Precision Motion Control by NewportCorp

Precision Motion Control For Motion, Think Newport

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Linear Stages

Rotation Stages

Actuators

Hexapods

Controllers

Air Bearing Stages

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Global Availability and Service Product Availability at All Times Newport has three global stocking locations for standard Motion products, enabling orders to be delivered within the shortest possible lead time from the closest warehouse serving the US, Europe and Asia-Pacific. In addition, there are a few Newport offices and distributors that stock a limited number of motion products, which can ship locally from their inventory, reducing lead times and also delivery risk. Listed below are Newport sales offices that can assist with Motion product quotes and orders. Please check newport.com regularly for pricing and lead times and feel free to contact us for faster delivery. China 86-510-8113-5000 china@newport.com

Irvine, CA, USA 800-222-6440 sales@newport.com Germany +49 (0) 6151-708-0 germany@newport.com

Netherlands +31-30-659-21-11 netherlands@newport.com

France +33-1-60-91-68-68 france@newport.com

Singapore +65-6664-0400 sales.sg@newport.com

United Kingdom +44 (0) 1235-432-710 uk@newport.com

Bozeman, MT

Rankweil, Austria

Stahnsdorf,

Oxfordshire,

China

Darmstadt, Germany

Rochester, NY

Santa Clara,

Beijing,

Germany

U.K.

Bucharest, Romania

Franklin, MA North Andover, MA

Irvine, CA

North Logan,

Stratford, CT

Saitama, Japan Tokyo, Japan

Wuxi,

China

Osaka, Japan

Evry La Boulonnie Beaune-la-Rolande, France

Taipei, Taiwan Jerusalem, Israel

Singapore

Corporate Headquarters Sales and Manufacturing

Corporate Headquarters

Sales and Service

Sales and Manufacturing Sales and Service

Global Service Newportâ&#x20AC;&#x2122;s global infrastructure means that wherever you are, and whatever you want, we can help! At all times, we offer application support for our product selection and with one of the best after sales service organization available, you can be assured that any issues will be instantly resolved.

Asia

Europe

USA

Newport Opto-Electronics Technologies (Wuxi) Co., Ltd.

MICRO-CONTROLE Spectra-Physics S.A.S

Newport Corporation

Zone industrielle 45340 Beaune-la-Rolande, France

1791 Deere Ave Irvine, CA. 92606

phone: +33 (0)2 38 40 5155 email: dst-bea-rma-service@newport.com

phone: 1-949-863-3144 email: service@newport.com

Lot J3-8, Wuxi Export Processing Zone, New District, Jiangsu, China, 214028 phone: +86 510 8113 5000 email: asiatech@newport.com

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For Motion, Think Newport ™

Dear Valued Newport Motion Customer, Welcome to this new edition of the dedicated catalog for Newport’s Motion Control products, your single point source for high performance, mechanical and air bearing stages, controllers, custom and OEM solutions. In this catalog, you will find product information of over 500 standard products, which is designed to help you choose the right stage and controller solution for your application. If you do not find exactly what you need or you need assistance for your demanding application, feel free to contact one of our application specialists. Also please do not hesitate to visit our website at www.newport.com/motion-control for additional information and updates on all our capabilities. We are always available to support you for your precision positioning and motion control needs. For Motion, Think Newport™ Sincerely, Motion Team

About Newport Newport Corporation is a globally recognized leader in advanced technology products and solutions for fields such as Research, Life and Health Science, Aerospace and Defense, Industrial Manufacturing, Semiconductors and Microelectronics. With decades of experience in motion control, Newport has both the capability and the capacity to provide the optimum solution for your individual needs. Our product portfolio includes standard products, special adaptations, custom systems and OEM solutions.

Family of Brands – ILX Lightwave® s New Focus™ s /PHIR® s /RIEL® )NSTRUMENTS s 2ICHARDSON 'RATINGS™ s 3PECTRA 0HYSICS® s 3PIRICON®

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For Motion, Think Newport ™

Table of Contents At the Cutting Edge of Research and Industry.............................4 Spearheading Market Development.............................................5

Motorized Vertical Stages

Milestones ....................................................................................6

Motorized Vertical Stage Selection Guide .................................66

Our Core Capabilities Meet Every Challenge...............................8 Metrology and Acceptance Test Procedure ...............................10

XMS-V Series – Ultra-high Precision Direct Drive Vertical Linear Stage ..................................................................67

ESP Technology...........................................................................11

VP-5ZA – Precision Vertical Linear Stages ................................69

Engineered Systems ...................................................................12

GTS30V – High-Precision Vertical Linear Stage ........................71

OEM – Developing for the Future ..............................................15

IMS-V Series – High-Load Vertical Linear Stages .....................73

Precision Actuation in Engineered OEM Sub-Systems..............20

UZ Series – Vertical Linear Stages ............................................75

Newport’s OEM Technology Platforms ......................................21

ZVR Series – Integrated Vertical and Rotation Stage for Wafer Positioning..................................................................77

Air Bearing Stage Capabilities & Solutions ...............................22 Capabilities in Advanced Ceramic Materials.............................29 Standard Products – Simply the Best!.......................................31

Motorized Rotation Stages Motorized Rotation Stage Selection Guide................................79

Motorized Linear Stages

RGV – High-Speed Precision Rotation Stage.............................80

Motorized Linear Stage Selection Guide ...................................32 XM Series – Ultra-Precision Linear Motor Stages ....................34 GTS Series – High-Precision Linear Stages...............................37 ILS Series – High-Performance Mid-Range Travel Linear Stages..39 IMS Series – High-Performance Long-Travel Linear Stages .....42 VP-25X – Precision Compact Linear Stages...............................45 FMS Series – Linear Metrology Stages.....................................48 MTN Series – Mid-Travel Steel Linear Stages..........................50 UTS Series – Mid-Travel Steel Linear Stages ...........................52

RV Series – High-Performance Precision Rotation Stages........82 URS Series – Precision Rotation Stages....................................87 URB100CC – High-Speed Belt-Driven Rotation Stage...............89 FCR100 – Intelligent Stepper Motor Rotary Stage ....................91 PR50 & SR50 Series – Compact Rotation Stages .....................93 BG Series – Goniometric Cradles...............................................95 NewStep NSR Series – Universal Rotator.................................98 Agilis™ Series – Piezo Motor Driven Rotation Stages..............99 Picomotor™ Rotary Stages .......................................................101

MFA Series – Miniature Steel Linear Stages............................54 FCL Series – Intelligent Stepper Motor Linear Stages ..............56 NPX Series – NanoPositioning Linear Stages ...........................58 Agilis™ Series – Piezo Motor Driven Linear Stages..................59 Multi-Axis Kinematic Alignment Stages....................................61 Optically Encoded Stainless-Steel Translation Stages ..............62 Translation Stages with Integrated Picomotors.........................63 Motorized Fiber Positioners........................................................64 Optical Delay Line Kit .................................................................65

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For Motion, Think Newport ™

Motorized Linear Actuator

Motorized Optical Mounts

Motorized Linear Actuator Selection Guide.............................102

Motorized Optical Mount Selection Guide...............................145

Motorized Actuator and Manual Positioner Compatibility ......103

Picomotor™ Mount with Controller Kits ..................................146

VP-25AA – High-Precision Motorized Actuator .......................106

Picomotor™ Series –Motorized Optical Mounts......................147

LTA Series – Precision Motorized Actuators............................107

Picomotor™ Large Aperture Optical Mounts ...........................149

TRB Series – Compact Motorized Actuators ...........................109

Stability™ Series – Picomotor™ Optical Mounts ....................150

TRA Series – Compact Motorized Actuators ...........................111

Pint Sized Series – Picomotor™ Optical Mounts.....................151

NewStep Series – Miniature Linear Actuator .........................113

Motorized Flipper Optical Mounts............................................152

Picomotor™ Piezo Linear Actuators .........................................114

Agilis™ Series – Piezo Motor Driven Optical Mounts.............153

Vacuum and Ultra-High Vacuum Picomotor™ Actuators .........116

PSM2 – Ultra-fast Piezo Steering Mirror .................................155

NanoPZ – Ultra-High Resolution Actuators .............................118

NPO Series – Objective NanoFocusing Stages........................156

NPA Series – NanoPositioning Piezo Translators ....................119

GuideStar II Laser Beam Steering Correction System .............157

NPM Series – NanoPositioning Piezoelectric Micrometer Adapter .....................................................................................120

FSM – Fast Steering Mirrors....................................................158

Hexapods

CONEX-LDS – Electronic Autocollimator .................................159

Special Collections

Hexapods ..................................................................................121

Vacuum Compatible Products...................................................161 All Steel Construction Linear Stages .......................................162

Controllers and Drivers

FC Series – iPP™ Technology – Intelligent Stepper Motor Stages .......................................................................................163

Motion Controller Selection Guide...........................................124 Stage and Controller Compatibility ..........................................125 XPS Series Motion Controllers – Universal High-Performance Motion Controller/Driver............127

CONEX™ – DC-Servo or Piezo Controller and Driver...............163 Agilis™ – Piezo Motor Driven Positioners ...............................164 Picomotor™ – Piezo Motor Actuators ......................................164

XPS – Training and Support......................................................130 ESP301 Series – 3 Axis Motion Controller/Driver ...................131 SMC100 – Single-Axis Motor Controller/Driver ......................133 NSC200 – NewStep Expandable Motion Controller System...135 CONEX-CC – CONEX DC-Servo Controller and Accessories....137 Agilis™ Motion Controllers ......................................................138 NanoPZ – PZC200 Controller....................................................139 Open-Loop Picomotor™ Controller/Driver Modules.................140 Closed-Loop Picomotor™ Controller/Driver Module................142 Picomotor™ Controller/Driver Module Accessories ................143 NPC3/NPC3SG – 3-channel Piezo Amplifier ............................144

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For Motion, Think Newport ™

At the Cutting Edge of Research and Industry For over 50 years, Newport Corporation has been a globally recognized leader in advanced technology products for research and industrial applications. We have helped researchers break through the frontiers of science and technology. By applying our innovative perspective to the manufacturing processes, we have worked with OEM's to improve their performance, their time-to-market and to increase their competitive edge. Newport plays a vital role in the following disciplines: • Research and development

• Industrial manufacturing

• Life & health sciences

• Semiconductor wafer manufacturing

• Aerospace, defense and security

• Microelectronics applications

Innovation at All Times Based on strong, solid and long-term relationships with all leading research centers, our vast industry knowledge and expertise spans a broad range of technologies. Our pledge is to continually and consistently deliver innovative products and solutions in a myriad areas including: • Lasers

• Spectroscopic and photonic instruments

• Light sources

• Vibration control

• Opto-mechanics

• Precision positioning

• Optics

• Customized systems

Newport is truly unique in combining all these technologies and providing exceptional application knowledge for the true benefit of our customers.

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For Motion, Think Newport â&#x201E;˘

Spearheading Market Development Our expertise and experience have led to the development of many innovative products and solutions that have spearheaded development of new markets. Today, our motion control solutions serve in a broad range of applications in multiple sectors such as: scientific research, aerospace and defense, life & health sciences, industrial manufacturing, quality assurance, metrology, semiconductor wafer manufacturing, microelectronics and photovoltaics, among others. At Newport, you can trust your project in the hands of experts and rely on a company that keeps its promises and delivers bottom-line profits!

Life & health sciences

Microelectronics and semiconductor

Photovoltaics

Aerospace and defense

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For Motion, Think Newport ™

Milestones Decades of Evolutionary Expertise and World-Class Experience. Founded on Innovation – Based on Technology

scan QR code to watch video

The world’s largest scientific research centers and leading equipment manufacturers have trusted Newport’s innovative technologies for over five decades.

1960's

– Laying the Foundations

The 1960s saw the beginning of Newport’s history in precision positioning, when the French company, MICRO-CONTROLE S.A was founded. One of the first products was MR8.25 linear stages and TR80 rotation stages, the predecessors of the highest installed base product UMR linear stages and UTR rotation stages still produced today. This decade saw a rapid extension in the product ranges of positioning products, as well as the introduction of opto-mechanical components and optics for research and aerospace/defense applications.

1970's

– Introducing the First Motorized Stages This decade witnessed the extension of the product line to motorized stages with the introduction of UT series linear stages, predecessor of the popular UTM/UTS series linear stages and the introduction of the TL17 stepper motor controller.

1980's

– Developing Technology Platforms As the company evolved, so did the products, in tandem with developing and advanced emerging technologies. MICRO-CONTROLE introduced the first air-bearing stages for metrology applications, as well as the FAB200, the first integrated XY air-bearing stage with 0.1 µm resolution, and Newport introduced the PM500 high-precision motion system with crossed-roller bearings and integrated linear optical encoder feedback.

1990's

– Becoming a Global Leader in Motion Control

The 1990s saw Newport acquiring new companies to further consolidate its strong position in the marketplace. Newport Corporation acquired the French company MICRO-CONTROLE and with combined resources, Newport further developed its global leadership in high precision positioning and motion control systems. New Focus™ introduces the Picomotor™ actuator, a revolutionary motor that uses a piezoelectric transducer to turn a screw.

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For Motion, Think Newport ™

2000's

– Continuous Innovation With the advent of the Millennium, Newport takes up the challenge of leveraging its expertise and experience into new market applications, pursuing its tradition of excellence and innovation. The HXP series Hexapod, an easier to use family of 6-axis parallel kinematic positioning systems, is introduced for precise control in complex motion applications demanding high load capacity and accuracy. Another product innovation took advantage of our manufacturing creativity to introduce the closedloop version of the Agilis piezo motor product.

Newport acquires Oclaro’s New Focus™ business, which is comprised of a portfolio of high-performance photonics products that includes opto-electronics, high-resolution actuators, opto-mechanics, tunable lasers, vacuum and ultraclean solutions, and OEM-engineered solutions.

2010's

– Present - Technology Experts

Our latest development is the new DynamYX® Datum® 450 and 450GT, air-bearing platforms utilizing SiC technology, that are designed to handle the larger travel ranges, payloads and increased throughput requirements of next generation tools for the 450 mm semiconductor wafer initiative.

Expertise and Experience Over Fifty Years of Proven Performance, Expertise and Experience Evolving in a dynamically changing research and industrial environment even prior to the founding of Newport Corporation, Newport Motion have acquired a tremendous wealth of knowledge and experience second to none. Newport’s technologies and capabilities have constantly evolved and strengthened over the past decades. With a best-in-class R&D organization, Newport’s engineers have the necessary resources and powerful design and metrology tools to enhance product quality and deliver the best performance products and to bring new and innovative perspective to your motion control application.

24 23

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INDICE

1000

2000

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400

1000

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400

120

±0.2

555

180

Whether it is a key customized multi-axis motion system for a diffractometry application in a synchrotron or the development of a technology solution platform to enable manufacturing of next generation semiconductor chips, or a motorized component to fit into a quality inspection system, we have the capability to adapt our expertise and experience to match to your needs and to deliver the right solution. Our experts understand your business and the challenges you face every day.

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For Motion, Think Newport ™

Our Core Capabilities Meet Every Challenge Commitment to Excellence – Capacity to Deliver With over fifty years of unprecedented experience behind us, Newport has both the capability and the capacity to provide the optimum solution for your individual needs! We have the most comprehensive portfolio of high precision positioning products and solutions in the industry, ranging from standard products, special adaptations and OEM solutions to subassemblies, fully engineered systems and customized OEM technology platforms. Simply tell us your application requirements and we will provide a solution.

Industry Best Products Newport is justifiably proud of an extensive offering of standard linear stages, rotation stages, actuators and control electronics. These highly engineered products are not only specifically designed to meet the majority of research and industrial end-user requirements but are the perfect solution for OEM applications. With our standard products, you can reap the benefits of: • Short lead times • Wide range of choices • High compatibility • Competitive pricing due to high-volume manufacturing

Tailor-Made Solutions Depending on your requirements, we have the capacity to tailor a solution for you! Whether the change involves cabling, mechanical adapters, metrology or the environmental preparation of a motion component, our dedicated engineering group at Newport can deliver special requirements with the utmost precision, accuracy and efficiency.

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For Motion, Think Newport â&#x201E;˘

Shaping the Future with OEM's With decades of specialized expertise and experience resulting in Newport's recognition as a world leader in precision motion technologies, we can help you consistently achieve the next levels of performance. We are perfectly positioned to handle the positioning requirements of your current and next generation tools, through cutting edge technology and our ultimate commitment to the highest standards of quality.

Fully Engineered Systems Leveraging upon tremendous expertise and capability, Newport provides comprehensive design, engineering and manufacturing services for the design of custom motion systems to exact customer specifications. Our engineering team has the expertise in CAD design, simulation modeling and software development to design the right systems for your needs and we ensure close communication throughout the process. All our motion systems are backed by a worldwide dedicated team of application engineers and world-class technical support.

Partnering for Success - Newport's customized technology platforms Newport has built upon decades of experience in motion solutions to establish the closest partnerships with clients through our customized technology platforms (CTP), specifically developed to cater to application-specific needs. These platforms have already seen massive success in partnership with OEM's such areas as semiconductor manufacturing, DNA sequencers, inkjet printing and other industrial manufacturing processes. Other applications include flat panel display (FPD) inspection and processing, as well as laser scribing of thin-film solar panels. CTPs are designed from leading technologies and combine the very latest in materials, manufacturing, assembly and motion control. Technologies such as air bearings, linear and rotary ball bearings, high resolution direct encoders, linear motors, piezos, flexures, ceramic materials and vibration isolation are optimally integrated into these platforms to satisfy the individual requirements of any application.

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For Motion, Think Newport ™

Metrology and Acceptance Test Procedure Extensive metrology capabilities and resources are used to test, analyze and measure critical system specifications to achieve excellence in quality, precision and performance. The best available metrology tools are used to provide customers with real performance data.

5 LEVELS OF METROLOGY Depending on your need, the Newport technical team can propose 5 distinct and complementary levels of metrology with your custom motion solution. We will provide calibration data with our advanced products clearly stating the guaranteed specifications. At Newport we want to make sure that we deliver on our promises and that your purchase will perform exactly as you expect it. In case of an Assembly, we will demonstrate system performance. This performance can be demonstrated using two complementary methods. The first one is called Global Accuracy measurement and it consists of metrology performed on a combination of multiple linear and rotation axes that can be measured as a group. There are limitations to this method due to the availability of metrology systems and is augmented



with a secondary method that consists of a theoretical error analysis for stack up of tolerances for the remaining axis that could not physically be measured as part of the group. The use of both methods has demonstrated, in our extensive systems experience, to be an excellent gage of the quality of the performance of the completed system. For very demanding applications we can also perform dynamic performance verification as well as single or multi axis error mapping. We will work with you to put in place a metrology plan that is tailored to your needs and will ensure that it is representative of your application. We can use simulated loads, measure performance at the point of interest on assembled sub-systems, following your system’s motion range.

XY calibration using interferometer.

 Multi-axis

SOC using autocollimator.

QUALITY CONTROL At Newport, we provide quality control services and can customize these to account for your specific environment. Newport continuously maintains its ISO9001.2008 registration.

METROLOGY TOOLS

ADDITIONAL CUSTOMER SERVICES



Interferometers



On-site installation



Autocollimators



Modal tests systems

Metrology services both at factory and customer sites



Environmental chambers



Maintenance contracts



Very high precision encoders



Training



Temperature controlled metrology room



After sales services



Real time acquisition



Documentation



Vibration isolated platform

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For Motion, Think Newport ™

User Friendly ESP Technology Exclusive to Newport, ESP is a proprietary, communication recognition channel system between stages and electronics. Minimizing system setup time and maximizing operational safety, this system brings you total peace of mind. Today, almost all our stages and electronics are ESP compatible. It couldn’t be simpler - during system boot, the motion controller retrieves all relevant information from a memory inside the stage and either self-configures to the connected hardware or checks for conformance to a stored configuration. Newport’s ESP is the only system that provides true plug-and-play compatibility, avoiding accidental damage caused by the wrong configurations. Furthermore, our motion electronics are equipped with the most advanced features and high-level commands to minimize the time for system optimization and application development. Examples of this technology in use include: • Auto-scaling

• Unidirectional motion mode avoiding the effects of backlash and hysteresis

• Auto-tuning • Automatic jerk settings

• Free programmable event triggers

• Auto-tracking

• Motion done trigger signal taking into account system settling times.

All of our stages and electronics have standard mechanical and electrical interfaces for maximum compatibility and interchangeability. At Newport we do not only talk about ease of use, we apply it.

11 10 9 8

Position (nm)

7 6 5 4 3 2

É 1 nm MIM with the XM series linear motor stages. Nanometer MIM with long travel.

1 0 -1 0

Time (s)

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For Motion, Think Newport ™

Engineered Systems In addition to an extensive offering of standard motion products and OEM work, Newport provides custom motion systems tailored to unique application needs. Our systems engineering team is focused on developing high precision custom systems solutions for research and industrial end users. Whether you require an adaptation of a standard product, a simple sub-assembly or a complex multi-axis system, Newport is your right partner. We shall assist you with the feasibility study of your application, recommend the solution that best meets your needs, and provide support throughout the lifetime of the motion system. In addition and up to final acceptance, our systems engineering department provides project management that ensures timely delivery of a motion system that meets or exceeds the expected system performance. The latter is guaranteed by extensive testing and metrology during the manufacturing process as well as on site. Four levels of custom motion systems are typically provided:

1. Adaptations of Standard Products Whether the change involves a cable, mechanical adapters, metrology, or an environmental preparation of a motion component, the systems engineering team handles your special adaptation requirements with highest efficiency.

É Vacuum compatible MTM-PEV6 stage: Most of Newport's positioners can be prepared for vacuum environments up to 10-6 hPa, in some cases up to 10-9 hPa Example of an X-Y-theta assembly entirely built by standard products: Newport provides orthogonality and sphere of confusion alignments including metrology reports upon request. Ñ

É Newport offers custom length or environmentally prepared cables that ensure the integrity of your application.

Newport provides clean standard solutions for cable routing including supplementary cables and vacuum tubes per individual requirement. Ñ

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For Motion, Think Newport ™

2. Special Motion Devices For years, Newport's systems engineering team has been designing and manufacturing special motion devices for niche applications such as high energy laser fusion systems and synchrotrons. Examples include high class clean room compatible, high-load motorized actuators, binary inserter devices, motorized mirror mounts, very long travel linear stages, and large scale rotation stages.

Å High Resolution Z-Stage: Vertical linear stage with 10 nm sensitivity, 20 kg load capacity using backlash-free ballscrew and steel construction.

Å Actuator: High resolution and high load capacity actuator for high power laser facility mirror mount. High level of cleanliness.

Å RVU240: High sensitivity, high torque, high angular stiffness rotation stages providing 5 µrad sensitivity and 0.1 Nm/µrad angular stiffness.

3. Sub-Assemblies scan QR code to watch video

These are economical solutions made exclusively from Newport’s standard catalog components. We add value by optimizing the performance level of these components to your requirements and commit ourselves to the global specifications of the system by performing metrology before delivery.

É Sensor calibration bench for car-safety systems in automotive industry. 11 catalogue stages in 3 stacks with custom brackets and interface plates.

Azimuth/elevation gimbal with 350 mm diameter for LIDAR analysis, target tracking or optical sensor testing. Ñ

É 2-Axis gimbal with custom RTM660 stages for load capacity up to 2000 N used in remote sensing instrument test and measurement. High speed 2-axis motion simulator using RGV series for continuous 360° rotation, speeds up to 720 °/s, high acceleration, 0.001° MIM for MEMS-based inertial sensors testing. Ñ

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For Motion, Think Newport ™

4. Advanced Customized Systems scan QR code to watch video

These tailor-made pieces of technology represent the pinnacle of Newport’s system design capabilities. In addition to the traditional electro-optical components, these multi-faceted systems typically include application specific sensors or devices, application software and system-level safety features. System level safety features are not limited to safety interlocks, but can include collision and simulation algorithms. Metrology and testing are two of the most intensive phases of the development of these systems that clearly distinguish their superb performance on site. Examples are: X-ray diffractometers, metrology systems, and various sample positioners.

É Newport designs and manufactures motorized mirror mounts for high power laser facilities. These mounts accommodate a variety of large optics for laser beam up to 600-mm diameter in very demanding environmental conditions (cleanliness, vacuum). Air-bearing system: This system was designed for large-scale assembly and testing of optics. The multi-axis system features a very rigid silicon carbide and granite structure for superior stability and flatness, 19 motorized axes for alignment and positioning and 2 long travel air-bearing stages driven by linear motors. Ñ

É X-ray diffractometers are full custom and turnkey systems used to study the structure and properties of materials. About 30 diffractometer systems in synchrotrons all over the world serve the scientific community in a large variety of application fields.

XYZ,ΘZ system used for laser conditioning of large optical components, measuring up to 800 x 800 x 100 mm. Ñ

 Vibrometer test bench: 3-axis system used at the LCPC (Roads and Bridges laboratory) to measure the density of large concrete blocks. A shock is created in one point with an explosion, the resulting vibrations are measured in another point for analysis of the concrete density.

 Sample positioner: 2-tons sample positioner for Neutron synchrotron.

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 LB Leveling base: High precision 5-axis heavy motorized base used for leveling and positioning a complete optical system. Tripod system, vertical range ±100 mm, tilt ±2.5°. 3000 kg centered load capacity. Optional air-bearing kit.

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For Motion, Think Newport ™

OEM – Developing for the Future «Our reputation as the leading motion supplier to OEM's is hard-earned. Product performance, cost, delivery, and quality directly impacts your competitiveness – and that is why we get it right the first time!»

Our dedicated OEM group focuses solely on the unique requirements of OEM customers. This experienced, professional department was developed as a small worldwide group within a large company – hence, you get the best of both worlds. Draw upon the resources that a large company offers and get the individualized service and rapid response of a small company.

Your Project Matters Our OEM strategy is to offer our customers a competitive advantage in their marketplace by providing direct access to our expert resources – engineering, manufacturing, logistics, and service organizations. We thoroughly evaluate a product, subassembly or sub-system from every angle to perform a rapid and in-depth feasibility review. During this initial assessment process, we determine the value we add based on our core technologies and competencies.

Working as Part of Your Business We are with you every step of the way, with a team consisting of engineering, manufacturing, logistics, marketing and customer service for maximum support. We view this team as an integral part of your organization that reports directly to your project team.

Discretion at All Times Your program’s confidentiality is imperative and we make special provisions to ensure that the highest levels of confidentiality are maintained. Non-disclosure agreements are signed up-front before we begin technical discussions and design ownership issues are firmly established. Upon request, Newport will dedicate work cells for your application to ensure total confidentiality within our company for your own peace of mind.

Full Design and Manufacturing Control Newport’s OEM project leaders use a controlled procedure to manage your project. Complete BOMs are developed and controlled through our formalized ECO process with all assembly and test procedures fully and formally documented.

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For Motion, Think Newport ™

The Optimum in Quality Control Newport operates under the ISO 9001 registered quality system. As a result, our exemplary quality system is audited by a third party. As a further measure of our commitment to quality, we perform internal audits routinely to ensure we are compliant with our procedures. At Newport, we ensure that quality is built into the process and monitor quality through closed loop performance metrics.

We Make It Right Should things not go according to plan, Newport has put in place closed loop corrective action systems. Complaints are entered into our customer management database and made directly accessible to our executive staff. This information is then reviewed for immediate corrective action. Once the root cause and course of corrective action has been determined, this information is provided to you in writing.

Examples of OEM Products Newport is at the cutting edge of OEM technology and design, delivering standard and bespoke value for money solutions in materials, manufacturing, assembly and motion control. Our solutions serve a broad variety of applications from lithography and photovoltaics to industry, research and defense.

Laser Radar Atmospheric Observation

High-speed, low profile rotation stage developed for a LIDAR remote atmospheric observation system. The stage is based on the URS100 rotation stage and features a precision belt drive to achieve a scanning speed of 720 °/s. The wobble error is maintained within 50 µrad.

Automotive Sensor Testing

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Standard BGS80PP Goniometric cradle with custom stepper motor used for quality control of adaptive cruise control sensors for the automotive industry. Another application for the same stage is for calibrating laser targeting systems. These goniometric cradles rotate on a transverse axis above the platform and offer maximum free access to the rotating part. This simplifies system layout compared to the use of 360° rotation stages.

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For Motion, Think Newport ™

Aviation Simulation

Azimuth/elevation system used for image alignment within a professional aircraft simulator. The system is made of standard rotation stages with custom brackets and metrology.

3D Micro-Fabrication

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X-ThetaZ-Y-ThetaZ motion system for high accuracy 3D micro-fabrication of ceramic components by micro-deposition (ink-jet technology). Newport developed and delivers the complete motion platform including granite structure, cable management and control electronics. The application requires a dynamic accuracy of ±3 µm accuracy over 300 x 300 mm while the stage is moving at 500 mm/s speed. Other demanding requirements are less than 300 ms settling time and 20 nm incremental motion on the lower Y-axis.

Electrical Discharge Machining

XYZ linear stage assembly for electrical discharge machining. The application requires high repeatability in XY and very high stiffness and straightness in vertical direction. More than one hundred of these machines are installed worldwide and have continued to work successfully many years, 24 hours per day.

DNA Analysis

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Linear stage developed for a high-throughput DNA microarray scanner. The stage is capable of performing 5 µm incremental steps in less than 100 ms with high precision and at a high duty cycle. To meet this demanding throughput requirement, the drive chain stiffness and component reliability were specially adapted.

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For Motion, Think Newport ™

Single Molecule DNA Sequencing

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The NanoPZ actuators offer 30 nm incremental adjustment capability over 12.7 mm range. They are perfectly suited for alignment of crucial optical setups such as those included in single-molecule DNA sequencers. Newport delivers standard actuators and a special PC-card controller for this application.

Optical Surface Profiling

This custom cradle assembly is used for motorized tip and tilt motion in an optical surface metrology system. The assembly allows large angle tilts without lateral motion of the field of view. As the system rotates the entire microscope scan head, a high load capacity and position stability is required.

Tactile Metrology for Optic and Automotive Industry

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3-axis part handling system for automated surface form and finish measurement of multi-featured parts. Newport supplies allow fully automated measurement routines to reduce operating errors and to free up operators time. The high stability and repeatability of the motion stack allows highly repeatable measurements, crucial especially when analyzing features such as small angles and radii.

Film Thickness Measurements

Non-contact film thickness and refractive index measurement tool for the semiconductor and solar industry. This tool is mainly determined for R&D and off-line production quality control. The use of standard motion components allows a flexible adaptation to specific customer needs.

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For Motion, Think Newport ™

Semiconductor Wafer Metrology

This XY-ThetaZ motion system allows in-situ inspection of 300 mm wafers on a minimum footprint of 450 x 450 mm. Throughput, low-cost, accuracy, and cleanliness were major design criteria in the development of this sub-system, which can yield speeds up to 300 mm/s and 720 °/s and accuracies down to 10 µm over the surface area of the wafer.

Flat Panel and PCB Inspection

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This system is used for large area 3D critical dimension metrology of flat panels and PCB’s. The split gantry system allows inspection of large panel sizes up to 600 x 600 mm on a minimum footprint. Newport delivers the complete motion sub-system including granite, vibration isolation and control electronics.

Maskless Lithography and Micro-Manufacturing

This special version of our LTA actuators provides 120 N axial load capacity, a non-rotating tip and spherical joints on both sides. It is perfectly suited for building custom multi-axis motion devices. Typical applications are custom Z-tip-tilt platforms for micro-manufacturing, maskless lithography of PCB’s, and flat panel processing/inspection.

Laser Scribing of Thin-Film PV Cells

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Newport’s IMS-LM linear motor stages provide fast and accurate scribing of PV substrates yielding the smallest possible dead zones.

Quality Control

Hexapods offer motion in all 6 degrees of freedom (XYZ, tip, tilt, and rotation) in a very compact envelope and with maximum access to the moving platform. They are ideally suited for complex quality control, simulation or calibration systems that need to control several degrees of motion.

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For Motion, Think Newport ™

Precision Actuation in Engineered OEM Sub-Systems

 Integration of precision actuators into custom-designed beamalignment systems.

• Picomotor™ OEM actuators with <30 nm precision • OEM high-speed actuation platform • Engineered sub-systems • Sophisticated control electronics

Our New Focus™ precision Picomotor™ actuators are widely used in OEM applications including semiconductor lithography, industrial manufacturing, metrology and test applications. Picomotor actuators deliver 30 nm set-and-forget precision motion control and are customized for UV, vacuum, high-radiation, e-beam and other OEM environmental conditions. For instance, our Ultrahigh-Vacuum (UHV) Picomotor actuators and Picomotor Actuator Ultra are very lowoutgassing actuators proven in demanding OEM applications. For closed-loop performance, these actuators can incorporate encoders. Additionally, we provide engineered OEM sub-systems incorporating our Picomotor actuators and customized OEM optomechanical components and assemblies. These OEM precision motion control solutions are engineered for OEM-specific requirements and are customizable for OEM environmental conditions. To complete the solution, we also deliver sophisticated control electronics to drive the actuators using feedback devices. Beyond our standard drivers and controls, we engineer custom control electronics for OEM applications.

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For Motion, Think Newport ™

Partnering for Success – Newport’s OEM Technology Platforms Newport has built upon decades of experience in motion solutions to partner with customers in creating customized OEM technology platforms that cater to application-specific needs. These platforms have been successfully implemented in partnership with OEM's in the semiconductor industry in wafer inspection and lithography applications, for example. Other applications include flat panel display (FPD) inspection and processing and laser scribing of thin-film photovoltaic panels. These customized technology platforms are designed from leading technologies and combine the collective knowledge of Newport in materials, manufacturing, assembly and motion control. Technologies such as air bearings, linear and rotary ball bearings, high resolution direct encoders, linear motors, piezos, flexures, ceramic materials and vibration isolation are optimally integrated into these platforms to address the customer's specific requirements. A major part of this technology knowledge comes from supplying numerous and proven standard motion products over the years to industry, research and defense. Newport supports the customer's product development process by engaging early on with collaborative discussions on the requirements and solutions until the optimum platform that meet those requirements is agreed upon. Collaboration continues past stages of development into the actual implementation of the platform into the customer's final product.

OEM Project Leaders We are with you every step of the way, with a team consisting of engineering, manufacturing, logistics, marketing and customer service for maximum support. We view this team as an integral part of your organization that reports directly to your project team.

Your Foundation of Support Behind our OEM group are highly skilled teams of engineers and scientists who help you configure a solution to your specific application. Working together in an open, collaborative basis to solve problems has proven to be the fastest, most efficient method to deliver results.

Service and Support Newport has a global infrastructure to ensure that after sales service and support extends on-site, at your facility or your customers facility. Our ability to solve your problems has no borders or time restrictions. Cooperative service agreements and extended warranties for specific support levels are available. Our factory-trained technicians bring test equipment and spare parts on-site to service our systems. Metrics can be established to track your product’s service history.

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For Motion, Think Newport ™

Air Bearing Stage Capabilities & Solutions Newport’s reputation for being the premier supplier of high-precision motorized stages is exemplified by our full line of Air Bearing Positioning Systems. From the all-new DynamYX® Datum® capable of 5 G acceleration and nanometer accuracy to the evolutionary HybrYX™ air and mechanical bearing “hybrid” stage, Newport has the knowledge and expertise needed to address the most complex and demanding motion control applications. Newport currently offers air bearing solutions from three families of products. For the highest levels of positioning performance in all categories DynamYX offers single-plane air bearing designs for both wafer and reticle applications. The HybrYX™ family blends mechanical bearings with air bearings in a single-plane architecture to provide a cost-effective solution for applications where performance is only needed in a few key areas. For single axis, split XY, and gantry applications the SinguLYS™ line of stage and self-supporting bridge configurations combine high performance with modularity ideal for a wide range of markets. Within each of these three families are a variety of features and options intended to suit the specific needs of your application.

DynamYX® Technology

Ceramic Carriage

Ceramic Guide

Granite Base

Single plane XY air bearing Granite base Ceramic moving elements Integrated pressure vacuum air bearing elements Ultra-low profile architecture

DynamYX air bearing stages are focused on applications requiring the highest levels of accuracy, repeatability, and overall system throughput. q

HybrYX™ Technology Single plane XY air bearing hybrid Granite base Ceramic Y-axis carriage Integrated pressure vacuum air bearing elements Truck-and-rail mechanical bearings

HybrYX stages are engineered to provide exceptional velocity regulation, straightness, flatness, and MTBF. q

SinguLYS™ Technology Single-axis air bearing All-ceramic construction Integrated pressure vacuum air bearing elements Stage and bridge configurations

SinguLYS family provides a modular approach for single-axis, split-XY, and long-travel Gantry Applications.

Clean and Simple Architecture of DynamYX includes Three Monolithic Elements

Newport’s philosophy of “designed-in” precision is a shared feature of all Newport air bearing stages. Our designs minimize the number of stage elements (bases, carriages, reference surfaces) and incorporate critical alignment (reference) features as to greatly reduce and/or eliminate the need for complex (and costly) assembly, alignment, and testing procedures. This design philosophy is achieve by creating monolithic structures with tolerances integral to the manufacturing process of each component. Pressure area Vacuum area Newport stages feature pressurevacuum air bearings that are directly machined into the ceramic elements. 

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For Motion, Think Newport ™

DynamYX® Family of Stages for Semiconductor Wafer Processing and Inspection Newport is heavily involved in the 450 mm wafer initiative, supplying the DynamYX to the industry. DynamYX was designed to provide equipment manufacturers in the semiconductor industry with a tool capable of achieving the highest levels of precision and throughput. DynamYX provides high resolution dynamic positioning of a wafer chuck or other similar substrate in two orthogonal translation axes from a single-plane carriage. A vertical (Z) axis with tip-tilt function and a rotary axis for wafer offset correction may be added on the carriage beneath the wafer chuck. Over the years, the form and function of DynamYX has evolved to keep pace with customer requirements. Today the DynamYX family consists of four specific designs each with their own specific features and benefits:

DynamYX® Datum® 450 and 450GT

scan QR code to watch video

Key Performance Values Acceleration: 3G X-Axis, 2G Y-Axis Velocity: 1500 mm/s Repeatability: 10 nm Accuracy: 50 nm Natural frequency: 300 Hz (20 kg load)

DynamYX® Datum® 450's heritage started from the DynamYX 300 and GT stages, where a simple three-piece architecture and designed-in precision have been satisfying demanding semiconductor applications for over ten years. More than a decade’s worth of technological advancement brings to DATUM a new, dynamically symmetric architecture constructed from next-generation ceramics with all-new micro-structure air bearings that, as in all Newport air bearing stages, are directly machined into the structure, providing low-profile, monolithic stage elements.

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For Motion, Think Newport ™

DynamYX® 300

Key Performance Values Acceleration: 0.75 G X-Axis, 1.5 G Y-Axis Velocity: 400 mm/s Repeatability: ±50 nm (long term) Accuracy: 0.4 µm Travel range: 520 x 340 mm

Newport introduced the DynamYX 300 more than 10 years ago as the first single-plane dual-axis Air Bearing system for 300 mm wafer inspection applications. Today, it is still a very capable solution for demanding applications such as wafer bump inspection, nano imprint lithography, laser direct writing, or optical calibration, and provides the smallest footprint of all DynamYX stages.

Key Performance Values

DynamYX® GT

Acceleration: 1.2 G X-Axis, 2 G Y-Axis Velocity: 800 mm/s Repeatability: ±50 nm (long term) Accuracy: 0.3 µm Travel range: 520 x 340 mm

Similar in design to the DynamYX 300, the DynamYX GT is intended for higher throughput applications with aggressive duty-cycles such as optical lithography or memory repair. Compared to the DynamYX 300 stage, the GT version has larger linear motors with integrated cooling in X & Y, a second (X2) linear motor, and more rigid structure with larger air bearings for increased load capacity.

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For Motion, Think Newport ™

DynamYX® Datum®

Key Performance Values Acceleration: 3 G X-Axis, 5 G Y-Axis Velocity: 1000 mm/s Repeatability: ±25 nm (long term) Accuracy: 0.2 µm (linear encoders) Natural frequency: 300 Hz

The all-new DynamYX® Datum® achieves performance never before possible in a commercially available air bearing stage. Datum is the bi-product of Newport’s continuous investment in advanced materials, proprietary fabrication techniques, and meticulous structural analysis and design. Our goal in creating Datum was to provide our customers with accuracy and throughput needed for today’s most demanding semiconductor applications as well as the ability to stay-ahead of tomorrow’s challenges. The DynamYX Datum stage meets the most challenging requirements for high aspect ratio wafer inspection, and optical or nano imprint lithography.

