Design and Simulation of Cantilever Based MEMS Bimorph Piezoelectric Energy Harvester

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Mechanics, Materials Science & Engineering, April 2017 – ISSN 2412-5954

Design and Simulation of Cantilever Based MEMS Bimorph Piezoelectric Energy Harvester19 G.K.S. Prakash Raju1, P. Ashok Kumar1, Vanaja Aravapalli2, K. Srinivasa Rao3,a 1 – M. Tech, KL University, Dept of ECE, Green Fields-522502, India 2 – Tirumala Engineering College, Dept of AS & H, Narasaraopeta-522601, India 3 – Professor & Head of MERG, KL University, Dept of ECE, Green Fields-522502, India a – gorantlaraju02@gmail.com, drksrao@kluniversity.in DOI 10.2412/mmse.16.9.490 provided by Seo4U.link

Keywords: cantilever beam, MEMS, Piezo-electric bimorph, power consumption, proof mass.

ABSTRACT. Piezoelectric generators designed for harvesting vibratory energy are usually based on mechanical resonators, cantilever beams for instance, able to effectively transmit ambient energy to the active materials. In this paper, we have designed and simulated a rectangular piezoelectric energy harvester, which consists of cantilever, proof mass, piezoelectric bimorph with different lead-zirconate-titanate (PZT) materials (PZT-5A, PZT-5H, PZT-5J, PZT-7A, PZT8) using COMSOL Multiphysics, (Finite Element Analysis) FEM Tool. The performance of the device mainly engrossed with the power-optimization by varying the materials and varying the dimensions of the proof mass and dimensions of piezoelectric bimorph. This model describes the consumption of the power dependence with the mechanical acceleration, frequency response and helps in the load behaviour for power optimization. The designed device will be used in aircraft engine and car engine. We observed from the simulated results, a rectangular piezoelectric energy harvester with PZT5H material gives optimal power. Comparable with the conventional devices, MEMS based energy harvesting device is optimized with 33.3% of power.

Introduction. Now-a-days, researchers are mainly concentrating on the reduction in size, area, cost and power consumption of sensors and complementary metal oxide semiconductor (CMOS) electronic circuitry research lines on battery recharge via available power sources. Energy harvesters can be operating as battery rechargers in various environments, such as wireless communication systems, wireless sensors, houses and military applications. The possibility to bypass replacing exhausted batteries is highly attractive for wireless networks [1-2], due to maintenance of battery check and restoration are relevant. There are several mechanisms for converting vibrational mechanical energy to electrical energy. The most important are electrostatic, electromagnetic and piezoelectric. Among the three mechanisms, piezoelectric transduction principle offers higher power density compared to electrostatic transduction and electromagnetic transduction. A majority of current research has been done on piezoelectric conversion due to the low complexity of its analysis and fabrication. For electrostatic transduction principle, which initially we need to provide the polarization and for electromagnetic transduction principle which are having some limitations in the magnet miniaturization [3]. Marin et al. have discussed about the scaling of output power as a function of effective material volume (v) for different mechanisms. By taking account into some equations for the respective conversion mechanisms, the output power of the electromagnetic mechanism is proportional to v2, while the piezoelectric mechanism is proportional to v3/4. Thus, at smaller scales, the piezoelectric mechanism becomes more attractive as compared to electromagnetics.So, piezoelectric is well suited than 19

© 2017 The Authors. Published by Magnolithe GmbH. This is an open access article under the CC BY-NC-ND license http://creativecommons.org/licenses/by-nc-nd/4.0/

MMSE Journal. Open Access www.mmse.xyz 85


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