENTON VACUUM VOYAGER® - YHMBEPCM1bHAS1 CPICTEMA W151 PECVD r1POLIECCOB YHmBepcanbHan yc -raHoBka nna3moxvmmyeckoro ocaxcgeHvin cepAm Voyager npegnaraer 6onbwiie BO3M0)KHOCTLI N rw6KOCTb gnn nonytieHvin TOHKI,IX 11.116HOK, rpm 3TOM npobecc npoxogvn- B Hinko-remnepaTypHom pexwime, a nneHka o6pa3yercn c BbICOKOVI cTeneHbio OHOpOHOCTM. Sacnyx(nBaiouvimm oco6oro BM/Mal-MA npekimmec-marAvi PECVD npouecca sanneTcsi TO, LiTo 1,1CTO4H1,1K Hanbinnemoro ma-repwana nparmLieckvi HeorpaHmeH, a Tame BO3MO)KHOCTb nonyLia-rb 3apaHee onpegeneHHoe 3Ha4eHme Haripn>keHmn B nneHke. Ilptinomenme: • pa3pa6oTka N AccnegoBaHvie PECVD npouecca • menkocepvii%1Hoe np0113B0gCTBO • HaHeceHAe orrroveckmx AHTepcbepeHLAmoHHbix nokpbn- friA gm3nekTpi/4eckmx crioeB • HaHeceHAe gns nponsogc-ma M3MC Vl nonynposogHmkosbix c-rpyrryp • HaileceHme ci3epx-membix nneHok: • anma3onogo6Hbie nnemon • HATpAg Tin-raHa • nonyLieHme amopcbHoro kperviHkin • nonyveHme nonmkpmc-rannw-ieckoro kpemilms YcTanoenennbie npoqeccbr • SiO, • SiN TiO2 • • DLC (Diamond Like Carbon) BO3MCMHble KoncOnrypaqmn:

• • • • • • • •

•

Typ6omonekyn1pHbiA Hacoc cnoco6HbiA pa6OTaTb B cpege arpeccvieHbix fa3013 BLI cmeigeHme Ha gogooxnaxcgaemom nognowkogepwaTene pa3Hble pa3OBble pacnpegenwrenbHbie CkICTeMbl ci3eOXTO4HbIcl eMKOCTHOcl Bakyymme -rp onumoHHo: 3arpy304Han Kamepa Ma1FIBTP0Hbl C 6nokamm nATaHvin HOHHbIII L1CTO4HVIK C 6nokamt1 nmTaHt4n anbTepHaTmsHbie ra3opacnpegenmTenbHbie cvicTembi , B TOM Limcne V1CTO4HVIK1,1 napoi3o0 cba3bi

Ygo6HbiA gocTyn

npoBegeHAR CepBI1CHbIX pa6oT

Ko3d4muyieHT orpaxceHmn nneHkA, nonyLieHHoi;i meTogom nna3moxI1mm4eckoro ocaxcgeHiv, 143meHne-rcn B Lumpokmx npegenax npv 113meHeHmm noga41,1 TexHonormLieckwx ra3OB

KoHd3Arypatvin BakyymHoVi pa6o4e0 kamepbi nna3moxinmv14eckoro peakTopa, nomonniotilas yCTal-10BOTb ilICTOLIHMK WOHOB N nogcoegmHATb 3arpy304Hylo KaMepy

rl11A3MEHHAR TEXHMKA PLASMART 11111A3MEHHASI CliCTEMA MINIPLASMA-ATMOS (PLASMART, KOREA) nna3MeHHoLl o6pa6orKfri noeepxHocry Cocrema nocraarmercp B na6oparopHom wcnanHeHviv ( moganb MINIPLASMA-ATMOS LAB) vino mroraanmaaercp nog 3aKa34mKa (mogenb MINIPLASMA-ATMOS CUSTOM). O6pa6oTKa noaepxHocro nnaameHHbIM pa3p5agom yRanieT 3arpi3HeHmq C noaepxHocrvi, aKrviampyer ee, LITO BO MHOI- VIX cnyHaqx KaLleCTBeHHbIM 06pa3om Ha pe3ynbrarbi TeXH0f101VI4BCKI4X npoimccoa, npoaogmmbix C noaepxmocrbio. ECTM Ha aawem np0w3aogcrae mcnonb3yercsi o6pa6orKa noaepxHocry, 06parwrecb K Hawom cneivanmcram C onocaHmem aawer4 3aga4m, vi no Baum rpe6or3aHvisi 6yger 1,1310TOBIleHa ycraHoaKa Flfla3MBHHOiii 06pa6orKvi noaepxHocro, vicn0nb3yq Koropm B CBOeM TeXH0.1101W4eCKOM npoLlecce, Bbl nanr-mre 3HB4VITeflbH0 6anee KaLtecraeHHHI) KOHBLIHblcl npogyKr.