Key Performance Values Travel range: 290 x 155 mm XYZ position stability – On-air: ±10 nm – Clamped: ±1 nm XY repeatability : ±50 nm (1)

DynamYX® RS Reticle Stage

XY accuracy (1): 1 µm Natural frequency (reticle holder): 400 Hz 1)

After clamping.

The DynamYX® RS is dedicated to reticle inspection and repair applications. It is based on the same single plane architecture found in the DynamYX 300 & GT stages with a cantilevered substrate holder located away from all moving elements of the stage providing the cleanest possible environment. The full-open-aperture accommodates flexible optical component integration as well as ease of service access. The footprint of this architecture is much smaller than traditional open-frame solutions. w w w. n e w p o r t . c o m / m o t i o n - c o n t r o l f o r m o r e i n f o r m a t i o n

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For Motion, Think Newport ™

HybrYX™ – High-Performance Solutions for Semiconductor Wafer Inspection, Flat Panel, PCB and Photovoltaic Applications The HybrYX™ single plane XY hybrid stages provide the advantages of a single plane air bearing stage at a much lower cost than previously possible. HybrYX is well suited for semiconductor wafer inspection systems as well as being an excellent choice for use in large substrate (flat panel display and photovoltaic panel) inspection and processing tools.

HybrYX™ XY Hybrid Air Bearing Stage HybrYX™ stages blend the costeffectiveness of mechanical bearings with the precision of a single plane air bearing carriage to deliver a powerful combination of throughput, precision and value for demanding scanning applications.

Key Performance Values Travel range: 350 mm (step) x 650 mm (scan) Acceleration: 0.3 G (step)-Axis; 0.6 G (scan)-Axis Scanning velocity: 600 mm/s Better than 0.1% velocity ripple Step-and-settle time (25 mm, ±40 nm): <350 ms Accuracy: ±1 µm (over 300 x 600 mm)

HybrYX™ G5 Large Substrate Positioning Stage

Key Performance Values Travel range: 450 mm (step) x 1400 mm (scan) Acceleration: 0.15 G (step)-Axis; 0.25 G (scan)-Axis Scanning velocity: 1200 mm/s Better than 0.1% velocity ripple Step-and-settle time (25 mm, ±40 nm): <350 ms Accuracy: ±3 µm (over 400 x 1200 mm)

The HybrYX™ G5 is closely based on the smaller HybrYX stage, but with larger ceramic carriage and Y-axis beam. It is well suited for up-to Generation 5 flat panel display substrates or photovoltaic panels.

É The G5 stage is available with an optional Z-Tip-Tilt-Theta stage which incorporates Newport’s patented flexure guide found in the DynamYX GT stage. Like the DynamYX version, Active Plane™ drive technology provides fast, repeatable, and stable positioning for active surface tracking applications.

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For Motion, Think Newport ™

SinguLYS™ – Single Axis Air Bearing Stage and Bridge SinguLYS™ S-370 Air Bearing Stage

Ceramic (SiC) Body

Ceramic (SiC) Carriage

Pressure Vacuum Air Bearing

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Newport’s SinguLYS™ S-Series stage features ceramic components similar to those found in the DynamYX and HybrYX families. The light-weight carriage with integrated pressure-vacuum elements is guided by a precisely lapped ceramic (L-shape) body. The rigidity and compact footprint of the SiC body allows this high-precision stage to be used in tight spaces typically reserved for mechanical bearing designs. The S-370 is perfect for applications with very high duty-cycles and require low pitch/yaw, tight velocity regulation, and high cleanliness.

Design is comprised of two primary elements

• Ceramic body provides extremely straight and flat reference surface over full travel of stage • Ceramic carriage provides thermally stable reference and low moving mass Key Performance Values Travel range: 370 mm Incremental motion: 10 nm Max. speed: 500 mm/s Max. acceleration: 0.5 G Payload: 5 kg Controller: XPS / DRV02

Integrated Clean Cable Management

Capability to Integrate Y-Axis Mechanical Stage

SinguLYS™ B-1200 Air Bearing Bridge

Dimensions (mm): 640 (L) x 300 (W) x 150 (H)

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The Proprietary SiC ceramic beam used in the SinguLYS B-Series Bridge is 3 times lighter than steel and offers triple the stiffness of granite. These properties have allowed our customers to increase throughput in current and next-generation Flat Panel Display Inspection tools. The light and rigid pressure-vacuum air bearing carriage accommodates high (10 kg) cantilevered payloads and significantly reduces contamination to the payload below. Besides cleanliness, the frictionless design eliminates the need for mechanical bearing maintenance/lubrication. Key Performance Values Well suited applications include:

Travel range: 1200 mm

• Gen 8-11 flat panel display processing

Rated payload: 10 kg

• Thin film photovoltaic scribing

Max. speed: 2.5 m/s

• Precision pick & place assembly

Max. acceleration: 2 G

• Laser micromachining

Efficient iron-core linear motor

• Split XY wafer processing

Natural frequency: >100 Hz

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For Motion, Think Newport ™

ZT3 Z-Tip-Tilt-Theta with Active Plane™ Technology Key Performance Values Travel Range: 5 mm Z; ±2 mrad (tip/tilt); ±3° (Θz) High resolution linear encoders directly measure movement of all voice coil driven axes Minimum incremental motion: 5 nm XY Stiffness: >200 Hz Step & Settle: 5 µm displacement in 40 ms settled to ±20 nm  ZT3 shown as integrated assembly with DynamYX GT air bearing stage.

The patented ZT3 (Z-Tip-Tilt-Theta) is designed for applications such as optical lithography or wafer inspection that require active alignments of a wafer/chuck in vertical, tip, tilt, and theta. The Active Plane™ drive technology provides high-bandwidth repeatable and stable positioning without compromising the dynamic performance of the XY stage. The ZT3 integrates cleanly within the SiC carriage of DynamYX® GT and DynamYX® Datum® stages and is also available as a standalone version for use with other high performance XY stages. The compact design includes an air bearing theta off-set stage which clamps for ultimate stability and a lift-pin mechanism for simplified wafer loading and unloading. An optional piezo driven fine-theta axis with 0.1 µrad sensitivity may be added to allow for active yaw control/compensation.

113 mm

The ZT3 concept is homogenous with the DynamYX GT/Datum concept in that both are low mass, low profile, high stiffness, and noncontact design philosophies. With a chuck surface height of 113 mm above the top surface of the reference granite, a DynamYX GT with integrated ZT3 is the industry’s lowest profile 6-axis air bearing positioning system.

t Metal enclosure of standalone ZT3 shield internal components from surrounding environment

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For Motion, Think Newport ™

Capabilities in Advanced Ceramic Materials Newport’s expertise in ceramic materials is “home-grown” with a team of engineers specialized in material science and a fully equipped in-house machining center. These R&D and manufacturing resources allow us to quickly react to challenging customer requirements as well as maintain a constant effort in product advancements needed to keep pace with industry road maps. The basic properties of these core (ceramic) components used in the construction of our products are low mass (density is similar to aluminum) and high strength or stiffness (Young’s modulus similar to steel). In addition to stages which have very high accuracy and throughput capabilities, our systems are thermally stable with clean and repeatable transfer functions capable of being tuned with ease in applications requiring high servo bandwidth. Beyond positioning in the XY plane, Newport offers several options for precise control in Z, Tip, Tilt, and Theta, and can provide integrated solutions which include ceramic wafer chucks, lift pin mechanisms, and precision SiC interferometer mirrors with cost-effective replicated optical surfaces. Requirements for integrated optical bridge structures are often met using our expertise in granite and/or ceramics. When used with our XPS and SPS motion controllers Newport’s air bearing stages achieve the highest level of positioning performance by virtue of sophisticated control algorithms, multi-dimensional error mapping, proprietary low-noise encoder interpolators, and integrated interferometer control boards.

Ceramic Wafer Chuck

Key Performance Values É SiC wafer chuck on DynamYX® Datum®.

É Support for 200 & 300 mm wafers, <2% backside contact, 100 nm flatness per 50 mm2 area.

Provides lower mass and greater flatness Thermal coefficient of expansion values of stage and chuck are matched – Allows for direct mounting of chuck to carriage – Best possible wafer surface flatness and stability Minimal contact design for exceptional backside cleanliness

Key Performance Values Two or three axis measurement at plane of wafer

Interferometer Feedback and SiC Mirrors

Ceramic (SiC) mirrors with master replicated surfaces – Allows for direct mounting of mirrors to chuck – Replica process yields exceptional mirror quality and is more costeffective than lapping High thermal conductivity (> zerodur) minimizes thermal surface distorsion Rigid material with very high (~900 Hz) natural frequency

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É Ceramic plate with integrated (replica) interferometer mirrors on Newport XML crossed roller bearing stages can provide 50 nm XY bidirectional repeatability (when used with XPS controller and Renishaw interferometer).

É Thermally matched mirrors are directly affixed to ceramic wafer chuck.

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Very Large and Rigid Ceramic Bridge Structures

Most of our systems are delivered with an overhead bridge structure that allows direct integration of the optical system. The bridge structure is an important piece to meet the overall system performance as precision and position stability are typically defined between the wafer and a reference point on the bridge. Newport has tremendous experience in materials and structural analysis and provides the optimum design solution for each application.

Material Properties of SiC, Granite and Other “Traditional” Air Bearing Stage Material Granite

Steel

Aluminum

SiC

Density: d

7.8

2.7

2.7–3.0

Young’s Modulus: E, (GPa)

210

210–350

Stiffness (E/d)

78–115

Thermal Conductivity: TC (W/m*K)

150

30–140

Thermal Expansion: TE (10-6/K)

4.0–4.8

 This material properties table above illustrates the advantages of Silicon Carbide (SiC) ceramic over other materials commonly found in stage and bridge designs. Newport has developed capabilities around several forms of SiC material and applies the technology according to the requirements of the given product or application.

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For Motion, Think Newport ™

Standard Products – Simply the Best! Decades of Unparalleled Performance Newport’s extensive range of standard motion products incorporates over 50 years of specialized knowledge in precision motion control. During this time, we have provided thousands of expert solutions for hundreds of different applications in: • Aerospace, defense and security

• Computer peripherals

• Laser research

• Bio-medical research

• Fiber optic communications

• Metrology

• Semiconductor wafer manufacturing

• Industrial manufacturing

We know what matters when it comes to precision motion control. We relish opportunities in new product development, taking the full range of applications into account and thoroughly analyzing and testing our products under the most extreme conditions. That’s how we can be assured that our products not only perform to their best capabilities under ideal circumstances, but will give optimum performance in your application and throughout the life of the product. Our product range undergoes a rigorous 100% metrology control with test certificates supplied free of charge – the only way to ensure that every product meets or exceeds performance expectations.

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Motorized Linear Stage Selection Guide

F I C ATI O

MOTORIZED ACTUATORS

MOTORIZED ROTATION STAGES

MOTORIZED VERTICAL STAGES

ANTE

For Motion, Think Newport â&#x201E;˘

MOTORIZED LINEAR STAGES

Motorized Linear Stages from Newport and New Focus are designed and built with over 50 years of experience in providing solutions to many markets including research and academia, industrial, semiconductor, aerospace and defense. Starting from the XM family of direct drive ultra-precision stages to the compact Agilis piezomotor linear stage, there are over 200 models of stages to choose from. Many more linear positioning solutions can be created by matching our popular manual stages with the wide selection of compatible motorized actuators. Linear motorized stages can be selected based on Travel, Minimum Incremental Motion, Repeatability, Accuracy, Speed, etc. To begin, use the selection guides below with more details in the following product family pages.

Mid-Range Travel Linear Stage Selection Travel Range (mm)

SPECIAL COLLECTIONS

MOTORIZED OPTICAL MOUNTS

CONTROLLERS AND DRIVERS

HEXAPODS

Series

Minimum Bi-directional Incremental Motion Repeatability (mm) (mm)

On-Axis Accuracy (mm)

Maximum Speed (mm/s)

Normal Load Capacity (Cz)(N)

XM Series Ultra-Precision Linear Motor Stages see page 34

50 - 350

0.01

0.08

1.5 - 3.0

300

100 - 300

GTS Series High-Precision Linear Stages see page 37

70, 150

0.1

0.2

2.0

100

ILS-LM Series HighPerformance Mid-Range Travel Linear Motor Stages see page 39

100 - 300

0.01

0.6

3.0 - 5.0

500

250

ILS Series High-Performance MidRange Travel Linear Stages see page 39

50 - 250

0.3 - 1.0

0.7 - 2.0

2.0 - 5.0

50 - 100

250

FMS Series Linear Metrology Stages see page 48

100 - 300

0.1 - 0.5

0.5 - 4.5

1.0 - 13.0

20 - 100

150

MTN Series Mid-Travel Steel Linear Stages see page 50

100 - 300

0.3

3.0 - 6.5

7.0 - 9.0

20 - 100

1000

UTS Series Mid-Travel Steel Linear Stages see page 52

50 - 150

0.3

3.5 - 6.0

4.5 - 8.0

10 - 40

100 - 200

FCL Series Intelligent Stepper Motor Linear Stages see page 56

50 - 200

0.15

4.5 - 5.0

4.0 - 10.0

250

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For Motion, Think Newport ™

MOTORIZED LINEAR STAGES

Miniature Linear Stage Selection

Travel Range (mm)

Minimum Incremental Motion(mm)

Bi-directional Repeatability (mm)

On-Axis Accuracy (mm)

NPX Series NanoPositioning Linear Stages see page 58

0.1 - 0.4

0.0002 - 0.008

Agilis™ Series Piezo Motor Driven Linear Stages see page 59

12, 27

0.05

0.5

VP-25X Precision Compact Linear Stages see page 45

0.01 - 0.1

0.14 - 0.2

2.0

40 - 60

MFA Series Miniature Steel Linear Stages see page 54

0.1

1.5

6.0

0.3 - 2.5

CONEX-MFACC Miniature Steel Linear Stages see page 53

0.1

1.5

6.0

0.3 - 2.5

Linear Stages with Integrated Picomotors see page 63

10 - 25

< 0.3

Depends on actuators and stages used

Linear Stages with Motorized Actuators see page 109

6 - 50

0.03 - 0.2

Depends on actuators and stages used

Travel Range (mm)

Minimum Incremental Motion(mm)

Bi-directional Repeatability (mm)

On-Axis Accuracy (mm)

Maximum Speed (mm/s)

Normal Load Capacity (Cz)(N)

IMS-LM Series High-Performance LongTravel Linear Motor Stages, see page 42

300 - 1200

0.02

0.5

9.0 - 30.0

1000

100 - 600

IMS Series High-Performance LongTravel Linear Stages see page 42

300 - 600

0.2 - 1.25

1.0 - 2.5

9.0 - 15.0

100 - 200

600

Series

Maximum Speed (mm/s)

Normal Load Capacity (Cz)(N) MOTORIZED VERTICAL STAGES

10 - 100

MOTORIZED ROTATION STAGES MOTORIZED ACTUATORS HEXAPODS

Long-Range Travel Linear Stage Selection CONTROLLERS AND DRIVERS

Series

MOTORIZED OPTICAL MOUNTS SPECIAL COLLECTIONS

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For Motion, Think Newport ™

Ultra-Precision Linear Motor Stages scan QR code to watch video

• Ultra-high Performance with Minimum Incremental Motion of 1 nm • Non-contact, direct-drive system ensures ultraprecision motion with high dynamics and reliability

MOTORIZED VERTICAL STAGES

MOTORIZED LINEAR STAGES

XM Series

• Sub-nm, high precision glass scale encoder provides accurate position feedback with 80 nm repeatability

• Ultra-quiet anti-creep crossed roller bearings assure ripple-free motion without cage migration

ANTE

Compliant

MOTORIZED ACTUATORS

RoHS

MOTORIZED ROTATION STAGES

• Extra-large, ironless, high-efficiency linear motor minimizes heat generation

F I C ATI O

The XM Series of Ultra-Performance Linear Stages deliver world-leading dynamic performance capable of consistent, reliable motion to 1 nm. Innovative and compact; XM stages provide robust, repeatable motion with outstanding accuracy on the most complex trajectories. Featuring precision engineered components and design that minimizes both wear and motor heating, XM performance maximizes your motion investment for the long-term. XM stages are stackable with other Newport stages to address multi-axis application needs. For critical positioning applications, micropositioning calibration service is available to improve the on-axis accuracy of XM stages to 1 mm per100 mm travel, using an error mapping compensation feature of XPS motion controllers. Applications include laser machining, semiconductor wafer process, sensor test and calibration, ultra-precision assembly and more. A test certificate is provided with XM stages at no additional charge.

100.20

100.15

100.10

100.05

Speed (mm/s)

Position (nm)

HEXAPODS

5 4 3 2

CONTROLLERS AND DRIVERS

99.85

0 -1 0

99.80

Ultra-high performance XM Stages are capable of 1 nm incremental motion in a controlled environment using appropriate drive electronics.

0.7 0.6 0.5 Error (µm)

0.5

Straightness (µm)

XM stages provide exceptional speed stability in continuous scanning or laser machining applications. Shown is the speed of an XMS50 gathered at a rate of 1 kHz using an interferometer.

-0.5

0.4 0.3 0.2

-1

-1.5

Position (mm)

Time (s)

1.5

MOTORIZED OPTICAL MOUNTS

99.95 99.90

SPECIAL COLLECTIONS

100

0.1 0 -25

-15

-5

Position (mm)

XM stages deliver ripple-free motion as required by many precision scanning and wafer inspection processes. Shown is the straightness of an XMS50 during one forward and return cycle, measured with an interferometer.

Accuracy of a XMS50 stage after linear error correction. The data was taken dynamically at a rate of 10 kHz while the stage was moving at a speed of 100 mm/s. Both the encoder and the interferometer positions were acquired by an XPS motion controller with a latency of less than 50 ns between the different signals.

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For Motion, Think Newport ™

MOTORIZED LINEAR STAGES

Design Details Base Material

High-strength 7075 Aluminum

Bearings

Anti-creep crossed roller bearings

Drive Mechanism

3-phase synchronous ironless linear motor (without Hall effect sensors) Utilizes XPS controller patented feature that avoids large motions during initialization, without using Hall effect sensors.

Motor commutation

Done by the XPS controller using encoder signals.

Feedback

Heidenhain LIF 481 scale, 1 Vpp, 4 mm signal period, 32768-fold signal subdivision when used with XPS controller.

Limit Switches

Optical, on encoder's fiducial track

Origin

Optical, at center of travel, including mechanical zero signal

Drive Type

Brushless DC Servo

Cable (m)

5 (included)

MOTORIZED VERTICAL STAGES

Motor initialization

Model Travel Range (mm)

XMS

XML

50, 100, 160

210, 350

Minimum Incremental Motion(w/XPS-DRV02)

0.01

Minimum Incremental Motion4 (See note)

0.001

0.05

Bi-directional Repeatability1 (mm)

0.08 or ± 0.04

On-Axis Accuracy1 (mm)

1.5 or ± 0.75

3 or ± 1.5

Maximum Speed5 (mm/s)

300

Maximum Acceleration5(m/s2)

Max. Force (Cont.)5 (N)

Load Capacity, Horizontal (N)

100

300

Straightness, Flatness1,2 (mm)

1.5 or ± 0.75

3 or ± 1.5

50 or ± 25

100 or ± 50

Yaw1,2 (mrad)3

50 or ± 25

100 or ± 50

20,000

2.5, 3.5, 4.5

13, 22

MTBF (h) Weight (kg) 1

Shown are peak to peak, guaranteed specifications or ± half the value as sometimes shown. For the definition of typical specifications which are about 2X better than the guaranteed values, visit Newport.com for the Motion Control Metrology Primer. 2 Middle 80% of travel 3 To obtain arcsec units, divide the mrad value by 4.8. 4 Requires operation in a controlled environment. Contact Newport for custom driver configuration required. 5 Maximum value is driver dependent. Specification provided is based on use with XPS-DRV02.

XMS50

XMS100

Cz, Normal centered load capacity (N)

XML210

XML350 300

Kax, Compliance in roll (mrad/Nm)

3.5

2.0

1.5

0.5

Kay, Compliance in pitch (mrad/Nm)

6.0

2.5

2.0

0.7

Kaz, Compliance in yaw (mrad/Nm)

8.0

3.5

2.0

1.0

0.2

a, Construction Parameter

109

155

kαy

kα Cz

kαz

0.1

MOTORIZED OPTICAL MOUNTS

XMS160

100

CONTROLLERS AND DRIVERS

Load Characteristics

HEXAPODS

Pitch1,2 (mrad)3

MOTORIZED ACTUATORS

Uni-directional Repeatability (mm)

MOTORIZED ROTATION STAGES

Specifications

Model

Off-center load, Q≤Cz/(1 + D/a)

Cantilever distance in mm

Normal centered load capacity on bearings

SPECIAL COLLECTIONS

A typical assembly using XML210, XMS50 and GTS30V

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MOTORIZED ACTUATORS

MOTORIZED ROTATION STAGES

MOTORIZED VERTICAL STAGES

MOTORIZED LINEAR STAGES

For Motion, Think Newport ™

Ordering Information

Recommended Motion Controllers/Drivers

Model

Description

XMS50

Ultra-Precision Linear Motor Stage, 50 mm Travel, XMS Series

XPS see page 127

XMS100

Ultra-Precision Linear Motor Stage, 100 mm Travel, XMS Series

XPS-DRV02, Standard Brushless DC Driver, see page 127

XMS160

Ultra-Precision Linear Motor Stage, 160 mm Travel, XMS Series

XPS-DRV02L, Low Power/Low Noise Driver, see page 127

XML210

Ultra-Precision Linear Motor Stage, 210 mm Travel, XML Series

XPS-DRV02P, High Power Driver, see page 127

XML350

Ultra-Precision Linear Motor Stage, 350 mm Travel, XML Series

GB50

Granite Base for XMS50

GB100

Granite Base for XMS100

GB160

Granite Base for XMS160

GB210

Granite Base for XML210

GB350

Granite Base for XML350

CAD

The flatness of the surface is a major factor in the positioning accuracy and repeatability of a motion system. Polished granite plates are among the flattest, commercially available surfaces. Granite’s tight flatness tolerance and extreme hardness make it logical option to complement Newport’s Ultra-Precision Linear Motor XM series stage. The GB series granite base plates feature 3 point mounting, to make-up for non-flat tables. Edge handles facilitate handling and locating the base plate on the work surface.

XML STAGES ONLY: 4 HOLES M6 THD, THRU XML STAGES ONLY: 4 HOLES M6 THD ON SQR 5.91 (150), THRU

2 x 4 HOLES M6 THD, THRU EXCEPT XML STAGES, DEPTH: .47 (12)

[ ] 2.00 (100.8)

DIMENSIONS IN INCHES (AND MILLIMETERS)

4 HOLES M4 THD, DEPTH: .24 (6) ON 3.94 x 2.95 (100 x 75) 1.97 (50)

HEXAPODS

XMS STAGES ONLY: 4 HOLES M4 THD, DEPTH: .24 (6) SQR 2.98 (75.6)

[ ] 3.94 (100)

EXCEPT XMS50: 4 HOLES M4 THD, DEPTH: .24 (6) ON B x C

[ ] 2.00 (100.8)

1.97 (50)

21°

4 HOLES M6 THD, DEPTH: F

.39 (10)

A 4.92 (125)

XMS100 XMS160 XML210 XML350

C –

D –

E 2.95 (75)

7.28 (185) 6.10 (155) 9.84 (250) 7.28 (185) 13.98 (355) 9.84 (250)

1.77 (45) 1.77 (45) 3.94 (100)

5.31 (135) 7.87 (200) 5.31 (135)

2.95 (75) 2.95 (75) 3.94 (100)

21.85 (555) 9.84 (250)

3.94 (100) 13.19 (335) 3.94 (100)

XMS50

F .28 (7)

G –

H –

J .39 (10)

K .28 (7)

XMS100 XMS160

.28 (7) .28 (7)

– –

.39 (10) .39 (10)

.59 (15) .59 (15)

XML210 XML350

.47 (12) .47 (12)

2.91 (74) 3.15 (80)

2.66 (67.5) 3.15 (80)

.59 (15) .59 (15)

– –

XMS: .41 (10.5) XML: .61 (15.5)

XMS: 1.97 (50) XML: 3.15 (80)

XMS: 4.92 (125) XML: 7.09 (180)

A XML350 ONLY: 4 HOLES C’BORED (REF. B) FOR M6 SCREW, THICKNESS UNDER SCREW HEAD: .59 (14.9)

XML STAGES 3.68 (93.5)

B –

XMS & XML STAGE CONNECTORS: SUB-D9M FOR MOTOR SUB-D9F FOR END-OF-RUNS & THERMISTANCE SUB-D15M FOR ENCODER

EXCEPT XMS50: 4 HOLES M4 THD, DEPTH: .24 (6) ON EACH SIDE

XML STAGES: EXIT FOR CONNECTORS

XMS50

5.91 (150)

2.95 (75)

XMS STAGES: EXIT FOR PIGTAIL CABLES

CONTROLLERS AND DRIVERS

XML STAGES ONLY: 3 HOLES M5 THD, AT 120° ON ø5.39 (137), DEPTH: .24 (6)

ø.24 +.0005 0 (6 H7)

3.94 (100)

MOTORIZED OPTICAL MOUNTS

See our website for CAD files

3.25 (82.5)

XMS STAGES XMS160 ONLY: 4 HOLES C’BORED (REF. B) FOR M6 SCREW, THICKNESS UNDER SCREW HEAD: .26 (6.5)

3.39 (86)

4 HOLES C’BORED (REF. A) FOR M6 SCREW, THICKNESS UNDER SCREW HEAD: .59 (14.9)

SPECIAL COLLECTIONS

K B1

.26 (6.5)

3.94 (100)

B1 A1

5.91 (150)

MOUNTING SURFACE, HEIGHT: .017 (.5)

3.94 (100)

1.97 (50)

3.94 (100)

1.97 (50)

4 HOLES COUNTERBORED (REF. A) FOR M6 SCREW, THICKNESS UNDER SCREW HEAD: .26 (6.5)

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For Motion, Think Newport ™

GTS Series MOTORIZED LINEAR STAGES

High-Precision Linear Stages • Ultra-quiet anti-creep crossed roller bearings assure ripple-free motion and outstanding trajectory accuracy without cage migration

• Very low friction ball screw drive avoids stick-slip effects and ensures 100 nm incremental motion capability

ANTE

F I C ATI O

Design Details

1.2

––––– Target Position ––––– Interferometer Position

High-strength 7075 Aluminum Anti-creep crossed roller bearings

Drive Mechanism

8 mm diameter, backlash-free, ground ball screw

Drive Screw Pitch (mm) 2 Feedback

Linear steel scale, 20 mm signal period, 0.05 mm resolution, RS422 differential output

Limit Switches

Optical Optical, at center of travel, including mechanical zero signal DC Servo

Cable (m)

3 (included)

0.8 0.6 0.4 0.2 0 -0.2 0

10 Time (s)

GTS stages deliver 100 nm motion sensitivity with high reliability and stability.

CONTROLLERS AND DRIVERS

Origin Drive Type

HEXAPODS

Base Material

Position (µm)

Bearings

MOTORIZED ACTUATORS

The GTS Series high-precision linear stages are engineered to provide outstanding trajectory accuracy in a compact, robust, and cost effective package with 100 nm Minimum Incremental Motion. Featuring anti-creep crossed roller bearings via geared retainers, a high-torque DC motor, and a low friction ball screw, GTS stages are capable of precise, ripple-free motion with no cage migration. Advanced asymmetric body design with an engineered flexible preload is insensitive to non-ideal mounting surfaces and it provides consistent results over varying temperatures. The extra thin and compliant carriage has been optimized for different load conditions including XY configurations and high vertical load capacity, providing excellent bi-directional repeatability of ± 0.1 mm. Typical applications include surface scanning, test and calibration, optical component alignment and attachment, and high-precision optical delay lines.

MOTORIZED ROTATION STAGES

Compliant

RoHS

MOTORIZED VERTICAL STAGES

• Integrated linear encoder with 50 nm resolution provides high sensitivity and ensures highly repeatable and accurate motion

Specifications GTS150

150

Minimum Incremental Motion (mm)

0.1

Uni-directional Repeatability (mm)

0.15

Bi-directional Repeatability1 (mm)

0.2 or ± 0.1

2 or ± 1

Maximum Speed (mm/s)

Straightness, Flatness1,2 (mm)

1 or ± 0.5

2 or ± 1

Pitch1,2 (mrad)3

60 or ± 30

80 or ± 40

Yaw1,2 (mrad)3

60 or ± 30

80 or ± 40

20,000

2.7

3.6

MTBF (h) Weight (kg)

SPECIAL COLLECTIONS

0.2 or ± 0.1

On-Axis Accuracy1 (mm)

MOTORIZED OPTICAL MOUNTS

GTS70

Travel Range (mm)

Model

A typical assembly with a GTS150, a GTS70 linear stage and a URS100 rotation stage.

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For Motion, Think Newport ™

MOTORIZED LINEAR STAGES

Load Characteristics and Stiffness Z D

MOTORIZED VERTICAL STAGES MOTORIZED ROTATION STAGES

Model

Description

GTS70

High Precision Linear Stage, 70 mm Travel, GTS Series

GTS150

High Precision Linear Stage, 150 mm Travel, GTS Series

QH Cz

kαy X

Recommended Motion Controllers:

kα kαz

XPS see page 127

+Cx

ESP301 see page 131 SMC100CC see page 133

–Cx

Model

GTS70

GTS150

Cz, Normal centered load capacity

100 N

-Cx, +Cx, Axial load capacity Kax, Compliance in roll

MOTORIZED ACTUATORS

Ordering Information

25 N

20 N

10 mrad/Nm

5 mrad/Nm

Kay, Compliance in pitch

10 mrad/Nm

5 mrad/Nm

Kaz, Compliance in yaw

10 mrad/Nm

5 mrad/Nm

Q, Off-center load

Q ≤ Cz/(1+D/100)

Where D = Cantilever distance in mm

Dimensions HEXAPODS

4 HOLES M6 THD ON SQR 3.97 (100.8) DEPTH: .24 (6)

4 HOLES M6 THD ON 2.95 x 3.94 (75 x 100) DEPTH: .24 (6)

MOUNTING SURFACE

MODEL SHOWN: GTS150 DIMENSIONS IN INCHES (AND MILLIMETERS)

0.01

GTS70

CONTROLLERS AND DRIVERS

GTS150

A 5.91 (150) 8.86 (225)

B .59 (15) .79 (20)

C 3.35 (85) 3.19 (81)

D 5.91 (150) 4.92 (125)

2.76 (70)

4 HOLES M4 THD ON SQR 2.95 (75) DEPTH: .24 (6)

4 HOLES M4 THD ON 100.8 x 75.6 DEPTH: .24 (6)

1.08 (27.5)

D SUB-D25M CONNECTOR

MOTORIZED OPTICAL MOUNTS

1.97 (50) .68 (17.3) A

4.92 (125) B

3.54 (90)

1.53 (38.8)

.04 (1)

SPECIAL COLLECTIONS

.39 (10)

CAD

See our website for CAD files

2.98 (75.6)

MOUNTING SURFACE, HEIGHT: .017 (.5)

ø.43 (11)

“n” HOLES ø.31 (7.8) COUNTERBORED ø.45 (11.5)

.42 (10.6)

3.97 (100.8)

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2.08 (52.8)

For Motion, Think Newport ™

ILS Series MOTORIZED LINEAR STAGES

High-Performance Mid-Range Travel Linear Stages • High stiffness, FEM optimized extruded aluminum body avoids thermal bending effects

• Ball screw drive version allows rapid movement with short step and settling time

MOTORIZED VERTICAL STAGES

• Precision recirculating ball bearing slides provide accurate linear motion without ball cage migration

• LM version with 3-Phase synchronous ironless linear motor with linear steel scale

ANTE

F I C ATI O

ILS Version

ILS-LM

PP, CC, CCL1

Travel Range (mm)

HEXAPODS

Specifications HA 50, 100, 150, 200, 250

100, 200, 300

1.0

0.3

Uni-directional Repeatability (mm)

1.0

0.4

Bi-directional Repeatability2 (mm)

2.0 or ± 1.0

0.7 or ± 0.35

0.6 or ± 0.3

On-Axis Accuracy2

Maximum Speed (mm/s)

3 or ± 1.5 4 or ± 2 5 or ± 2.5 7.5 or ± 3.75 10 or ± 5

ILS50 ILS100 ILS150 ILS200 ILS250

PP, CCL: 50 CC: 100

0.01

4 or ± 2 3 or ± 1.5 4 or ± 2 6 or ± 3 7.5 or ± 3.75

ILS100 ILS200 ILS300

100

3 or ± 1.5 4 or ± 2 5 or ± 2.5 5004

50 or ± 25 100 or ± 50 150 or ± 75 200 or ± 100 250 or ± 125

ILS100 ILS200 ILS300

220 or ± 110 270 or ± 135 300 or ± 150

Yaw2,3 (mrad)

ILS50: ILS100: ILS150: ILS200: ILS250:

50 or ± 25 75 or ± 37.5 100 or ± 50 130 or ± 65 150 or ± 75

ILS100 ILS200 ILS300

75 or ± 37.5 130 or ± 65 200 or ± 100

20,000 ILS50CC: 4.2, ILS100CC: 4.5, ILS150CC: 4.8, ILS200CC: 5.1, ILS250CC: 5.4

ILSCCL used with the SMC100CC controller only Shown are peak to peak, guaranteed specifications or ± half the value. For the definition of typical specifications which are about 2X better than the guaranteed values, visit Newport.com in the Motion Control Metrology Primer. 3 To obtain arcsec units, divide mrad value by 4.8. 4 With a 44V driver (such as the XPS-DRV02 board of the XPS controller) 2

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SPECIAL COLLECTIONS

Weight(kg)

MOTORIZED OPTICAL MOUNTS

Pitch2,3 (mrad)

ILS50: ILS100: ILS150: ILS200: ILS250:

MTBF (h)

CONTROLLERS AND DRIVERS

Minimum Incremental Motion (mm)

ILS50 ILS100 ILS150 ILS200 ILS250

MOTORIZED ACTUATORS

The ILS Series linear stages are available from 50-300 mm travel and offer high performance at low cost. Fast, submicron minimum incremental motion is provided in a highly stiff and robust package. Features include: recirculating ball bearing slides to provide excellent payload capabilities and long life; FEM-optimized extruded aluminum body to avoid bending effects or deflection under load. The ILS series are available in ball screw and linear motor drive versions. The preloaded, backlash-free ballscrew version provides rapid motion with fast step and settling times. For PP, CC and CCL models, position measurements are read with a 4000 pts/rev. encoder mounted directly on the screw. The HA model features an integral linear scale providing 0.1 mm resolution feedback. The linear motor version ILS-LM series employs a centered, high efficiency 3-phase synchronous ironless, linear motor as driving element, providing high speed, high acceleration and high system responsiveness. The ILS series stages are ideal for many precision industrial applications such as semiconductor wafer inspection, micro-electronics test and assembly, pick and place, DNA sequencing and laser machining.

MOTORIZED ROTATION STAGES

Compliant

RoHS

scan QR code to watch video

MOTORIZED LINEAR STAGES

For Motion, Think Newport ™

Design Details ILS Base Material Bearings

ILS-LM

Drive Screw Pitch (mm)

Feedback

Origin MOTORIZED ROTATION STAGES

Backlash-free ball screw

3-phase synchronous ironless linear motor (without Hall effect sensors)

–

CC, CCL, PP: Screw mounted rotary encoder, 4,000 pts/rev, index pulse HA: Linear steel scale, 20 mm signal period

Linear steel scale, 20 mm signal period, 1 Vpp

Limit Switches

Cable Length (m)

kαy

kα

+ Cx – Cx

Optical Optical, at center of travel, including mechanical zero signal 3 (included)

ILS (PP, CC, CCL, HA) Load Illustration

5 (included)

MTBF (h)

20,000

Dynamic Specifications (LM Models) (M-)ILS100LM

Model

MOTORIZED ACTUATORS

Extruded Aluminum Double-row recirculating ball bearings

Drive Mechanism MOTORIZED VERTICAL STAGES

Load Characteristics and Stiffness

(M-)ILS200LM

Maximum Acceleration, No Load (m/s2)

Max. Force (Cont.) (N)

Max Force (Peak) 4 s (N)

(M-)ILS300LM

kαy

kα Cz

kαz

For the definition of specifications, visit Newport.com in the Motion Basics and Standards. ILS-LM Load Illustration

HEXAPODS CONTROLLERS AND DRIVERS MOTORIZED OPTICAL MOUNTS

Cz, Normal center load capacity on bearings +Cx/-Cx, Direct/Inverse load capacity on X axis

Model

Travel Drive (mm) 50 CC 100 CCL 150 MILS HA 200 PP 250 (2) LM 300 (1) 1) Only for LM drive version. 2) 100, 200 and 300 mm travels only. M-: For metric version CC: DC motor CCL: DC motor for SMC100CC controller HA: DC motor with linear encoder PP: Stepper motor LM: Linear motor

ILS-LM

ILS

Ordering Information Series

Example: The ILS150HA is an ILS stage with 150 mm travel, a DC motor drive with linear encoder, in English version.

250 N <40 N

kax, Compliance in roll

15 mrad/N.m

kay, Compliance in pitch

10 mrad/N.m

kaz, Compliance in yaw

10 mrad/N.m

Q, Off-center load

Q≤Cz/(1 + D/60)

D, Cantilever distance in mm

Recommended Motion Controllers/Drivers: XPS (see page 127) ESP301 (see page 131) SMC100 (see page 133)

ILSCCL and ILSPP only

Motor cables are included.

SPECIAL COLLECTIONS

An RVS80 (see page 82) mounted in a vertical configuration with an EQ120 bracket to an ILS stage.

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Two IMS stages (see page 42), one ILS stage, and one EQ120 bracket in an XYZ configuration.

–

For Motion, Think Newport ™

MOTORIZED LINEAR STAGES

Dimensions (ILS PP, CC, CCL and HA) L1

4.33 (110) 2.36 (60)

4.53 (115)

2.24 (57) L2

.63 (16)

3.03 (77)

3.94 (100)

4.00 (101.6)

3.00 (76.2)

SUB-D25M CONNECTOR

MOTORIZED ROTATION STAGES

n1 x 2 CLEARANCE HOLES FOR M6 SCREW

MODEL SHOWN: ILS200 DIMENSIONS IN INCHES (AND MILLIMETERS)

n2 x 2 CLEARANCE HOLES FOR 1/4-20 SCREW

Dimensions for CC, CCL and PP A

ILS50 (M-ILS50)

ILS100 (M-ILS100)

ILS150 (M-ILS150)

3 in.

Dimensions for HA

8 (203)

14 (358)

4.8 (123)

15.5 (394)

6.3 (159)

10 (253)

16 (408)

4.8 (123)

17.5 (444)

6.3 (159)

12 (303)

18 (458)

4.8 (123)

19.4 (494)

6.3 (159)

ILS200 (M-ILS200)

100 mm

3 in.

14 (353)

20 (508)

4.8 (123)

21.4 (544)

6.3 (159)

ILS250 (M-ILS250)

100 mm

3 in.

16 (403)

22 (558)

4.8 (123)

23.4 (594)

6.3 (159)

.41 (10.5)

1.18 (30)

4.72 (120)

1.18 (30)

.77 (19.5)

EACH SIDE: 2 HOLES M4 THD, DEPTH: .31 (8)

EACH SIDE: 7 HOLES M4 THD, DEPTH: .31 (8)

.47 (12)

4 HOLES M4 THD ON 2.95 x .31 (75 x 8) DEPTH: .31 (8)

CONTROLLERS AND DRIVERS

3.94 (100)

HEXAPODS

Dimensions (ILS-LM)

MOTORIZED ACTUATORS

Model (Metric)

MOTORIZED VERTICAL STAGES

4.33 (110)

4.53 (115) 2.58 (65.5)

2.36 (60)

CAD

4.33 (110)

n1 x 2 HOLES CLR FOR M6 SCREWS

3.0 (76.2)

3.94 (100)

L 3.0 (76.2)

3.0 (76.2)

n2 x 2 HOLES CLR FOR 1/4-20 SCREWS

See our website for CAD files MOTORIZED OPTICAL MOUNTS

MODEL SHOWN: ILS300LM

DIMENSIONS IN INCHES (AND MILLIMETERS)

4.0 (101.6)

MODEL (METRIC) (M-)ILS100LM (M-)ILS200LM (M-)ILS300LM

3.94 (100) n1 2 4 4

n2 2 4 4

SPECIAL COLLECTIONS

3.94 (100)

3.94 (100) C 1.08 (27.5) 2.76 (70) 3.54 (90)

TRAVEL 3.94 (100) 7.87 (200) 11.8 (300)

L 11.22 (285) 15.16 (385) 19.09 (485)

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For Motion, Think Newport ™

MOTORIZED LINEAR STAGES

IMS Series

High-Performance Long-Travel Linear Stages • Single axis or gantry configuration up to 1200 mm travel

MOTORIZED VERTICAL STAGES

• High stiffness, FEM optimized extruded aluminum body avoids thermal bending effects • Precision recirculating ball bearing slides provide accurate linear motion without ball cage migration

ANTE

• LM version for non-contact drive system with high dynamic response and high reliability in a small footprint

MOTORIZED ROTATION STAGES MOTORIZED ACTUATORS HEXAPODS

CONTROLLERS AND DRIVERS

Compliant

RoHS

• Preloaded, backlash-free ballscrew drive allows rapid movement with short step and settling time

F I C ATI O

The IMS Series linear stage complements the ILS Series by providing longer linear travel ranging from 300 to 1200 mm. The IMS stages feature a robust design and high performance at low cost, making them cost-effective solutions for precision industrial and laboratory applications. Features include: recirculating ball bearing slides to provide excellent payload capabilities and long life; FEM-optimized extruded aluminum body to avoid bending effects or deflection under load. The IMS series are available in ball screw and linear motor drive versions. The preloaded, backlash-free ballscrew version provides rapid motion with fast, step and settling times. For PP and CC models, position measurements are read with a 4000 pts/rev. encoder mounted directly on the screw. The CCHA model features an integral linear scale providing 0.1 mm resolution feedback. The linear motor version IMS-LM series employs a centered, high efficiency 3-phase synchronous ironless, linear motor as driving element, providing high speed, high acceleration and high system responsiveness. The IMS series stages are ideal for many precision industrial applications such as semiconductor wafer inspection, micro-electronics test and assembly, pick and place, DNA sequencing or laser machining. The IMS-LM-SA version with 4-pt mounting is ideal for delay lines and other applications on non-flat mounting surfaces.

Design Details

Ordering Information IMS

Base Material Bearings

Double-row recirculating ball bearings with caged balls

Drive Mechanism

Backlash-free ball screw

3-phase synchronous iron core linear motor (no Hall effect sensors)

–

Drive Screw Pitch (mm)

Feedback

CC, PP: Screw mounted rotary Linear steel scale, 20 mm encoder, 4,000 pts/rev, signal period, 1 Vpp, index pulse 32768-fold signal subdivision CCHA: Linear steel scale, when used with 20 mm signal period XPS controller

Limit Switches Origin MOTORIZED OPTICAL MOUNTS

Cable (m)

Optical Optical 5 (included)

Dynamic Specifications (LM Models) Maximum Speed (mm/s), No Load

SPECIAL COLLECTIONS

IMS-LM Extruded Aluminum

Model

Series

Travel Drive 4-Point (mm) Mounting 300 Example: 400 CC The M-IMS800LM-SA is a 500 CCHA metric version of IMS MIMS 600 stage with 800 mm travel, PP 800 (1) a linear motor drive and (2) LM -SA 1000 (1) 4-point mounting. 1200 (1) 1) Only for LM drive version. 2) 800, 1000 and 1200 mm travels available. M-: For metric version CC: DC motor with rotary encoder CCHA: DC motor with linear encoder PP: Stepper motor with rotary encoder LM: Linear motor SA: 4-point mounting

500

Maximum Acceleration (m/s2), No Load

Max. Force (Cont.) (N)

100

Max Force (Peak) (N)

140

For the definition of specifications, visit Newport.com for the Motion Basics and Standards.

Recommended Motion Controllers/Drivers: XPS see page 127 ESP301 see page 131

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IMS-PP Only

For Motion, Think Newport ™

Specifications Travel Range (mm)

CCHA

300, 400, 500, 600 0.2

0.02

Uni-directional Repeatability (mm)

1.25

0.5

Bi-directional Repeatability1 (mm)

2.5 or ± 1.25

1 or ± 0.5

0.5 or ± 0.25

IMS300: IMS400: IMS500: IMS600:

10 or ± 5 12.5 or ± 6.25 15 or ± 7.5 20 or ± 10

100

IMS300: IMS400: IMS500: IMS600:

8 or ± 4 11 or ± 5.5 12.5 or ± 6.25 15 or ± 7.5

200

IMS300 IMS400 IMS500 IMS600 IMS800(SA) IMS1000(SA) IMS1200(SA)

200

500

Yaw1,2 (mrad)

IMS300: 100 or ± 50 IMS400: 150 or ± 75 IMS500: 150 or ± 75 IMS600: 150 or ± 75

IMS300: IMS400: IMS500: IMS600: IMS800(SA): IMS1000(SA): IMS1200(SA):

100 or ± 50 150 or ± 75 150 or ± 75 150 or ± 75 300 or ± 150 300 or ± 150 300 or ± 150

MOTORIZED ACTUATORS

IMS300: 150 or ± 75 IMS400: 150 or ± 75 IMS500: 150 or ± 75 IMS600: 250 or ± 125

150 or ± 75 150 or ± 75 150 or ± 75 250 or ± 125 500 or ± 250 400 or ± 200 550 or ± 275 450 or ± 225 600 or ± 300 500 or ± 250

MOTORIZED ROTATION STAGES

Pitch1,2 (mrad)

IMS300: IMS400: IMS500: IMS600: IMS800: IMS800SA: IMS1000: IMS1000SA: IMS1200: IMS1200SA:

MTBF (h)

9 or ± 4.5 11 or ± 5.5 15 or ± 7.5 20 or ± 10 25 or ± 12.5 30 or ± 15 35 or ± 17.5

MOTORIZED VERTICAL STAGES

1.25

Maximum Speed (mm/s)

20,000

Weight(kg)

IMS300:17; IMS400:19; IMS500:21; IMS600:23, IMS800; 24, IMS1000:28, IMS1200:32

HEXAPODS

300, 400, 500, 600, 800, 1000, 1200

Minimum Incremental Motion (mm)

On-Axis Accuracy, Guaranteed1 (mm)

IMS-LM(-SA)

MOTORIZED LINEAR STAGES

IMS (M-IMS) PP

Load Characteristics and Stiffness IMS (CC, PP, CCHA) Cz, Normal centered load capacity-

IMS-LM

IMS-LM-SA

600 N

100 N

<30 N

–

kax, Compliance in roll

–

1 mrad/N.m

kay, Compliance in pitch

0.2 mrad/N.m

kaz, Compliance in yaw

1 mrad/N.m

D Cx

2 mrad/N.m 2 mrad/N.m

1 mrad/N.m

Q, Off-center load

QH, QV ≤ Cz / (1 + D/90) and QH, QV ≤ Cz / (1 + D/90) and QV must be ≤ Cx QV must be ≤ Cx D, cantilever distance in mm between the center of the mass of the load and the bearings center.

MOTORIZED OPTICAL MOUNTS

Z D

kαy

kα

+Cx

–Cx

IMS-LM Load

kαz

IMS Load

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SPECIAL COLLECTIONS

CONTROLLERS AND DRIVERS

-Cx, +Cx, Axial load capacity

For Motion, Think Newport ™

Dimensions (IMS PP, CC, CCHA) 3.54 (90) 1.10 (28)

7.09 (180)

MOTORIZED VERTICAL STAGES

MOTORIZED LINEAR STAGES

4.45 (113)

MODEL SHOWN: IMS300

2.96 (75.2)

MOTORIZED ROTATION STAGES

DIMENSIONS IN INCHES (AND MILLIMETERS)

1.81 (30)

L2 5.91 (150)

5.91 (150)

MOTORIZED ACTUATORS

n1 x 2 CLEARANCE HOLES FOR M6 THD SCREW

6.0 (152.4)

5.91 (150)

5.0 (127)

SUB-D25M CONNECTOR

5.91 (150)

5.0 (127)

n2 x 2 CLEARANCE HOLES FOR 1/4-20 THD SCREW

5.0 (127)

MODEL (METRIC) (M-)IMS300LM

n1 4

n2 4

TRAVEL 11.81 (300)

L1 26.30 (668)

L2 20.20 (513)

(M-)IMS400LM (M-)IMS500LM

4 4

4 6

15.75 (400) 19.69 (500)

30.24 (768) 34.17 (868)

24.13 (613) 28.07 (713)

(M-)IMS600LM

23.62 (600)

38.11 (968)

32.01 (813)

An RV160 (see page 82) vertically mounted with an EQ180 to an IMS stage.

HEXAPODS

Dimensions (IMS-LM) L

MODEL SHOWN: IMS300LM

CONTROLLERS AND DRIVERS

CAD

7.09 (180)

DIMENSIONS IN INCHES (AND MILLIMETERS)

SIDE VIEW (M-)IMS300LM TO (M-)IMS600LM

7.05 (179)

3.54 (90) 1.10 (28) .83 (21)

.83 (21)

MOTORIZED OPTICAL MOUNTS

5.91 (150)

SIDE VIEW (M-)IMS800LM(-SA) TO (M-)IMS1200LM(-SA) n1 x 2 HOLES CLR FOR M6 SCREW

6.0 (152.4)

5.91 (150)

4.36 (111)

7.09 (180)

SPECIAL COLLECTIONS

5.91 (150)

5.0 (127)

n2 x 2 HOLES CLR FOR 1/4-20 SCREW

5.0 (127)

MODEL (METRIC) (M-)IMS300LM

n1 4

n2 4

TRAVEL 11.81 (300)

L 21.85 (555)

(M-)IMS400LM (M-)IMS500LM (M-)IMS600LM

4 4 6

4 6 6

15.75 (400) 19.69 (500) 23.62 (600)

25.79 (655) 29.72 (755) 33.66 (855)

(M-)IMS800LM (M-)IMS1000LM (M-)IMS1200LM

6 7 8

– – – 4 HOLES ON 26 x 6 (600 x 150)

31.49 (800) 39.36 (1000) 47.23 (1200) 31.49 (800)

44.48 (1130) 52.35 (1330) 60.22 (1530) 44.48 (1130)

4 HOLES ON 28 x 6 (750 x 150) 4 HOLES ON 34 x 6 (900 x 150)

39.36 (1000) 47.23 (1200)

52.35 (1330) 60.22 (1530)

(M-)IMS800LM-SA (M-)IMS1000LM-SA (M-)IMS1200LM-SA

IMS1000LM

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See our website for CAD files

For Motion, Think Newport ™

VP-25X MOTORIZED LINEAR STAGES

Precision Compact Linear Stages scan QR code to watch video

• 25 mm travel in ultra-compact profile

MOTORIZED VERTICAL STAGES

• High sensitivity with 10 nm Minimum Incremental Motion • Integrated linear encoder for highly repeatable, precision motion • Innovative, fixed reading-head design avoids any moving cables • 20,000 hours MTBF with low friction ballscrew ANTE

MOTORIZED ROTATION STAGES

Compliant

RoHS

F I C ATI O

Load Characteristics and Stiffness

Design Details Bearings

Recirculating ball bearings

Drive Mechanism

Backlash-free ball screw

Drive Screw Pitch (mm)

Limit Switches

Optical

Motor

1.5 (included)

(M-)VP-25XA

Travel Range (mm)

(M-)VP-25XL

Minimum Incremental Motion (mm)

0.1

0.01

Uni-directional Repeatability (mm)

0.15

0.07

Bi-directional Repeatability1 (mm)

0.2 or ± 0.1

On-Axis Accuracy1 (mm)

kαy

kα kαz

+Cx

–Cx

0.14 or ± 0.07 2.0 or ± 1.0 25

Pitch1 (mrad)2

100 or ± 50

Yaw1 (mrad)2

100 or ± 50 20,000 1.5

For the definition of specifications, visit Newport.com’s section on Motion Basics and Standards.

+Cx, -Cx, Axial load capacity k x, Compliance in roll

60 N 40 N 20 mrad/N.m

kay, Compliance in pitch

20 mrad/N.m

kaz, Compliance in yaw

30 mrad/N.m

Q, Off-center load

QH, QV ≤ Cz / (1+D/30)

Where D = Cantilever distance in mm between the center of the mass of the load and the bearings center Distance between top surface and bearings center

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22.3 mm

SPECIAL COLLECTIONS

Cz, Normal centered load capacity

MOTORIZED OPTICAL MOUNTS

Maximum Speed (mm/s)

CONTROLLERS AND DRIVERS

Specifications

DC Servo

Cable Length (m)

Optical, at center of travel, including mechanical zero signal

Origin

Weight (kg)

.88 (22.3)

.41 (10.3)

HEXAPODS

Linear steel scale, 20 mm signal period. VP-25XA: RS422 output; VP-25XL: 1 Vpp analog sine-cos output

Feedback

MTBF (h)

MOTORIZED ACTUATORS

The VP-25X Series linear stage provides high-precision positioning performance in an ultra-compact form factor. A low friction ball screw drive provides robust, reliable performance with excellent thrust and minimal heat induced position drift. Combined with excellent minimum incremental motion of 10nm and travel of 25mm, the VP-25X is ideal for applications requiring fine manipulation of small parts. Featuring a manual adjustment knob, VP-25X stages are versatile enough to handle automated and non-automated tasks alike. Typical applications include fiber alignment, microassembly, and micro-machining. Available in VP-25XA and the finer MIM, VP-25XL models.

MOTORIZED VERTICAL STAGES

MOTORIZED LINEAR STAGES

For Motion, Think Newport ™

Recommended Motion Controllers:

Ordering Information Model (Metric)

Description

VP-25XA (M-VP-25XA)

Precision Compact Linear Stage, 25 mm, 0.1 mm, DC Servo w/Tach

VP-25XL (M-VP-25XL)

Precision Compact Linear Stage, 25 mm, 0.005 mm, DC Servo w/Tach

VP-BK (M-VP-BK)

Multi-Axis Bracket for M-VP-25X Linear Stages, Metric

VP-25XA-XYZL (M-VP-25XA-XYZL)

Compact XYZ Stage Stack, Left-handed, M-VP-25XA Stages with Bracket, Metric

VP-25XA-XYZR (M-VP-25XA-XYZR)

Compact XYZ Stage Stack, Right-handed, M-VP-25XA Stages with Bracket, Metric

VP-25XL-XYZL (M-VP-25XL-XYZL)

Compact XYZ Stage Stack, Left-handed, M-VP-25XL Stages with Bracket, Metric

VP-25XL-XYZR (M-VP-25XL-XYZR)

Compact XYZ Stage Stack, Right-handed, M-VP-25XL Stages with Bracket, Metric

VP-BP

Universal Base Plate

VP-BC

Base Clamp Set, VP Series Stages, Set of Four

MOTORIZED ROTATION STAGES

562-RAIL-3.7

Length: 3.7 in. (94 mm) Length: 1 in. (25.4 mm)

VP-25XA and VP-25XL

ESP301 see page 131

Only VP-25XA

SMC100CC (see page 133)

Only VP-25XA

Motor cables are included.

CAD

Dovetail rail for ULTRAlign™ positioning system: 561-RAIL-1

XPS (see page 127)

See our website for CAD files

Note: XYZ stacks are assembled with ±50 mrad XY orthogonality; ±100 mrad XZ and YZ orthogonality.

Dimensions .61 (15.6)

1.54 (39) .29 (7.4)

4.34 (110.3) 2 HOLES .06 (1.6), SPACING: .375 (9.525)

5 HOLES 8-32 (M4) THD

MOTORIZED ACTUATORS

12.7 .79 (20.1) 16 HOLES 1/4-20 (M6) THD, DEPTH: .35 (9), SPACING: 1.0 (25)

12.7

4.34 (110.3)

3.94 (100)

1.50 (38.1)

HEXAPODS

3.58 (91)

.45 (11.4)

.47 (12)

4 HOLES ø.18 (4.5) C’BORED

2.95 (75)

SPECIAL COLLECTIONS

MOTORIZED OPTICAL MOUNTS

CONTROLLERS AND DRIVERS

SUB-D25M CONNECTOR, CABLE LENGTH 1.5 M

VP25XL-XYZR single-mode fiber alignment setup

VP-25X stages can easily be assembled into an XYZ configuration with optional VP-BK bracket. Shown here is a left-handed stack, (M-)VP-25X-XYZL.

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2.0 (50)

1.20 (31) 2.20 (56)

1.0 (25)

9 HOLES 1/4-20 (M6) THD, DEPTH: .35 (9), SPACING: 1.0 (25)

1.70 (43,5)

MOTORIZED LINEAR STAGES

XYZ Assembly

.52 (13.25)

.50 (12.7)

3.0 2.32 (76.2) (59)

2.32 (59.15)

1.0 (25)

2 x 2 HOLES .06 (1.6), SPACING: .375 (9.525)

2 x 4 HOLES 4-40 (M3) THD, DEPTH: .24 (6)

7 HOLES 8-32 (M4) THD, DEPTH: .24 (6)

MOTORIZED ROTATION STAGES

6.35 (161.3) MAX. 4.33 (110) .52 (13.5)

5.08 (129)

2.0 (50)

8 HOLES 1/4-20 (M6) THD, DEPTH: .35 (9), SPACING: 1.0 (25)

1.67 (42.5)

2.0 (50) 1.59 (40.5)

5.79 (147)

.64 (16.5)

MOTORIZED ACTUATORS

1.0 (25)

5.45 (138.45) MAX.

MOTORIZED VERTICAL STAGES

DIMENSIONS IN INCHES (AND MILLIMETERS) NOTE: DIMENSIONS IN BRACKETS APPLY ONLY TO METRIC VERSIONS

2.0 (50)

.14 (4)

4.13 ±.50 (105 ±12.7)

HEXAPODS

2 x 4 HOLES 4-40 (M3) THD, DEPTH: .24 (6)

CONTROLLERS AND DRIVERS

VP-BP Drawing 6.50 (165)

5.31 (135)

.39 (10) 4 HOLES M4 THD ON 3.94 x 2.95 (100 x 75)

4 HOLES ø.31 (8) C'BORED ø.51 (13) ON 4.96 x 3.97 (126 x 100.8)

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SPECIAL COLLECTIONS

4 HOLES ø.26 (6.6) C'BORED ø.44 (11.2) ON 4 x 3 (101.6 x 76.2)

MOTORIZED OPTICAL MOUNTS

4 HOLES ø.26 (6.6) C'BORED ø.44 (11.2) ON SQR 3.94 (100)

For Motion, Think Newport ™

MOTORIZED LINEAR STAGES

FMS Series

Linear Metrology Stages

scan QR code to watch video

• All-steel construction combines high stiffness and thermal stability resulting in robust and repeatable measurements MOTORIZED VERTICAL STAGES

• Anti-creep crossed roller bearings provide exceptional straight, smooth motion, reducing measurement noise and eliminating measurement variability • Precision ground ball screw made for high speed motion, enabling higher throughput capability

F I C ATI O

Design Details

HEXAPODS CONTROLLERS AND DRIVERS

ANTE

The FMS Series precision linear stages have been engineered to address the demanding applications of surface measurement and profilometry. Featuring monolithic steel construction, patent-pending preload technology and innovative anti-creep cross-roller bearings, FMS stages are capable of smooth motion with exceptional flatness and straightness. Steel construction and thermally-matched design insure optimal repeatability and stability. Typical applications include: contact and non-contact profilometry, mechanical and tribological testing, microstructure characterization and laser micromachining. FMS stages are available in CC, PP and PPHA models.

Base Material

Stainless Steel

Bearings

Crossed Roller Bearings

Drive Mechanism

8mm, precision ground ball screw

Drive Screw Pitch (mm)

Feedback

DC: Screw mounted rotary encoder, 4000 cts/rev, index pulse PP: No feedback PPHA: Steel scale, 50 nm

Origin

PP: optical, located ~9.5 mm from negative software limit CC & PPHA: Optical, located ~10.5 mm from negative software limit

Drive Type

DC Servo Stepper

Weight

100mm: 6.5kg, 200mm: 7.7kg, 300mm: 8.9kg

Cable (m)

3 (included)

Specifications Model

FMS-CC

MOTORIZED OPTICAL MOUNTS

Travel Range (mm)

0.1

0.11

Uni-directional Repeatability (mm)

1.5

0.2

Bi-directional Repeatability2 (mm)

3.0 or ± 1.5

4.5 or ± 2.25

0.5 or ± 0.25

100

Model

FMS100

FMS200

FMS300

On-Axis Accuracy (CC and PP)2 (mm)

6 or ± 3.0

10 or ± 5.0

13 or ± 6.5

1 or ± 0.5

2 or ± 1.0

3 or ± 1.5

1.5 or ± 0.75

3.0 or ± 1.5

6 or ± 3.0

Pitch2, 3 (mrad)

80 or ± 40

100 or ± 50

120 or ± 60

Yaw2, 3 (mrad)

20 or ± 10

30 or ± 15

40 or ± 20

Straightness, Flatness2 (mm)

FMS-PPHA

100 - 300 0.5

Maximum Speed (mm/s)

FMS-PP

Minimum Incremental Motion (mm)

On-Axis Accuracy (-PPHA)2 (mm) SPECIAL COLLECTIONS

MOTORIZED ACTUATORS

Compliant

RoHS

MOTORIZED ROTATION STAGES

• Ideal for surface metrology applications

0.1 mm with XPS; 0.5 mm with SMC100PP and ESP301 Shown are peak to peak, guaranteed specifications or ± half the value as sometimes shown. For the definition of typical specifications which are about 2X better than the guaranteed values, visit Newport.com for the Motion Control Metrology Primer. To obtain arcsec units, divide mrad value by 4.8. For the definition of specifications, visit Newport.com for the Motion Basics and Standards.

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For Motion, Think Newport ™

D Q

kαz

Model

FMS

Cz, Normal centered load capacity

150 N

-Cx, +Cx, Axial load capacity Kax, Compliance in roll

kα

Kay, Compliance in pitch

2 mrad/Nm

Kaz, Compliance in yaw

2 mrad/Nm

Q, Off-center load

+Cx

30 N 3 mrad/Nm

MOTORIZED VERTICAL STAGES

–Cx

MOTORIZED LINEAR STAGES

Load Characteristics and Stiffness

Q ≤ Cz/(1+D/80)

Where D = Cantilever distance in mm

X kαy

MOTORIZED ROTATION STAGES

Recommended Motion Controllers:

Ordering Information Model

Description

FMS100CC

100 mm Travel, DC Motor, Rotary Encoder

FMS100PP

100 mm Travel, Stepper Motor

FMS100PPHA

100 mm Travel, Stepper Motor, Linear Encoder

SMC100CC see page 133

FMS200CC

200 mm Travel, DC Motor, Rotary Encoder

Motor cables are included.

XPS see page 127 ESP301 see page 131

200 mm Travel, Stepper Motor 200 mm Travel, Stepper Motor, Linear Encoder

FMS300CC

300 mm Travel, DC Motor, Rotary Encoder

FMS300PP

300 mm Travel, Stepper Motor

FMS300PPHA

300 mm Travel, Stepper Motor, Linear Encoder

FMS-PPHA models are compatible with the XPS Controller only.

Dimensions

MOTORIZED ACTUATORS

FMS200PP FMS200PPHA

1.54 (39)

HEXAPODS

16 HOLES M6 THD (1) ON SQR 2.95 (75)

4 HOLES M6 THD (1) ON SQR 1.97 (50)

3.54 (90) 5.63 (143) 4 ACCESS HOLES FOR FIXING SCREW

DEPTH: .24 (6)

.63 (16)

4.69 (119)

FMS100: 6.42 (163) FMS200: 8.39 (213) FMS300: 10.35 (263)

4 HOLES ø.26 (6.6) C’BORED ø.43 (11) ON SQR 1.97 (50)

FMS300: 20.3 (515)

1.57 (40) SUB-D15M CONNECTOR

MODEL SHOWN: FMS300 DIMENSIONS IN INCHES (AND MILLIMETERS)

FMS200 AND FMS300: 4 HOLES ø.26 (6.6) C’BORED ø.43 (11)

FMS200: 5.91 x 1.97 (150 x 50) FMS300: 9.84 x 1.97 (250 x 50)

w w w. n e w p o r t . c o m / F M S - M C f o r m o r e i n f o r m a t i o n

See our website for CAD files

SPECIAL COLLECTIONS

CAD

MOTORIZED OPTICAL MOUNTS

FMS100: 12.4 (315) FMS200: 16.3 (415)

3.31 (84)

CONTROLLERS AND DRIVERS

HOLE M6 THD (1)

For Motion, Think Newport ™

MOTORIZED LINEAR STAGES

MTN Series

Mid-Travel Steel Linear Stages • All-steel construction combines high stiffness and thermal stability with a low profile design

MOTORIZED ROTATION STAGES

MOTORIZED ACTUATORS

F I C ATI O

• Vacuum compatible versions down to 10-6 hPa

The MTN Series linear stages are durable, all-steel construction linear stages with excellent stiffness, load capacity and thermal stability. They are available in DC and Stepper motor versions and are ideal for applications that require moving heavy loads with micron scale precision. Recommended for up to 300 mm travel, MTN stages can bear up to 100 kg with an axial load capacity up to 200 N. Features include: opposing single-row bearing surface, a diamond-corrected lead screw, a matched, precision-lapped nut and a non-migrating ball cage design. The nut design includes anti-backlash preloading and a sophisticated decoupling system ensuring little to no stage movement. The non-migrating ball cage design prevents any drift in vertical applications.

Load Characteristics and Stiffness

Design Details Base Material

Stainless Steel

Bearings

Linear ball bearings

Drive Mechanism

Backlash-compensated leadscrew

HEXAPODS

CC: 4 PP: 4

Drive Screw Pitch (mm) Feedback

CC: 20,000 pts/rev. PP: No encoder Optical

Origin

Centered

Cable (m)

3 (included)

CONTROLLERS AND DRIVERS

PP 100, 200, 300

Minimum Incremental Motion (mm)

MOTORIZED OPTICAL MOUNTS

0.3

Uni-directional Repeatability (mm)

2.5

1.5

Bi-directional Repeatability (mm)

3.0 or ± 1.5

6.5 or ± 3.25

On-Axis Accuracy (mm)

Maximum Speed (mm/s)

100 (no load)

Pitch (mrad)

Yaw1,2 (mrad)3

Weight (kg)

– Cx

Travel Range (mm)

1,2

x kα

(Preliminary)

Model

Cz + Cx

MTN

D Q

kαy X

Limit Switches

Specifications

MTN100: 7.7, MTN200: 11.1, MTN300: 14.5

Cz, Normal center load capacity on bearings

1000 N

+Cx, Direct load capacity on X axis

200 N (PE1, PE.1, PP.1) 150 N (PP1, CC.1) 100 N (CC1)

-Cx, Inverse load capacity on X axis

50 N

kax, Compliance in roll

5 mrad/Nm

kay, Compliance in pitch

10 mrad/Nm

kaz, Compliance in yaw

7 mrad/Nm

Q, Off-center load

QCz / (1 + D/100)

D, Cantilever distance in mm

MTN100: 8.4, MTN200: 11.8, MTN300: 15.2

SPECIAL COLLECTIONS

• Precision, backlash-compensated leadscrew and nonmigrating ball cage device

ANTE

RoHS

Compliant

MOTORIZED VERTICAL STAGES

• Supports up to 100 kg load with a high axial load capacity up to 200 N

Shown are peak to peak, guaranteed specifications or ± half the value as sometimes shown. for the definition of typical specifications which are about 2X better than the guaranteed values, visit Newport.com for the Motion Control Metrology Primer. 2 For 100 mm travel 3 20mm/s for vertical usage with maximum Cx 4 With V6 versions the maximum speed is reduced by a factor of two 5 To obtain arcsec units, divide mrad value by 4.8

Recommended Motion Controllers/Drivers: XPS (see page 127) ESP301 (see page 131)

For the definition of specifications, visit Newport.coms section on Motion Basics and Standards. Motor cables are included.

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For Motion, Think Newport ™

Travel Drive (mm) 100 CC MTN 200 PP 300 CC: DC motor PP: Stepper motor

MOTORIZED LINEAR STAGES

Ordering Information

Accessories

Series

MOTORIZED VERTICAL STAGES

Example: The MTN200PP is an MTN stage with 200 mm travel and a stepper motor drive.

Use EQ160 Series right-angle brackets for vertical mounting configurations.

9 HOLES M6 THD DEPTH: .39 (10), .98 (25) SPACING 4 HOLES M6 THD, ON SQR 2.48 (63) C’BORED FOR CAPTIVE SCREWS

4 HOLES M4 THD DEPTH: .31 (8), ON SQR 1.34 (34)

1.57 (40)

6.40 (162.5)

2 HOLES ø.41 (10.5) ACCESS FOR MOUNTING TO BODY ON SQR 1.98 (50.4)

SUB-D25M CONNECTOR

2 HOLES ø.41 (10.5) ACCESS FOR MOUNTING TO BODY ON SQR 2.48 (63)

MOTORIZED ACTUATORS

2.36 (60)

2.05 (52)

MOTORIZED ROTATION STAGES

Dimensions 2.28 (58)

MODEL SHOWN: MTN200PP DIMENSIONS IN INCHES (AND MILLIMETERS)

BOTH SIDES: 4 HOLES M6 THD, DEPTH: .31 (8) FOR ACCESSORIES AND HANDLING

BOTH SIDES: HOLE M5 THD, DEPTH: .39 (10) FOR GROUNDING

HEXAPODS

SQR 3.54 (90) ø1.57 (40)

.79 (20)

.31 (8) 2.36 (60)

STEPPER MOTOR DRIVE

B A

5.12 (130)

5.87 (149)

CONTROLLERS AND DRIVERS

HOLES ø.41 (10.5) ACCESS FOR CAPTIVE SCREWS TO CARRIAGE ON SQR 2.48 (63)

4 HOLES ø.30 (7.5) FOR MOUNTING ON SQR 1.97 (50) AND SQR 2.00 (50.8) 4 HOLES M6 THD DEPTH: .39 (10), ON SQR 5.04 (128)

4 HOLES ø.30 (7.5) FOR MOUNTING ON SQR 2.48 (63)

1.97 (50)

DC MOTOR DRIVE

MOTORIZED OPTICAL MOUNTS

2.00 (50.8) ø.94 (24)

3.86 (98)

A 2.95 (75) 3.03 (77) 3.54 (90) 3.62 (92) 3.54 (90) 3.62 (92)

2.20 (56)

–

11.65 (296) 5.94 (151)

4.69 (119)

3.94 (100) 6.00 (152.4) 15.59 (396) 7.91 (201)

6.14 (156)

9.84 (250) 8.00 (203.2) 19.53 (496) 9.88 (251)

w w w. n e w p o r t . c o m / M T N - M C f o r m o r e i n f o r m a t i o n

CAD

See our website for CAD files

SPECIAL COLLECTIONS

MODEL MTN100CC MTN100PP MTN200CC MTN200PP MTN300CC MTN300PP

4.70 (119.5)

For Motion, Think Newport ™

MOTORIZED LINEAR STAGES

UTS Series

Mid-Travel Steel Linear Stages • Up to 150 mm travel in very compact and ultra-low profile design

MOTORIZED VERTICAL STAGES

• All-steel construction offers high stiffness and high thermal stability • 20,000 cts/rev rotary encoder on DC motor versions enables 0.1 mm resolution for tightest position control

MOTORIZED ACTUATORS

ANTE

• Vacuum compatible versions up to 10-6 hPa

Compliant

RoHS

MOTORIZED ROTATION STAGES

• Economical stepper motor version with high motion sensitivity

F I C ATI O

The UTS Series linear stages feature low-profile design with all steel construction, ideal for environments where temperature is not very well controlled. They have been engineered for excellent stiffness, thermal stability and load capacity with travel ranges to 150 mm with Minimum Incremental Motion (MIM) of 0.3 mm. The DC motor version features an ultra-high resolution encoder mounted on the lead screw and a reduction belt providing precise incremental motion capability and high dynamic speed control. The stepper motor version is an economical solution for less demanding applications. The high output torque of the stepper motor minimizes the risk of lost steps and provides optimum MIM. All UTS Series Stages feature: a homogenous steel design, a diamond-corrected lead screw, and a precision lapped nut which includes anti-backlash preloading and a sophisticated decoupling system.

CONTROLLERS AND DRIVERS

HEXAPODS

Design Details Base Material

Stainless steel

Bearings

Linear ball bearings

Drive Mechanism

Precision ground backlash-compensated leadscrew with decoupling nut

Drive Screw Pitch (mm)

Feedback

CC: Screw mounted rotary encoder PP and PPV6: No feedback

Limit Switches

Optical

Origin

Optical, at center of travel

Drive Type

DC Servo, Micro Stepper

Cable Length (m)

3 (included) Example of an XY assembly with UTS50CC and UTS150CC

Specifications DC (CC)

Motorization Travel Range [ (mm)]

MOTORIZED OPTICAL MOUNTS

Minimum Incremental Motion (mm)

100

0.3

100

Bi-directional Repeatability2 (mm)

3.5 or ± 1.75

6 or ± 3

On-Axis Accuracy2 (mm)

4.5 or ± 2.25

Maximum Speed (mm/s)

5.5 or ± 2.75

150

0.31

Uni-directional Repeatability (mm)

6.5 or ± 3.25

5 or ± 2.5

403

7 or ± 3.5

8 or ± 4.0

204

Pitch2 (mrad)5

75 or ± 37.5

100 or ± 50

120 or ± 60

75 or ± 37.5

100 or ± 50

120 or ± 60

Yaw2 (mrad)5

50 or ± 25

70 or ± 35

90 or ± 45

50 or ± 25

70 or ± 35

90 or ± 45

3.3

3.8

MTBF SPECIAL COLLECTIONS

Stepper (PP, PPV6) 150

Weight (kg)

20,000 hrs with 5 kg load and 30% duty cycle 2.8

3.2

3.7

2.9

0.3 mm with XPS; 0.5 mm with SMC100PP or ESP301 2 Shown are peak to peak, guaranteed specifications or ± half the value as sometimes shown. For the definition of typical specifications which are about 2X better than the guaranteed values, visit Newport.com for the Motion Control Metrology Primer. 3 With axial loads greater than 1 kg the maximum speed must be reduced to 20 mm/s 4 10 mm/s for UTS-PPV6; 4 mm/s for UTS-PPV6 when used with SMC100PP 5 To obtain arcsec units, divide mrad value by 4.8

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For Motion, Think Newport ™

MOTORIZED LINEAR STAGES

Load Characteristics and Stiffness Z D Q αx

kαy

Cz, Normal centered load capacity

200 N

+Cx, Axial load capacity

50 N

-Cx, Inverse axial load capacity Y

10 N

Kax, Compliance in roll

10 mrad/Nm

Kay, Compliance in pitch

15 mrad/Nm

Kaz, Compliance in yaw

15 mrad/Nm

Q, Off-center load

–Cx

MOTORIZED VERTICAL STAGES

+Cx

Q ≤ Cz/(1+D/50)

D, Cantilever distance in mm

Model

Series

M-

UTS

Travel (mm) 50 100 150

Drive

Vacuum Prep. (1)

CC PP

MOTORIZED ROTATION STAGES

Ordering Information

Example: The UTS50CC is a UTS stage with 50 mm travel and a DC motor drive.

Vacuum compatible to 10-6 hPa. In this case max. speed and load capacity are divided by two. M-: For metric version CC: DC motor PP: Stepper motor 1)

MOTORIZED ACTUATORS

Dimensions 4 HOLES M4 THD ON SQR 1.34 (34) DEPTH: .16 (4)

HEXAPODS

4 HOLES M4 THD, C’BORED FOR CAPTIVE SCREW ON SQR 2.48 (63) .20 (5)

2.99 (76)

4.13 (105)

CONTROLLERS AND DRIVERS

SUB-D15M CONNECTOR

UTS50 UTS100 UTS150

A 7.24 (184) 9.21 (234) 11.18 (284)

B 3.54 (90) 4.53 (115) 5.51 (140)

4 HOLES ø.30 (Ø 7.5) TO ACCESS CAPTIVE SCREWS USED FOR FIXING THE STAGE

9 HOLES M6 THD, .98 (25) SPACING DEPTH: .47 (12)

H UTS-PP

MODEL SHOWN: UTS100PP

UTS-PPV6

DIMENSIONS IN INCHES (AND MILLIMETERS)

C .39 (10) .31 (8)

D 4.17 (106) – –

E 3.62 (92) 3.54 (90)

F .76 (19.7) .65 (16.5)

G 2.26 (57.5) 2.54 (64.5)

H 1.57 (40) 1.50 (38)

3.07 (78) UTS-CC & UTS-PP UTS-PPV6 1.41 (35.8) 1.67 (42.3) MAX. MAX.

D (ONLY UTS-PP)

BOTTOM VIEW OF THE UTS100CC 4 HOLES M5 THD ON SQR 92 DEPTH: .26 (7)

UTS-PPV6 .12 (3.15) MAX.

2.39 (109)

4 HOLES M4 THD, C’BORED FOR CAPTIVE SCREW ON SQR 2.48 (63)

.51 (13)

2.44 (62) 2.91 (74)

1.95 (49.5)

.26 (7) .47 (12)

SUB-D15M CONNECTOR 3.23 (82)

w w w. n e w p o r t . c o m / U T S - M C f o r m o r e i n f o r m a t i o n

Use the EQ100 Series right-angle brackets for vertical mounting configurations

CAD

See our website for CAD files

SPECIAL COLLECTIONS

2.91 (74)

4 HOLES ø.30 (7.5) TO ACCESS CAPTIVE SCREWS USED FOR MOUNTING ON THE CARRIAGE

MOTORIZED OPTICAL MOUNTS

1.26 (32) 1.24 (31.5)

For Motion, Think Newport ™

MOTORIZED LINEAR STAGES

MFA Series

Miniature Steel Linear Stages • 25 mm travel in a low-cost and compact design

MOTORIZED VERTICAL STAGES

• All-steel construction provides exceptional load capacity and stiffness • Precision-ground, double-row linear ball bearings ensure ultra-smooth and accurate linear travel

MOTORIZED ROTATION STAGES

F I C ATI O

• Vacuum-compatible versions to 10-6 hPa.

The MFA Series compact all-steel construction linear stages provide precision motion with 0.3 mm Minimum Incremental Motion and excellent stability and stiffness. The MFA-CC DC-motor version features an integrated gear-box and a motormounted high resolution rotary encoder. Faster motion with higher reliability and lower backlash makes it ideal for applications requiring small incremental motion with high dynamic speed and good repeatability. The MFA-PP and MFAPPD stepper motor versions are more economical solutions for less demanding applications. Additional features include: all-steel construction for high stiffness-to-weight ratio and excellent thermal stability; a double-row linear ball bearing design for ultra-smooth motion; and 4 widely spaced mounting holes for base mounting and XY/XYZ configurations. Typical applications for this stage are fiber optic alignment, laser diode research, bio-medical applications and inspection systems. The CONEX-MFACC is the MFA-CC linear stage with the integrated CONEX-CC controller/driver. The CONEX-CC is a very compact and inexpensive driver for Newport’s low power DC servo motor driven devices. For out-of-the box control, the CONEX-CC is preconfigured and delivered with the MFA-CC.

Design Details

Load Characteristics and Stiffness

Base Material

Stainless Steel

HEXAPODS

Bearings

Double row linear ball bearings

Drive Mechanism

Backlash compensated leadscrew

Drive Screw Pitch (mm)

Feedback

MFA-CC: 1:14

CONTROLLERS AND DRIVERS

αy

MFA-PP: 1:43 MFA-CC: Motor mounted rotary encoder; 2,048 cts/rev MFA-PP: None

Limit Switches

Vacuum compatible versions are available up to 10-6 hPa using DC motor (MFA-CCV6). Maximum load, speed and acceleration are divided by two.