IlapameTpbt pa3pnga yc-raHoemi MINIPLASMA-ATOS LAB nna3meHHoro pa3pnga

Tnetou.mii pa3psig

Tyn nna3meHHoro pa3psiga

Tnefouwill pa3png 10" -10 1z cm-3

nflOTHOCTb pa3pnga TemnepaTypa ra3a

< 250 C (npv nogaHe OT reHeparopa 300 BT) 200 x 10 x 5 / 100 x 25 x 5

06-bem

CnegincpviKaultisi cricTembi

nion-aHtie CI.ICTeMbI

MINIPLASMA-ATOS LAB 220 B, 50 1111V160 FLA

600 BT rpm 13.56 mal 300 BT at 13.56 MHz < 5 n/ MI1H < 2.511/MI4H

BLI reHepaTop flogaHa ra3a

Ar, He

flogasaembie ra3bl PeaKTPIBHble ra3b1 0

02, N2, CF4

Ronycrvimag winpfrma o6pa3qoa CKOpOCTb

nepmeutemn

MaKC. 200 MM / MaKC. 100 MM maKc. 200 MM/C / maKc. 100 MM/C

o6paata

Xog mexam43ma nepemeweHvig Pa3mepbr (MM)

X - 250 MM, OCb Z - 20 MM / X - 200 MM, OCb Z - 20 MM (pyHH) 11308001400/ 750 LI 800 LI 1400

OCb OCb

CI'ICTEMA AHAJ1113A 11,I1A3Mbl TIEHIMFOPOBCKI1M 30H/40M flapameTpbi N BO3MONCHOCTb 11X gmarHoc -mpoeamin B nna3me 11110THOCTb 10 8 ... 10 13 CM 3 TeMnepaTypa alleKTOOHOB < 10 eB

ElnaaaFou.Wi noreHqvan EloreHuman B nna3Me 110TOK VIOHOB

-250 ... +250 B gocrynHo gocrynHO

3nek-rmi4ecKHe napame -rpbi

Hanpq>KeHvie noraHosa HanpsDKeHme noraHvig 3oHga

220 B, 60 EL4 -50 .. +50 B MaKCVIMarlbHbli4 TOK 30HAB 25 MA gvana3oH nnaaaEowero noreHLmana -250 ... +250 B LUmpviHa nonocbi nponycKaHo925 KFLA aHanoroaoro corHana flapameTpbu gnH 4WICTKI1 TOK

HanpmKeHme Bpemsi LIVICTKV1

< 50 mA ... +125 B 0,1 ... 5 ceK Bonbr-amnepHaR xaparrepincrma pa3pqga

Pa3mepbi

Tvn Pa3mepbi, MM Bec

CraHgaprHbliA 19" 446 x 133 x 450 18 K1

3rleKTp0H1-1851 Temnepa -rypa

MaTepHanbi 3oHga DLP2000

oginH 1,13 miry napamerpoB. Koropbie 1103BOTIFIBT aHanvi3mp0a8rb DLP2000

(oKvicb aril-ow-1mq 99.8 %), 018" KpemHmeabi0 op,HoHanpaaneHHbiL) nepeKnEoHarenb,01" Bonbcppam, 00,5/1,0 MM, gnwHa 10/20 mm Kepanowa