MOTORIZED OPTICAL MOUNTS

MFA-PP

Minimum Incremental Motion (mm)

0.1

Uni-directional Repeatability (mm)

0.5

Bi-directional Repeatability1, 2 (mm)

1.5 or ± 0.75

On-Axis Accuracy (mm)

MTBF Weight (kg) 1

2 3

MFA-PPD

Travel Range (mm)

Yaw (mrad)1, 3

αz

±Cx

1.5 (included)

Specifications

Pitch (mrad)1, 3

Uses motor side limit for homing, typically < 5 mm repeatability

Cable (m)

Maximum Speed (mm/s)

Optical switches

Origin

Vacuum Compatibility

0.5

Reduction Gear

SPECIAL COLLECTIONS

• High-resolution, encoder feedback enables ultra-smooth motion with 100 nm sensitivity

MOTORIZED ACTUATORS

ANTE ED

RoHS

Compliant

MFA-CC

0.3

Cz, Normal centered load capacity

50 N

-Cx, +Cx, Axial load capacity

10 N

kax, Compliance in roll

60 mrad/Nm

kay, Compliance in pitch

10 mrad/Nm

Q, Off-center load

Q≤ Cz / (1 + D/20)

D, Cantilever distance in mm

1.5 or ± 0.75

6 or ± 3 0.3

1.0

2.5

200 or ± 100 100 or ± 50 10,000 h at a 1kg load with a 20% duty cycle 0.6

For the definition of specifications, visit Newport.com for the Motion Basics and Standards.

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For Motion, Think Newport ™

Description

MFA-CC

Miniature linear stage, DC motor

XPS (see page 127)

Except MFA-PP

MFA-PP

Miniature linear stage, stepper motor, 9-pin mini-DIN connector Compatible with NSC200 only

ESP301 (see page 131)

Except MFA-PP

MFA-PPD

Miniature linear stage, stepper motor, 25-pin D-Sub connector Compatible with SMC100PP, ESP301, and XPS

SMC100CC (see page 133)

Except MFA-PP and MFA-PPD

MFA-CCV6

Vacuum Compatible Miniature Linear Stage, DC Motor

SMC100PP (see page 133)

MFA-PPD only

CONEX-MFACC1

MFA-CC Linear Stage Integrated with CONEX Controller

NSC200 (see page 135)

MFA-PP only

CONEX-CC (see page 137 )

MFA-BK

Universal top plate for XZ and XYZ mounting

MFA-TP (M-MFA-TP)

Top Plate, MFA Series Miniature Linear Stage, English Thread

MFA-BP

Universal base plate

Included in CONEX-MFACC

MOTORIZED VERTICAL STAGES

Model

MOTORIZED LINEAR STAGES

Recommended Motion Controllers/Drivers

Ordering Information

Motor cables are included.

MOTORIZED ROTATION STAGES MOTORIZED ACTUATORS

CONEX-MFACC Integrated Linear Stage and Controller

Dimensions

MFA stages in an XYZ configuration

MFA-BP

MODEL SHOWN: MFA 4 HOLES C’BORED, FOR 4-40 (M3) SCREW

4 HOLES C’BORED FOR 4-40 (M3) SCREW ON SQR .79 (20)

MFA-PP: MINI-DIN9 CONNECTOR

DIMENSIONS IN INCHES (AND MILLIMETERS)

1.42 .79 (36) (20)

8 HOLES M3 THD

6 HOLES M3 THD, DEPTH: .20 (5)

1.42 (36)

ø.79 (20)

1.42 (36) 3.50 (89)

1.89 (48)

1.97 (50)

CONTROLLERS AND DRIVERS

.98 (25)

4 HOLES ø.26 (7,5) ON 2.98 x 1.0 (75.8 x 25.4)

4 HOLES M2 THD, DEPTH: .12 (3)

.79 (20)

MFA-PPD & MFA-CC: SUB-D25M CONNECTOR

.87 ±.49 (22 ±12.5)

.24 (6)

HEXAPODS

MFA-CC and MFA-PP

CABLE LENGTH 9.8 FT (3 M)

.79 (20)

.39 (10) 5.26 (133.5)

MOTORIZED OPTICAL MOUNTS

1.42 (36) 1.77 (45)

2 HOLES M3 THD, DEPTH: .20 (5)

MFA-TP 4 HOLES C’BORED FOR 4-40 (M3) SCREW ON 1.42 x .79 (36 x 20)

.24 (6)

MFA-BK 6 HOLES 8-32 (M4) THD

.38 (9.65)

.31 (8)

4 HOLES C’BORED FOR M2 SCREW .24 (6)

1.26 (32)

1.0 (25) 2.0 (50)

1.77 (45)

1.42 .79 (36) (20)

2 HOLES C’BORED FOR 4-40 (M3) SCREW

1.21 (30.65)

2.48 (63)

w w w. n e w p o r t . c o m / M F A - M C f o r m o r e i n f o r m a t i o n

.79 (20)

2.17 (55)

6 HOLES ø.24 (6)

SPECIAL COLLECTIONS

1.0 (25)

For Motion, Think Newport ™

MOTORIZED LINEAR STAGES

FCL Series

Intelligent Stepper Motor Linear Stages scan QR code to watch video

• Affordable integrated stepper motor controller and mid-range travel linear stage MOTORIZED VERTICAL STAGES

• Up to 200 mm travel with 150 nm sensitivity • Proven, robust stage construction with precision recirculating ball bearing

MOTORIZED ROTATION STAGES

ANTE

• Easy connection via the USB or directly via RS-422

MOTORIZED ACTUATORS

Compliant

RoHS

F I C ATI O

The FCL Series linear stages combine a fully integrated stepper motor controller (iPPTM technology) and mid-range travel linear stage in a small footprint. Similar to the CONEX series for DC motor, the FCL stage comes fully pre-configured and enables true out-of-the box control. The iPPTM technology used in the FC series completely eliminates controller or driver set up, allowing users to simply connect USB communication, plug in the power supply and start the motion GUI. Available in 50, 100 and 200 mm travel, features of the FCL stages include: FEM optimized aluminum body to minimize thermal expansions, robust construction of recirculating ball bearing for highly accurate linear motion and backlash-free ballscrew drive for rapid movement with short, step and settling time. Up to 4 FCL units can be daisy-chained and controlled with the same GUI.

Design Details

Load Characteristics and Stiffness

Base Material Motor

Aluminum Integrated iPP 2-phase step motor and controller/driver

Drive Mechanism Drive Screw Pitch (mm)

D Q

Bearing HEXAPODS

backlash free ball screw Recirculating Ball Bearings

Limit Switches

Optical

Origin

Optical at center of travel

Communication

RS422, USB

Cable

kαy

kα

+ Cx – Cx

Cables and power supply sold seperately.

CONTROLLERS AND DRIVERS

Specifications Travel Range (mm)

FCL50

FCL100

FCL200

100

200

Minimum Incremental Motion (mm)

0.15

MOTORIZED OPTICAL MOUNTS SPECIAL COLLECTIONS

15 mrad/N.m

kay, Compliance in pitch

10 mrad/N.m

10 or ± 5

kaz, Compliance in yaw

Bi-directional Repeatability (mm)

4.5 or ± 2.25

5 or ± 2.5

4 or ± 2

5 or ± 2.5

Maximum Speed (mm/s) 50 or ± 25

100 or ± 50

200 or ± 100

Yaw (mrad)

70 or ± 35

100 or ± 50

160 or ± 80

MTBF (h)

20,000

Shown are peak to peak, guaranteed specifications or ± half the value as sometimes shown. For the definition of typical specifications which are about 2X better than the guaranteed values, visit Newport.com for the Motion Control Metrology Primer. 2 After backlash compensation 3 To obtain arcsec units, divide mrad value by 4.8 For the definition of specifications, visit Newport.com’s section on Motion Basics and Standards.

10 mrad/N.m

Q, Off-center load

Pitch (mrad)1,3 1,3

<40 N

5 or ± 2.5

1.5

On-Axis Accuracy (mm)1

250 N

+Cx/-Cx, Direct/Inverse load capacity on X axis kax, Compliance in roll

Uni-directional Repeatability (mm) 1,2

Cz, Normal center load capacity on bearings

Q≤Cz/(1 + D/60)

D, Cantilever distance in mm

Ordering Information Model

Description

FCL50

50 mm Travel, iPP motor/controller

FCL100

100 mm Travel, iPP motor/controller

FCL200

200 mm Travel, iPP motor/controller

FC-PS40

Power supply, iPP step motor, RoHS

USB-RS422-1.8 FC-CB1

Cable adapter, USB to RS422, 1.8m 1m communication cable, daisy chain, RS422

Power supply and cables are sold separately.

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For Motion, Think Newport ™

MOTORIZED LINEAR STAGES

Dimensions 3.94 (100) 31 HOLES M6 THD DEPTH: .31 (8)

1.97 (50)

MOTORIZED VERTICAL STAGES

3.94 2.95 1.97 .98 (100) (75) (50) (25) 25°

SQR 4.33 (110)

.98 (25)

MOTORIZED ROTATION STAGES

4 HOLES M4 THD ON ø4.45 (113) DEPTH: .31 (8)

6 HOLES M4 THD AT 60° ON ø3.62 (92) DEPTH: .31 (8)

2.95 (75)

2.36 (60)

.08 (2)

3.94 (100)

n1 x 2 CLEARANCE HOLES FOR M6 SCREWS

DIMENSIONS IN INCHES (AND MILLIMETERS

n2 x 2 CLEARANCE HOLES FOR 1/4-20 SCREWS

.31 (7.8)

3.94 (100)

4.00 (101.6)

3.23 (82)

HEXAPODS

MODEL SHOWN: FCL200

4.69 (119)

MOTORIZED ACTUATORS

4.53 (115)

1.98 (50.2)

1.0 (25.3) 3.00 (76.2)

A – – 3.94 (100)

n1 2 2 4

B – – 3.0 (76.2)

n2 2 2 4

L1 L2 4.06 (103) 9.21 (234) 5.04 (128) 11.18 (284) 7.01 (178) 15.12 (384)

CONTROLLERS AND DRIVERS

MODEL FCL50 FCL100 FCL200

MOTORIZED OPTICAL MOUNTS SPECIAL COLLECTIONS

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For Motion, Think Newport ™

MOTORIZED LINEAR STAGES

NPX Series

NanoPositioning Linear Stages • Sub-nanometer piezoelectric positioning resolution

MOTORIZED VERTICAL STAGES

• Motion in X, XY, or XYZ • Piezoelectric travel range of up to 400 mm • Precision parallelogram design for accurate linear displacements

RoHS

• High resonant frequency for high dynamic applications

The NPX Series is a family of compact, long travel piezo-based linear stages providing nanometer resolution motion in one, two or three axis. These versatile stages are ideally suited for nanopositioning of small components such as mirrors, fibers, laser diodes, micro-optics, sensors, or cellular samples. NPX stages feature highly reliable, multi-layer, low-voltage piezoelectric transducer (PZT) stacks for high-duty cycle operations. A sophisticated, FEA-optimized, parallelogram solid state flexure guide system ensures perfect parallel motion and up to 400 mm travel range. Due to the frictionless guide principle, NPX stages are maintenance-free and are not subject to wear.Applications include optical delay lines, path length changes of interferometers, laser lithography, scanning microscopy, and patch-clamping, among others.

Specifications NPX200 (-D), NPX200Sg (-D)

CONTROLLERS AND DRIVERS

HEXAPODS

MOTORIZED ACTUATORS

MOTORIZED ROTATION STAGES

Compliant

NPX400 (-D), NPX400SG (-D)

NPXY100 (-D), NPXY100SG (-D)

NPXY200 (-D), NPXY200SG (-D)

NPXYZ100 (-D), NPXYZ100SG (-D)

Axes

X, Y

X, Y, Z

Travel per axis (± 10%), (mm) 1

200

400

100

200

100

Closed loop travel per axis (mm) 1, 2

160

320

160

Open loop resolution (nm) 3

0.4

0.8

0.2

0.4

0.2

Closed loop resolution (nm) 2

Typ. Repeatability (nm) 2

Capacitance (± 20%) (mF)

1.8

5.2

1.8

5.2

1.8

Resonant frequency, unloaded (Hz)

177

200

380/480

350/350

500/550/480

Resonant frequency, with 80 g load (Hz)

210/200/300

Resonant frequency, with 105 g load (Hz)

190/180/250

Resonant frequency, with 300 g load (Hz)

110/110/150

Axial stiffness (N/mm)

0.08

0.16

1.1/0.95

0.65/0.6520

1/1/1

Max centered load (N)

100

Max axial load (N) 4

110/95

40/40

40/40/32

Weight (g)

180

175

350

165

SPECIAL COLLECTIONS

MOTORIZED OPTICAL MOUNTS

Typical value measured with NPC3 and NPC3SG, (-20 V to +130 VDC range). 2 Applies to devices ending with SG in closed-loop control only. 3 Equal to rms noise value measured with NPC3 and NPC3SG controller. 4 Maximum load that can be applied in the direction of motion. For multi-axis systems, read as X/Y/Z.

Ordering Information*

Recommended Motion Controllers

Model

Description

XPS (see page 127)

NPXY100

Nanopositioning Open-loop XY Stage, 100 mm

NPC3 (see page 144)

NPXY100-D

Nanopositioning Open-loop XY Stage, 100 mm, XPS

NPXY100SG

Nanopositioning XY Stage, 100 mm, Strain-guage

NPXY100SG-D

Nanopositioning XY Stage, 100 mm, Strain-guage, XPS

NPXY100SGV6

Vacuum Nanopositioning XY Stage, 100 mm, Strain-guage

NPC3SG (see page 144)

* Selected examples only. See full product offering at Newport.com

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Use XPS-DRVP1

For Motion, Think Newport ™

Agilis™ Series

scan QR code to watch video

• Innovative Agilis Proprietary Piezo Technology

MOTORIZED VERTICAL STAGES

• 12 & 27 mm travel and 50 nm Minimum Incremental Motion

MOTORIZED LINEAR STAGES

Piezo Motor Driven Linear Stages

• Set-and-forget long term stability • Available with direct read encoder and CONEX controller

RoHS

Compliant

MOTORIZED ROTATION STAGES MOTORIZED ACTUATORS

The AG-LS25, AG-LS25-27 and CONEX-AG-LS25-27P are high precision miniature linear stages featuring Newport’s proprietary Agilis™ piezo motor. With ultra-high adjustment sensitivity, convenient programmable operation and compact design, Agilis stages provide outstanding motion performance at the cost of a high-quality manual stage. Precision motion is achieved by calibrated, pre-stressed linear ball bearings. The thermally matched stainless steel design and precision manufactured bearing surfaces provide ripple-free, low friction linear travel and angular deviations better than 100 mrad in any axis. The Agilis piezo motor is also directly coupled to the moving carriage with no intermediate screw or gear avoiding problems with coupling in drivetrain. In contrast to ultrasonic motors, the Agilis non-resonant motor makes small incremental adjustments more predictable with 50 nm incremental motion capability, ideal for ultra-sensitive alignments and adjustments. Available with integrated direct read encoder and CONEX Controller, the CONEX-AG-LS25-27P is wellsuited for applications where repeatability is critical. For vacuum applications, see V6 versions of Agilis.

Specifications Travel Range (mm) Minimum Incremental Motion, Linear (mm)1

Maximum Speed (mm/s) Normal Load Capacity (Cz) (N) Holding Force (N) Axial Load Capacity (+Cx) (N)3 Material

Cable Life Time Operating Temperature Storage Temperature 1

CONEX-AG-LS25-27P 27

0.05

0.1

0.2

100

0.5 with no axial load, >0.2 with 1.7 N axial load

0.4

2.5

3.5

1.5

Stainless Steel

125

1.2 m length, 4-wire mini-DIN connector Can extend cable length using AG-MD4-1.2 extension cable

1.2 m length, Integrated

> 1000 m (> 500,000 cycles of ± 1 mm motion)

+10 to +35 °C

-10 to +40 °C (in original packaging)

The step size for forward and backward direction is adjustable. With default settings, the step size for the forward direction varies from the step size for the backward direction and may be larger than 50 nm. Individual steps are not 100% repeatable. For absolute positioning, the CONEX-AG-LS25-27P uses an integrated encoder for closed-loop operation. The AG-LS25 an AG-LS25-27 stages determine the average step size by counting the number of steps between the limits. The execution of an absolute positioning may take up to 80 s on these stages. When used vertically, the axial load capacity is 0.4N.

Ordering Information

Recommended Motion Controllers/Drivers

Description

AG-LS25

Piezo Motor Driven Linear Stage, 12 mm travel

AG-LS25-27

Piezo Motor Driven Linear Stage, 27 mm travel

AG-LS25V6

Piezo Motor Driven Linear Stage, 12 mm travel, Vacuum Compatible

AG-LS25-27V6

Piezo Motor Driven Linear Stage, 27 mm travel, Vacuum Compatible

CONEX-AG-LS25-27P

Piezo Motor Linear Stage, Direct Encoder, Integrated Controller

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AgilisTM Series Controller, see page 138 SPECIAL COLLECTIONS

Model

MOTORIZED OPTICAL MOUNTS

CONTROLLERS AND DRIVERS

Weight (g)

AG-LS25-27

HEXAPODS

Absolute Positioning Accuracy (mm)2

AG-LS25

MOTORIZED LINEAR STAGES

For Motion, Think Newport ™

Dimensions Model AG-LS25 1.02 (26)

.51 (13)

.94 (24)

MOTORIZED ROTATION STAGES

MOTORIZED VERTICAL STAGES

HOLE M4 THD, DEPTH: .12 (3)

1.02 (26)

1.38 (35)

4 HOLES C’BORED FOR M3 SCREW ON SQR .79 (20)

4 HOLES M3 THD ON SQR .79 (20), DEPTH: .14 (3.5)

MODEL SHOWN: AG-LS25 DIMENSIONS IN INCHES (AND MILLIMETERS)

2 CABLES ø.07 (1.8) LENGTH: 45 (1140)

MOTORIZED ACTUATORS

MINI-DIN4M CONNECTOR

.51 (13)

HEXAPODS

1.97 (50)

CONTROLLERS AND DRIVERS

HOLE 8-32 THD, DEPTH: .24 (6)

.12 (3)

HOLE 8-32 THD, DEPTH: .12 (3)

1.02 (26)

1.38 (35) .65 (16.5)

HOLE M4 THD, DEPTH: .12 (3)

.79 (20)

.65 (16.5)

HOLE M4 THD, DEPTH: .24 (6)

MODEL SHOWN: AG-LS25-27 DIMENSIONS IN INCHES (AND MILLIMETERS)

6 HOLES M3 THD .79 (20) SPACING, DEPTH: .14 (3.5)

SPECIAL COLLECTIONS

MOTORIZED OPTICAL MOUNTS

MINI-DIN4M CONNECTOR

CONEX-AG-LS25-27P shown

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2 CABLES ø.07 (1.8) LENGTH: 45 (1140)

2 HOLES C’BORED FOR M3 SCREW .79 (20) SPACING

For Motion, Think Newport ™

MOTORIZED LINEAR STAGES

Multi-Axis Kinematic Alignment Stages

MOTORIZED VERTICAL STAGES

• <30-nm resolution • 4- and 5-axis aligner - easily align modulators and isolators • 6-axis aligner - ideal for semiconductor wafer alignment

RoHS

MOTORIZED ROTATION STAGES

Compliant

Model 8071 Four-Axis Tilt Aligner shown

The Multi-Axis Kinematic Alignment Stages increase the utility of our popular kinematic stages by motorizing each of the axes. The addition of Picomotor™ actuators to each stage allows remote high-resolution (<30-nm) adjustment of various combinations of X, Y, Z, x, and y. The four-axis and five-axis aligners are ideal for positioning modulators or isolators and for coupling light into waveguide devices. The six-axis aligner is ideal for semiconductor-wafer alignment.

8071 (8071-M)

8081 (8081-M)

8082 (8082-M)

8095 (8095-M)

Motorized Axes

Travel Range (mm)

X=5, Y&Z=3 Qx=8, Qy=10

Travel, Angular (°)

8081-UHV (8081M-UHV)

<30

qx, qy≤0.7

qx, qy, qz≤0.2

qx, qy≤0.7

Load Capacity [lb (N)]

3 (13)

Operating Temperature Range (°C)

10-40

6-pin Connectors (2)

4-pin Connectors (6)

DB15 Female

8-32

8-32 and 1/4-20

1/4-20

8-32 and 1/4-20

Resolution- Angular (mrad)

Connector Type Thread Type

Ordering Information

HEXAPODS

8 <30

Minimum Incremental Motion, Linear (nm)

MOTORIZED ACTUATORS

Specifications

Dimensions

Description

8071

Motorized XY x y Tilt Aligner, 3 mm, 8°

8081

Motorized XYZ x y Tilt Aligner, 3 mm, 8°

8082

Motorized Wide XYZ x y Tilt Aligner, 3 mm, 8°

8095

Motorized XYZ x y z Aligner, 3 mm, 4°

8081-UHV

Ultra High Vacuum Motorized XYZ x y Tilt Aligner

8081-UHV-C

8081-UHV cable , 1.83m, DB15 Female to 6-pin RJ25 Connector

4x 8-32 (M4) tapped holes on 1.00" x 1.69" (25.0 x 45.0) 1.3 (33 2" rectangle .5)

captive 1/4-20 (M6) screw

X Z

2x 6-pin connectors

8" 3.2 ) .3 3 (8

MOTORIZED OPTICAL MOUNTS

1.1 (29 4–1. .0– 28" 32 .5)

Add -M to model number for metric version. 3.6 (91 2" .9)

CONTROLLERS AND DRIVERS

Model

Model 8071 shown. Visit Newport.com for other drawings. SPECIAL COLLECTIONS

Model 8081-UHV, Ultra High Vacuum Compatible

Model 8081 Motorized Five-Axis Tilt Aligner shown

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For Motion, Think Newport ™

Optically Encoded Stainless-Steel Translation Stages

MOTORIZED VERTICAL STAGES

MOTORIZED LINEAR STAGES

• Easily integrated with Picomotor™ actuators • Linear optical encoder with 80-nm resolution

MOTORIZED ACTUATORS

MOTORIZED ROTATION STAGES

• Compatible with other stainlesssteel crossed-roller- bearing translation stages

RoHS

Model 9066-COM-E stage with a Picomotor actuator

Compliant

The stainless-steel, crossed-roller-bearing translation stages include linear optical encoders that create a closed-loop Picomotor™ actuated stage. Highly repeatable motion and outstanding accuracy can be achieved by using these stages with their integrated encoders and selected Picomotor actuators. These encoders are fully compatible with the Model 8743-CL Closed-Loop Picomotor Driver. For example, a 9066-COM-E stage with a Model 8302 Picomotor actuator and Model 8743-CL driver becomes a closed-loop linear stage.

HEXAPODS

Specifications 9066-COM-E(-M)

9067-COM-E(-M)

12.7

25.4

Resolution (nm)

On-Axis Accuracy (mm)

Crossed Roller Bearings

Motorized Axes Travel Range (mm)

Bearings Motor/Encoder Type Thread Type CONTROLLERS AND DRIVERS

Ordering Information

Linear Optical

8-32 and 1/4-20(M4 and M6)

Model

Description

9066-COM-E(-M)

Stainless Steel Translation Stage, Optical Encoder, 0.5 in. (12.7 mm), 8-32 (M4)

9067-COM-E(-M)

Stainless Steel Translation Stage, Optical Encoder, 1.0 in. (25.4mm), 1/4-20 (M6)

Dimensions 0.50" (12.7)

4x 3/32" (2.4)

4x 1/8" (3.2) on 0.75" (19.0) grid

MOTORIZED OPTICAL MOUNTS

0.70" (17.8)

actuator clamp lock screw accepts 5/64" (2) Allen Wrench

5x 1/4-20 (M6) on 1.00" (25.0) grid

2x 1.00" (25.4)

20x 8-20 (M4) on 0.50" (12.5) grid

2x 0.20" (5.1)

encoder cable

0.20" (5.1) SPECIAL COLLECTIONS

16x 1/4-20 (M6) on 0.50" (12.5) grid

2x 0.20" (5.1) Model 9067-COM-E

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For Motion, Think Newport ™

MOTORIZED LINEAR STAGES

Translation Stages with Integrated Picomotors

MOTORIZED VERTICAL STAGES

• True set-and-forget long-term stability—these actuators stay put • Motorized and manual configurations • Easily integrated with driver kit

MOTORIZED ROTATION STAGES

RoHS

Compliant

Model 9062-XYZ-PPN

Model 9065-XYZ-PPN

MOTORIZED ACTUATORS

The Gothic Arch Bearing Motorized Linear Stages (Model 9062 and 9063 Series) include integrated Picomotor™ actuators to provide the ultimate stability and rigidity along with remote-control operation. These motorized stages offer stainlesssteel construction, thumbscrew locks, and 13-mm travel ranges. They are ideal for demanding applications in the laboratory, OEM, or on the manufacturing floor. Gothic-arch bearings offer the smooth motion of ball bearings but high stiffness and repeatability. The unique gothic profile provides increased contact area so that the load and momentum are more evenly distributed. The Compact Gothic Arch Bearing Motorized Linear Stages (Model 9061 Series) feature integrated Tiny PicomotorTM actuators. Note the Tiny Picomotor is recommended only for driving XY axes due to the lower force limit compared with standard Picomotor.

HEXAPODS

The Crossed Roller Bearing Motorized Stages (Model 9066 and 9067 Series) provide smooth and accurate positioning for critical optical alignment applications such as fiber alignment and high-stability positioning in laser systems. To ensure accurate linear travel, the stages use thermally matched hardened-steel, crossed-roller bearing and high-precision reference surfaces. The Triple Divide motorized translation stage system (Model 9064 and 9065 Series) iis based on the unique e•z•trac™ rail system and delivers the stability of an integrated stage but is effortlessly adaptable and easy to use. Because of its modularity, these stages are extremely economical.

Model 9061-X-P 9061-XY-PP

Motorized Axes

Bearings

Travel Range (mm)

Cable Length

Thread Type

Gothic Arch Bearings

<100

4-Pin

7 (2.1)

8-32

X, Y

Gothic Arch Bearings

<100

4-Pin

7 (2.1)

8-32

Gothic Arch Bearings

12.7

<30

4-Pin

7 (2.1)

8-32 and 1/4-20

9062-XYZ-PPN

X, Y

Gothic Arch Bearings

12.7

<30

4-Pin

7 (2.1)

8-32 and 1/4-20

9063-XY-PP

X, Y

Gothic Arch Bearings

25.4

<30

4-Pin

7 (2.1)

8-32 and 1/4-20

X, Y, Z

Gothic Arch Bearings

25.4

<30

4-Pin

7 (2.1)

8-32 and 1/4-20

Ball Bearings

25.4

4-Pin

7 (2.1)

8-32 and 1/4-20

9063-XYZ-PPP 9064-XY-PN 9065-XYZ-PNP

X, Z

Ball Bearings

25.4

4-Pin

7 (2.1)

8-32 and 1/4-20

9066-XYZ-NPN

Crossed Roller Bearings

25.4

<30

4-Pin

7 (2.1)

8-32 and 1/4-20

9067-XYZ-PPP

X, Y, Z

Crossed Roller Bearings

25.4

<30

4-Pin

7 (2.1)

8-32 and 1/4-20

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SPECIAL COLLECTIONS

Selected examples only. See full specifications at Newport.com Add -M to model number for metric version.

MOTORIZED OPTICAL MOUNTS

9062-X-P

Minimum Incremental Motion, Linear (nm) Connector Type

CONTROLLERS AND DRIVERS

Specifications

For Motion, Think Newport ™

Ordering Information Number of Axes

9062-XYZ-PPN

MOTORIZED VERTICAL STAGES

MOTORIZED LINEAR STAGES

Indicates if Corresponding Axis has a Picomotor™ Actuator (P) or Manual Micrometer (N)

MOTORIZED ROTATION STAGES

Example Model Number: 9062-XYZ-PPN 9062-XYZ stage with Picomotor actuators integrated on X and Y axes and manual micrometer on Z axis.

Model 9061-XY-PP

Model 9066-XYZ-PPN

MOTORIZED ACTUATORS

Motorized Fiber Positioners

• Unique flexure design HEXAPODS

• Tiny version of single-mode-fiber aligner • <0.1mm resolution

RoHS

Compliant

CONTROLLERS AND DRIVERS

Model 8051

Motorized XY fiber positioners provide the resolution from 1.0 mm down to finer than 0.1 mm. A multimode-fiber positioner can be assembled by combining one of these stages with Model 9092 coupler body and clamp.

Dimensions

Specifications MOTORIZED OPTICAL MOUNTS

8051 (8051-M) Motorized Axes

X, Y

Minimum Incremental Motion, Linear (nm)

<30

Maximum Speed (mm/min)

0.9 (23 2" .4)

10 - 40

Connector Type

6 Pin

Thread Type

6-pin connector

8-32 (M4)

Ordering Information SPECIAL COLLECTIONS

locking screw

Operating Temperature Range (°C)

Model

accepts 1/4" (6.3) dia. fiber chuck (not included)

2" 2.9 x ma ) .2 (74

Description

8051

Motorized XY Fiber Positioner, 8-32 Tapped Hole

8051-M

Motorized XY Fiber Positioner, M4 Tapped Hole

0.6 (15 3" .9) 0" 1.0 x ma ) .4 (25

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x ma 2" 2.9 4.2) 8-32 (M4) tapped hole (7

Model 8051 U.S. Patent #5,410,206

For Motion, Think Newport ™

• Products pre-selected to ensure system compatibility • Wide selection of options and configurations from standard precision components

MOTORIZED VERTICAL STAGES

• Comprehensive all-in-one kit provides complete solution

MOTORIZED LINEAR STAGES

Optical Delay Line Kit

• Easy to use motion controllers and setup MOTORIZED ROTATION STAGES MOTORIZED ACTUATORS

The Optical Delay Line Kit provides researchers and scientists with all the necessary components to create a high quality free-space optical delay line assembly. The ODL-OPT allows users to choose among the most widely used options for motorized positioning, optics, mechanics, beam delivery and steering in a combined kit. Delay options range from 333 ps up to 4000 ps maximum delays and delay position sensitivities from 0.07 fs to 8.33 fs. Optical access heights range from 2.9 in to 5.5, based on the motion option selected. These motorized positioners are combined with Newport controllers to ensure easy integration with high performance. Various optics and opto-mechanical options can be selected to ensure the appropriate performance for the delay line application.

Ordering Information HEXAPODS CONTROLLERS AND DRIVERS MOTORIZED OPTICAL MOUNTS

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SPECIAL COLLECTIONS

For more details about component selections, specifications and dimensions, visit Newport.com.

For Motion, Think Newport ™

MOTORIZED VERTICAL STAGES

MOTORIZED LINEAR STAGES

Motorized Vertical Stage Selection Guide Motorized vertical stages add the 3rd dimension to orient objects in 3D space. Newport's precision vertical stages range from the high load, long travel IMS family to the high accuracy XMS100V. Typical applications include focusing and imaging, metrology, inspection, laser writing, etc. Vertical stages can be selected based on load capacity, travel, Minimum Incremental Motion and repeatability.

Travel Range (mm)

Minimum Incremental Motion (mm)

Bi-directional Repeatability (mm)

XMS100V Ultra-high Precision Vertical Linear Stage see page 67

100

0.05

VP-5ZA Precision Vertical Linear Stage see page 69

4.8

GTS30V High-Precision Vertical Linear Stage see page 71

On-Axis Accuracy (mm)

Maximum Speed (mm/s)

Normal Load Capacity (Cz)(N)

0.1 or ± 0.05

1.5 or ± 0.75

300

100

0.06

0.5 or ± 0.25

3.0 or ± 1.5

0.1

0.2 or ± 0.1

1.5 or ± 0.75

IMS-V Series High-Load Vertical Linear Stages see page 73

100, 300

0.3 - 0.6

1.0 or ± 0.5

5.0 - 10.0

5 - 20

100 - 400

UZ Series Vertical Linear Stages see page 75

4.5, 9

0.2

3.4 - 5.9

3.0 - 8.0

4 or ± 2

30 - 300

ZVR Series Integrated Vertical and Rotation Stage see page 77

0.05

4.0 or ± 2.0

100

SPECIAL COLLECTIONS

MOTORIZED OPTICAL MOUNTS

CONTROLLERS AND DRIVERS

HEXAPODS

MOTORIZED ACTUATORS

MOTORIZED ROTATION STAGES

Series

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For Motion, Think Newport ™

XMS-V Series

• Non-contact, direct-drive system with pneumatic counterbalance for ultra-precision motion with high dynamics and reliability

MOTORIZED VERTICAL STAGES

• Ultra-high performance vertical stage with superior accuracy, repeatability and MIM

MOTORIZED LINEAR STAGES

Ultra-high Precision Direct Drive Vertical Linear Stage

• Extra-large, ironless, high-efficiency linear motor minimizes heat generation

RoHS

Compliant

Design Details

Load Characteristics

Base Material

High-strength 7075 Aluminum

Drive Mechanism

3-phase synchronous ironless linear motor Heidenhain LIF 481 scale, 1 Vpp, 4 mm signal period, 32768fold signal subdivision when used with XPS controller.

Limit Switches Origin

.55 (14)

Anti-creep crossed roller bearings

HEXAPODS

Bearings Feedback

Optical, on encoder's fiducial track Optical, at center of travel, including mechanical zero signal

Counterbalance

Low-friction air cylinder with regulator valve 5 (included)

CONTROLLERS AND DRIVERS

Cable (m)

kα

Specifications Model Travel Range (mm)

100 0.05 0.05 0.1 or ± 0.05

On-Axis Accuracy1 (mm)

1.5 or ± 0.75 1.5 or ± 0.75

Pitch1,2 (mrad)3

75 or ± 37.5

Yaw1,2 (mrad)3

50 or ± 25

Weight (kg)

2 3 4

20,000 8.8

Shown are peak to peak, typical specifications or ± half the value as sometimes shown. For the definition of typical specifications which are about 2X better than the guaranteed values, visit Newport.com for the Motion Control Metrology Primer. Middle 80% of travel To obtain arcsec units, divide the mrad value by 4.8. Operating parameters to be determined after load and counterbalance pressure are set.

XMS100V

Model Kax, Compliance in roll (mrad/Nm)

2.0

Kay, Compliance in pitch (mrad/Nm)

2.5

Kaz, Compliance in yaw (mrad/Nm)

3.5

Off-center load, Qv≤100N/(1 + D/109)

Cantilever distance in mm between the center of mass of the load and the bearing center

Distance between top surface and the bearing center

14 mm

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SPECIAL COLLECTIONS

300

Straightness, Flatness, guaranteed1,2 (mm)

MOTORIZED OPTICAL MOUNTS

Uni-directional Repeatability (mm) Bi-directional Repeatability1 (mm) Maximum Speed (mm/s)

kαy

XMS100V

Minimum Incremental Motion

MTBF (h)

MOTORIZED ACTUATORS

The XMS100V stage is a standard XMS100 ultra-precision linear stage mounted vertically on a high flatness plate with a pneumatic counterbalance. The air cylinder valve is used to achieve a perfect balance of the load while enabling a controlled descent of the carriage in a vertical setup. Innovative and compact, XM stages provide robust, repeatable motion with outstanding accuracy on the most complex trajectories. Features include precision position feedback with a linear scale encoder and a frictionless direct drive with ironless linear motor for high speed, high acceleration and excellent ripple-free motion. Typical applications include focusing, sensor test and calibration, direct laser lithography, fiber alignment, ultraprecision assembly and more.

MOTORIZED ROTATION STAGES

• Ultra-quiet anti-creep crossed roller bearings assure ripplefree motion without cage migration

For Motion, Think Newport ™

XM Series Models

Recommended Motion Controllers

Model

Description

XMS100V

Ultra-Precision Vertical Linear Motor Stage, 100 mm Travel, XMS-V Series

4 HOLES C’BORED FOR M6 SCREWS ON SQR 8.27 (210)

4 HOLES C’BORED FOR 1/4-20 SCREWS ON SQR 6.00 (152.4)

13.03 (331) 9.84 (250)

HEXAPODS

MOTORIZED ACTUATORS

XPS (see page 127)

Dimensions

MOTORIZED ROTATION STAGES

MOTORIZED VERTICAL STAGES

MOTORIZED LINEAR STAGES

8.86 (225)

MODEL SHOWN: XMS100V DIMENSIONS IN INCHES (AND MILLIMETERS)

NOTE: FOR DIMENSIONS AND HOLES PATTERN OF THE STAGE, SEE XMS100 DRAWING.

Optional bracket for XYZ mounting is available

SPECIAL COLLECTIONS

MOTORIZED OPTICAL MOUNTS

CONTROLLERS AND DRIVERS

3.35 (85)

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For Motion, Think Newport ™

VP-5ZA MOTORIZED LINEAR STAGES

Precision Vertical Linear Stages • 4.8 mm of precision vertical motion in an ultra-low profile design with unique inclined plane concept

• Unobstructed access to the moving platform from any side • Highly repeatable and accurate motion with integrated linear encoder

MOTORIZED VERTICAL STAGES

• Higher load capacity compared to vertically mounted linear stages

• 20,000 hours MTBF reliability NS

ANTE

F I C ATI O

Design Details

Load Characteristics and Stiffness

Base Material

Aluminum D

Inclined plane design with transmission ratio of 5:1; Backlash-free ball screw

Drive Mechanism Drive Screw Pitch (mm)

1 Linear steel scale, 20 mm signal period, 0.1 mm resolution

Limit Switches Origin

Optical

Cz kαy

HEXAPODS

Recirculating ball bearings, double-row linear ball bearings for vertical guidance

Bearings

Feedback

MOTORIZED ACTUATORS

The VP-5ZA vertical stage is an ultra-low profile, precision vertical stage with minimum incremental motion capability of 60 nm, high-responsiveness and perfectly straight trajectory over 4.8 mm travel. Features include: an innovative inclinedplane design; a cool running, high torque DC motor with a precision preloaded, long-life, ball screw ensuring high speed motion with minimum settling time; a high-resolution linear scale directly attached to the moving rail, eliminating all drivetrain induced motion errors; and two pairs of vertically mounted double-row linear ball bearing slides resulting in pure vertical motion. A standard 3-point mounting interface for a wafer chuck is provided as well. Manual vertical adjustments can be made using a flat screw driver for convenience. Typical applications include: semiconductor wafer inspection, photonics test and packaging, micro-assembly, precision metrology, and surface inspection systems. The VP-5ZA is compatible with the VP-25X linear stages and other Newport positioning products. For mounting to optical tables or to the ILS linear stages, use the optional base plate VP-BP.

MOTORIZED ROTATION STAGES

Compliant

RoHS

x kα

kαz

Optical, at center of travel, including mechanical zero signal

Cable Length (m)

DC Servo with tachometer 1.5 (included) X

CONTROLLERS AND DRIVERS

Drive Type

Specifications Travel Range (mm)

4.8

Minimum Incremental Motion (mm)

0.06 0.3 0.5 or ± 0.25

45 mrad/N.m

3 or ± 1.5

kay, Compliance in pitch

kaz, Compliance in yaw

10 mrad/N.m

Pitch1,2 (mrad)

100 or ± 50

Q, Off-center load

Roll1,2 (mrad)

100 or ± 50

Where D = Cantilever distance in mm

Qx, Qy ≤ Cz / (1+D/30)

20,000 2.4

For the definition of specifications, visit Newport.com's section on Motion Basics and Standards.

Ordering Information Model (Metric)

Description

VP-5ZA (M-VP-5ZA)

Compact Precision Vertical Stage, 4.8 mm Travel, DC Servo Motor with Tachometer, Metric

VP-BP

Universal Base Plate

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SPECIAL COLLECTIONS

50 mrad/N.m

Maximum Speed (mm/s)

Weight(kg)

50 N

kax, Compliance in roll

On-Axis Accuracy1 (mm)

MTBF (h) 1

Cz, Normal centered load capacity

MOTORIZED OPTICAL MOUNTS

Uni-directional Repeatability (mm) Bi-directional Repeatability1 (mm)

MOTORIZED LINEAR STAGES

For Motion, Think Newport ™

Dimensions

6.50 (165) 3.94 (100) 4 HOLES C'BORED FOR 8-32 (M4) SCREW ON 3.94 x 2.95 (100 x 75)

24 HOLES M4 THD, DEPTH: .24 (6)

.98 (25) 2

MOTORIZED VERTICAL STAGES

.50 (12.5) 3.94 (100)

5.31 (135)

3 HOLES 8-32 (M4) THD, AT 120° / ø2.56 (65)

.50 (12.5) 1.97 (50)

.50 (12.5)

2 x 4 HOLES 4-40 (M3) THD, DEPTH: .18 (4.5) ON 1.98 x 99 (50.4 x 25.2) FOR PR50 OR SR50

.50 (12.5) 6

MOTORIZED ROTATION STAGES

1.00 (25) 1.69 ±0.09 (43 ±2.4)

1.00 (25)

.04 (1) .30 (7.6) MODEL SHOWN: VP-5ZA

.80 (20.2)

SUB-D25M CONNECTOR, CABLE LENGTH 4.9 FT (1.5 M)

MOTORIZED ACTUATORS

DIMENSIONS IN INCHES (AND MILLIMETERS)

HEXAPODS

6.50 (165) COUNTERBORED HOLE FOR 1/4-20 OR M6 SCREW

SPECIAL COLLECTIONS

MOTORIZED OPTICAL MOUNTS

CONTROLLERS AND DRIVERS

4 HOLES ø.26 (6.6) C'BORED ø.44 (11.2) ON SQR 3.94 (100) 5.31 (135)

.39 (10) 4 HOLES M4 THD ON 3.94 x 2.95 (100 x 75)

WASHER

8-32 OR M4 SCREW

Components with counterbored holes for 1/4-20 (M6) screws can be attached to the top plate of the VP-5ZA (M-VP-5ZA) using 8-32 (M4) screws and the washers supplied with each stage.

4 HOLES ø.26 (6.6) C'BORED ø.44 (11.2) ON 4 x 3 (101.6 x 76.2) 4 HOLES ø.31 (8) C'BORED ø.51 (13) ON 4.96 x 3.97 (126 x 100.8)

Recommended Motion Controllers: XPS see page 127 ESP301 see page 131 SMC100CC see page 133

Ultra low-profile precision XYZ system consisting of two VP-25XA linear stages and one VP-5ZA vertical translation stage. Compared to traditional stacks of stages, this solution offers a lower-profile alternative with easy access to the load from any side.

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For Motion, Think Newport ™

GTS30V MOTORIZED LINEAR STAGES

High-Precision Vertical Linear Stage • 30 mm of precision vertical travel in a compact unit • Unobstructed access to the payload from any side

ANTE

F I C ATI O

Design Details

Load Characteristics and Stiffness Anti-creep crossed roller bearings

Drive Mechanism

precision ground lead screw, gravity preloaded nut

Drive Screw Pitch (mm)

Feedback

Linear steel scale, 20 mm signal period, 0.05 mm resolution, RS422 differential output

Limit Switches

Optical

Origin

Optical, located 5 mm from lower position travel limit

Drive Type

DC Servo

Cable Length (m)

3 (included)

Cz kαx

0.2 or ± 0.1

On-Axis Accuracy1 (mm)

1.5 or ± 0.75

Pitch, Roll (mrad) MTBF (h) Weight (kg) 1

.75 ) (19

10 1.5 or ± 0.75

Cz, Normal centered load capacity

40 N

Kax, Compliance in roll

40 mrad/Nm

20,000 hours at 25% load and with a 30% duty cycle

Kay, Compliance in pitch

40 mrad/Nm

3.3

Kaz, Compliance in yaw

25 mrad/Nm

Qx, Qy, Off-center load

Q ≤ Cz/(1+D/30)

50 or ± 25

D max, Cantilever distance

For the definition of specifications, visit Newport.com's section on Motion Basics and Standards.

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100 mm SPECIAL COLLECTIONS

MOTORIZED OPTICAL MOUNTS

0.1

Bi-directional Repeatability 1 (mm)

1,2

y kα

30 (-5 /+25 from origin)

Minimum Incremental Motion (mm)

Straightness, Flatness1 (mm)

kαz

.51 (13)

Specifications Travel Range (mm)

CONTROLLERS AND DRIVERS

High-strength 7075 Aluminum

Bearings

HEXAPODS

Base Material

Maximum Speed (mm/s)

MOTORIZED ACTUATORS

The GTS30V is a compact, vertical stage that combines outstanding trajectory accuracy with fine adjustment capability of 0.1 mm Minimum Incremental Motion with a travel range of 30 mm. Features include: a vertical guide system composed of matched pairs of anti-creep crossed roller bearings resulting in high-precision, ripple-free motion, a folded DC motor with a precision ground and a low-friction lead screw designed to deliver ultra-smooth motion. The GTS30V also does not back drive even with heavy loads, offering excellent in-position stability. A reduction belt between the motor and lead screw increases available output torque and robustness for servo loop sensitivity. The GTS30V is ideal for applications such as semiconductor wafer inspection, scanning, microscopy, laser machining, automated device alignment, metrology, quality control and applications requiring long travel vertical motion of 30 mm.

MOTORIZED ROTATION STAGES

Compliant

RoHS

• High sensitivity, excellent repeatability and high accuracy motion from integrated linear encoder

MOTORIZED VERTICAL STAGES

• Ripple-free motion and outstanding trajectory accuracy with vertical anti-creep crossed roller bearings

MOTORIZED LINEAR STAGES

For Motion, Think Newport ™

Recommended Motion Controllers:

Ordering Information Model

Description

GTS30V

High Precision Vertical Stage, 30 mm Travel, GTS Series

XPS see page 127 ESP301 see page 131

MOTORIZED ACTUATORS

MOTORIZED ROTATION STAGES

MOTORIZED VERTICAL STAGES

SMC100CC see page 133

Dimensions 4 HOLES M6 THD ON SQR 3.97 (100.8) DEPTH: .39 (10)

SUB-D25M CONNECTOR

4 HOLES M4 THD ON 2.95 x 3.94 (75 x 100) DEPTH: .31 (8)

CAD

See our website for CAD files

120°

4 HOLES M4 THD ON 3.94 x 2.95 (100 x 75) DEPTH: .31 (8)

5 HOLES M4 THD ON ø3.62 (Ø 92) DEPTH: .31 (8)

4 HOLES M6 THD ON SQR 2.95 (75) DEPTH: .39 (10) 5°

DIMENSIONS IN INCHES (AND MILLIMETERS)

SQ 4.57 (116)

HEXAPODS

.97 (24.75)

5.12 +.98 -.20 (130 +25 -5 )

CONTROLLERS AND DRIVERS

4 HOLES ø.31 (Ø 7.8)

.39 (10) SQR 3.97 (100.8) 4.63 (117.5)

MANUAL KNOB

SPECIAL COLLECTIONS

MOTORIZED OPTICAL MOUNTS

SQR 4.53 (115)

A typical assembly with an ILS250 linear stage, a GTS30V vertical stage and a URS100 rotation stage.

A compact XYZ assembly consisting of a GTS150 linear stage, a GTS70 linear stage and a GTS30V vertical stage.

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For Motion, Think Newport ™

IMS-V Series MOTORIZED LINEAR STAGES

High-Load Vertical Linear Stages • High stiffness, FEM optimized extruded aluminum body minimizes thermal bending

• Self-locking lead screw ensures best position stability even with power off • Proprietary nut design minimizes wear and stick-slip effect • Direct position feedback provides superior accuracy with minimum hysteresis

ANTE

F I C ATI O

Load Characteristics and Stiffness

Design Details Base Material Bearings

Extruded Aluminum Four way equal loaded caged recirculating ball bearings Precision ground 16 mm diameter lead screw, High, wear-resistance polyethylene terephthalate nut, no preload

Drive Mechanism

Feedback

3 Linear steel scale, 20 mm signal period, 0.1 mm resolution

Limit Switches

Optical

Origin

Optical, approx. 8 mm from motor side limit

Drive Type

Minimum Incremental Motion (mm) Uni-directional Repeatability (mm)

0.5

1.0 or ± 0.5

5 or ± 2.5

10 or ± 5

100 or ± 50

250 or ± 125

100 or ± 50

200 or ± 100

kay, Compliance in pitch

0.2 mrad/N.m

kaz, Compliance in yaw

1 mrad/N.m

Qv≤1500N/(1 + D/90), but Q, Off-center load not greater than Cx Max z kα D, Cantilever distance in mm between the center of mass of the load and the bearings center. kαy

20 mm/s with up to 100 N load, 5 mm/s with higher loads

Yaw (mrad)1,2

Max. -Cx; +Cx

Distance between mounting surface and the bearings center

66 mm

20,000 h with 300 N load and with a 10% duty cycle 13.6

For the definition of specifications, visit Newport.com's section on Motion Basics and Standards.

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SPECIAL COLLECTIONS

300

0.3 mm with XPS, 0.6 mm with ESP301 or SMC100CC

Pitch (mrad)1,2 MTBF 1

(M-)IMS300V

100

40 N 400 N with XPS 100 N with ESP301 or SMC100CC

MOTORIZED OPTICAL MOUNTS

Bi-directional Repeatability (mm)

(M-)IMS100V

Min. -Cx; +Cx QV

CONTROLLERS AND DRIVERS

Travel Range (mm)

Weight (kg)

5 (included)

Specifications

Maximum Speed

+Cx

DC Servo

Cable Length (m)

On-Axis Accuracy (mm)1

D –Cx

HEXAPODS

Drive Screw Pitch (mm)

MOTORIZED ACTUATORS

IMS-V Series stages are long travel vertical stages offering high performance in a cost effective package. They are an ideal solution for both precision industrial and laboratory applications requiring precise vertical motion with 0.3 mm MIM for loads up to 400 N and 300 mm travel. Features include: four-way equal load ball bearings to provide superior cantilevered loading characteristics, caged recirculating ball bearings to ensure maintenance-free operation without cage migration, self-locking lead screw to ensure superior in-position stability with no change of position at power off, and a direct-read to encoder provide superior accuracy and minimum hysteresis. Available in IMS300V and IMS100V models. Ideal for a wide range of precision industrial and research applications.

MOTORIZED ROTATION STAGES

Compliant

RoHS

MOTORIZED VERTICAL STAGES

• Four-way, equally load ball bearings offer best support for high cantilevered loads

MOTORIZED LINEAR STAGES

For Motion, Think Newport ™

Dimensions

MOTORIZED VERTICAL STAGES

1.18 (30)

8 HOLES CLR FOR M6 SCREW A

MOTORIZED ROTATION STAGES

8 HOLES CLR FOR 1/4-20 SCREW

5 (127)

MOTORIZED ACTUATORS

5.91 (150)

HEXAPODS

CONTROLLERS AND DRIVERS

SUB-D25M CONNECTOR

5.73 (145.5)

7.09 (180) MODEL SHOWN: IMS300V DIMENSIONS IN INCHES (AND MILLIMETERS)

B 2.00 (50.8) 5.00 (127)

L1 19.78 (502.5) 27.66 (702.5)

L2 12.32 (313) 20.20 (513)

MOTORIZED OPTICAL MOUNTS

MODEL (METRIC) A (M-)IMS100V 1.97 (50) (M-)IMS300V 6.91 (150)

3.54 (90) 1.10 (28)

CAD Ordering Information

SPECIAL COLLECTIONS

TRAVEL 3.94 (100) 11.81 (300)

See our website for CAD files

Recommended Motion Controllers/Drivers

Model (Metric)

Description

XPS (see page 127)

(max. 400 N payload, 0.3 mm MIM)

(M-)IMS100V

Vertical Stage, 100 mm Travel, DC motor, IMS-V Series

ESP301 (see page 131)

(max. 100 N payload, 0.6 mm MIM)

(M-)IMS300V

Vertical Stage, 300 mm Travel, DC motor, IMS-V Series

SMC100 (see page 133)

(max. 100 N payload, 0.6 mm MIM)

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For Motion, Think Newport ™

UZ Series MOTORIZED LINEAR STAGES

Vertical Linear Stages • 4.5 or 9 mm vertical motion in a very low profile design

• Exceptional high load capacity based on opposing wedge guide concept

ANTE

GU SP

Compliant

RoHS

F I C ATI O

Stainless Steel

Bearings

Linear ball bearings 2-wedge design with transmission ratio of 4:1, Backlash-compensated leadscrew

Drive Mechanism

UZS80: 0.8 UZM160: 4

Drive Screw Pitch (mm)

10:1 on all UZM160(1) UZS80CC: Screw mounted rotary encoder, 4,000 cts/rev, index pulse UZS80PP: None UZM160: Screw mounted rotary encoder, 2,000 cts/rev, index pulse

Feedback

UZS80: Optical UZM160: Mechanical

Limit Switches

Optical, at center of travel

Cable Length (m)

3 (included)

Description

UZS80CC

UZS80 vertical stage, DC motor

UZS80PP

UZS80 vertical stage, stepper motor

UZM160CC.05 (M-UZM160CC.05)

UZM160 vertical stage, DC drive

UZM160PE.05 (M-UZM160PE.05)

UZM160 vertical stage, full-step drive

UZM160PE.05V6 (M-UZM160PE.05V6)

UZM160PE.05 vertical stage, vacuum compatible to 10-6 hPa

UZM160PP.05 (M-UZM160PP.05)

UZM160 vertical stage, micro-step drive

M-CAP-M41

4 Captive screws for mounting UZS80 on top of UTS linear stages

M-CAP-M61

4 Captive screw for mounting MTM linear stages on top of UZM160

M-PBN12

Base plate for UZS80

UTS-TP

UZS80 top plate with English holes

Vacuum compatible version of UZM160PE.05 available up to 10-6 hPa

CONTROLLERS AND DRIVERS

Origin

Model (Metric)

HEXAPODS

Reduction Gear

Vacuum Compatibility

MOTORIZED ACTUATORS

Ordering Information

Base Material

MOTORIZED ROTATION STAGES

UZ Series vertical stages offer high precision vertical translation for space-limited applications requiring sub-micron sensitivity. They are available in two sizes, the UZS80 and the UZM160. The UZS80CC DC motor version provides high speed adjustments and accurate bi-directional positioning capabilities and features a high resolution encoder directly attached to the drive spindle, eliminating most error sources associated with indirect feedback devices. The UZS80PP stepper motor version is a more economical model for less demanding applications. The UZM160 is specifically designed for high load applications, capable of bearing loads up to 300N, and is available with a DC-motor drive, a full step motor drive, or a mini-step motor drive. In addition, the stages utilize a 2,000 cts/rev. rotary encoder to ensure consistent operation under high loads. UZ Series stages feature a center home position and are available in vacuum versions as well.

Design Details

MOTORIZED VERTICAL STAGES

• Sub-micron Minimum Incremental Motion

1) Additional motor mounted gear on some drive options. Call Newport for details.

Specifications

UZS80PP

4.5

(M-)UZM160 9

Minimum Incremental Motion (mm)

0.2

0.2 0.9 typical1

Uni-directional Repeatability (mm)

1.4 guaranteed

Bi-directional Repeatability (mm)

3.4 or ± 1.7 guaranteed

4.4 or ± 2.2 guaranteed

5.9 typical1

3 or ± 1.5 guaranteed

4 or ± 2 guaranteed

8 or ± 4 typical1

On-Axis Accuracy (mm) Maximum Speed (mm/s)

PP, CC: 12; PE: 0.1

150 or ± 75 guaranteed

100 or ± 50 typical1

Roll (mrad)3

200 or ± 100 guaranteed

200 or ± 100 typical1

6.2 (2.8)

47.4 (21.5)

Weight [lb (kg)] 1

Because of the complexity of the measurement, the actual performances of the UZM160 stages are not verified on 100% of the produced stage. Hence, only typical specifications are provided. For definition of typical specifications, visit Newport.com for the Motion Control Metrology Primer. 2 0.4mm/s for UZM160PP.05 when used with SMC100PP 3 To obtain arcsec units, divide the mrad value by 4.8. For the definition of specifications, visit Newport.com's section on Motion Basics and Standards.

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SPECIAL COLLECTIONS

Pitch (mrad)3

MOTORIZED OPTICAL MOUNTS

UZS80CC

Travel Range (mm)

MOTORIZED LINEAR STAGES

For Motion, Think Newport ™

Load Characteristics

Recommended Motion Controllers: XPS (see page 127) D

ESP301 (see page 131)

Q Y

MOTORIZED ROTATION STAGES

MOTORIZED VERTICAL STAGES

-Cz y

kαy

±Cx

±C

SMC100CC (see page 133)

UZS80CC only

SMC100PP (see page 133)

UZS80PP and UZM160PP.05 only

kα

Cz, Normal centered load capacity Cx, Cy

UZS80

UZM160

±30 N

-200 N, +300 N

±150 N

±200 N

kax, Compliance in roll

100 mrad/Nm

0.13 mrad/Nm

kay, Compliance in pitch

100 mrad/Nm

0.65 mrad/Nm

0.75 Nm

20 Nm

Max torque (Q x D)

A BGS80CC stage mounted on top of an UZS80CC stage

MOTORIZED ACTUATORS

Q, Off-center load D, Cantilever distance in m

CAD

Dimensions

HEXAPODS CONTROLLERS AND DRIVERS

4 HOLES M4 THD ON SQR 2.48 (63) DEPTH: .24 (6)

4 HOLES M4 THD ON SQR 1.34 (34) DEPTH: .20 (5)

1.48 ±.089 (37.5 ±2.25)

See our website for CAD files

.90 (22.8)

3.83 (97.2)

2.99 (76)

.17 (4.25)

3.20 (81.2)

3.34 (84.8)

MODEL SHOWN: UZS80PP

3.43 (87)

DIMENSIONS IN INCHES (AND MILLIMETERS)

3.15 (80)

SUB-D15M CONNECTOR

UZS80PP: 1.46 (37) UZS80CC: 1.43 (36.25)

4 HOLES M4 THD ON SQR 1.34 (34) DEPTH: .20 (5)

6.29 (159.75)

4 HOLES M4 THD ON SQR 2.48 (63) DEPTH: .24 (6)

4.00 (101.5) BOTTOM VIEW OF THE UZS80CC

3.19 (81)

SPECIAL COLLECTIONS

MOTORIZED OPTICAL MOUNTS

1.37 (34.85)

4 HOLES ø.18 (4.5) AT 90° ON ø4.92 (125)

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3.98 (101) 4.70 (119.5)

For Motion, Think Newport ™

ZVR Series MOTORIZED LINEAR STAGES

Integrated Vertical and Rotation Stage for Wafer Positioning • Precise 10 mm vertical and continuous 360 degree angular travel in a very low profile design

• Large aperture through centre of stage simplifies vacuum and electrical cable management to chuck • All electrical and vacuum connections for stage and chuck are smartly managed at a single location

ANTE ED

Compliant

scan QR code to watch video

RoHS

F I C ATI O

HEXAPODS

Design Details Base Material Bearings

Vertical

Rotary

Aluminum

Stainless Steel

Recirculating ball bearings

Ball bearings

Stepper

Stepper or DC

Motor Feedback

None

MOTORIZED ACTUATORS

Newport’s ZVR-PP and ZVR-PC are integrated Z-vertical and Theta-rotation positioning stages designed to precisely elevate and rotate 200 mm and/or 300 mm diameter wafer chucks. The ZVR stages rigidly support and drive the payload at three points (seperated by 120 degrees) along the outer circumference of the stage. Newport’s three point design has advantages for applications that have slight to extreme unbalanced loading such as wafer probing, which can have vertical forces applied at locations along the outer edges of the chuck. Angular deflections due to these off-centre loads are minimized and binding during vertical motion is eliminated. The ZVR's unique design also permits the center of the stage to remain open down through the bottom plate. Guiding the stage through its vertical trajectory are three miniature, ultraquiet, recirculating bearing guides. The ZVR is also equipped with a hardware origin allowing the stage to be returned to an absolute reference (home) position and a limit switch enabling the user to set the upper limit for vertical travel.

MOTORIZED ROTATION STAGES

• Three-point bottom interface for stable mounting to any XY stage or other platform

MOTORIZED VERTICAL STAGES

• Low mass and a high natural frequency accommodate rapid step-and-settle applications

ZVR-PC: 8,000 cts/rev rotary encoder Optical

Origin

CONTROLLERS AND DRIVERS

Limit Switches

Centered

Cable

MTBF

20,000

Specifications Drive Type Travel Range (mm)

Drive Type

0.05

Angular Range(°)

Uni-directional Repeatability (mm)

1.5

Minimum Incremental Motion(°)

Bi-directional Repeatability (mm)

4 or ± 2

On-Axis Accuracy (mm)

4 or ± 2

Maximum linear speed (mm/s)

10 70 or ± 35 ± 0.1

Optional Linear Scale, 0.1mm MIM This is a measure of XY deviation when the Z direction of motion is reversed. This specification is important for image focusing.

On-Axis Accuracy (°) Uni-directional Repeatability (°) Bi-directional Repeatability(°) Maximum Speed (°/s) Wobble (mrad) Eccentricity (mm) Normal Load Capacity (Cz) (N)

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ZVR-PP

ZVR-PC

Stepper Motor

DC Servo

±160 or 360 continuous

0.0002

0.002

0.035 or ± 0.0175

0.030 or ± 0.015

0.003

0.013 or ± 0.0065

0.007 or ± 0.0035

80 or ± 40

80 or ±40

8 or ± 4

100

SPECIAL COLLECTIONS

XY Cross Talk2(mm) 2

Minimum Incremental Motion, Linear1 (mm)

Pitch, Yaw (mrad)

Stepper Motor

MOTORIZED OPTICAL MOUNTS

Rotation Stage Specifications

Vertical Stage Specifications

For Motion, Think Newport ™

Recommended Motion Controllers/Drivers:

Ordering Information Model

Description

ZVR-PP

Integrated Vertical and Stepper Motor Rotation Stage for Wafer Positioning

ZVR-PC

Integrated Vertical and DC Rotation Stage for Wafer Positioning

XPS see page 127 ESP301 see page 131 SMC100CC see page 133

For a vertical only version, please contact Newport.

SMC100PP see page 133

Dimensions 6 HOLES M6 THD AT 60° ON ø2.36 (60)

6.26 (159)

2 SUB-D15M CONNECTORS

MOTORIZED ROTATION STAGES

MOTORIZED VERTICAL STAGES

MOTORIZED LINEAR STAGES

ø7.32 (186)

3 ADJUSTMENT SCREWS M4 TO ADJUST TOP PLATE

5.91 (150)

7.32 (186)

HEXAPODS

MOTORIZED ACTUATORS

6.30 (160) ø1.97 (50)

3 STRAIGHT UNIONS FOR VACCUM TUBE ø.15 (4)

2.36 (60) 6.30 (160) ø5.04 (128)

MODEL SHOWN: ZVRPP

2.59 (65.5): +EOR 2.37 (60.2): MZ 2.16 (54.9): -EOR

CONTROLLERS AND DRIVERS

DIMENSIONS IN INCHES (AND MILLIMETERS)

SPECIAL COLLECTIONS

MOTORIZED OPTICAL MOUNTS

10.6 (269)

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.33 (8.4) ADJUSTMENT

For Motion, Think Newport ™

Motorized rotation stages can be selected based on Minimum Incremental Motion, Bi-directional Repeatability, Absolute Accuracy, Maximum Speed, Wobble, Load Capacity, etc.

RGV Series High Speed Precision Rotation Stage see page 80

0.0002 - 0.0011

0.01

720 - 1000

20 - 40

100 - 2700

RV Series High-Performance Precision Rotation Stages see page 82

0.0002 - 0.002

0.0012 - 0.004

0.005 - 0.01

2 - 80

16 - 40

900 - 6500

URS Series Precision Rotation Stages see page 87

0.0002 - 0.002

0.006 - 0.02

0.023 - 0.030

20 - 80

100 - 300

URB Series High-Speed Belt-Driven Rotation Stage see page 89

0.02

.013 - .024

.05 - .07

2 - 20

200

20 - 500

FCR100 Intelligent Stepper Motor Rotary Stage see page 91

0.00025

0.012

0.04

300

SR50 and PR50 Series Compact Rotation Stages see page 93

0.004 - 0.02

0.05 - 0.15

0.06 - 0.10

4 - 20

100

10, 30

BG Series Goniometric Cradles see page 95

0.0002 - 0.002

0.003 - 0.024

0.05 - 0.07

2 - 20

200

20 - 500

NSR1 Universal Rotator see page 98

2.25

120

600

4.0

AgilisTM Series Piezo Motor Driven Rotation Stages see page 99

0.0003

100

Picomotor Motorized Rotation Stages see page 101

0.2

6 - 12

CONEX-URS50BCC see page 87

0.001

0.006

0.04

100

CONEX-SR50CC see page 93

0.004

0.05

0.06

100

CONEX-PR50CC see page 93

0.02

0.15

0.1

100

CONEX-BGS50CC see page 95

0.0005

0.006

0.04

100

CONEX Integrated Piezo Motor Stages see page 99

0.00025 - 0.001

0.33 - 1.5

1.5

100

2 - 3.5

Series

w w w. n e w p o r t . c o m / R S G - M C f o r m o r e i n f o r m a t i o n

SPECIAL COLLECTIONS

Normal Load Capacity (Cz)(N)

MOTORIZED OPTICAL MOUNTS

Wobble (mrad)

CONTROLLERS AND DRIVERS

Maximum Speed(°/s)

HEXAPODS

Absolute Accuracy(°)

MOTORIZED ACTUATORS

Bi-directional Repeatability(°)

MOTORIZED ROTATION STAGES

Minimum Incremental Motion(°)

MOTORIZED VERTICAL STAGES

Motorized rotation stages are precision positioning products designed and built over many decades of experience in providing solutions to research and academia, industry and defense markets. Applications of Rotation Stages include semiconductor wafer inspection or scribing, metrology, micro-robotics, sensor testing, disk texturing, optics positioning like polarizers, waveplates, etc. Newport rotation stages offering ranges from the direct drive, direct read, high rotation speed RGV series to the multi-use low-cost NSR1 Universal Rotator, with over 100 model numbers to choose from. Vacuum versions, as well as multiple axis designs, OEM or custom solutions are available upon request.

MOTORIZED LINEAR STAGES

Motorized Rotation Stage Selection Guide

For Motion, Think Newport ™

MOTORIZED LINEAR STAGES

RGV

High-Speed Precision Rotation Stage • Brushless direct-drive provides faster rotating speeds, high torque, reliability and enhanced position sensitivity

MOTORIZED ACTUATORS

Compliant

ANTE

RoHS

scan QR code to watch video

HEXAPODS

• High efficiency brushless DC torque motor optimizes available torque for rapid point-to-point motions

CONTROLLERS AND DRIVERS

• Precision glass scale encoder ensures excellent repeatability

MOTORIZED ROTATION STAGES

MOTORIZED VERTICAL STAGES

• Ultra-compact footprint – only 115 mm x 115 mm (for RGV100)

F I C ATI O

The RGV series are compact, direct-drive rotation stages that provide ultra-fast rotation with very high MIM and outstanding positioning performance. Features include: a direct drive motor which ensures operational reliability due to no wear, high precision glass scales for position repeatability and large diameter bearings for stiffness and low runout. The RGV can be used in positioning or as a spindle. Applications include semiconductor wafer inspection, micro-robotics, precision metrology and motion simulators, specifically for MEMS, gyros and accelerometer testing. The RGV is compatible with the XPS controller with driver options depending on speed and torque requirements.

Design Details

General Specifications

Base Material

Aluminum

Model

RGV100BL

Bearings

Large diameter steel ball bearings

Travel Range (°)

Motor

High-torque brushless DC motor with rare earth magnets

0.00011

0.00004

Motor Initialization

Done by the XPS controller by a patented process that avoids major motion during initialization and that does not require Hall effect sensors

Minimum Incremental Motion (°) Uni-directional Repeatability (°)

0.0003

0.0001

Motor Commutation

Done by the XPS controller on encoder signals

0.0011 or ± 0.00055

0.0002 or ± 0.0001

Feedback

RGV100: Glass scale encoder with 15,000 line pairs per revolution, 1 Vpp, 32768-fold signal subdivision when used with XPS controller RGV160: Glass scale encoder with 28,800 line pairs per revolution, 1 Vpp, 1,250-fold signal subdivision when used with XPS controller

Bi-directional Repeatability 1 (°)

Limit Switches

RGV100: Two optical limit switches at approx. +/- 168°, disabled by external switch RGV160: No limit switches

Origin

Optical, fixed at position 0°, including mechanical zero signal

Cable Length (m)

360 continuous

Absolute Accuracy 1 (°)

0.01 or ± 0.005

Maximum Speed (no load) (°/s)

720

10003

Maximum Acceleration (°/s²)

1000

5000

40000

Maximum Torque (Mz) Nm at 0 deg/s

0.42

1.43

0.00104

0.00123

0.024

Inertia (no load) (kg-m2) Wobble (mrad)

40 or ± 20

Eccentricity 1 (mm) MTBF (h)

MOTORIZED OPTICAL MOUNTS

Ordering Information

SPECIAL COLLECTIONS

RGV160BL3

RGV100HL2

20,000 with 5 kg load, 720°/s speed and a duty cycle of 30%

Weight (kg)

Model

Description

RGV100BL

High Speed, High Precision Rotation Stage, 360°, Brushless Direct Drive, UltraCompact

RGV100HL

High Torque, High Precision Rotation Stage, 360°, Brushless Direct Drive, UltraCompact

RGV160BL

High Load, High Speed Rotation Stage, 360°, Brushless Direct Drive, Compact

20 or ± 10 3 or ± 1.5

2.6

3.6

17.5

Shown are peak to peak, guaranteed specifications or ± half the value as sometimes shown. For the definition of typical specifications which are about 2X better than the guaranteed values, visit Newport.com for the Motion Control Metrology Primer. Specifications shown with XPS-DRV02. Contact us for higher dynamic specifications with XPS-EDBL driver Specifications shown with XPS-EDBL driver

Recommended Motion Controller: XPS see page 127

High speed motion simulator with RGV series rotation stages

w w w. n e w p o r t . c o m / R G V - M C f o r m o r e i n f o r m a t i o n

For Motion, Think Newport ™

RGV100

RGV160

100 N

2700 N

15 mrad/Nm

1 mrad/Nm

Mz, Maximum torque

(BL) 0.42 Nm @ 0°/s (HL) 1.43

39 Nm @ 0°/s

Jz, Maximum Inertia

0.032 kgm2

Q ≤ Cz/(1+D/35)

Q ≤ Cz/(1+D/50)

Cz, Normal centered load capacity Ka, Transversal compliance

and Q ≤ (Jz-Jq)/D2

Cz kα

MOTORIZED VERTICAL STAGES

Q, Off-center load

MOTORIZED LINEAR STAGES

Load Characteristics and Stiffness

Where: D = Cantilever distance in mm; Jq = Inertia of payload

Dimensions

(RGV100BL shown) RGV100: 4 HOLES M6 THD ON SQR 1.97 (50) DEPTH: .31 (8)

n HOLES “P” THD ON SQR “Q” DEPTH: R

MOTORIZED ROTATION STAGES

øG DEPTH: H MODEL SHOWN: RGV100HL DIMENSIONS IN INCHES (AND MILLIMETERS)

MOTORIZED ACTUATORS

NOTE: FOR MORE INFORMATION ON DIMENSIONS OF EACH RGV STAGE, REFER TO INDIVIDUAL DRAWINGS ON THE WEBSITE.

øF

HEXAPODS

RGV100HL: 4 HOLES M6 THD, DEPTH: .47 (12) ON 2.95 x 1.97 (75 x 50) RGV160BL: 4 HOLES M8 THD, DEPTH .63 (16) ON 5.91 x 1.97 (150 x 50) – ON 3 SIDES

CONNECTORS

CONTROLLERS AND DRIVERS

SQR “A”

RGV100HL RGV160BL

A B C D E F G H J K 4.53 2.36 3.05 2.56 2.44 3.07 1.97 +.00063 .31 1.18 +.00051 0 0 – (8) (30H6) (115) (60) (77.5) (65) (62) (78) (50H7) 4.53 3.19 3.05 2.56 2.65 3.07 1.97 +.00063 .31 1.18 +.00051 0 0 – (8) (30H6) (115) (81) (77.5) (65) (67.3) (78) (50H7) 10.24 3.94 5.28 4.37 0+.0014 .56 4.33 0+.0014 .56 – – – (260) (100) (134) (111H7) (14.3) (110H7) (14.3)

MOTORIZED OPTICAL MOUNTS

RGV100BL

øJ DEPTH: K

RGV100HL n HOLES “S” THD ON øT DEPTH: U

4 HOLES øL C'BORED ON SQR “M”

RGV160BL

L M .29 3.97 (7.5) (100.8) .29 3.97 (7.5) (100.8) .35 7.87 (9) (200)

n 4 4 6

P Q 1.89 M4 SQR (48) SQR 1.89 M4 (48) ø4.72 M5 (120)

R .24 (6) .24 (6) .91 (23)

RGV100: 4 HOLES M5 THD ON SQR 3.35 (85) DEPTH: .31 (8)

w w w. n e w p o r t . c o m / R G V - M C f o r m o r e i n f o r m a t i o n

S M3 M3 M5

T 1.38 (35) 1.38 (35) 4.72 (120)

U .24 (6) .24 (6) .28 (7)

SPECIAL COLLECTIONS

RGV100BL

For Motion, Think Newport ™

MOTORIZED LINEAR STAGES

RV Series

High-Performance Precision Rotation Stages • Precision 80–350 mm diameter rotation stages

• High-accuracy versions with direct reading encoder and better than 0.0001° (0.36 arcsec) resolution

ANTE

Compliant

RoHS

MOTORIZED ACTUATORS

• Ideal for high-load application

MOTORIZED ROTATION STAGES

MOTORIZED VERTICAL STAGES

• Monolithic design ensures high structural stiffness

F I C ATI O

The RV Series rotation stages provide high-precision angular positioning accuracy combined with high load capacity. There are five stage sizes and six drive configurations available, optimizing load capacity, torque, speed and resolution for a variety of operating conditions. All RV stages are constructed of tool steel, with rotation accuracy ensured by ground bearing surfaces. A double row of preloaded bearings allows for high off-center loads in a reduced footprint, and the single monolithic design improves stiffness without compromising dynamic performance. The larger models, RV120PP to RV350PP, feature a worm mounted rotary encoder for improved accuracy and repeatability and the full-step PE version is equipped with a reduction gear providing higher torque. The DC motor-driven CCHL and HAHLT versions are equipped with a reduction gear providing higher torque and payload inertia capacity. The HAT and the HAHLT feature a highresolution direct reading encoder and tachometer for superior repeatability, position stability and speed regulation.

HEXAPODS

Design Details Base Material

Stainless Steel

Bearings

Double row ball bearings

Drive Mechanism

Ground worm gear with self adjusting preload

Worm Gear Ratio

RVS80: 1:180 RV120–RV350: 1:90

CONTROLLERS AND DRIVERS

Reduction Gear

Reduction gear before encoder on some versions RVS80CC: Worm mounted rotary encoder, 8,000 pts/rev, Index pulse RVS80PP: None. One full-step equals 0.01° RV120 to RV350, except for HAT and HAHLT versions: Worm mounted rotary encoder, 4,000 pts/rev, Index pulse HAT and HAHLT versions: Direct reading optical encoder on the rotating platen, 20 mm signal period

Feedback Limit Switches

Optical, at ± 170, can be disabled for continuous rotation (except HAT & HAHLT versions)

Origin

Optical

Cable Length (m)

3 m cable included

Weight kg

Vacuum compatible versions are available down to 10-6 hPa using full-step motor (PEV6) RVS80 1.8

RV120 6.5

RV160 9

RV240 16

RV350 27

–

RV120HAT 8

RV160HAT 11

RV240HAT 19

RV350HAT 33

SPECIAL COLLECTIONS

MOTORIZED OPTICAL MOUNTS

Vacuum Compatibility

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For Motion, Think Newport ™

Travel Range (°)

360 continuous

Minimum Incremental Motion (°)

HAT & HAHLT versions

0.001

Except RVS80PP, HAT & HAHLT versions

0.0002

RVS80PP

0.00075

HAT versions

0.0002

HAHLT versions

0.002

Except RVS80CC, HAT & HAHLT versions

0.001

RVS80CC

0.001

RVS80PP

0.0002

HAT & HAHLT versions

0.004 or ± 0.002

Except RVS80, HAT & HAHLT versions

0.003 or ± 0.0015

RVS80CC

0.003 or ± 0.0015

RVS80PP

0.0012 or ± 0.0006

HAT & HAHLT versions

0.01 or ± 0.005

Except RVS80, HAT & HAHLT versions

0.015 or ± 0.0075

RVS80CC

Absolute Accuracy1 (°)

0.015 or ± 0.0075

RVS80PP

0.005 or ± 0.0025

HAT & HAHLT versions

CC & HAT motor option, except RVS80CC

Maximum Speed (°/s)

RVS80CC

PP motor option

CCHL & HAHLT motor option

PE motor option

40 or ± 20

RVS80

20 or ± 10

RV120 & RV160

16 or ± 8

D QH

kα

4 or ± 2

MTBF (h)

20,000 1.8

RVS80CC & RVS80PP

6.5 to 8

RV120

9 to 11

RV160

16 to 19

RV240

27 to 33

RV350

HEXAPODS

Weight (kg)

RV 240 & RV350

Eccentricity 1 (mm)

Load Rotation Axes

Vertical Axis

Load Characteristics RVS80

RV120

RV160

RV240

RV350

900

1800

2700

4000

6500

a, construction parameter (mm)

100

b*, (mm) except HAT & HAHLT

1.5

0.6

0.3

0.1

QH, Off-center load, vertical rotation axis QV, Off-center load, horizontal rotation axis

3.5

b QV

QH ≤ Cz / (1+D/a)

MOTORIZED OPTICAL MOUNTS

Cz, Normal centered load capacity (N)

b*, (mm) for HAT & HAHLT

CONTROLLERS AND DRIVERS

For the definition of specifications, visit Newport.com's section on Motion Basics and Standards.

k, radial compliance (mrad/Nm)

MOTORIZED ACTUATORS

Wobble1,2 (mrad)

This Azimuth/Elevation gimbal system positions a 350 mm dia. mirror that can be used for laser based qualification and characterization of precision optical sensors, LIDAR analysis, or target tracking.

MOTORIZED ROTATION STAGES

Bi-directional Repeatability1 (°)

With disabled limits, except HAT & HAHLT

±170

MOTORIZED VERTICAL STAGES

Uni-directional Repeatability (°)

MOTORIZED LINEAR STAGES

Specifications

QV ≤ Cz / 2 / (1+D/a)

* Construction parameter = Distance between the top surface of the RV stage and the bearing center.