AHAJ1113 CBOACTB nnA3mbi PLASMETREX, rEPMAHNS1 l/13mepwrenbHaci cHcTeMa Hercules Ansi LumepeHinsi CBOOCTB nna3Mbl HemegKoin KomnaHfrun Plasmetrex incn0nb3yeTcq Ansi c03naHtnq N oTnap,Kin nna3meHHoro o6opyflosaffinci, Hanpmep, cinc-rem TpasneHinq V1 nna3moxinmin4ecKoro ocaNKAeHvq, a Tame WA KOH -10011g napame-rpos nonynposogHtiKoro TeXH0110111HeCK010 06opygosaHinci V1fV1 HHblX 3aAa4, B KOTOpIDIX incn0nb3yeTcp By nna3meHHIA pa3pFig. Cinc -rema Hercules in3mepfle -r OCHOBHble napame-mbi nna3Mbl B pewinme peanbHoro spemeHin in He BHOC14T KaK14X-F11460 in3meHeHinin B nna3my vi3yLiaembici npouecc. Cinc-rema Hercules COCT014T 143 RaTt-ma (sing gaminKa noKa3aH Ha pincyHKe cripaea), BbICOKOCKOIDOCTH010 umcppoeoro npeo6pa3oeaTen5 Ansi KoHeepTaumn cmrHana OT gaTyinKa B Lunchooeoin C141- Hall ( BHeuJHVi1 stng n0Ka3aH Ha ci- paHinue caepxy cnpaaa), nporpammHoro o6ecneHeHinq Anq aHarm3a N sin3yanvi3aulny CincTema moHinTopinHra napameTpos nna3Mbl Hercules ocHosaHa Ha aHanv3e cnerrpa pe3oHaHcHoro camoso36pK,AeHinci 3nerrp0Hos nna3Mbl (Self Excited Electron Plasma Resonance Spectroscopy, SEERS) pni nna3Mbl 11143K01-0 gaeneHvici in Ha Me -rope NEED (Nonlinear Extended Electron Dynamics) Ansi cpegHinx nasneHviO. BbICOKOe epemeHHoe pa3petgeHme, 14C110.11b3yg anc-rema moHin -ropinHra napaMerpoB nna3Mbl Hercules o6ecneweaer cBepx6bicTpuin anropNTM aHanin3a paHHbIX. 1114K0B0e 3HaileHine BLI 143ny1eHinq t4.1114 HanpmKeFivie cmeLueHinsi in3mepFie -rui c FlOMOLLtbE0 eMKOCTH010 genvTenq Hanpq>KeHmq. Me-roAbi SEERS in NEED no3songioT onpegeninTb cpegtHine no o6 -bemy napame -rpbi nna3Mbl. moHTvipyeTcq Ha cTeHky KaMepbl, HI4KaK14X naTLIMK ,C1,0110.11HVITeJlbHbIX tn3meHeHfr1N B KOHCIpyKL114F0 kamepu BHOCVTb He Harp. OaKTyvecKin ceHcop BepeT ce6ci KaK LlaCTip CTeHbl, OH 3a3eMneH V1 TaK14M 06pa3OM He oKa3bisae-r B11149H14f1 Ha nna3meHHble nooLeccbi. CeHcop 143MepfleT TOrIbK0 But TOK, TaKVM o6pa3om oTcyTurayeT gpyryx BnNAHIne nonymepoa 14.1114 KaKI4X-.111460 1430.1114pyK)1.414X 11.116HOK Ha pe3yrIbTaT 143Mepehll4i4. gaHHble OT nan-unKa, yCTaHOBJleHHOM Ha cTeHKe saKyymHovi HanpqweHme me)mgy CTeHK01%1 Kamepbi N anerrpoAamin Kamepbi, nonagaicIT Ranbuie B Lncpposyi-o cincTemy Anci garyinKa meHee 100 MB. nocnegyrowein sin3yanin3awnin N aHanin3a

Hercules® PMX 500

Hercules® PMX 1000

Hercules® C 500

Hercules® C 1000

Hercules®

nr1OTHOCTb alleKTOOHOB

HeT

LlacToTa

CT0.11KHOBeHl4f4 311eKTp0HOB

ConpoTinsneHine nna3Mbl tilinpinHa npoc-rpaHc-raeHHoro 3apAp,a

N10

paccHeTHasi

paccHeTHaq

noc-r.