QV at a distance of 80 mm from the top surface for a RV160HAT rotation stage, D = 80 mm + 75 mm = 155 mm: QV = 2700 N / 2 / (1 + 155 mm / 50 mm) = 329 N w w w. n e w p o r t . c o m / R V - M C f o r m o r e i n f o r m a t i o n

SPECIAL COLLECTIONS

Horizontal Axis

Example:

For Motion, Think Newport ™

SPECIAL COLLECTIONS

MOTORIZED OPTICAL MOUNTS

CONTROLLERS AND DRIVERS

HEXAPODS

MOTORIZED ACTUATORS

MOTORIZED ROTATION STAGES

MOTORIZED VERTICAL STAGES

MOTORIZED LINEAR STAGES

Torque and Payload Inertia The following table lists the maximum torque and the maximum payload inertia for all RV rotation stages. The maximum payload inertia equals the maximum kinetic energy that the rotation stage can absorb in the event of a sudden stop at the maximum speed. Likewise, this is the maximum inertia to accelerate from stop to the maximum stage speed in 250 ms. Some RV stages can handle higher payload inertias at reduced speed. For detailed information, please contact a Newport Applications Engineer. Maximum Torque (Mz) (N.m)

Maximum Inertia (Iz) (kg.m2)

Maximum Speed(°/s)

RVS80PP

0.5

RVS80CC

0.1

RV120PP

Model

RV120PE

RV120CC

0.2

80 16

RV120CCHL

RV120HAT

0.9

RV120HAHLT

RV160PP

RV160PE

100

RV160CC

0.7

RV160CCHL

RV160HAT

RV160HAHLT

RV240PP

RV240PE

150

RV240CC

1.5

RV240CCHL

RV240HAT

1.1

RV240HAHLT

RV350PP

RV350PE

220

RV350CC

1.8

RV350CCHL

RV350HAT

1.2

RV350HAHLT

16 SM300 mirror mount for a high power laser application, built with custom, high sensitivity and high angular stiffness RVU rotary stages

Ordering Information Series

Diam. (mm)

Drive

Folded Motor

Antenna and sensor positioner for guidance and field communication systems

Vacuum Prep. (2)

CC Example: CCHL The RV240HAHLT-F is a Ø 240 HAHLT mm RV rotation stage with a RV -F DC motor, a reduction gear, HAT PE V6 an integral optical encoder and with a folded motor. PP 1) RVS80 is only available as RVS80CC and RVS80PP. 2) Vacuum compatible to 10-6 hPa. In this case max. speed and load capacity have to be divided by two. CC: DC motor CCHL: DC motor with reduction gear HAHLT: DC motor with reduction gear and integral optical encoder HAT: DC motor with integral optical encoder PE: Full-step motor PP: Mini-step motor S80 (1) 120 160 240 350

Recommended Motion Controllers/Drivers XPS (see page 127) ESP301 (see page 131)

All models Except HAT, HAHLT, CC and CCHL

SMC100CC (see page 133)

RVS80CC only

SMC100PP (see page 133)

RVS80PP only

w w w. n e w p o r t . c o m / R V - M C f o r m o r e i n f o r m a t i o n

For Motion, Think Newport ™

Dimensions MOTORIZED LINEAR STAGES

RVS80 models

A-A 2 x 4 HOLES M3 THD ON ø2.24 (Ø 57), DEPTH: .16 (4) TOP AND BOTTOM HOLES ARE ALIGNED A

.41 (10.3)

1.95 (49.5)

.12 (3)

5.08 (129)

.45 (11.5)

SUB-D15M CONNECTOR MODEL SHOWN: RVS80CC

ø2.44 (62)

ø3.31 (84)

DIMENSIONS IN INCHES (AND MILLIMETERS)

1.97 (50)

1.52 (38.5)

1.96 (49.7) .47 (12)

6.14 (156)

1.79 (45.5) 2.13 (54) 4.61 1.32 2.89 (117) (33.5) (73.5) 4.13 (105)

ø4.06 (103)

.30 (7.5)

6.71 (170.6)

77.3 (3.04)

BOTTOM VIEW OF THE RVS80PP 5.91 (150)

1 HOLE M4 THD ON ø3.62 (92) DEPTH: 7

MOTORIZED ROTATION STAGES

.98 (25)

ROTATION STAGE, DIRECT MOTOR L1 MODEL PP PE CC CCHL RV120 9.90 9.90 9.90 11.87 (251.5) (251.5) (251.5) (301.5) RV160 10.39 12.36 10.39 12.36 (264) (314) (264) (314) RV240 11.38 13.35 11.38 13.35 (289) (339) (289) (339) RV350 12.40 14.37 12.40 14.37 (315) (365) (315) (365)

MOTORIZED VERTICAL STAGES

2.38 (60.5)

ø.14 (3.5)

ø.63 (16)

5.35 (136)

4 HOLES M4 THD ON SQR 2.48 (63) DEPTH: 7

60° 2.40 (61)

ROTATION STAGE, FOLDED MOTOR MODEL L1 M1

ø1.97 +.001 0 (Ø 50 H7)

RV120

25°

6.12 (155.5) 6.61 (168) 7.60 (193) 8.62 (219)

RV160 RV240

5 HOLES AT 60° ON ø3.62 (92). C’BORED FOR M4 SCREW 3.31 (84)

RV350

2.15 (54.5) 2.48 (63) 3.25 (82.5) 4.49 (114)

6.32 (160.5)

4.35 (110.5)

HEXAPODS

RV120 to RV350 Models

2 x “R” HOLES Ø “S” THD, AT “T” ON ø“U”, WORKING DEPTH OF TAPPING: “V” (SEE DETAIL A)

MOTORIZED ACTUATORS

1.61 (41)

øB ±.0039 (0.1) “W” HOLES AT “X” ON ø”Y”: “Z” HOLES C’BORED FOR CHC ø”a” SCREW “b” HOLES ø”a” THD, DEPTH: “c” (HIDDEN PART OF THE BASE)

2 bearing areas of ø”C” H7 Q N

.02 (0.5)

øC H7

22.5° -> RV120 ONLY: 1 HOLE C’BORED FOR CHC M5 SCREW

.02 (0.5) øE

øD

CONTROLLERS AND DRIVERS

øF

MODEL SHOWN: RV240CCHL DIMENSIONS IN INCHES (AND MILLIMETERS)

DISABLING OF LIMIT SWITCHES

øA

– DETAIL A –

MOTORIZED OPTICAL MOUNTS

SUB-D25M CONNECTOR

H øF G

øE Q

MODEL RV120

A 4.96 (126)

RV160 RV240 RV350

6.42 (163) 7.56 (192) 4.33 (110) 5.08 (129) 5.28 (134) 5.98 (152) .55 (14) 9.33 (237) 10.83 (275) 6.89 (175) 7.64 (194) 8.03 (204) 8.74 (222) .63 (16) 14.02 (356) 15.55 (395) 11.02 (280) 11.89 (302) 12.40 (315) 13.05 (331.5) .69 (17.5)

MODEL RV120 RV160 RV240

R 4 6 6

RV350

B 6.10 (155)

C 3.07 (78)

D 3.66 (93)

E F 3.90 (99) 4.55 (115.5)

G .55 (14)

H 2.68 (68)

J 2.48 (63)

K 1.34 (34)

2.80 (71) 3.21 (81.5) 1.42 (36) 2.95 (75) 4.70 (119.5) 1.58 (40) 3.54 (90) 7.05 (179) 1.97 (50)

N .75 (19)

P .16 (4)

Q .59 (15)

.73 (18.5) .80 (20.3) .84 (21.3)

.20 (5) .28 (7) .31 (8)

.57 (14.5) .65 (16.6) .68 (17.3)

S M4 M5

T 90° 60°

U 3.44 (87.5) 4.72 (120)

V .24 (6) .28 (7)

W 6 6

X 60° 60°

Y 5.39 (137) 6.85 (174)

Z 5 5

a M5 M5

b 1 1

c 7 7

α 17.5° 25°

M5 M6

60° 60°

7.38 (187.5) 11.61 (295)

.28 (7) .28 (7)

6 12

60° 30°

9.84 (250) 14.65 (372)

5 10

M6 M8

1 2

10 12

30° 10°

w w w. n e w p o r t . c o m / R V - M C f o r m o r e i n f o r m a t i o n

SPECIAL COLLECTIONS

.02 (0.5)

For Motion, Think Newport ™

MOTORIZED LINEAR STAGES

RVHAT & RVHAHLT Models 2 x “R” HOLES Ø “S” THD, AT “T” ON ø“U”, WORKING DEPTH OF TAPPING: “V” (SEE DETAIL A) øB ±0.1

r = “I” “W” HOLES AT “X” ON ø”Y”: “Z” HOLES C’BORED FOR CHC ø”a” SCREW “b” HOLES ø”a” THD, DEPTH: “c” (HIDDEN PART OF THE BASE)

MOTORIZED VERTICAL STAGES

2 bearing areas of ø”C” H7 Q N øF

.02 (0.5)

øC H7

22.5° -> RV120 ONLY: 1 HOLE C’BORED FOR CHC M5 SCREW

.02 (0.5) øE

øD

MODEL SHOWN: RV240HAT DIMENSIONS IN INCHES (AND MILLIMETERS)

MOTORIZED ROTATION STAGES

SUB-D25M CONNECTOR

L1 øA

MOTORIZED ACTUATORS

– DETAIL A –

øF øE .02 (0.5)

G Q

CAD

A 4.96 (126)

B 6.10 (155)

C 3.07 (78)

D 3.66 (93)

E F 3.90 (99) 4.55 (115.5)

G .55 (14)

RV160

6.42 (163)

7.56 (192)

4.33 (110)

5.08 (129)

5.28 (134)

.55 (14)

RV240 RV350

9.33 (237) 10.83 (275) 6.89 (175) 7.64 (194) 8.03 (204) 8.74 (222) .63 (16) 14.02 (356) 15.55 (395) 11.02 (280) 11.89 (302) 12.40 (315) 13.05 (331.5) .69 (17.5)

5.98 (152)

H 3.39 (86)

I 3.15 (80)

J 2.48 (63)

K 1.34 (34)

N .75 (19)

3.50 (89)

3.86 (98)

3.21 (81.5)

1.42 (36)

.73 (18.5)

.20 (5)

.57 (14.5)

3.66 (93) 5.22 (132.5) 4.70 (119.5) 1.58 (40) 4.25 (108) 7.44 (189) 7.05 (179) 1.97 (50)

.80 (20.3) .84 (21.3)

.28 (7) .31 (8)

.65 (16.6) .68 (17.3)

SPECIAL COLLECTIONS

P .16 (4)

MODEL RV120

R 4

S M4

T 90°

U 3.44 (87.5)

V .24 (6)

W 6

X 60°

Y 5.39 (137)

Z 5

a M5

b 1

c 7

α 17.5°

RV160 RV240 RV350

6 6 6

M5 M5 M6

60° 60° 60°

4.72 (120) 7.38 (187.5) 11.61 (295)

.28 (7) .28 (7) .28 (7)

6 6 12

60° 60° 30°

6.85 (174) 9.84 (250) 14.65 (372)

5 5 10

M5 M6 M8

1 1 2

7 10 12

25° 30° 10°

See our website for CAD files

MOTORIZED OPTICAL MOUNTS

CONTROLLERS AND DRIVERS

HEXAPODS

MODEL RV120

ROTATION STAGE, DIRECT MOTOR L1 M1 MODEL HAT HAHLT RV120 11.87 11.87 1.79 (301.5) (301.5) (45.5) RV160 12.36 14.06 2.13 (314) (357) (54) RV240 13.35 15.04 2.89 (339) (382) (73.5) RV350 14.37 16.06 4.13 (365) (408) (105)

4.61 (117)

1.32 (33.5)

ROTATION STAGE, FOLDED MOTOR M1 L2 L1 MODEL HAT-F HAHLT-F RV120 6.12 2.15 3.13 (155.5) (54.5) (79.5) RV160 6.61 2.48 4.23 (168) (63) (107.5) 6.32 (160.5) RV240 7.60 3.25 3.25 (193) (82.5) (82.5) RV350 8.62 4.49 4.49 (219) (114) (114)

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4.35 (110.5)

Q .59 (15)

For Motion, Think Newport ™

URS Series MOTORIZED LINEAR STAGES

Precision Rotation Stages scan QR code to watch video

• Backlash-free continuous rotation with 20,000 MTBF • 8,000 cts/rev rotary encoder on DC motor versions enables 0.0005° resolution

ANTE

GU SP

Compliant

RoHS

F I C ATI O

• Economic stepper motor versions with high motion sensitivity

MOTORIZED ROTATION STAGES MOTORIZED ACTUATORS

URS Series provide precision 360° continuous motion in a low profile package. URS Series stages feature: a proprietary ball bearing with exceptional stiffness, high reliability, minimal wobble and eccentricity; a tilted worm screw arrangement to allow 4 symmetric mounting holes, providing better support for cantilevered loads; adjustable limit switches to prevent over-travel (except for URS50B); and a flexible preloading system to guarantee backlash-free operation with an MTBF of 20,000 hours. The DC motor version features an ultra-high resolution encoder, 8,000 cts/rev, mounted on the worm screw, ensuring excellent bi-directional repeatability and high accuracy motion. The DC motor versions provides the highest dynamic speed range and allows rotation speeds up to 80 °/s. The stepper motor version is an economical solution for less demanding applications and with its high output torque, minimizes any risk of lost steps, providing good linearity between the stage’s motion and commanded steps. The URS is also available in vacuum compatible versions down to 10e-6hPa. Additionally the CONEX-URS50BCC is the URS50BCC rotational stage with the integrated CONEX-CC controller/driver and is pre-configured for the highest level of out-of-the-box control. The CONEX-CC is a very compact and inexpensive driver for Newport’s low power DC servo motor driven devices.

MOTORIZED VERTICAL STAGES

• Unique, compact 2-piece bearing design provides exceptional wobble and eccentricity

Design Details Base Material

Hardened steel with aluminum body

Bearings

Large diameter ball bearings HEXAPODS

Drive Mechanism

Worm/gear URS50BCC: Encoder at motor rear, no index pulse URS75BCC to URS150BCC: Worm mounted 8,000 cts/rev encoder, index pulse URS-BPP: None

Feedback Limit Switches

Two independently adjustable optical limit switches (except URS50B)

Origin

Optical, fixed at position 0°.

Motor

DC Servo or Stepper 3 (included)

CONEX-URS50BCC shown

Specifications URS50BPP

URS50BCC

Travel Range (°)

URS75BPP to URS150BPP

URS75BCC to URS150BCC

360 continuous1 0.0005

0.001

0.0002

0.002

Uni-directional Repeatability 3 (°)

0.002

Bi-directional Repeatability 3 (°)

0.008 or ± 0.004

0.006 or ± 0.003

0.02 or ± 0.01

0.006 or ± 0.003

Absolute Accuracy 3 (°)

0.05 or ± 0.025

0.04 or ± 0.02

0.030 or ± 0.015

0.023 or ± 0.0115

Wobble3 (mrad) Eccentricity (mm) 3

50 or ± 25 6 or ± 3

6 or ± 3

MTBF

3 or ± 1.5

URS75BPPV6 version, vacuum compatible up to 10-6 hPa.

20000 h @ 25% load and a 30% duty cycle 0.7

URS75: 1.7; URS100: 2.0; URS150: 3.4

With disabled limit switches 2 MIM with the SMC100PP is 0.0005° and 0.0002° with the XPS and ESP 3

Shown are peak to peak, guaranteed specifications or ± half the value as sometimes shown. For the definition of typical specifications which are about 2X better than the guaranteed values, visit Newport.com for the Motion Control Metrology Primer. 4 Speed is reduced by 2.5x of the rated speed (ie, 40% of rated speed) when used with SMC100PP controller.

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SPECIAL COLLECTIONS

Weight [ (kg)]

3 or ± 1.5

MOTORIZED OPTICAL MOUNTS

Minimum Incremental Motion (°)

Maximum Speed (°/s)

CONTROLLERS AND DRIVERS

Cable Length (m)

For Motion, Think Newport ™

Recommended Motion Controllers/Drivers:

MOTORIZED ROTATION STAGES

MOTORIZED VERTICAL STAGES

MOTORIZED LINEAR STAGES

Ordering Information Model (Metric)

Description

URS50BCC

Precision Rotation Stage, DC, Continuous 360° Motion, URS50

URS50BPP

Precision Rotation Stage, Stepper, Continuous 360° Motion, URS50

URS50BPPV6

Vacuum Compatible Precision Rotation Stage, Stepper, URS50

URS75BCC

Precision Rotation Stage, DC, Continuous 360° Motion, URS75

URS75BPP

Precision Rotation Stage, Stepper, Continuous 360° Motion, URS75

URS75BPPV6

Vacuum Rotation Stage, Stepper Motor, URS75

URS100BCC

Precision Rotation Stage, DC, Continuous 360° Motion, URS100

ESP301 see page 131

URS100BPP

Precision Rotation Stage, Stepper, Continuous 360° Motion, URS100

URS150BCC

Precision Rotation Stage, DC, Continuous 360° Motion, URS150

URS150BPP

Precision Rotation Stage, Stepper, Continuous 360° Motion, URS150

CONEX-URS50BCC1

URS50BCC Rotation Stage Integrated with CONEX Controller

URS75TP (M-URS75TP)

Solid Top Mounting Plate, URS75 Series, M6 Threaded Holes

URS100TP (M-URS100TP)

Solid Top Mounting Plate, URS100 Series, M6 Threaded Holes

URS150TP (M-URS150TP)

Solid Top Mounting Plate, URS150 Series, M6 Threaded Holes

URS75P1

Adapter for B25.4 lens barrel on URS75 stages

URSBK

90° Mounting Bracket URS Series Rotation Stages

Order XPS-DRV01 separately.

XPS see page 127 SMC100CC see page 133

CC versions only

SMC100PP see page 133

PP versions only

Load Characteristics

Order CONEX-PS separately.

Dimensions Dimensions in inches (millimeters)

MODEL URS100B MOTORIZED ACTUATORS

4 HOLES ø.31 (7.8) (2) C’BORED ø.45 (11.5) ON SQR “P” SUB-D15M CONNECTOR

.57 (14.5)

2.05 (52)

HEXAPODS

8°

G F 4 HOLES M4 THD ON “L”, DEPTH: 6 NOTE: ON URS150B VERSIONS, THE POSITION OF THESE 4 HOLES IS TURNED OF 45°.

4 HOLES Ø “H” THD ON SQR “J”, DEPTH: “K” MODEL SHOWN: URS100BPP DIMENSIONS IN INCHES (AND MILLIMETERS)

.98 (0.25)

CAD

URS-BPP: 1.40 (35.6) URS-BCC: 1.38 (35)

.72 (18.3)

.79 (10)

URS75

100

200

300

a, Construction parameter (mm)

ka, Transversal compliance (mrad/Nm)

100

Mz, Nominal Torque (Nm)

0.25

0.5

Q, Off-center load

URS100 URS150

Q ≤ Cz / (1 + D/a)

D, Cantilever distance in mm

See our website for CAD files

BOTTOM VIEW OF THE URS100BCC

MODEL (M-)URS100TP

SUB-D15M CONNECTOR

URS150B: 3 HOLES M5 THD AT 120° ON øN, DEPTH: .79 (10)

1.06 (27)

.53 (13.5)

SQ. 2.00 (50) SQ. 1.00 (25)

ØM

MOTORIZED OPTICAL MOUNTS

CONTROLLERS AND DRIVERS

ØA

1.50 (38)

URS50 Cz, Normal centered load capacity (N)

2.28 (58)

ØE

䊐D

1.95 (49.5)

1.00 (25)

4 TAPPED HOLES M6 CLR ON SQ.1.97 (50)

4.04 (102.5) URS75B & URS100B: 4 HOLES M3 THD ON SQR N, DEPTH: .24 (6)

3.00 (75)

1.00 (25) C

SPECIAL COLLECTIONS

21 HOLES 1/4-20 (M6) THD, USABLE DEPTH: .26 (7) URS75B URS100B URS150B

A 1.97 (50) 3.07 (78) 5.18 (131.5)

B 8.19 (208) 9.13 (232) 11.14 (283)

C -.20 (1) (-5) (1) .71 (18) 2.56 (65)

D E F 3.54 1.18 +.00051 .08 0 (90) (30 +.013 (2) 0 ) 4.49 1.97 +.00063 .26 0 (114) (50 +.016 (6.5) 0 ) 6.50 3.54 +.00087 .41 0 +.022 (165) (90 0 ) (10.5)

G .83 (21) 1.02 (26) 1.14 (29)

H M3 M6 M6

J 1.26 (32) 1.97 (50) 2.95 (75)

K .24 (6) .24 (6) .31 (8)

M 1.50 – (38) SQR 1.89 2.28 (SQR 48) (58) ø4.92 4.13 (Ø 125) (105)

N 1.34 (34) 2.13 (54) 3.86 (98)

P 2.98 (75.6) 3.97 (100.8) 5.91 AND 6 (2) (150 AND 152.4) (2)

NOTES: 1) THE DRIVE BOX OF THE URS75BCC EXCEEDS .20 IN. (5 MM) FROM THE BODY. 2) URS150B: 4 SLOTS COUNTERBORED.

3.00 (75) ø3.86 (Ø 98) .31 (8)

.37 (9.5) -.00039

ø1.97 -.00118 (Ø 50

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-.01 -.03 )

For Motion, Think Newport ™

URB100CC MOTORIZED LINEAR STAGES

High-Speed Belt-Driven Rotation Stage

MOTORIZED VERTICAL STAGES

• Belt driven version of URS series offers higher rotation speeds without sacrificing life time expectancy • 720°/s maximum speed

F I C ATI O

The URB100CC rotation stage is a high-speed, belt driven rotation stage. It is engineered for applications requiring fast moves over larger angles or continuous rotation at very high duty cycles, with high precision requirements. Features include: the belt drive which provides high rotational speeds of up to 720°/s; a proprietary four point contact ball bearing and 2piece design to provide exceptional stiffness and high reliability while minimizing wobble and eccentricity; an enhanced low-profile package to ensure easy top down mounting. Typical applications for the URB stage are LIDAR, 3D imaging, or film thickness measurements of semiconductor wafers.

Base Material Bearings

Hardened steel with aluminum body

Large diameter 4pt contact ball bearing

Drive Mechanism Feedback

QH Mz

Two independently adjustable optical limit switches, enabled/disabled by an external switch

Cz kα

HEXAPODS

Origin

Belt drive with 1:18 reduction ratio Motor mounted rotary encoder, 2,000 cts/rev, with index pulse

Limit Switches

MOTORIZED ACTUATORS

Load Characteristics

Design Details

Optical, fixed at position 0°, 0.015° typical repeatability

Motor

DC Servo

Cable Length (m)

MOTORIZED ROTATION STAGES

ANTE

Compliant

RoHS

• Economic motor mounted rotary encoder with 0.01° resolution

3 ( included)

Specifications 360 continuous1

Minimum Incremental Motion (°)

0.02

Uni-directional Repeatability 2 (°)

0.015

Bi-directional Repeatability 3 (°)

0.115 or ± 0.0575

Absolute Accuracy 3 (°) Maximum Speed (°/s)

0.2 or ± 0.1 720 1300 (with 0.025 kg.m2 inertia)

Maximum Torque (Mz) (Nm)

0.6

Wobble (mrad) Eccentricity (mm) 3

MTBF

50 or ± 25 3 or ± 1.5 20,000 h at 25% load and with a 30% duty cycle

100

a, Construction parameter (mm)

ka, Transversal compliance (mrad/Nm) Mz, Maximum Torque (Nm) Jz, Maximum Inertia (kg.m2) Q, Off-center load D, Cantilever distance in mm

For the definition of specifications visit Newport.com's section on Motion Basics and Standards.

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10 ± 0.6 0.025 Q ≤ Cz / (1 + D/a)

SPECIAL COLLECTIONS

With disabled limit switches To minimize drive chain hysteresis affecting repeatability, Newport recommends always approaching positions from the same direction of motion 3 Shown are peak to peak, guaranteed specifications or ± half the value as sometimes shown. For the definition of typical specifications which are about 2X better than the guaranteed values, visit Newport.com for the Motion Control Metrology Primer. 2

Cz, Normal centered load capacity (N)

MOTORIZED OPTICAL MOUNTS

Maximum Acceleration (°/s2) 3

CONTROLLERS AND DRIVERS

Travel Range (°)

For Motion, Think Newport ™

Recommended Motion Controllers/Drivers:

Ordering Information Model (Metric)

Description

URB100CC

Belt Drive Rotation Stage, 360°, DC Servo Motor

URS100TP (M-URS100TP)

Solid Top Mounting Plate, URS100 Series, 1/4-20 Threaded Holes

URSBK

90° Mounting Bracket URS Series Rotation Stages

MOTORIZED VERTICAL STAGES

MOTORIZED LINEAR STAGES

XPS see page 127 ESP301 see page 131 SMC100CC see page 133

CAD

MODEL URB100CC 4 HOLES ø.31 (7.8) C’BORED ø.45 (11.5) ON SQR 3.97 (100.8)

1.56 (39.5)

.33 (8.5)

MOTORIZED ROTATION STAGES

ø.98 (25)

.81 (20.6)

ø1.97 +0-.0006 (Ø 50 H6)

SQR 4.49 (114)

3.46 (88)

.59 (14.9)

MOTORIZED ACTUATORS

1.89 (47.9)

4 HOLES M4 THD ON SQR 1.89 (48), DEPTH: .24 (6)

4 HOLES M6 THD ON SQR 1.97 (50), DEPTH: .22 (5.5) SUB-D15M CONNECTOR

HEXAPODS

ø3.08 (78)

1.50 (38)

.16 (4)

.01 (0.25) .39 (10)

4.96 (126)

CONTROLLERS AND DRIVERS

ø2.28 (58) 3.19 (81)

3.31 (84)

4.15 (105.5)

MODEL SHOWN: URB100CC

ø1.65 (42)

SPECIAL COLLECTIONS

MOTORIZED OPTICAL MOUNTS

DIMENSIONS IN INCHES (AND MILLIMETERS)

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See our website for CAD files

For Motion, Think Newport ™

FCR100 MOTORIZED LINEAR STAGES

Intelligent Stepper Motor Rotary Stages scan QR code to watch video

• Value-engineered • Proven and robust construction

• Plug and play • Easy connection via the USB or directly via RS-422 GU

ANTE

Compliant

RoHS

F I C ATI O

FCR100

Base Material

Aluminum

Motor

Integrated iPP 2-phase step motor and controller/driver

Drive Mechanism

Ground worm gear

Feedback

Open-loop, no encoder

Worm Gear Ratio

1:200

Bearings

Crossed roller bearings

Limit Switches

None

Origin

Optical, fixed at position 0°

MOTORIZED ACTUATORS

Load Characteristics and Stiffness

MOTORIZED ROTATION STAGES

The FCR100 rotation stage combines a fully integrated stepper motor controller (iPPTM technology) and precision rotation stage in a small footprint. Similar to the CONEX series for DC motor, the FCR100 comes fully pre-configured and enables true out-of-box control. The iPPTM technology used in the FC series completely eliminates controller or driver set up, allowing users to simply connect USB communication, plug in the power supply and start the motion GUI. Features of the FCR100 includes: robust construction of crossed roller bearing for high position accuracy and the stepper motor directly attached to the worm screw providing high output torque. Up to 4 FC series units can be daisy-chained and controlled by a single GUI, via USB or direct RS-422 interface.

Design Details

MOTORIZED VERTICAL STAGES

• Space-saving (no seperate controller box)

D Q Cz

kα

Computer Interfaces

RS422, USB

Cable

Cables and power supply sold seperately

HEXAPODS

General Specifications FCR100

Cz, Normal centered load capacity

Travel Range (°)

360 continuous

Ka, Transversal compliance

Minimum Incremental Motion (°)

0.00025

Mz, Maximum torque

0.5 Nm

Bi-directional Repeatability 1 (°)

0.012 or ± 0.006

Jz, Maximum Inertia

0.1 kgm2

Absolute Accuracy 1 (°)

0.04 or ± 0.02

Q, Off-center load

Maximum Speed (no load) (°/s)

Where: D = Cantilever distance in mm

Wobble 1 (mrad)

50 or ± 25

Eccentricity 1 (mm)

6 or ± 3 20,000

Weight (kg)

2.25

Q ≤ Cz/(1+D/30)

For the definition of specifications visit Newport.com for the Motion Basics and Standards.

MOTORIZED OPTICAL MOUNTS

MTBF (h)

300 N 12 mrad/Nm

CONTROLLERS AND DRIVERS

Model

SPECIAL COLLECTIONS

A typical assembly using FCR100, FCL100 and FCL200

An FCR100 stage mounted to an FCL200 stage

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MOTORIZED VERTICAL STAGES

MOTORIZED LINEAR STAGES

For Motion, Think Newport ™

Ordering Information Model

Description

FCR100

Precision Rotation Stage, Intelligent Stepper Motor, Continuous 360° Motion

FC-PS40

Power supply, iPP step motor, RoHS

USB-RS422-1.8

Cable adapter, USB to RS422, 1.8m

FC-CB1

1m communication cable, daisy chain, RS422

Dimensions FCR100

MOTORIZED ROTATION STAGES

.31 (8)

1.97 (50)

4 HOLES M6 THD DEPTH: .39 (10)

.98 (25)

ø3.33 (84.6)

MODEL SHOWN: FCR100 DIMENSIONS IN INCHES (AND MILLIMETERS)

MOTORIZED ACTUATORS

SQR 4.53 (115)

3.46 (88)

1.70 (43.2)

3.31 (84)

2.68 (68)

HEXAPODS

ø1.18 (30) (50H7) ø1.97 +.00063 0 DEPTH: .08 (2)

CAD

6 HOLES M6 THD DEPTH: .31 (8)

1.77 (45)

See our website for CAD files

SPECIAL COLLECTIONS

MOTORIZED OPTICAL MOUNTS

CONTROLLERS AND DRIVERS

4 HOLES ø.31 (7.8) C’BORED ø.45 (11.5) ON SQR 3.97 (100.8)

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For Motion, Think Newport ™

PR50 & SR50 Series MOTORIZED LINEAR STAGES

Compact Rotation Stages • Compact, low-profile rotation stage for 1 in. diameter optics

• Proprietary ball bearings provide smooth motion with low wobble

ANTE

Compliant

RoHS

• Variety of choices, high speed or high resolution

F I C ATI O

SR50 Series

PR50 Series Aluminum

Bearings

Ball bearings

Drive Mechanism

Ground worm gear

Worm Gear Ratio

1:63 11.8642:1

SR50CC: Motor mounted rotary encoder, 48 pts/rev SR50PP: Open-loop, no encoder

PR50CC: Motor mounted rotary encoder, 48 pts/rev PR50PP: Open-loop, no encoder

Origin

Optical

Cable (m)

CONEX-PR50CC shown

CONTROLLERS AND DRIVERS

1:70 107.143:1

Reduction Gear Feedback

HEXAPODS

Design Details

MOTORIZED ACTUATORS

The CONEX SR50CC and PR50CC are rotation stages with the integrated CONEX-CC controller/driver and is pre-configured for the highest level of out-of-the-box control. The CONEX-CC is a very compact and inexpensive driver for Newport’s low power DC servo motor driven devices.

MOTORIZED ROTATION STAGES

The SR50 and PR50 Series are compact, lightweight rotation stages designed for optical components up to 1" in diameter, such as polarizers, wave plates, or wedges. The SR50 stages provide high precision rotation with Minimum Incremental Motion of 0.004° with either DC servo or open-loop stepper motors. The PR50 stages are a cost-efficient alternative to the SR50 for applications that do not require precision of the SR50 or that could benefit from higher speeds up to 20°/s. SR50/PR50 feature: a lightweight, low profile design with the proprietary ball bearings to provide smooth rotation with minimal wobble (± 50 mrad); a precision ground worm gear producing consistent driving torque to the rotating carriage; an internally foldered motor provides a small footprint for easy integration in the optics path. Typical applications include rotation of optical elements in confined spaces, such as laser cavities, disk texturing machines, or fiber optics component manufacturing.

Base Material

MOTORIZED VERTICAL STAGES

• Lightweight, folded motor design

Specifications SR50 Series

PR50 Series

360 continuous

Minimum Incremental Motion (°)

0.004

0.02

Uni-directional Repeatability (°)

0.01

0.05

Bi-directional Repeatability 1 (°)

0.05 or ± 0.025

0.15 or ± 0.075

Absolute Accuracy1 (°)

0.06 or ± 0.03

0.1 or ± 0.05

Maximum Speed2 (°/s)

100 or ± 50

Wobble1 (mrad) Weight (kg)

SPECIAL COLLECTIONS

MTBF (h)

MOTORIZED OPTICAL MOUNTS

Travel Range (°)

10,000 0.3

0.4

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Two PR50 stages with an EQ45.

For Motion, Think Newport ™

MOTORIZED LINEAR STAGES

Load Characteristics

D Q Cz

kα Mz

SR50 Series

PR50 Series

Normal Load Capacity (Cz) N

Construction parameter (a) mm

Transversal Stiffness (ka) mrad/Nm

160

100

SR50CC: 0.4 SR50PP: 0.5

Nominal Torque (Mz) Nm MOTORIZED VERTICAL STAGES

0.1

Q≤ Cz/(1 + D/a)

Off-center load (Q) Cantilever distance (D) mm Also applicable to the PR50 Series

MOTORIZED ACTUATORS

MOTORIZED ROTATION STAGES

Ordering Information Model

Description

Recommended Motion Controllers:

SR50CC

Compact Rotation Stage, 360°, DC Servo Motor, SR Series

SR50PP

Compact Rotation Stage, 360°, Micro Step Drive Stepper, SR Series

PR50CC

Compact Rotation Stage, 360°, DC Servo Motor, PR Series

PR50PP

Compact Rotation Stage, 360°, Micro Step Drive Stepper, PR Series

CONEX-SR50CC

SR50CC Rotation Stage Integrated with CONEX Controller

CONEX-PR50CC

PR50CC Rotation Stage Integrated with CONEX Controller

EQ45

Right-Angle Bracket for PR50 and SR50

Dimensions

XPS see page 127 ESP301 see page 131 SR50CC and PR50CC SR50PP and PR50PP

For the definition of specifications, visit Newport.com's section on Motion Basics and Standards.

SR50 Series 4 HOLES ø.14 (3.5) ON 1.98 x .99 (50.4 x 25.2), C'BORED ø.24 (6), DEPTH: .13 (3.2)

.39 (10) 4 HOLES M3 THD ON SQR .98 (25), DEPTH: .12 (3)

See our website for CAD files

2 RETAINING RINGS THICKNESS: .26 (6.5)

4 HOLES M3 THD ON SQR 1.97 (50) DEPTH: .18 (4)

2 x 1 HOLE 8-32 THD, DEPTH: .18 (4.5)

ø.83 (21)

2.28 (58)

ø1.0625"-20 UN 2B THD

3.15 (80)

ø1.01 (25.7)

1.14 (29)

HEXAPODS

CAD

SMC100CC see page 133 SMC100PP see page 133

2 x 2 HOLES M3 THD, DEPTH: .24 (6)

1.14 (29)

3.03 (77) NOTE: SHOWN WITHOUT RETAINING RINGS.

NOTE: SHOWN WITH RETAINING RINGS. 1.6

CONTROLLERS AND DRIVERS

1.97 (50) 2.28 (58)

MODEL SHOWN: SR50 DIMENSIONS IN INCHES (AND MILLIMETERS)

SUB-D25 CONNECTOR, CABLE LENGTH 9.8 FT (3 M)

PR50 Series .83 (21)

MOTORIZED OPTICAL MOUNTS

ø1.0625"-20 UN 2B THD

4 HOLES M3 THD ON SQR .98 (25), DEPTH: .12 (3)

1.97 (50)

ø.83 (21)

ø1.01 (25.7)

1.14 (29)

4 HOLES Ø 3.5 ON 1.98 x .99 (50.4 x 25.2), C'BORED ø.24 (6), DEPTH: .13 (3.2) NOTE: BOTTOM VIEW SHOWN WITHOUT RETAINING RINGS.

2.28 (58)

HOLE 8-32 THD, DEPTH: .18 (4.5)

2 HOLES M3 THD, DEPTH: .24 (6)

1.14 (29) NOTE: TOP VIEW SHOWN WITH RETAINING RINGS.

MODEL SHOWN: PR50 DIMENSIONS IN INCHES (AND MILLIMETERS)

2 HOLES M3 THD, DEPTH: .24 (6)

HOLE 8-32 THD, DEPTH: .18 (4.5)

.063 (1.6) RETAINING RING

SPECIAL COLLECTIONS

.39 (10)

2 RETAINING RINGS THICKNESS: .26 (6.5)

.25 (6.5)

.39 (10) 1.97 (50) SUB-D25 CONNECTOR, CABLE LENGTH 9.8 FT (3 M)

4.65 (118)

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.82 (Ø 21)

For Motion, Think Newport ™

BG Series

• ±45° transverse axis rotation with maximum free access to the rotating platform (±30° for BGS50)

• Precision machined ball bearing races assure smooth motion and high stability • Precision ground worm gear provides 0.001° resolution

RoHS

Compliant

MOTORIZED VERTICAL STAGES

• Nested cradles provide orthogonal rotation about the same point

MOTORIZED LINEAR STAGES

Goniometric Cradles

• Vacuum compatible versions up to 10-6 hPa

MOTORIZED ACTUATORS

The CONEX-BGS50CC is a goniometric cradle stage with the integrated CONEX-CC controller/driver and is pre-configured for the highest level of out-of-the-box control. The CONEX-CC is a very compact and inexpensive driver for Newport’s low power DC servo motor driven devices.

MOTORIZED ROTATION STAGES

BG Series Goniometric Cradles are designed to provide precision transverse axis rotational motion with maximum free access to the rotating platform and an MIM to 0.0002°. BG stages can be stacked for two-axis rotation about the same pivot point. Mounting a rotation stage under the assembly adds a third orthogonal rotation axis through the same point. Features include: a precision ground, hardened worm gear drive for high accuracy rotation; single row ball bearings and precision ground tool-steel races to ensure smooth rotational motion with minimal wobble and eccentricity; and a home switch conveniently located at the center of travel. BG Series goniometric cradles are available in 5 sizes and may be configured with DC motors (CC) or stepper motors (PP with mini-step or PE with full-step), depending on the applications. These highly versatile stages can be used for applications with high loads or torques, vacuum applications and compact multi-axis rotation assemblies.

Design Details Stainless steel with aluminum body

Bearings

Ball bearings

Drive Mechanism

Ground worm gear

Worm Gear Ratio

BGS50, BGS80 and BGM120: 1:180 BGM160 and BGM200: 1:60 BGS50CC: 14:1, BGS50PP: 43:1, BGS80CC: 44:20 BGS80PP and BGM1201): None BGM1601) and BGM2001): 3:1

Reduction Gear

BGS50CC: Motor mounted rotary encoder, 2048 cts/rev BGS50PP and BGS80PP: none BGS80CC: Worm mounted rotary encoder with index pulse, 4000 cts/rev BGM120 to BGM200: Worm mounted rotary encoder with index pulse, 2000 cts/rev

Limit Switches

CONEX-BGS50CC shown

Mechanical, at ± 45° (for BGS50 Mechanical, at ± 30°)

Origin

Optical, at 0°

Cable

3 m long cable included

Vacuum Compatibility 1)

CONTROLLERS AND DRIVERS

Feedback

HEXAPODS

Base Material

For the definition of specifications visit Newport.com for the Motion Basics and Standards.

Available up to 10-6 Torr using full step motor (BGM120PE to BGM200PE only)

Specifications Travel Range (°) Minimum Incremental Motion (°)

BGS50CC

BGS50PP

BGS80CC

BGS80PP

±30

±45

0.0005

0.0002

0.0005

0.0002

0.002

0.001

0.004

0.013 or ± 0.0065

0.016 or ± 0.008

0.003 or ± 0.0015

0.005 or ± 0.0025

0.024 or ± 0.012

0.05 or ± 0.025

0.07 or ± 0.035

0.05 or ± 0.025

0.06 ° or ± 0.03

0.05 or ± 0.025

CC and PP: 20, PE: 2

200 or ± 100

2.1

BGM120: 8.5, BGM160: 18, BGM200: 38

Maximum Speed (°/s) Wobble, Typical1 (mrad) MTBF (h) Weight (kg)

20,000 0.8

0.8

2.1

Shown are peak to peak, typical specifications or ± half the value as sometimes shown. For the definition of typical specifications which are about 2X better than the guaranteed values, visit Newport.com for the Motion Control Metrology Primer. The actual performance of BG stages are not verified on all production units, hence typical specifications are provided.

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SPECIAL COLLECTIONS

Uni-directional Repeatability Typical1 (°) Bi-directional Repeatability, Typical1 (°) Absolute Accuracy, Typical1 (°)

BGM120, BGM160, BGM200

MOTORIZED OPTICAL MOUNTS

Additional motor mounted 10:1 reduction gear on PE versions.

For Motion, Think Newport ™

MOTORIZED ACTUATORS

MOTORIZED ROTATION STAGES

MOTORIZED VERTICAL STAGES

MOTORIZED LINEAR STAGES

Ordering Information Model

Load Characteristics and Stiffness

Series

Travel Drive Vacuum (mm) Prep. (2) 50 Example: BGS 80 CC The BGM80PE is an BGM goniometric cradle 120 PP with a full-step motor MBGM 160 PE (1) V6 drive, English version. 200 1) Only available as BGM Series stage. 2) Vacuum compatible to 10-6 hPa. In this case max. speed and load capacity are divided by two. M-: For metric version CC: DC motor PP: Micro-step motor PE: Full-step motor

Z D Q

XPS see page 127 ESP301 see page 131 SMC100CC see page 133

BGS50CC and BGS80CC only

SMC100PP see page 133

BGS50PP and BGS80PP only

CONEX-CC see page 137

BGS50CC only

BGS50

BGS80 BGM120 BGM160 BGM200

Cz, Normal centered load capacity (N)

200

300

500

a, Construction parameter (mm)

120

ka, Radial compliance (mrad/Nm)

100

(PP)

0.5

(CC)

0.5

My, Maximum torque (Nm)

Motor cables are included.

Recommended Motion Controllers: Model

kα

(PE)

Q, Off-center load: Q ≤ Cz/(1 + D/a), where D = Cantilever distance in mm

Dimensions BGS50

BGS80

HEXAPODS

4 HOLES M3 THD ON SQR .79 (20), DEPTH: .20 (5)

+.0005

ø.197 0 (5 H7)

1.97 (50)

.79 (20)

CONTROLLERS AND DRIVERS

+.0005

ø.197 0 (5 H7)

3.86 3.15 (98) (80)

CABLE LENTH 9.8 FT (3 M) AND SUB-D25M CONNECTOR

4 HOLES M3 THD ON SQR .79 (20), DEPTH: .20 (5)

2.26 (57.5)

4 HOLES M4 THD ON SQR 1.34 (34), DEPTH: .20 (5) MODEL SHOWN: BGS80CC DIMENSIONS IN INCHES (AND MILLIMETERS)

.18 (4.5)

MOTORIZED OPTICAL MOUNTS

4 HOLES ø.18 (4.5) ON ø4.92 (125)

4 HOLES C’BORED FOR M3 SCREW ON .79 x 2.52 (20 x 64)

8 HOLES M3 THD, DEPTH: .20 (5)

2.95 (75)

2.32 (59) +.0005

ø.197 0 (5 H7)

3.96 (100.5)

1.54 (39)

.79 (20)

MANUAL KNOB ø.79 (20)

MODEL SHOWN: BGS50 DIMENSIONS IN INCHES (AND MILLIMETERS)

45°

4.31 (109.5) 3.94 (100)

.61 (15.5)

SUB-D15M CONNECTOR

2.46 (62.5)

4 HOLES M4 THD ON SQR 1.34 (34), DEPTH: .14 (3.5)

BGS80CC : 9.73 (247.2) BGS80PP : 8.96 (227.7) 1.02 (26)

.79 .87 (20) (22)

SPECIAL COLLECTIONS

.87 (22)

2.26 (57.5)

45°

BOTTOM VIEW OF THE BGS80PP

+.0005

ø.197 0 (5 H7)

4 HOLES M4 THD ON SQR 1.89 (48), DEPTH: .24 (6)

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4 HOLES M4 THD ON SQR 2.48 (63), DEPTH: .24 (6)

For Motion, Think Newport ™

BGM120 to BGM200 “Z” HOLES 1/4”-20 (M6) THD, 1.0 (25) SPACING

45°

MODEL SHOWN: BGM160PP

45°

DIMENSIONS IN INCHES (AND MILLIMETERS)

MOTORIZED ACTUATORS

MOTORIZED ROTATION STAGES

4 HOLES, ø.27 (6.8) ON “F”

NOTE: 1) CONNECTOR ORIENTATION VARIES BY SERIES SIZE. PLEASE CALL FOR EXACT CONFIGURATION OF SPECIFIC MODELS.

MOTORIZED VERTICAL STAGES

MOTORIZED LINEAR STAGES

4 HOLES, ø.27 (6.8) ON “E”

SUB-D25M CONNECTOR (1)

HEXAPODS

N 45° S

K F 5.91 x 3.94 (150 x 100) 7.87 x 5.91 (200 x 150) 9.84 x 9.84 (250 x 250)

MODEL (METRIC) N P Q R (M-)BGM120 2.76 (70) 3.70 (94) 6.46 (164) 7.09 (180) (M-)BGM160 3.90 (99) 5.44 (138.2) 9.65 (245) 10.63 (270) (M-)BGM200 5.31 (135) 7.72 (196) 15.67 (360) 15.67 (398)

G 4.72 (120) 6.69 (170) 10.63 (270) S .31 (8) .39 (10) .39 (10)

H 4.72 (120) 6.30 (160) 7.87 (200)

J 6.69 (170) 8.66 (220) 10.63 (270)

T U 3.90 (99) 5.04 (128) 5.12 (130) 7.78 (197.5) 7.87 (200) 11.81 (300)

V .24 (6) .39 (10) .39 (10)

K 8.11 (206) 13.78 (350) 20.47 (520) W 1.70 (43.2) 1.84 (46.8) 2.46 (62.5)

M 1.22 (31) .34 (8.7) –

CONTROLLERS AND DRIVERS

MODEL (METRIC) E (M-)BGM120 6.0 x 2.0 (152.4 x 50.8) (M-)BGM160 8.0 x 4.0 (203.2 x 101.6) (M-)BGM200 10.0 x 8.0 (254 x 203.2)

Z 15 21 49

CAD

See our website for CAD files

MOTORIZED OPTICAL MOUNTS

For interface assembly details, refer to the BGM series page at Newport.com.

SPECIAL COLLECTIONS

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For Motion, Think Newport ™

MOTORIZED LINEAR STAGES

NewStep NSR Series

Universal Rotator • Versatile - can be configured as a rotation stage, flipper mount, filter wheel and ND rotator • 1" threaded aperture with reference surface and retaining ring

MOTORIZED VERTICAL STAGES

• Compact with 3" optical axis height and integrated cable • Compatible with NSC200 and NSC-SB to provide manual remote and computer controlled positioning • Available Labview-based indexing software

RoHS

MOTORIZED ACTUATORS

MOTORIZED ROTATION STAGES

Compliant

The NSR1 is an economical and versatile rotary positioner for use as a filter wheel, a neutral density rotator, polarized optic rotator, flipper mount or basic rotation platform. It features a 1” threaded aperture, retaining ring and internal reference surface for 25.4 mm optics, a 1-degree step resolution, and up to 120 °/s speed. The NSR1 serves as a base unit, and can be used as a rotator for 25.4 mm optics. Accessories are also available, including a filter wheel (NSFW-1) for up to 8 - 25.4 mm optics, a 127 mm diameter variable ND filter adapter (NSND), a tooling plate (NSTP-1) featuring an array of tapped holes, and a unique set of adapters to transform the rotator into a motorized flipper mount (NSFM-1). Combined with the NSC200 controller, the NSR1 takes the place of up to 5 separate devices at one fifth of the price. NSR1

Design Details Base Material

Aluminum

Bearings

Ball Bearings

Drive Mechanism

Belt

HEXAPODS

Feedback

Open-loop, no encoder

Motor

2-phase stepper motor, 1 full step = 1°

Cable Length [ (m)]

NSTP-1

3 (included) NSFW-1

NSR1 Specifications

CONTROLLERS AND DRIVERS

Travel Range (°)

MOTORIZED OPTICAL MOUNTS

360 ° continuous

Minimum Incremental Motion (°)

Uni-directional Repeatability (°)

0.25

Bi-directional Repeatability, Typical (°)

2.25

Maximum Speed (°/s)

120

Wobble, Typical (mrad)

600

Maximum Torque (Mz) (Nm)

0.06

Load Capacity, Centered (N)

4.0

Weight (kg)

0.4

SPECIAL COLLECTIONS

NSND-1 THRU -6 (1)

NSFM-1

CAD

See our website for CAD files

Recommended Motion Controller: NSC200 (see page 135) XPS Series can be used for NSR1. Contact us for special quotation.

When the NSR1 is used with the NSFM-1 in the flipper mount configuration, the travel range is 90° and 180°.

NSFM-1flip mount attachment includes adapter plate, magnetic hard stops, U50-P1 mount and UPA1 1" optic holder

Ordering Information Model

Description

NSR1

Rotary Positioner, 1 in. Theaded Aperature

NSFW-1

Filter wheel attachment

NSFM-1

Flip Mount Attachment, Inc. Adapter Plate, Magnetic Stops, U50-P1 & U50A1

NSTP-1

Top plate attachment

NSND-3

ND rotator attachment including 50G02AV.1 ND optic

NSND-4

ND rotator attachment including 50G02AV.2 ND optic

NSND-5

ND rotator attachment including 50Q04AV.1 ND optic

NSND-6

ND rotator attachment including 50Q04AV.2 ND optic

NSTP-1 top plate attachment

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NSFW-1 8-position filter wheel attachment

For Motion, Think Newport ™

Agilis™ Series MOTORIZED LINEAR STAGES

Piezo Motor Driven Rotation Stages scan QR code to watch video

• Ultra-high adjustment sensitivity • Convenient remote operation

• Set-and-forget long-term stability • Available wth direct read encoder and Conex controller

MOTORIZED VERTICAL STAGES

• Ultra-compact — ideal for systems integration

RoHS

Compliant

MOTORIZED ROTATION STAGES MOTORIZED ACTUATORS

The Agilis Series of high precision miniature rotation stages feature Newport’s Agilis piezo step direct motor. Agilis stages provides the benefits of ultra-high adjustment sensitivity and convenient remote operation at a price and size comparable to that of a high quality manual stage. Agilis rotation stages include both compact conventional piezo rotation stages and goniometers. The compact and light weight AG-PR100 and CONEX-AG-PR100P rotation stages feature 1" apertures with retaining rings and are ideal for continuous rotation of waveplates and polarizers. The CONEX-AG-PR100P is based on the Agilis AG-PR100 rotary stage, but features an innovative miniature direct read encoder, providing 0.002º uni-directional repeatability. The CONEX-AG-GON Series gonimeters provide easy access to the tip/tilt platform and can be stacked for multi-axis rotations.

Specifications AG-PR100 and CONEX-AG-PR100P Travel Range (°) Minimum Incremental Motion (°)1

AG-PR100

CONEX-AG-PR100P

360, continuous

340

0.0003

0.001

Uni-Direction Repeatability (°)

0.002

Bi-Direction Repeatability (°)

0.003

Wobble (mrad)

100

Normal Load Capacity (N)

0.135

1.2 m length, 4-wire mini-DIN connector

1.2 m length

Weight (kg) Cable

AG-PR100 in a vertical mounting position for easy placement in optical path

CONTROLLERS AND DRIVERS

100

Maximum Speed (°/s)

HEXAPODS

Model

CONEX-AG-GON-LP and CONEX-AG-GON-UP Travel Range (°)

CONEX-AG-GON-UP

±5.5

±7.5

Minimum Incremental Motion (°)1

0.00025

0.00032

Uni-Direction Repeatability (°)

0.0005

0.00064

Maximum Speed (°/s)

0.33

0.45

Normal Load Capacity (N)

3.5

0.171

1.2 m length

Weight (kg) Cable

CONEX-AG-PR100P shown

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SPECIAL COLLECTIONS

CONEX-AG-GON-LP

MOTORIZED OPTICAL MOUNTS

Model

For Motion, Think Newport ™

MOTORIZED VERTICAL STAGES

MOTORIZED LINEAR STAGES

100

Ordering Information Model

Description

AG-PR100

Agilis Piezo Driven Rotation Stage, 1 inch(1)

AG-PR100V6

Vacuum Compatible Piezo Rotation Stage, Agilis(1)

CONEX-AG-PR100P

Piezo Motor Rotation Stage, 1 in., Direct Encoder, Includes Controller

CONEX-AG-GON-UP

Goniometer, Direct Encoder Feedback, CONEX Controller

CONEX-AG-GON-LP

CONEX Goniometer, Direct Encoder Feedback and Integrated Controller

AG-PR100-TP

Top Plate, CONEX-AG-PR100P, Mount AG-LS25 Stages or GON goniometers

RSA-1TI

Solid Insert for RSP-1T Rotation Stage

PRA-05

Polarizer Adaptor, 12.7 mm Optics to 1.063-20 Threaded Mounts

AG-MD4-1.2

Agilis Extension Cable, 1.2 m, 4-wire mini-DIN connector

USB-CH(2)

USB Power Supply, Includes clips for US, EU, UK & Australia, 2m Cable

CONEX-AG-GON-LP shown

(1)

MOTORIZED ROTATION STAGES

One A-1.25-1RR retaining ring is included with every stage. (2) The USB-CH is required only with AG-UC2 and only if power is not available from a PC.

Recommended Motion Controllers/Drivers Model AG-UC2AG-UC2 see page 138

MOTORIZED ACTUATORS

AG-UC8 see page 138 AG-UC8PC see page 138 CONEX-AG-GON-LP and CONEX-AG-GON-UP assembly shown

Dimensions Model AG-PR100

Model CONEX-AG-GON-LP 3 HOLES 8-32 THD. DEPTH: .17 (4.5)

HEXAPODS

.5 (12.7)

4 HOLES M3 THD DEPTH: .12 (3)

2 HOLES ø.27 (6.8) FOR ACCESS TO C’BORED HOLES

.13 (3.3)

MODEL SHOWN: AG-PR100

.79 (20) 1.26 (32)

MOTORIZED OPTICAL MOUNTS

CONTROLLERS AND DRIVERS

DIMENSIONS IN INCHES (AND MILLIMETERS)

APERTURE 1”1/16-20 UN-2B THD

.79 (20)

3 HOLES M4 THD. DEPTH: .17 (4.5)

.47 (12)

CABLES ø.07 (1.8) AND ø,1 (2.5) LENGHT: 39.4 (1000)

.13 (3.3)

2.91 (74)

SQR 2 (50.8)

.71 (18)

SPECIAL COLLECTIONS

2 HOLES C’BORED FOR M3 SCREWS

.75 (19)

MINI-DIN4M CONNECTOR

CABLE ø.07 (1.8) LENGTH: 45 (1140)

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1.57 (40)

For Motion, Think Newport ™

MOTORIZED LINEAR STAGES

Picomotor™ Rotary Stages

101

• 0.011° resolution • Ideal for remotely rotating polarizers and wave plates MOTORIZED VERTICAL STAGES

• Convenient 1" adapter included

RoHS

Compliant

Model 8401 MOTORIZED ROTATION STAGES MOTORIZED ACTUATORS

With a resolution better than 0.011° and an overall thickness of just 0.63" (16.0 mm), the compact Picomotor™ Rotary Stages can be used for a number of applications, including positioning wave plates and polarizers . Each rotary stage includes an adapter for mounting components with a 1" (25-mm) diameter. For motorized beam-steering applications, use our 45° adapter model 9922. For applications requiring high accuracy and repeatability, the 8410 Closed-Loop Picomotor Rotary Stage includes an encoder for superior position feedback. The closed-loop version provides microradian level of precision and continuous 360° rotation.

Specifications

Model 8410

8401 (-M) Motorized Axes Resolution- Angular (°)

8410

<0.011

4.4

1-2

8-32 thread (M4 thread)

Mounting Connector Type

4 Pin

Ordering Information

Model

Description

8742

Open-Loop Picomotor Controller & Driver Module, 4 Channels

8743-CL

Closed-Loop Picomotor Controller & Driver Module, 2 Channel

HEXAPODS

Load Capacity (N) Maximum Speed (RPM)

Recommended Motion Controllers/Drivers

Note: Use 8742 for 8401 (-M) and 8743-CL for 8410

Description

8401(-M)

Picomotor Rotary Stage, Stainless Steel, 1 in. With 0.5 in. Adapter

8410

Closed-Loop Picomotor Rotary Stage, 1 in. Diameter Components

CONTROLLERS AND DRIVERS

Model

Dimensions

1.563-20 thread

2x 1/4-20 (M6) through holes on 2.83" (70.7) dia. circle

threaded mounting hole for 1.00" (25.4) optic 4x 1/4-20 counter bore

3.50" (88.9) 2x 3.25" (82.6)

dia. 1.50" (38.1)

3.125" (79.38)

4-pin connector

4x 8-32 threaded hole 2.00" (50.8) bolt circle

3x 1.75" (44.5)

0.88" (22.2) clear aperture

0.00" (0.0)

Model 8401

0" 2.5 ) .5 3 6 (

3.50" (88.9) 2x 3.25" (82.6)

3x 1.75" (44.5)

Model 8410

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0.00" (0.0) 2x 0.25" (6.4)

SPECIAL COLLECTIONS

2x 0.25" (6.4) 2.6 (66 3" .8)

MOTORIZED OPTICAL MOUNTS

0.6 (16 3" .0)

4-Motorized Actuators_BR-011302-EN (Motion Control) 2/3/14 3:29 PM Page 102

For Motion, Think Newport ™

102

MOTORIZED LINEAR STAGES

Motorized Linear Actuator Selection Guide Travel (mm)

Minimum Incremental Motion (mm)

Uni-directional Repeatability (mm)

Bi-directional Repeatability (mm)

On-Axis Accuracy (mm)

Maximum Speed (mm/s)

Axial Load Capacity (+Cx)(N)

VP-25AA High Performance Precision Motorized Actuator see page 106

0.1

0.6

2 or ± 1

LTA Series Precision Motorized Actuators see page 107

25, 50

0.05 - 0.1

0.5

6 - 10

1- 5

50 - 120

TRB Series Compact Motorized Actuators see page 111

6 - 25

0.2

0.5

1.5

6 - 10

TRA Series Compact Motorized Actuator see page 111

6 - 25

0.1 - 0.2

6 - 10

0.4

NewStep Series Miniature Motorized Actuator see page 113

0.2

2.21

101

0.9

Picomotor Piezo Linear Actuators see page 114

12.7 - 50.8

0.03

0.02

Vacuum and Ultra-High Vacuum Picomotor™ 12.7-50.8 Actuators see page 116

0.03

0.02

SPECIAL COLLECTIONS

MOTORIZED OPTICAL MOUNTS

CONTROLLERS AND DRIVERS

HEXAPODS

MOTORIZED ACTUATORS

MOTORIZED ROTATION STAGES

MOTORIZED VERTICAL STAGES

Series

1 2 3

NanoPZ Series Ultra-High Resolution Actuators see page 118

12.5

0.03

0.2

NPA Series Nanopositioning Piezo Translators see page 119

25 - 100 (mm)

0.05 - 2 (nm)

16 - 28 (nm)1

0.016 - 0.0281

NA2

1000/150 (push/pull)

NPM Series Nanopositioning Piezoelectric Micrometer Adaptor see page 120

140 (mm)

0.1 - 1 (nm)

35 (nm)1

0.0351

NA2

100

CONEX-LTA Series see page 107

25, 50

0.05, 0.1

0.5

2.0

8, 15

1, 5

50 - 120

CONEX-TRB Series see page 109

6 - 25

0.1

0.5

1.5

CONEX-TRA Series see page 111

6 - 25

0.1 - 0.2

3.0

6 - 10

0.4

Typical Value Refer to the specific NanoPositioner product for more details about resonant frequency and stiffness. For TRB, axial loads over 60N, the max. speed must be reduced to 1 mm/s (CC) and 0.3 mm/s (PP). For TRA, axial loads over 45N, the max. speed must be reduced to 0.3 mm/s.

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4-Motorized Actuators_BR-011302-EN (Motion Control) 2/3/14 3:29 PM Page 103

For Motion, Think Newport â&#x201E;˘

Compatibility Key

Many Newport manual positioning products can be motorized by using Newport motorized precision actuators. Once the manual positioner is chosen for the application, use the tables below to select the appropriate motorized actuator.

Fully Compatible

Compatible but may require standard interface adaptor and/or include small performance limitation (See website for details)

Not Compatible or Not Recommended3 1

NSA12

TRA & TRB TRA6 TRB6

NanoPZ

In some cases, one must limit the travel range of actuators. See Newport website for details. 'Yellow' may require custom interface adaptor or may include significant performance limitations in terms of travel length, load capacity and etc. See Newport.com/motorize for details.

LTA

NewStep

TRA12 TRA25 TRB12 TRB25 PZA12 LTA-HS LTA-HL

NSA12

460P-05

M-562 Series

460P

UMR8.25

460A-X

UMR8.51

460A-XY

UMR12.40

460A-XZ

UMR12.63

460A-XYZ

423

401 and 406

433

MVN80

443

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SPECIAL COLLECTIONS

M-561 series

MOTORIZED OPTICAL MOUNTS

436

CONTROLLERS AND DRIVERS

M-462 Series

LTA

HEXAPODS

426

NanoPZ

TRA12 TRA25 TRB12 TRB25 PZA12 LTA-HS LTA-HL

MOTORIZED ACTUATORS

M-461 Series

TRA & TRB TRA6 TRB6

MOTORIZED ROTATION STAGES

NewStep

Call the local sales office or email tech@newport.com

MOTORIZED VERTICAL STAGES

For more detailed information, visit Newport.com/motorize.

Manual Linear Stages

MOTORIZED LINEAR STAGES

Motorized Actuator and Manual Positioner Compatibility

103

4-Motorized Actuators_BR-011302-EN (Motion Control) 2/3/14 3:29 PM Page 104

104

For Motion, Think Newport ™

MOTORIZED LINEAR STAGES

Manual Rotation Stages NewStep

HEXAPODS

MOTORIZED ACTUATORS

MOTORIZED ROTATION STAGES

MOTORIZED VERTICAL STAGES

NSA12

CONTROLLERS AND DRIVERS

TRA6

TRA12

NanoPZ TRA25 TRB25

PZA12

NewStep

LTA

NSA12

LTA-HS LTA-HL

RS65

SN100

481-A

U100-A

GON40-U

U200-A

GON40-L

U300-A

GON65-U

U100-AC2K

GON65-L

U200-AC2K

561-GON

U300-AC2K

TGN80

TGN120

MOTORIZED OPTICAL MOUNTS

TRA

Mirror Mounts

TRA TRA6 TRB6

U400-AC2K

U100-ACG

U100-G

U200-G

VGM-1N

SPECIAL COLLECTIONS

VGM-2N

600A-2R

600A-4R

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TRA12 TRB12

TRA25 TRB25

NanoPZ

LTA

PZA12

LTA-HS LTA-HL

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TRA12 TRB12

TRA25 TRB25

NanoPZ

LTA

PZA12

LTA-HS LTA-HL

MOTORIZED LINEAR STAGES

NSA12

TRA TRA6 TRB6

105

625-RC2

MOTORIZED VERTICAL STAGES

625-RC4

625-RC6

MOTORIZED ROTATION STAGES

605-2

605-4

MOTORIZED ACTUATORS

SL8A

SL20A HEXAPODS

SL25.4

SL50 CONTROLLERS AND DRIVERS

SL51

SL76.2 MOTORIZED OPTICAL MOUNTS

SL101.6

SB18YZ

ULM-TILT

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SPECIAL COLLECTIONS

BSD-2A

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106

MOTORIZED LINEAR STAGES

VP-25AA

High-Precision Motorized Actuators • Integrated linear encoder for exceptional repeatability and accuracy

MOTORIZED VERTICAL STAGES

• Non-rotating tip avoids periodic motion variations • Very low friction design provides high sensitivity with 0.1 mm minimum incremental motion • Convenient manual adjustment knob

MOTORIZED ROTATION STAGES MOTORIZED ACTUATORS

The top rail of the VP-25AA can also be used as a single-rail linear stage to position optical fibers, micro-optics, sensors, or other small and lightweight parts. For added versatility, a mounting interface for a dovetail rail compatible with the popular ULTRAlign™ positioning system is provided. This system offers a wide selection of interchangeable mounts for optical fibers, fiber arrays, objectives, or GRIN lenses in a variety of fiber alignment applications..

HEXAPODS

Base Material

Ordering Information Aluminum

Bearings

Recirculating ball bearings

Drive Mechanism

Backlash-free ball screw

Drive Screw Pitch (mm)

Feedback

Model

Description

VP-25AA (M-VP-25AA)

High-Precision Motorized Actuator, 25 mm Travel Range

562-RAIL-3.7

Length: 3.7 in. (94 mm)

561-RAIL-1

Length: 1 in. (25.4 mm)

Linear steel scale, 20 mm signal period, 0.1 mm resolution

Limit Switches

CONTROLLERS AND DRIVERS

F I C ATI O

The VP-25AA actuators combine precise positioning with highly reliable performance. It is based on the same innovative design used in the VP-25XA linear stages (see page 45) and features a high-resolution linear scale for exceptional repeatability and accuracy. The scale is fixed on a moving rail to which the actuator’s tip is permanently attached without any contact to the mounting shaft. This concept eliminates all drivetrain induced motion errors and minimizes hysteresis between the scale and the actuator tip. The non-rotating tip is essential to avoid undesirable periodic motion variations caused by the variable contact made between the actuator tip and the mating surface.

Design Details

Optical

Origin

Optical, at center of travel, including mechanical zero signal

Motor

DC Servo

Cable Length (m)

Recommended Motion Controllers/Drivers

1.5 XPS (see page 127) ESP301 (see page 131 )

Specifications

MOTORIZED OPTICAL MOUNTS

Travel (mm)

SMC100CC (see page 133) 25

Minimum Incremental Motion (mm)

0.1

Uni-directional Repeatability 2 (mm)

0.1

Bi-directional Repeatability1,2 (mm)

0.6 or ± 0.3

On-Axis Accuracy 1,2 (mm)

2 or ± 1

Maximum Speed (mm/s)

Axial Load Capacity (+Cx) (N)

SPECIAL COLLECTIONS

ANTE ED

Compliant

RoHS

• 20,000 hr MTBF

MTBF (h)

20,000

Weight kg

1.0

The VP-25AA actuator as a single-rail linear stage to position small and light weight parts with the optional 561-RAIL rails

For the definition of specifications visit Newport.com for the Motion Basics and Standards.

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MOTORIZED LINEAR STAGES

Dimensions Dimensions in millimeters

.08 (2)

4 HOLES M2.5 THD

2 HOLES ø.063 (1.6), .375 (9.525 SPACING)

.45 .50 (11.5) (12.7)

.63 .50 (16) (12.7)

ø.25 (6)

.02 (0.5) .49 (12.5)

BALL ø.20 (5)

1.0 (25.4)

2.83 (72)

ø.97 (9.52)

.53 (13.5)

.06 (1.5)

3.0 (76.2)

.47 (12)

3.15 (80)

.13 (3.2)

MOTORIZED VERTICAL STAGES

.91 (23)

.43 .31 (8) (10.9)

1.06 (27)

6.53 ±.50 (165.8 ±12.7)

6 HOLES M4 THD .59 (15.1)

107

3.94 (100) MODEL SHOWN: VP-25AA DIMENSIONS IN INCHES (AND MILLIMETERS)

.61 (15.6)

4 HOLES C’BORED FOR M4 SCREW ON 3.94 x 1.97 (100 x 50)

4.34 (110.3)

1.04 (26.4) .87 (22.2)

Precision Motorized Actuators

MOTORIZED ACTUATORS

LTA Series

MOTORIZED ROTATION STAGES

CABLE LENGTH 1.5 M AND SUB-D25M CONNECTOR

• Up to 50 mm travel in a space saving design • Non-rotating tip improves motion smoothness and has no wear

• Adjustable limit switch prevents damage from over-travel

HEXAPODS

• Exceptional Minimum Incremental Motion

• Convenient manual positioning knob

ANTE

F I C ATI O

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SPECIAL COLLECTIONS

The CONEX-LTA-HS (or -HL) is LTA actuator with the integrated CONEX-CC controller/driver and is pre-configured for the highest level of out-of-the-box control. The CONEX-CC is a very compact and inexpensive driver for Newport’s low power DC servo motor driven devices.

MOTORIZED OPTICAL MOUNTS

LTA actuators are designed to fit into existing manual stages and other opto-mechanical components directly replacing manual micrometers. The LTA series has a space-saving design that reduces the actuator length by 50% and minimizes the unwanted effects of cantilever loads on micro-positioning equipment. The series features two DC servo models with optimized output torque for faster motion (-HS) and higher load capacity (-HL). The LTA-HL is recommended for heavy load applications and the LTA-HS is optimized for high speed applications while providing a longer travel range. The LTAHSPPV6 and LTAHLPPV6 are two stepper motor models specifically designed for vacuum applications down to 10-6hPa. Common features include: a non-rotating tip to prevent wear and avoid periodic motion variations, a movable limit switch to prevent over-travel, a manual adjustment knob which permits quick positioning of the actuator when the motor is off, and a scale to indicate coarse actuator position in both millimeters and inches.

CONTROLLERS AND DRIVERS

Compliant

RoHS

• Vacuum versions with encoders

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Specifications

MOTORIZED VERTICAL STAGES

MOTORIZED LINEAR STAGES

108

LTA-HS

LTA-HL

LTAHSPPV6

Travel (mm)

LTAHLPPV6 25

Minimum Incremental Motion5 (mm)

0.1

0.05

0.08

Uni-directional Repeatability (mm)

0.5

0.6

Bi-directional Repeatability 1, 2 (mm)

2 or ± 1

On-Axis Accuracy 1 (mm)

10 or ± 5

6 or ± 3

10 or ± 5

5 or ± 2.5

Maximum Speed (mm/s)

0.5(4)

0.25(4)

Axial Load Capacity (+Cx) (N)

120

100

Side Load Capacity3 (N)

MOTORIZED ROTATION STAGES

Shown are peak to peak, guaranteed specifications or ± half the value as sometimes shown. For the definition of typical specifications which are about 2X better than the guaranteed values, visit Newport.com for the Motion Control Metrology Primer. 2 After backlash compensation 3 Avoid side loads during motion 4 With SMC100PP: 0.1 mm/s for LTAHLPPV6, 0.2 mm/s for LTAHSPPV6 5 MIM in closed loop: 0.15 mm for LTAHLPPV6, 0.3 mm for LTAHSPPV6

LTAxxPPV6 vacuum compatible actuator.

Design Details Base Material

Stainless steel body

Drive Mechanism

Non-rotating lead screw

MOTORIZED ACTUATORS

Feedback

LTA-HL, LTA-HS: Motor mounted rotary encoder, 2048 cts/rev.

Limit Switches

Optical switches, both ends, adjustable

Origin

Uses minimum travel limit for homing, typically <4 mm repeatability LTA-HS, LTA-HL: DC Servo

Motor

LTAHSPPV6, LTAHSPPV6: Stepper Motor LTA-HS, LTA-HL: 3 m

Cable Length

LTAHSPPV6, LTAHLPPV6: 1.5m, SubD25 connector not vacuum compatible. 10-6 hPa (7.5*10-7 Torr) [0.7 x 10 e-7 torr] 0.35

Ordering Information

CONTROLLERS AND DRIVERS

HEXAPODS

Vacuum Compatibility Weight kg

Model

Description

LTA-HS

High Speed LTA Motorized Actuator, 50 mm travel, LTA, 3/8-40 thread

LTA-HL

High Load Motorized Actuator, 25 mm travel, LTA, M12 thread

LTAHSPPV6

Vacuum Compatible High Speed Motorized Actuator, 50 mm travel, LTA

LTAHLPPV6

Vacuum Compatible High Load Motorized Actuator, 25 mm travel, LTA

CONEX-LTA-HS1

LTA-HS actuator Integrated with CONEX Controller

CONEX-LTA-HL1

LTA-HL actuator Integrated with CONEX Controller

LTA-M12

Mounting Adapter, M12-0.5, LTA-HS to UMR8, MVN80 and SL products

SPECIAL COLLECTIONS

MOTORIZED OPTICAL MOUNTS

Order CONEX-PS separately.

Recommended Motion Controllers/Drivers XPS (see page 127)

Order the XPS-DRV01 separately

ESP301 (see page 131) SMC100CC (see page 133)

LTA-HS and LTA-HL only

SMC100PP (see page 133)

LTAHLPPV6 and LTAHSPPV6 only

CONEX-CC (see page 137)

Included in CONEX-LTA-HS or CONEX-LTA-HL

For the definition of specifications visit Newport.com's section on the Motion Basics and Standards.

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MOTORIZED LINEAR STAGES

Dimensions Model LTA-M12

Model LTA-HS

109

MODEL SHOWN: LTA-M12 DIMENSIONS IN INCHES (AND MILLIMETERS)

CABLE LENGTH 5.8 FT (3 M) AND SUB-D25M CONNECTOR

MODEL SHOWN: LTA-HS

(M12 x 0.5 THD)

DIMENSIONS IN INCHES (AND MILLIMETERS)

ø .25 (6.4)

NUT

1.77 (45)

MOTORIZED VERTICAL STAGES

ø .61 (15.5)

.39 (10) .89 (22.5)

.55 (14)

4.63 (117.5)

.18 (4.5)

.47 (12)

.79

ø .63 (16)

+0.012 0

(20

+0.3 0

)

MOTORIZED ROTATION STAGES

.88 (22.3)

LTA-HS ROD LTA-HL ROD

.88 ±0.012 (22.4 ±0.3) .62 (15.8)

.52 ±0.012 (13.3 ±0.3)

MOTORIZED ACTUATORS

.47 (12)

.19 (5) BALL ø.19 (5)

(M12 x 0.5 THD)

BALL ø.19 (5)

-.00019

ø .375 -.00055 (9.53

-.005 -.014

3/8”-40 UNS THD

)

HEXAPODS

TRB Series

Compact Motorized Actuators scan QR code to watch video

• Up to 25 mm travel in a light, compact design

• Stepper and closed-loop DC servo motor versions

ANTE

Compliant

RoHS

• Integrated limit switches prevent component and motor damage

CONTROLLERS AND DRIVERS

• Replaces manual micrometer drives with similar form factor

F I C ATI O

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SPECIAL COLLECTIONS

The CONEX-TRB series is TRB actuator with the integrated CONEX-CC controller/driver and is pre-configured for the highest level of out-of-the-box control. The CONEX-CC is a very compact and inexpensive driver for Newport’s low power DC servo motor driven devices.

MOTORIZED OPTICAL MOUNTS

The TRB motorized actuator series provide reliable motorized linear motion in a lightweight and very compact package. Improvements compared to the TRA actuator include: higher speed, better repeatability and higher axial loading. The cable on the side provides more flexibility for cable routing. To provide the best fit to an application, the TRB actuators are available in open-loop stepper and closed-loop DC servo motor versions. The integrated optical limit switches of the TRB actuators provide a repeatable reference/home. TRB actuators are direct replacement of micrometers which are found in a wide variety of linear and rotation stages, and are ideal for OEM applications.

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MOTORIZED LINEAR STAGES

110

Design Details Base Material

Stainless steel body, Black

Drive Mechanism

Rolled lead screw

Feedback

Motor mounted rotary encoder, 1024 cts/rev.

MOTORIZED VERTICAL STAGES

Limit Switches

Optical switches, both ends

Origin

Uses negative travel limit for homing, typically <4 mm repeatability

Motor

CC: DC Servo, UE13MCC PP: Stepper, UE12PP, 20 steps/rev

Cable Length (m)

1.5

Vacuum Compatibility

None

Weight [ (kg)]

0.23

Specifications

TRB-CC

TRB-PP

6, 12, 25

Minimum Incremental Motion (mm)

0.1

Uni-directional Repeatability (mm)

0.5

Bi-directional Repeatability 1,2 (mm)

1.5 or ± 0.75

MOTORIZED ROTATION STAGES

Travel Range (mm)

TRB6: 6 or ± 3 TRB12: 8 or ± 4 TRB25: 10 or ± 5

MOTORIZED ACTUATORS

On-Axis Accuracy 1 (mm) Maximum Speed3 (mm/s)

0.3

Axial Load Capacity (+Cx) (N)

2) 3)

Shown are peak to peak, guaranteed specifications or ± half the value as sometimes shown. For the definition of typical specifications which are about 2X better than the guaranteed values visit Newport.com for the Motion Control Metrology Primer. Backlash value is provided with each actuator. For axial loads over 60N, the max. speed must be reduced to 1 mm/s for the CC and kept to 0.3 mm/s for the PP.

CONTROLLERS AND DRIVERS

HEXAPODS

Ordering Information Model

Description

TRB6CC

Compact Motorized Actuator, 6 mm Travel, DC Servo Motor, 90N

TRB6PP

Compact Motorized Actuator, 6 mm Travel, Stepper Motor

TRB12CC

Compact Motorized Actuator, 12 mm Travel, DC Servo Motor, 90N

TRB12PP

Compact Motorized Actuator, 12 mm Travel, Stepper Motor

TRB25CC

Compact Motorized Actuator, 25 mm Travel, DC Servo Motor, 90N

TRB25PP

Compact Motorized Actuator, 25 mm Travel, Stepper Motor

CONEX-TRB6CC1

TRA6CC Actuator Integrated with CONEX Controller

CONEX-TRB12CC1

TRA12CC Actuator Integrated with CONEX Controller

CONEX-TRB25CC1

TRB25CC Actuator Integrated with CONEX Controller

ADAPT-TRA25

TRA25 Actuator Adapter for Opto-Mechanics

Order CONEX-PS separately.

SPECIAL COLLECTIONS

MOTORIZED OPTICAL MOUNTS

Dimensions ø.375 (9.522) MAX. ø.374 (9.499) MIN.

2.62 (66.5)

BALL ø.125 (3.175) .68 (17.2)

ø.63 (16)

3/8-40 THD .37 (9.4) .63 (15.9) .86 +.98 0 (21.9 +25 0 )

5.35 (136)

CABLE LENGTH 4.9 FT (1.5 M) SUB-D25M CONNECTOR MIN. BEND RADIUS: .28 (7)

MODEL SHOWN: TRB25 DIMENSIONS IN INCHES (AND MILLIMETERS)

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111

TRA Series MOTORIZED LINEAR STAGES

Compact Motorized Actuators • Up to 25 mm travel in a light, compact design • Replaces manual micrometer drives with similar form factor

ANTE

F I C ATI O

MOTORIZED ACTUATORS

The TRA series miniature motorized actuators provide reliable motorized motion in a small diameter, lightweight package. TRA actuators incorporate an excellent space saving design that allows them to be used with a wide variety of linear stages, mirror mounts, and OEM applications. The TRA6 is recommended for motorizing 561 series linear stages, 481 and RS65 rotation stages. The TRA12 is compatible with Ultima and Suprema mirror mounts, ULTRAlign, 460A series linear stages. The TRA25 is recommended for 25 mm travel in a slightly larger package and is the recommended choice for motorizing longer travel linear stages and other devices with long travel. To provide the best fit for your application, TRA actuators are available in stepper, stepper vacuum and closed-loop DC servo motor versions. All TRA actuators feature integrated optical limit switches, preventing over travel and providing a method for repeatable referencing. TRA actuators also feature a hardcoated steel ball tip that minimizes contact surface wear compared to other designs that use regular steel ball tips.

MOTORIZED ROTATION STAGES

Compliant

RoHS

• Integrated limit switches prevent component and motor damage

MOTORIZED VERTICAL STAGES

• Stepper, stepper vacuum, and closed-loop DC servo motor versions

The CONEX-TRA series is TRA actuator with the integrated CONEX-CC controller/driver and is pre-configured for the highest level of out-of-the-box control. The CONEX-CC is a very compact and inexpensive driver for Newport’s low power DC servo motor driven devices.

Base Material

Stainless steel body

Drive Mechanism Feedback Limit Switches

Rolled lead screw CC: Motor mounted rotary encoder, 64 cts/rev. PP: Open loop (no encoder) Optical switches, both ends Uses negative travel limit for homing, typically <4 mm repeatability

Motor

CC: DC Servo, UE10MCC PP: 2 Ph stepper motor, UE10PP, 20 steps/rev

Vacuum Compatibility Weight kg

TRA-PP 6, 12 or 25

Minimum Incremental Motion (mm)

0.2

0.1

Uni-directional Repeatability (1) (mm)

Bi-directional Repeatability (1),(2) (mm)

3 or ± 1.5

On-Axis Accuracy (1) (mm)

TRA6: 6 or ± 3 TRA12: 8 or ± 4 TRA25: 10 or ± 5

Maximum Speed (mm/s)

0.4(3)

0.4(3),( 4)

For compatible manual positioners see page 103

Shown are peak to peak, guaranteed specifications or ± half the value as sometimes shown. For the definition of typical specifications which are about 2X better than the guaranteed values visit Newport.com for the Motion Control Metrology Primer. Backlash value is provided with each actuator. For axial loads over 45N, the max. speed must be reduced to 0.3 mm/s. 0.2 mm/s for TRA-PPV6. 0.2 mm/s for TRA-PPM with NSC200.