HeT

BLI TOK

V13mepeFne niva HanpsweHlisi

HeT

gunana3oH in3mepeHinfA n110THOCTb afleKTOOHOB

Llac-ro-ra CT011KHOBeHal alleKTOOHOB

SEERS NEED

LlacToTa Bo36y>KReH1453gwana3oH gaaneHmh: SEERS

NEED CVICTeMbl ToasneHinq

io9 -10"

109

107 — 5 x 10 9c-1

10 11 cm -3

10 7 — 5 x10 9c-1

OrWOHHO

onqmoHHo

HeT

10 - 35 MHz 10 - 70 MHz 10 - 35 MHz i

HeT

10 - 70 MHz

13.56 MHz

3aawcti1r oT Twna ra3a, reomeTpmvi peatcropa L4 BLI - M01.14HOCTI4 go 35 -la (250 MTOpp)

go 35 fla (250 MTOpp)

HeT

60 fla - 1 Kila (0.5 - 7.5 Topp)

HeT

60 fla - 1 Kfla (0.5 - 7.5 Topp)

RIE-, MERIE anc -rembi

RIE-, MERIE-cincTembf

TCP, ICP

Dual frequency

TCP, ICP

Dual frequency

CfricTembt cpegHero gaaneHmq g1151 nna3meHH01-0 Tpaenewsi

CliCTeMbl CVD

HDP

HDP 39

(PE) CVD

3J1EKTPOHHO - J1YLIEBblE lialAPVITEJ111 Pa3pa6oTaHHoe N npom3Bogqweecq B EepmaHinv KomnaHveL) FerroTec o6opygoBaHve Ann aneKTpoHHo-nyyeBoro HanbineHmq TOHK1/1X nneHoK B BaKyyme 03BeCTHO BO BceM mmpe N omeeT penyTaumv3 HagewHoro o6opygoBaHvisi , mcnonb3yemoro B cambix OTBeTCTBeHHbIX npmno>KeHoqx no nonyveHmo TOHKI4X 11.11eHOK: M3MC nonynpoBogHoKoBaci npombILLIfleHHOCTb, 1-131-10TeXH011011414, onTmHecKme FerroTec npov3B0gwr 3neKTpoHHo-nyHeBbie MCTOLIHMK0 mcnapeHinq C opHinm 0.110 HeCK011bKMMV1 TV1MFIMM, OCTO ,IHNKV1 no-raHmq KoH -rponnepu ,W1A HMX. Bce o6opypoBaHme npom3Bogin -rcq B reptvlaH141,1 Ha coapemeHHom ripoH38ucTae, Hmeroutem cep -HO/mar DIN EN 15090001.

3J1EKTPOHHO-J1YYEBbIE VICTOLIFOIKII MaKcvmanbHaq 3HeprinsR, KoTopasi MO>KeT 6bITb B110>KeHa B 3fleKTp0HH610 nyv, goc-rviraer 12 KBT. 1/1cnapvTenb MO>KeT 14MeTb 1 TIffellb (npv 3TOM 0MeTb oftem go 190 Ky6.CM), 4, 6, 8 inn 12 Tornein. B o-rnmvve OT mcnapvTenein KOHKypeHTOB, oTcyTm- ByeT gwviammHecKoe ynnoTHeHve Boga-BaKyym, LITO 3HBLIMTBflbH0 nosbiwaeT HapewHocTb BceO cmcTembi m 3HaHmTenbHo cHowaeT Be0OATHOCTb nonapaHmq BOgbl B BaKyymHyro KaMepy.

snoK YI1PAIMEHM51 (KOHTPOJ1J1EP) ynyk-iweHHyFo KoHTponnep o6ecneHmBaEoT Genius mcnonb3yeTcq BO MH01- 1/1X cvcTeMax, Tpe6yFoLuvx npeuvi3HoHHoro Hanbinevanq TOHK0X 0.116HOK. KoH-rponnep Genius KowrponopyeT N yripaBrmeT Bcemv napameTpamm B npouecce HanbineHmq: HanpmKeHme, MOLLAHOCTb, corm ToKa nyHa, pa3BepTKa nyLia, BpaipeHvie Tvimein, xpaHeHme gaHHbIX npouecca HanbineHmq. C nomoLubh3 nynbTa ynpaBneHmq KoHTponnep no3Boncier JlerK0 3anporpammmpoBaTb <<peuenTbi» HanbmeHmq (K01104eCTBO Cfl0613, MX TompinHy N maTepmanbi), coxpaHmTb NX (331.LAMTHB naponeM), nocne Vero onepaTopy ocTaeTcq TOflbK0 ab16paTb opeuenT» N 3anyurmTb npouecc. BbICOKBA noBTopemocTb pe3ynbT8ToB rapaH -ropyeTcsi. KoHTponep MOWHO 1-100KFIFOLIVITb K BHeWHeM cmcTeme ynpaBneHmsi, a MO>KHO Ha ero 6a3e CO3RBTb cocTemy ynpaBneHosi Hanbinv -renbHoin cmuremoin. Elporpammvpyembun

CIDyHK01,10HailbHOCTb 0

5/10K11 1111TAH1151 3,11.-J1Y4. MalAPIVITEJ1SIMII 6110Km no -ram/151 cepvin Carrera gnq 3neKTpoHHo-nyHeBbm mcnapmTenein pa3pa6oTaHbl Ha 6a3e mmnynbcHbm nmTaHm9, LITO o6ecneHvBaeT BbICOKyK) 344eKTMBHOCTb pa6oTbi, 6blurpoe BbipBneHme nyroBoro pa3p5=Iga 0 BoccTaHomeHme pa6oTbi mcnapv -renq. He6onbume pa3mepu 110380.1-151K)T nerKo ero BCTp0VTb B cToOKy yripaBneHvq. HoBbM MOgyflbHUO gv3a0H 6noKa rim -ram/1cl noaaormer cKoHcOnrypinpoBaTb cmcTemy 3neKTpoHHo-nyHeBoro Mcnapewq gnq npvinoweHmin, Tpe6yFoLuvx nopBog MOLLAHOCTO OT 3 ,no 12 KBT, npv 3TOM BapmatAq HanpqweHmq 3fleKTpOHH010 nyHa cocTaBnqeT OT 2 no 10 KB. BnoK noTaHmq mmeeT mHTepcOei>icHwo KapTy, KoTopaq mo)KeT 6bITb cKoHcimrypinpoBaHa nog paaninumbie KoHcOrypaumm HanbmvTenbHo CMCTeMbL OH ,name moweT 6bITb COBMeCTHMIA no pa3-bemy vinv BbiBogam C 6noKamv noTaHvA ppyrox npom3BoginTene0, HTO no3BoncleT ero 0C0011630B3Tb C OCTOLIHMKBMIA mcnapeHmq gtpyrkix KomnaHHO. pa6oTaeT 1/1H -renneKTy8nbHa1 cmc-rema p8cn03HaBaHoq H raweHmq nyr aKcTpemanbHo oblurpo: nocne B03HOKHOBe11051 gy114 cVcTeMa 110F1HOCTbE0 BoccTaHaBnoBaeT CBOE0 pa60Tocnoco6HocTb B Teyevive minnninceKyHg, ripm 3TOM pacn03HaBaHve pyrin npoincxogoT 3a 200 HaHoceKyHp, a raweHme pyrm — meHee Hem 3a 1 mvKpoceKyHgy. KomnaHmq AKTAH TaK)Ke nocTaansleT BaKyymHble HanbmvTenbvible cincTembi C 3fleKTp0HHO-flyLleBbIM mcnapvTenem (c OgH0M 0.00 HeCK0flbK0M0 VCTOLIHNKBM0), LIBCTMLIHOO 11011HOCTbF0 aErromaTmHecKyFo 01-10 60flee 6Fog>KeTHbC6 BapmaHT C aBromaTmaume0. KOMFIBKTHble

HCTOLIHMKOB

KPHOTEHHOE OBOPYAOBAHliE KPNOPEOPPDKEPATOPb1 SUZUKI SHOKAN RF ORHO- H gByxc-ryneHHaTbie kpmopecOpvukepa -ropbi rvicpdpopga-MakmaroHa Suzuki Shokan cepvim RF o6nagaicT BbICOLIaMLIJI4M14 TexHint-leckvmm xapak-repmc-rmkamm, HMBFOT CH14>KeliHblii yp0BeHb Bm6paumm H moryT, KaK H KpvoHacocbl, mynurvikoH(13virypaumm. 06-beRVIHRTbCF1 B OgHoc-ryneHyaTbie pectxm>kepaTopbi pa6oTalc-r Ha TemneparypHom ypOBHe 80 K, gByxc-ryneHvaTbie — Ha 20 m 80 K. Ha 6a3e kpmopecppvukepa -ropoi3 Suzuki Shokan npegnaraeT Lumpokm0 cnek -rp o6opyg0BaHmsa — OT cBepxnpoBogBigmx cvic -rem g0 yCTaHOBOK AnA CIElepXH143K14X mccnegoBaHvm npoLleccoB npvi Temneparypax.

.•

RF7OS

RF371S so

0 RF271S

0 RF373S RF273S 0

2.0

4.0

fi.0

XOSIOgOrlp014330A14TefIbnOCTb II

8.0

100

12.0

14.0

cryneHm npm 20 K, BT

BbICOK011P0113BOLINTE/1bHblE 3AMKHYTbIE L4NPKY/1SI14VIOHHblE CliCTEMbl OXTIANMEHN51 SUZUKI SHOKAN HA YPOBEHb 80 K 3amkHyTa5:1 umpkyrwiumoHHaci cmcTema oxna>kgeHmq >kingKI4M a30TOM 1-103B0FIReT oxna>kgarb, Hanpmmep, kpmonaHenm B yeTaHOBKaX mmvn-aumm KOCMA4eCK010 npoc-rpaHc-naa, KaTyLIJK14 BbicokoTemnepaTypHbix cBepxnpoBogsqulmx Mall-IHTOB H T . n. Oxna>kgeHme ocymeci- Bnsie-rcci 3a CveT umpkynsmmin >K14,E1KCIFO a3oTa B 3aMKHyTOM umkne, npvi 3TOM cam a3OT oxnaKgaeTc51 C FlOMOLLAbH) renmeBbix kpviopecppm>kepaTopoi3 rviclxpopgaCHH3HTb MakMaroHa, LITO 1103B0.11FleT cyLgem- BeHHo 143Rep)KKI4, TaK KaK oTcyTm- Bye-i- He06X0r114MOCTb ROI-114MM o6ecneymBaeTcci BbICOKaR )1O4F1KOF0 a3oTa. Elpm 3TOM 3a1114BHbIX cmc-rem. xonogonpou3Bogvn-enbHOCTb 1._1,eHTpanm3oBaHHa1 cmc -rema KOHTpOf5 H ynpaBneHmq npoqeccom oxna>kgeHmq o6ecneLmBakr . gnm -renbHpo HenpepbiBHylo 6ecnepe6o0Hpo pa6oTy. TexHiitiectuie xapaKTepmc -rviKii TemnepaTypa >kingkoro a3oTa B FIVHVII4 FIOTOK )1C14,E1K0r0 a30Ta B .1114H1414 naBneHme >kvigkoro a3oTa B.1114H1414 Xonogonpom3Bogm -renbHocTb TennoBbie no-repm

67 — 85 K go 12 .n/mmH go 2 aTm (a6c.) 450 BT npm 80 K 0,35 BT /M

BbICOK0111PON3BOLINTE/IbHblE 3AMKHYTb1E LINPKYJ15114140HHblE CNCTEMbl OX/1AW/IEHMS1 TELEMARK HA YPOBEHb 140-160 K 3amkHyTbie cmc -rembi ox.na>kgeHim Telemark o6ecne4mBaikyr BbIC0KY10 X0.110g0ilp0143BOTWITellbHOCTb Ha yporaHe 140-160 K H MOryT 14CF1011b30BaTbCR KaK grisi ueneVi nonyLieHmci H143KNX TeMllepaTyp, TaK H B kat-lecTBe kpmoBakyymHbix HaCOCOB grisi OTKaLIK14 napoB BOP,b1 H3 60.11bLJOX BakyymHux KaMep. BbICOKOF1130143BORI4TellbHble

Bum- pas:I orkaLika C 3C1X0eKTI4BHbIM yganeHmem napoB B0Th I 143 BakyymHcA kamepbi FiBriqeTcsi o6ecne4eHmq MaKCI4MaJlbHOM 11130143BOAMTellbHOCT14 npoueccoB HaHeceHmsa TOHKHX nneHok. ,

1/1C11011b3yR MH01- 01-1eTHI41) 011b1T H

K1110 14eBbIM

Tpe6oBaHmem Arm

nvigmppouve no3miAmm B 06flaCTI4 06opy0,oBaHmq gr-19 npoqeccoB PVD komnaHvm Telemark npegnaraer cambia cospemeHHble TexHonormm KpHO3aXBaTa, rapaHTmpyFoulme grim- enblvo 6ecnepe6o&yro pa6oTy yH141<allbHble TexHmveckme xapakTepvicTium BbICOKOFIP0143BOTIVTaflbHbIX HaCOCOB Telemark cepmm TVP qnA OTKaLIKM napoB BOrtbl, KOTOPble o6ecnet-imBaicT: • BbicTpoe 3axona>kmBaHme gnsi CHI/Mel-MA BpemeHm pa6o4ero uvula; • BbICOKyK) 11p0143BORI4TellbHOCTb OTKa4KI4 BO,E1F1HbIX napoB — go 220000 n/c 14.1114 X01100:101-1P0143B0/114TarlbHOCTb — go 3500 BT nom 160 K; • Bbic-rpoe pa3mopa>kmBaHme; •

• • • • •

komnpeccop 3aHl4MaeT He60.11b1DyK) LlaCTb pa6oHero npourpaHm- Ba; MmkponpoueccopHaq cocTema ynpaaneHmsi C B031\10>KHOCTbF0 o6meHa RaHHb1M14 no umcppoBomy KaHany RS232 vinv RS485; CHwkeHme BpemeHm OTKa4K14 Ha 25-90%; noci-mx(eFivie 6onee rny6oKoro Bakyyma — napumanbHoe gaBneHme BOgFIHbIX napoB 10' m6ap; OcBo6o>kgeHme OT goporocToqwero 14C11011b30BaH1451>KHgKOM a3oTa; YnyHweHme kaHec-rBa HaHeceHmq POKPUT1414. KOMIlaKTHOCTb CACTeMbl —

KPMOIEHHOE flABOPATOPHblE rEHEPATOPb1 maigKoro A3OTA AKTAH npegcTaBnBeT He6onbwme na6oparopHble a30Ta 113 oKpy*mowero B034yxa:

nonyHeHms4

yCTaHOBKI/1

)104,11K010

•

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gilF1 aHanH3a manbix na3epHbix nyHe0 H gpyryx 14CTO4HMKOB, TaK14X KaK na3epHbie googbi, VCSEL-na3epbl, CBeTOBOgbl, onTwAecKoe BarlOKHO. TexHmHecKoe mcnonbaoeaHoe .1114H3 obbeKTmea mmKpocKona o6ecne4meaer oTo6pa>KeHvie nyya Ha geTeKTope. mcnonb3yeTc5

B OCHOBHOM

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Parameter Tester Wavelength Range

Lens spread function Maximum Source

Objective focal length Objective Working distance

NFP-VIS 400.700nm <380 optional

0 49pm

NFP-Pyro

700 - 1100nm

1300.1700nm

190nm - >20t.r -

1 1pm

2 6pm

2 6um

200pm

3mm

imm

5 tmm

3mrr

0 3mrn

0,3mm,

3mm

0 3rnm

160mm

207mm

160mm

085

048

068 60 1 NSPyro9/5

140pm

Distance Aperture

NFP-1550

'4:,- -

Objective Rear Focal

Objective Numerical

NFP-980

085

14Ou

60.1

60 1

40 1

NSSI19/5

NSGE/9/5

NSG'E, ,r

Aperture size

9mm

Slit *vldth

5pm

50M

5j.m

Objective Magnification

NanoScan Model

3 Axis Stage Travel X (Across rail)

13mm micrometer adjust

l'(normal io rail)

6 5mm fine pitch actuator

2 (along rail)

13rnm micrometer adjust

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Sum

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•

flepeHacrpamBaemba;i: Bbi6op mna cnerrporpacpa R011011H14Tel1bHbIX 011141/114

• • •

npemmyutecTea:

Vicnonb3oBaHme nporpammHoro o6ecneyeHing SpectraViewTM Mcnonb3ye-rcp gnq onpegeneHmq koHeHHoro nonoweHmR, o6HapyweHvie noBpe>kgeHviin" gviarHocmim npogeccoB nvana3oH pa60Tbi 200-800 HM

• •

KomnakTHEACA: cymka CO Bcemvi KomnoHem-amw COCTaBilSIBT B pa3mepax 451 MM x 386 MMX 305 MM liana/10 B 14C110.f1b30BaHMN: Bx.nrovaeT Bce Ho6xogvimoe gnsi c6opa H aHanvi3a cnerrpanbHbix gaHHbix YcTaHoeneHHoe nporpammHoe o6ecne4eHme SpectraViewTM

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C epNN

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TexHmvecKme xa aue Mogen!. Xonogo-

OC-

50R 75R 1760 2350

wacnom 200R 300R 400R 500R 750R 1000R 1500R 2000R 2500R 3000R 7040 10560 14000 17600 26400 35200 52800 70400 88000 105600

LICT141%1 cHcrem C 3aMKHyTbIM

25R 750

33R 970

100R 3520

150R 5280

7,5

120

180

250

273

320

np0V13BOAVITerlbHOCTb,

BT (nom 16C) Ilpowaaomirenbilocrb Hacoca, ninom. 06-bowl pe3epayapa, n Macca, Kr

375

300

450

112

150

225

120

180

225

375

560

750

395

460

550

680

1150

1300

CIACTEMA OXTIANMEHI151 C OTKPbITbIM LitiKflOM (OPEN LOOP) ancTema oxnawgeHmq C OTKpb1TbIM 014KFI0M (open loop) vicnanb3yercq B cnyyae, Korga y nonb3oaaTerm ywe gng oxna>KgaKxge(4" wingKocro N Hacoc RFIA 06ecneHeHinq ee peuvpKyncluviv mewgy pe3epayapom N oxnawgaembim o6beKrom. Livinnep o6ecne4maaer oxna>K,geHine wingKocrvi B 3TOM peaepayape, opraHm3yq ee peuinpKynquinio c 1-10MOLLAbK) C06CTBeHH010 Hacoca. Cvcrema mower 6blTb cHa6>KeHa BCTpOeHHbIM KoHrponnepom TemnepaTypbi oxnawgalow,eCt N<V1AKOCT14, no3Bonszi[oulein ynpaansrrb ee TemnepaTypoi,i C TOHHOCTbE0 ±0,3 C, 6noKom ynpaaneHinq FIOTOKOM oxnawgalowein wingKocrin, ycraHaaninaaa.onct Havi6onee 0171 ,1MaJlbHblVi 110TOK C 1.1e.111.HD o6ecneyeHosR oraoRa Heo6xogvmoro KonvHecTaa Tenna 1,4 3KOHOM141,1 oneKTpoaHeprow, a TaK?Ke Heo6xogymbimo cincTemamin 6.110KV1p0BK1,1 N CV11Haf1143aL.1141,1 B cnyHae HecooTaeTc -ravisi ycnoavin aKcnnyarawnin pa6o4vim Tpe6oBaHinFim. KpoMe TO1O, incnapinTenb meal - nerKo pa36opHylo KOHCTpyKL114[0 TATIFI o6neryeHmq ero OHI4CTKVI B npinno>KeHinqx, rge OXIIWK,E1a1-01.48A >i<HRKOCTb mower 6bITb 3arpci3HeHa.

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Pe3epeyap noftecearensi

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autaxgaembra obbewr

2501 33DI 50DI 7501 10001 150DI 200DI 300DI 400DI 500DI 750DI 1000DI

750 970 1760 2350 3520 5280 7040 10560 14000 17600 26400 35200 45

ornimm

135

205

250

460

320

395

460

550

CMCTEM OXJ1AWAEHM51

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