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SPECIAL COLLECTIONS

TRA-CC

Axial Load Capacity (+Cx) (N)

TRA6: 0.23, TRA12: 0.40, TRA25: 0.60

6, 12 or 25

Travel Range (mm)

3 Select TRA-PPV6 for vacuum applications up to 10-6 hPa. Maximum axial load, speed and acceleration are half of the standard specifications. Cable length is 1.5m

MOTORIZED OPTICAL MOUNTS

Specifications

CONTROLLERS AND DRIVERS

Origin

Cable Length (m)

HEXAPODS

Design Details

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Ordering Information

MOTORIZED ROTATION STAGES

MOTORIZED VERTICAL STAGES

MOTORIZED LINEAR STAGES

112

Recommended Motion Controllers/Drivers:

Model

Description

TRA6CC

Miniature Motorized Actuator, 6 mm Travel, DC Servo Motor

TRA6PPD

Miniature Motorized Actuator, 6 mm Travel, Stepper, 25-pin D-Sub

TRA6PPV6

Miniature Motorized Actuator, 6 mm Travel, Vacuum Compatible

TRA12CC

Miniature Motorized Actuator, 12 mm Travel, DC Servo motor

TRA12PPD TRA12PPV6 TRA25CC

Miniature Motorized Actuator, 25 mm Travel, DC Servo Motor

TRA25PPD

Miniature Motorized Actuator, 25mm Travel, Stepper Motor, 25-pin D-Sub

TRA25PPV6

Miniature Motorized Actuator, 25 mm Travel, Vacuum Compatible

CONEX-TRA6CC1

TRA6CC Actuator Integrated with CONEX Controller

CONEX-TRA12CC1

TRA12CC Actuator Integrated with CONEX Controller

CONEX-TRA25CC1

TRA25CC Actuator Integrated with CONEX Controller

ADAPT-TRA25

TRA25 Actuator Adapter for Opto-Mechanics

ADAPT-TRA

TRA6 & TRA12 Actuator Adapter for Opto-Mechanics

XPS (see page 127)

Except TRA-PPM

ESP301 (see page 131)

Except TRA-PPM

SMC100CC (see page 133)

TRA-CC only

Miniature Motorized Actuator, 12 mm Travel, Stepper, 25-pin D-Sub

SMC100PP (see page 133)

TRA-PPD and TRA-PPV6 only

Miniature Motorized Actuator, 12 mm Travel, Vacuum Compatible

NSC200 (see page 135)

TRA-PPM only

CONEX-CC (see page 137)

Included in CONEX-TRAXXCC

Order CONEX-PS separately.

MOTORIZED ACTUATORS

Dimensions C .63 (15.9) .37 (9.4)

3/8”-40 THD

øB SUB-D25M CONNECTOR

CABLE LENGTH 9.8 FT (3 M)

CONTROLLERS AND DRIVERS

HEXAPODS

Compact XY module used for focus and cell-to-cell pitch adjustments in PV laser scribe systems.

MODEL SHOWN: TRA6 DIMENSIONS IN INCHES (AND MILLIMETERS)

TRA12 TRA25

A 3.94 (100) 4.45 (113) 4.72 (120)

B .59 (15) .59 (15) .71 (18)

C .81 +.24 0 (20.5 +60 ) .66 +.49 0 (16.8 +12.5 0 ) +.98 .66 0 +25 (16.8 0 )

CAD

See our website for CAD files

SPECIAL COLLECTIONS

MOTORIZED OPTICAL MOUNTS

TRA6

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113

NewStep Series MOTORIZED LINEAR STAGES

Miniature Linear Actuator • Up to 11 mm motorized travel in a light, very compact linear actuator design • Ideal for use as a micrometer replacement actuator in mirror mounts

• Low friction design enables high sensitivity

MOTORIZED VERTICAL STAGES

• Integrated limit sensors/switches prevent component and motor damage

• Vacuum compatible versions to 10-6 hPa available

MOTORIZED ACTUATORS

Newport’s NewStep miniature motorized linear actuators are an economical solution for motorizing mirror mounts, rotation stages, linear stages and other manual motion devices. The NSA12 features a reliable open-loop stepper motor that provides sub-micron minimum incremental motion. A non-rotating tip prevents wear and avoids periodic motion variations which may occur in other rotating tipped actuator products. Furthermore, the actuator incorporates a novel mechanism that virtually eliminates backlash, which is critical in applications such as optimization of beam alignment or optical scanning.The NSA12 is ideal for remote adjustment of sensitive, hard-to-reach optical components which can be influenced by the compressive and torsional forces imposed by traditional manual adjustment micrometers. Typical applications include optimizing the alignment of a laser cavity, zeroing in on coherence lengths or just adjusting the pointing of a beam over a long distance.

MOTORIZED ROTATION STAGES

RoHS

Compliant

Design Details Base Material

Aluminum Direct drive, non-rotating lead screw

Feedback Limit Switches

HEXAPODS

Drive Mechanism

Open loop, no encoder One limit switch on the motor side, use software limit for maximum travel limitation 2 phase stepper motor, 48 steps/rev, 3 072 microsteps/rev. when used with NSC200 controller

Motor Cable Length (m)

3 Vacuum compatible up to 10-6 hPa.

Vacuum Compatibility

0.1 Ultima morror mount with NSA12 actuators.

Specifications 11

Minimum Incremental Motion (mm)

0.2

Uni-directional Repeatability, Typical (mm)

2.2

Bi-directional Repeatability, Typical1 (mm)

10 or ± 5

Maximum Speed (mm/s)

0.9

Axial Load Capacity (+Cx) (N)

MOTORIZED OPTICAL MOUNTS

Travel Range (mm)

Shown are peak to peak, typical specifications or ± half the value as sometimes shown.

For the definition of specifications visit Newport.com's section on the Motion Basics and Standards.

Ordering Information Description

NSA12

Motorized Linear Actuator, 11 mm Travel, Micro Step Drive

NSA12V6

Motorized Linear Actuator, 11 mm Travel, Vacuum Compatible

NSA12V6 - Vacuum compatible up to 10-6 hPa

Recommended Motion Controller NSC200 (see page 135)

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SPECIAL COLLECTIONS

Model

CONTROLLERS AND DRIVERS

Weight kg

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Picomotor™ Piezo Linear Actuators

MOTORIZED LINEAR STAGES

114

MOTORIZED ACTUATORS

MOTORIZED ROTATION STAGES

MOTORIZED VERTICAL STAGES

• < 30 nm resolution in a compact design • Set-and-forget long-term stability- these actuators stay put • Lifetimes of 1,000,000,000 steps From left to right: Models 8353, 8341, 8301, 8302, and 8303.

RoHS

Compliant

• Vacuum and Ultrahigh-Vacuum

Picomotor actuators are ideal devices for motorizing fine-positioning stages and mounts in optical or mechanical systems. Use them with optomechanical translation stages or custom devices. They have better than 30-nm resolution with minimal backlash, and can exert a 5-lb (22-N) force. Moreover, they have exceptional longterm stability and the ability to hold their position with no power applied. These last two features make the Picomotor actuators unique among motion-control devices and ideal for typical set-and-hold applications. Such applications include precision control of sample holders inside cold and/or vacuum chambers, hands-off adjustment of hard-to-reach mirror mounts, or adjustments of optical mounts that are sensitive to forces applied while twisting a knob (for instance optimizing the alignment of a laser cavity or adjusting the pointing of a beam over a long distance). The standard sized shanks of the Models 830X and 12X0.5-mm threading of the Models 832X let them fit into standard micrometer mounting holes. The Tiny Model 8353 gives you a solution for even the smallest application. For rotation without translation, use the Model 8341NF rotating shaft. Use these Picomotor actuators with our Model 8742 Open-Loop Picomotor Controller/Driver or Model 8743-CL Closed-Loop Picomotor Controller/Driver. Contact us for custom configurations and volume pricing.

HEXAPODS

Specifications

8301NF

8302

8303

8321

8322NF

8341NF

8353

8354

Minimum Incremental Motion (nm)

<30

Resolution- Angular (mrad)1

<0.6

Axial Load Capacity (+Cx) (N)

Maximum Drive Frequency (kHz)

1.75

0.018 (2.5)

0.014

0.018

> 1 x 109 steps

>1,5x108 steps

>1x109 steps

0.50 (12.7)

1 (25.4)

2 (50.8)

0.50 (12.7)

1 (25.4)

0.50 (12.7)

1.2

3-4 RPM

1.2

10-40

0.375 in. (9.5 mm) Shank

0.25 in. Shank

1/4-40 Thread with retaining nut

0.375 in. (9.5 mm) Shank

Connector Type

4-Pin

One Each: 15-Pin D and 4-Pin RJ-22

Cable Length [ft. (m)]

7 (2.1)

2.1 (7)

1.8 (6)

Maximum Drive Torque [Nm (oz-in)]

CONTROLLERS AND DRIVERS

Rated Life2 Travel (mm2) Speed Range (mm/min) Operating Temperature Range (°C)

SPECIAL COLLECTIONS

MOTORIZED OPTICAL MOUNTS

Mounting

M12 x 0.5 mm M12 x 0.5 mm Thread Thread

8310

Ordering Information Model

Description

8301NF

Picomotor Actuator, 0.5 in. Travel, 30 nm Resolution, 9.5 mm Shank

8302

Picomotor Actuator, 1 in. Travel, 30 nm Resolution, 9.5 mm Shank

8303

Picomotor Actuator, 2 in. Travel, 30 nm Resolution, 9.5 mm Shank

8321

Picomotor Actuator, 0.5 in. Travel, 30 nm Res., M12 x 0.5 mm Thread

8322NF

Picomotor Actuator, 1 in. Travel, 30 nm Res., M12 x 0.5 mm Thread

8341NF

Rotating Picomotor Actuator, 3-4 RPM, 9.5 mm Shank

8353

Tiny Picomotor Actuator, 0.25 inch Shank Mount

8354

Tiny Picomotor Actuator, 1/4-40 Thread Mount

8310

Closed Loop Picomotor Actuator, 12.7 mm Travel

Since these motorized components do not have internal encoders, repeatability is not specified or guaranteed. Step sizes can vary over 20% between the forward and backward directions. Lifetime is tested by cycling actuator out 1 mm of travel range and back pushing a 5-lb load.

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Travel Range(mm)

Model

Mounting 0.375 in. (9.5 mm) Shank

8302

25.4

0.375 in. (9.5 mm) Shank

8303

50.8

0.375 in. (9.5 mm) Shank

8321

12.7

M12 x 0.5 mm Thread

25.4

M12 x 0.5 mm Thread

8341NF

0.375 in. (9.5 mm) Shank

8353

12.7

0.25 in. shank

8354

12.7

1/4-40 Thread with retaining nut

8310

12.7

0.375 in. shank (9.5 mm shank)

8322NF

I/O

USB 2.0, 10/100 Ethernet

Closed-Loop Picomotor™ Controller/Driver Module

USB 2.0, 10/100 Ethernet

Model 8310 U.S. Patent #5,394,049 & #5,410,206

6' long cables

min. 0.78" (19.8) max. 1.28" (32.6)

Dimensions Model 8302

retaining nut

1.64" (41.5)

7" 1.2.1) 2 3 (

retaining nut 1/4-80 screw

4" 0.7.8) 8 (1

+0.00" 0.374" –0.002" 9.5"+0.0" –0.0"

4-pin connector

Model 8321

RJ-22 4-PIN module connector

CONTROLLERS AND DRIVERS

0.6 (15 0" .2)

DB15 connector

1.49" (37.8)

0.67" (17.0)

stopper nut dia. 0.34" (8.6)

0.50" (12.7)

3/8-40 UNS-2A

dia. 0.50" (12.7)

HEXAPODS

2" 2.7.1) 9 (6

dia. 0.374" (9.5)

MOTORIZED ACTUATORS

3.36" (85.3)

MOTORIZED ROTATION STAGES

12.7

Communications Open-Loop Picomotor™ Controller/Driver Modules

Series

MOTORIZED VERTICAL STAGES

8301NF

Picomotor Controller/Driver Modules

MOTORIZED LINEAR STAGES

Picomotor Piezo Linear Actuators

115

Model 8341

5" 2.2.2) 7 (5 x ma " 6 ) 2 . 0 (6.7

dia. 0.374" (9.53)

7" 1.2.1) 2 (3

retaining nut

7" 1.2 ) .1 2 3 (

5" 2.2 ) .2 (57

MOTORIZED OPTICAL MOUNTS

locking ring

0" 0.6 ) .2 5 1 (

0.6 (150" .2) 4-pin connector

4" 0.7.8) (18 dia. 0.55" (14.0)

dia. 0.63" (16.0)

0" 0.3 ) 6 . (7 0.6 0" (15 .2)

dia. 0.19" (4.8)

4-pin connector

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4" 0.7 ) 8 . 8 (1

SPECIAL COLLECTIONS

1/4-80 screw

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MOTORIZED LINEAR STAGES

Vacuum and Ultra-High Vacuum Picomotor™ Actuators

MOTORIZED VERTICAL STAGES

• UHV version compatible to 10–9 Torr; vacuum version compatible to 10-6 Torr • 1/2", 1", and 2" travel ranges, rotating and European-type-mounting versions

RoHS

• Set-and-forget long-term stability

All New Focus vacuum compatible and ultra-high vacuum compatible Picomotor actuators come with short, Teflon®coated leads so you can make connections to your vacuum-chamber feedthrough. Working with x-rays or other highradiation applications can require ordering a custom version with Kapton®-coated wire extensions. While Teflon is compatible for use in high-vacuum environments, it is not recommended for use in high-radiation applications where, with repeated exposure to X-rays and other radiation, it can degrade and fall off, possibly causing electrical shorts. Contact New Focus tech support for ordering these customized Picomotor version actuators for use in high-radiation applications.

Specifications

HEXAPODS

MOTORIZED ACTUATORS

MOTORIZED ROTATION STAGES

Compliant

8301-V

8302-V

8303-V

8321-V

8322-V

8341-V

8353-V

Minimum Incremental Motion (nm)

<30

Resolution- Angular1 (mrad)

<0.6

Axial Load Capacity (+Cx) (N)

Maximum Torque (My) (Nm)

0.018

0.014

0.018

>1x109 steps

0.50 (12.7)

1.00 (25.4)

2.00 (50.8)

0.50 (12.7)

1.00 (25.4)

0.50 (12.7)

1.2 mm/min @ 2 kHz pulse rate

3-4 RPM

1 mm/min. @ 1.75 kHz pulse rate

1.2 mm/min @ 2 kHz pulse rate

10 to 40

Rated Life2 Linear Travel in (mm) Maximum Speed Operating Temperature Range (°C)

CONTROLLERS AND DRIVERS

Mounting Cable Length (ft.)

Minimum Incremental Motion (nm) MOTORIZED OPTICAL MOUNTS

Resolution- Angular1 (mrad)

0.375 in. Shank

12 x 0.5 mm Thread

0.375 in. Shank

0.25 in. Shank

0.375 in. (9.5 mm) Shank

2.1 (7)

1.8 (6)

8301-UHV

8302-UHV

8321-UHV

8341-UHV

8353-UHV

8330

<30

<0.6 mrad

<1 mrad

<0.6 mrad

Axial Load Capacity (+Cx) (N)

Maximum Torque (My) (Nm)

0.018

0.014

>1x109 steps

>1,5x108 steps

Rated Life2 Linear Travel in (mm) Maximum Speed Operating Temperature Range () Mounting

SPECIAL COLLECTIONS

8310-V

Cable Length (ft.)

22 >1x109 steps

0.50 (12.7)

1.00 (25.4)

0.50 (12.7)

0.125 (3)

1.2 mm/min @ 2 kHz pulse rate

3-4 RPM

1.2 mm/min @ 2 kHz pulse rate

10 to 40

0.375 in. Shank (9.5 mm Shank)

12 x 0.5 mm Thread (12x0.5-mm thread)

0.375 in. Shank (9.5 mm Shank)

0.25 in. Shank (6.4 mm Shank)

1/2 in. shank

2.1 (7)

Since these motorized components do not have internal encoders, repeatability is not specified or guaranteed. Step sizes can vary over 20% between the forward and backward directions. 2 Lifetime is tested by cycling actuator out 1 mm of travel range and back pushing a 5-lb load. -UHV Versions have 10-9 Torr Vacuum Compliance Level.

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MOTORIZED LINEAR STAGES

Closed Loop Vacuum Picomotor Actuators

Model 8310-V U.S. Patent #5,394,049, #6,911,763, & #5,410,206

• Compatible to 10–6 Torr • Calibrated highly accurate positioning with all the benefits of our traditional Picomotor actuators

Note 1

Model 8310-V

3.085" (78.36) 0.25" (6.4)

Picomotor™ Actuator Ultra

0.78" (19.8) min to 1.28" max travel

0.24" (6.1) R 0.094" min thickness for (2.38) mounting plate 440C ball 0.34" (8.7) retaining nut max thickness for mounting plate

• Ultraclean for VUV/EUV and UHV environments

mounting surface

• <30-nm resolution with a non-rotating tip

1.150" (29.21)

0.09" (2.4) additional clearance for twisted pair exiting unit

MOTORIZED ROTATION STAGES

0.375" (9.50)

MOTORIZED VERTICAL STAGES

• Completely compatible with our modular iPico™ network controllers

0.795" (12.57)

117

• >5,000-cycle lifetime MOTORIZED ACTUATORS

0.67" (17.02)

Model 8330 with Model 8338 cable 1. Cables shown are 19" long with a PEEK 15 PIN miniature Sub-D Connector. Sensor wire is a 11 Conductor Teflon Ribbon Cable and Picomotor wire is a shielded 2 wire twisted pair.

Model 8321

Model 830X

U.S. Patent #5,394,049 & #5,410,206

U.S. Patent #5,394,049 & #5,410,206 HEXAPODS

2.23" (56.5) for 8301-UHV 2.83" (63.5) for 8302-UHV

3/8-40 retaining nut

1.31" (33.3)

2.23" (56.5) 1.31" (33.3)

0.81" (20.6) stopper nut

0.60" (15.2)

0.81" (20.6) 0.20" (5.1)

0.080" (2.03)

0.37" (9.5) 0.30" (7.62)

0.63" (16.0)

0.60" (15.2)

0.20" (5.1)

0.63" (16.0)

0.34" (8.6) 1.27" (32.2) 0.19" (4.8) ball

1/8" Hex

0.55" (14.0)

0.37" (9.5)

0.64" (16.4)

0.16" (4.0) min 0.25" (6.4) max 0.34" (8.6)

red wire 1.75" (44.5) long Teflon 0.02 (0.5) Metal 0.01 (0.3)

0.58" (14.7)

Model

Description

8301-V

Vacuum Compatible Picomotor Actuator, 0.5 in. Travel, 0.375 in. Shank Vacuum Compatible Picomotor Actuator, 1.0 in. Travel, 0.375 in. Shank

8303-V

Vacuum Compatible Picomotor Actuator, 2.0 in. Travel, 0.375 in. Shank

8321-V

Vacuum Compatible Picomotor Actuator, 12.7 mm Travel, 12x0.5 mm Thread

8322-V

Vacuum Compatible Picomotor Actuator, 25.4 mm Travel, 12x0.5 mm Thread

8341-V

Vacuum-Compatible Picomotor Actuator, Rotating Shaft

8310-V

Vacuum-Compatible Closed-Loop Picomotor Actuator, 12.7 mm Travel

8353-V

Vacuum-Compatible Tiny Picomotor Actuator, 0.5 in. Travel

red wire 1.75" (44.5) long Teflon 0.02 (0.5) Metal 0.01 (0.3)

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0.64" (16.4) min 0.26" (6.6) max 0.34" (8.6)

0.58" (14.7)

SPECIAL COLLECTIONS

8302-V

white wire 1.75" (44.5) long Teflon 0.02 (0.5) Metal 0.01 (0.3)

MOTORIZED OPTICAL MOUNTS

white wire 1.75" (44.5) long Teflon 0.02 (0.5) Metal 0.01 (0.3)

1.27" (32.2)

0.188" (4.76) 0.55" (14.0) 0.16" (4.0)

CONTROLLERS AND DRIVERS

0.163" (4.14)

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MOTORIZED LINEAR STAGES

NanoPZ

Ultra-High Resolution Actuators • High reliability operation with 30 nm motion sensitivity over 12.5 mm travel

MOTORIZED VERTICAL STAGES

• Fast speed (> 0.2mm/s) and high load capacity (50 N) • Non-rotating tip • No loss of position with removal of power; ideal for set-and-forget applications

RoHS

MOTORIZED ACTUATORS

MOTORIZED ROTATION STAGES

Compliant

The NanoPZ Ultra-High Resolution Actuator provides exceptional nanometer-scale remote control of manualpositioning stages and optomechanical components over large distances, in hard to reach spaces and in hazardous hands-off applications, like high-power laser experiments. The NanoPZ's non-rotating tip prevents contact surface wear and allows for direct load attachments. Newport's exclusive design and innovative piezo motor ensures 30 nm incremental motion capabilities with no loss of position when power is removed. The NanoPZ incorporates the exclusive piezo micro stepping motor and, with ergonomic controls, provides consistent results and superior reliability. The NanoPZ is compatible with an array of Newport products including ULTIMA® Series optical mounts, GON Series goniometers, and ULTRAlign™ Series of linear stages.

PZA12 Specifications Travel Range [in. (mm2)]

0.5 (12.5)

HEXAPODS

Minimum Incremental Motion, Linear (mm)

0.03

Repeatability/Accuracy

Varies depending on application and feedback method

Maximum Speed (mm/s)

0.2

Axial Load Capacity (+Cx) (N)

MOTORIZED OPTICAL MOUNTS

CONTROLLERS AND DRIVERS

Ordering Information Model

Description

PZA12

NanoPZ Ultra-High Resolution Actuator, 12.5mm Travel

PZC200

Hand-held controller for PZA12

PZC200-KT

PZA12 Actuator Kit, PZC200 Cont. NSC-PS25 Power Supply, NSC-PSC3 Cable

PZC-SB

PZC200 Switchbox, Includes Power, Driver & Controller Cables Switchbox allows one PZC200 to drive up to 8 actuators. Included cables: P/N 417971-01 1.8 m (6 ft) power cable to controller, P/N 44415-01 6 pin Mini DIN motor cable (6 ft), P/N NSC-CB2 1.8 m (6 ft) RS-485 cable to controller

Notes: 1. For high duty applications, please consult with Newport applications engineering. 2. The PZC200 must be used with the PZA12.

Dimensions

.37 to .47 (9.5 to 12)

BALL ø.16 (3.97)

SPECIAL COLLECTIONS

MODEL SHOWN: PZA12

3/8”-40 UNS2A THD

DIMENSIONS IN INCHES (AND MILLIMETERS) -.00020 -.00055 g6

ø.37 (Ø 9.5 )

ø.83 (21) ø.24 (6)

.63 (15.9) 1.03 (26.23 ±6.35) ±.25

1.9 (49.1)

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NPA Series MOTORIZED LINEAR STAGES

NanoPositioning Piezo Translators • Piezoelectric translators in a compact package

• Sub-nanometer positioning resolution • Integrates easily into custom motion systems

MOTORIZED VERTICAL STAGES

• Piezoelectric travel range to 100 mm

• Optional strain-gauge position feedback

RoHS

MOTORIZED ACTUATORS

The NPA Series Piezo Translators are ideally suited for integration into custom motion devices and provide nanometer resolution, up to 100 mm travel range, and micro-second response time in a very compact housing. NPA translators are equipped with a highly reliable, multi-layer, low-voltage, piezoelectric transducer (PZT) stack protected by a cylindrical stainless steel housing. The high internal mechanical preload simplifies handling allowing for high load, dynamic applications. NPA translators can generate large forces up to 1000 N making them particularly useful for machine tools, active vibration isolation, or adaptive mechanics. Their small size and high resonant frequency are suitable for scanning microscopy, laser tuning, beam steering, patch clamping, or micro lithography applications. NPA actuators are available as open-loop (no position feedback) or closed-loop devices with integrated position feedback. In open-loop, the resolution is limited by the noise of the control electronics, but repeatability and stability are compromised due to the hysteresis and creep of the piezo ceramic material.

MOTORIZED ROTATION STAGES

Compliant

Fastening is accomplished by M3 threads at the top and the base of the translator. Like all piezoelectric devices, moment loads and side forces should be avoided. Spanner flats are provided and should be used when securing screws.

NPA50 NPA50SG

NPA100 NPA100SG

Open loop travel range (± 10%), (mm) 1

100

Closed loop travel range (mm) 1, 2

Open loop resolution (nm) 3

0.05

0.1

0.2

Closed loop resolution (nm) 2

0.5

1.0

2.0

Typ. Repeatability (nm) 2

Capacitance (± 20%) (mF)

2.5

5.4

9.0

12,000

8,000

3,000

1000/150

Resonant frequency, unloaded (Hz) Axial stiffness (N/mm) Push/Pull load capacity (N)

CONTROLLERS AND DRIVERS

NPA25 NPA25SG

HEXAPODS

Specifications

Typical value measured with NPC3 and NPC3SG, (-20 V to +130 VDC range). Applies to devices with ending SG in closed-loop control only. 3 Equal to rms noise value measured with NPC3 and NPC3SG controller. 2

Description

NPA25

Nano-Positioning Open-loop Piezo Actuator, 25 mm

NPA25SG

Nano-Positioning Piezo Actuator, 25 mm, Strain-gauge

NPA50

Nano-Positioning Open-loop Piezo Actuator, 50 mm

NPA50SG

Nano-Positioning Piezo Actuator, 50 mm, Strain-gauge

NPA100

Nano-Positioning Open-loop Piezo Actuator, 100 mm

NPA100SG

Nano-Positioning Piezo Actuator, 100 mm, Strain-gauge

NPC3 see page 144 NPC3SG see page 144 XPS-Q see page 124

Add -D for XPS compatible models Add V6 for vacuum compatible models

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For -D version only, with XPS-DRVP1

SPECIAL COLLECTIONS

Model

MOTORIZED OPTICAL MOUNTS

Recommended Motion Controllers/Drivers

Ordering Information

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MOTORIZED LINEAR STAGES

NPM Series

NanoPositioning Piezoelectric Micrometer Adapter

MOTORIZED VERTICAL STAGES

• Nanometer positioning sensitivity for manual products • Piezoelectric travel range of 140 mm • 100 N axial load capacity

MOTORIZED ACTUATORS

MOTORIZED ROTATION STAGES

• Compatible with all manual stages with 3/8” mounting bores

RoHS

NPM140SG shown with AJS100-2. Order actuators separately.

Compliant

The NPM140 Piezoelectric micrometer adapter provides nanometer positioning capability for manual products. This adapter mounts to the actuator seat on the stage and is mechanically compatible with all Newport stages, mounts and actuators with 0.375” (Ø 9.5mm) mounting flange*.

Ordering Information

Specifications NPM140, NPM140-D NPM140SG, NPM140-D-SG

Description

NPM140

Piezo-electric Open-loop Micrometer Adapter, 140 mm

Open loop travel range (± 10%), (mm) (1)

140

NPM140SG

Piezoelectric Micrometer Adapter, 140 mm, Strain-gauge

Closed loop travel range (mm) (1, 2)

NPM140-D

Piezoelectric Open-loop Micrometer Adapter, 140 mm, XPS

Open loop resolution (nm) (3)

0.1

Closed loop resolution (nm) (2) HEXAPODS

Model

NPM140SG-D

Piezoelectric Micrometer Adapter, 140 mm, Strain-gauge, XPS

NPC3

3-channel piezo stack amplifier, open-loop control

NPC3SG

3-channel piezo amplifier, strain-gauge position control

Typ. Repeatability (nm) (2)

Capacitance (± 20%) (mF)

1.7

Resonant frequency, without drive (Hz)

670

Axial stiffness (N/mm)

0.4

Max. axial load (N)

100

Weight (g)

125

Recommended Motion Controllers/Drivers NPC3 see page 144 NPC3SG see page 144

Typical value measured with NPC3 and NPC3SG, (-20 V to +130 VDC range). Applies to NPM140SG in closed-loop control only. 3) Equal to rms noise value measured with NPC3 and NPC3SG controller.

XPS-Q see page 124

CONTROLLERS AND DRIVERS

For -D version only, with XPS-DRVP1

Note: NPM140 is compatible with NPC3. NPM140SG is compatible with NPC3SG.

Dimensions 3/8-40 THD

MOTORIZED OPTICAL MOUNTS

.24 (6.1)

.63 (15.9)

.69 (17.4) ø.30 (7.5) THRU

.86 (21.8)

.55 (14)

.98 (25)

SPECIAL COLLECTIONS

1.57 (40) CABLE AND SUB-D15 CONNECTOR CABLE LENGTH NPM140: 3.3 FT (1 M) NPM140SG: 3.9 FT (1.2 M)

MOTION DIRECTION

1.93 (49)

MODEL SHOWN: NPM140 DIMENSIONS IN INCHES (AND MILLIMETERS)

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Hexapod MOTORIZED LINEAR STAGES

6-Axis Parallel Kinematic Positioning System • Compact, integrated 6-axis positioner • Light but with High stiffness (particularly in z) • No accumulation of motion errors • Two Virtual centers of rotation, set by software • 5, 20 or 450 kg centered load capacity

MOTORIZED VERTICAL STAGES

• No moving cables

• Vacuum (10-6hPa) versions available

MOTORIZED ACTUATORS

A Hexapod is a parallel kinematic motion device that provides six degrees of freedom: X, Y, Z, pitch, roll, and yaw. Hexapods are ingenious and effective solutions to complex motion applications that require high load capacity and accuracy in up to six independent axes. Hexapods having the image of being complex and highly priced, Newport Hexapods, on the contrary, are not only affordable but extremely easy to use and easily re-configurable. Newport Hexapods are driven by six, industryproven, high performance actuators using designs that leverage Newport's expertise in actuators. The quality of the actuators has obviously a strong impact on the overall motion performance of a Hexapod, but of almost equal importance are the joints connecting the actuators to the base and the moving top plate. Embracing this challenge, our engineers came up with a unique design of joints that are not only simple, but also provide significantly higher rigidity than ordinary universal joints. The result is a Newport Hexapod that provides more than five-times higher rigidity and twice the load capacity of other hexapods of similar size.

MOTORIZED ROTATION STAGES

scan QR code to watch video

TOOL WORK CARRIAGE

• Optics and satellite assembly and testing • AED simulation

HEXAPODS

Applications

BASE WORLD

• Astronomy • Biotechnology, surgery

Two virtual centers of rotations

• Micromachining, micro-manipulation

Absolute moves and positions are defined in the work coordinate system. Incremental moves can be done in the tool or in the work coordinate systems.

Model

Description

HXP50-MECA

6-Axis Hexapod, 5 kg Load Capacity

HXP50-ELEC

Hexapod Controller/Driver, For HXP50-MECA

HXP50-MECAV6

6-Axis Hexapod, 5 kg Capacity, Vacuum

HXP50-ELECV6

Hexapod Controller/Driver, HXP50-MECAV6

HXP100-MECA

6-Axis Hexapod, 20 kg Load Capacity Hexapod Controller/Driver, For HXP100-MECA 6-Axis Hexapod, 20 kg Load Capacity, Vacuum

HXP100-ELECV6

Hexapod Controller/Driver, For HXP100-MECAV6

HXP1000-MECA

6-Axis Hexapod, 450 kg Load Capacity

HXP1000-ELEC

Hexapod Controller/Driver, For HXP1000-MECA

An HXPxxx-MECA must be ordered with an HXPxxx-ELEC controller.

SPECIAL COLLECTIONS

HXP100-ELEC HXP100-MECAV6

MOTORIZED OPTICAL MOUNTS

Ordering Information

CONTROLLERS AND DRIVERS

• X-Ray diffraction

The HXP50 is a very compact hexapod ideal for complex motion applications in very confined spaces requiring high precision multi-axis control.

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MOTORIZED ROTATION STAGES

MOTORIZED VERTICAL STAGES

MOTORIZED LINEAR STAGES

122

Specifications Model Size

HXP50-MECAV6

HXP100-MECA

HXP100-MECAV6

HXP1000-MECA

Ø 200 mm x H 151

Ø 300 mm x H 196

Ø 550 mm x H 395

Travel (X, Y, Z), mm (1)

±17, ±15, ±7

±29, ±26, 28(-1 to +27)

-62;+93, ±69, ±39.5

Travel ( qx, qy, qz), °(1)

±9, ±8.5, ±18

±12, ±10, ±20

±11, ±10, ±19.5

Minimum Incremental Motion (X, Y, Z)(3), mm

0.1, 0.1, 0.05

0.2/0.8, 0.2/0.8, 0.1/0.4

0.5, 0.5, 0.25

1, 1, 0.5

0.3, 0.3, 0.16

0.00005 (0.8 mrad), 0.00005, 0.0001

0.0001/0,0004, 0.0001/0,0004, 0.0002/0,0008

0.00025 (5 mrad), 0.00025, 0.0005

0.2, 0.2, 0.1

0.4, 0.4, 0.2

0.5, 0.5, 0.25

0.0005, 0.0005, 0.001

Minimum Incremental Motion (qx, qy, qz)(3), ° Uni-directional repeatability, typical (X, Y, Z), mm

0.0005 (8 mrad), 0.0005, 0.001 1, 1, 0.5

Uni-directional Repeatability, typical (qx, qy, qz), °

0.0001, 0.0001, 0.0002

0.0008, 0.0008, 0.0004

0.00025 (3 mrad) 0.00025, 0.0005

Bi-directional repeatability, typical (X, Y, Z), mm (2)

1.2, 1.2, 0.6 (0.4, 0.4, 02)

2, 2, 1

4, 4, 2 (1, 1, 0.5)

5, 5, 3 (1.5, 1.5, 1)

Bi-directional Repeatability, typical (qx, qy, qz), ° (2)

0.0006, 0.0006, 0.0012 (0.0002, 0.0002, 0.0004)

0.001, 0.001, 0.002

0.002, 0.002, 0.004 (0.0005, 0.0005, 0.0004)

0.0025, 0.0025, 0.005 (0.001, 0.001, 0.001)

0.00006 (1 mrad), 0.00006, 0.0001 0.3, 0.3, 0.16 0.00006 (1 mrad), 0.00006, 0.0001

Maximum Speed (X, Y, Z), mm/s

14, 12, 5

2, 1.9, 0.8

2, 2, 1

0.5, 0.5, 0.25

9, 9, 4

Maximum Speed (qx, qy, qz), °/s

6, 6, 15

2.4, 2.4, 6

0.8, 0.8, 1.6

0.2, 0.2, 0.4

1.4, 1.4, 2.8

Centered Load Capacity (horizontal base plate), kg Centered Load Capacity (at any orientation), kg

450

0.1

N/A

200

Rigidity (Z), N/mm

100

Rigidity (X, Y), N/mm

2, 2

5, 5

10, 10

Cable Length, m MOTORIZED ACTUATORS

HXP50-MECA Ø 200 mm x H 151

Travel ranges are interdependent. The listed values are max. travels per axis when all other axes are in their centered positions. 2) Value with standard setting (value with hysteresis compensation) 3) Open/Closed loop values of HXP50-MECAV6

Dimensions HXP50-MECA

HEXAPODS

– A-A –

ø7.87 (200)

5.91 (150)

– TOP VIEW –

CONTROLLERS AND DRIVERS

2.95 (75)

ø1.97 (50)

3.94 (100)

4 HOLES M6 THD ON SQR 1.97 (50) 6 HOLES M6 THD AT 60° ON ø3.94 (100)

MOTORIZED OPTICAL MOUNTS

3 HOLES ø.17 (4.4) C’BORED ø.26 (6.6) AT 120° ON ø7.48 (190)

1.97 (50) ø4.92 (125) DIMENSIONS IN INCHES (AND MILLIMETERS)

TOP PLATE CARRIAGE

SPECIAL COLLECTIONS

.61 (15.5)

5.94 ±.28 (151 ±7) HEXAPOD AT MIDDLE POSITION

.55 (14)

A BASE BASE PLATE

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– TOP VIEW –

HXP1000-MECA 4 CLR SLOTS FOR: 1/4” SCREW ON 4.0 x 8.0 (101.6 x 203.2) OR M6 SCREW ON 3.9 x 7.9 (100 x 200)

6 HOLES M6 THD (1) EQUIDISTANT AT 60° ON ø6.9 (175)

MOTORIZED LINEAR STAGES

HXP100-MECA

– TOP VIEW –

BOTH PLATES: 3 x 3 HOLES M8 THD, DEPTH: .63 (16)

123

3.94 (100)

4 HOLES M6 THD (1) ON SQR 1.97 (50) 6 CLR HOLES FOR M6 SCREW EQUIDISTANT AT 60° ON ø7.9 (200)

+.006

1.48 (37.5)

MOTORIZED VERTICAL STAGES

1 HOLE ø.394 0 (Ø 10 H7) DEPTH: .31 (8)

8.94 (227)

2 CLR HOLES FOR 1/4 SCREW 8.0 (203.2) SPACING 3.94 (100)

6.89 (175)

1.97 (50)

X Y

ø11.8 (300)

6.38 (162)

ø21,6 (550) ø16.7 (425)

12 HOLES M6 THD (1) 1.97 (50)

6 HOLES M6 THD (1) EQUIDISTANT AT 60° ON ø4.9 (125)

3 CLR HOLES FOR M6 SCREW EQUIDISTANT AT 120° ON ø11.0 (280)

3.94 (100) 1)

DEPTH: .39 (10)

BOTH PLATES: 6 HOLES ø.35 (9) C’BORED ø.79 (20) x 1.97 (50), AT 60° ON ø11.81 (300)

BOTH PLATES: 3 HOLES ø.35 (9) C’BORED ø.79 (20) x 1.97 (50), AT 120° ON ø15.35 (390)

DIMENSIONS IN INCHES (AND MILLIMETERS)

.98 (25)

TOP PLATE

5.91 (150)

.59 (15)

TOP PLATE

1.57 (40)

2.59 (65)

CARRIAGE

+27 7.72 +1.06 -.039 (196 -1 ) HEXAPOD AT DEFAULT ZERO POSITION

MOTORIZED ACTUATORS

EACH SIDE: 3 HOLES M6 THD, DEPTH: .47 (12)

ø7.9 (200)

CARRIAGE

MOTORIZED ROTATION STAGES

1 HOLE M6 THD DEPTH: .20 (5)

4.4 (112.5) TYP.

ø7.87 (200)

15.55 ±1.55 (395 ±39.5) HEXAPOD AT MIDDLE POSITION

HEXAPODS

BASE BASE PLATE

.98 (25)

BASE 2.56 (65) BASE PLATE

Note: Different top plate hole pattern or a central aperture are available upon request.

CONTROLLERS AND DRIVERS MOTORIZED OPTICAL MOUNTS

The HXP1000 has a load capacity up to 450 kg centered loads.

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SPECIAL COLLECTIONS

The HXP100 has excellent rigidity, load capacity and positioning performance in a compact size.

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Motion Controller Selection Guide

MOTORIZED LINEAR STAGES

124

Number of Axis

ESP Stage Detection

Display

Compatible Motors

Communications

I/O

HXP 6-Axis Hexapod Controller see page 121

Yes

Remote, GUI

HXP-MECA

Ethernet

4 Analog In, 4 Analog Out 30 TTL In, 30 TTL Out

XPS High-Performance Motion Controller/Driver see page 127

1 to 8

Yes

Remote, GUI

*DC, Brushless DC, Stepper, Peizo, Galvo and Voice coil

Ethernet

4 Analog In, 4 Analog Out 30 TTL In, 30 TTL Out

ESP301 3-Axis Motion Controlle/Driver see page 131

1 to 3

Yes

USB, RS232, IEEE-488.1

16 TTL I/O

SMC Single-Axis Motion Controller/Driver see page 133

Yes

GUI

DC or Stepper

USB, RS232

1 Analog In 4 TTL In, 4 TTL Out

NewSTEP Single-Axis Motion Controller/Driver see page 135

1 (up to 8 with NSC-SB)

Configurable

GUI

Small Stepper

USB, RS232

AgilisTM Series Controllers see page 138

2 (up to 8 on AG-UC8)

Preconfigured

GUI

Agilis Piezo Motor

USB

NanoPZ Controller see page 139

1 (up to 8 with PZC-SB)

PRreconfigured

GUI

PZA12 Piezo Motor

USB, RS232

Open-Loop Picomotor Controller/Driver see page 140

Yes

Remote, GUI

Open-Loop Picomotor

Ethernet, USB, RS-485

Closed-Loop Picomotor Controller/Driver see page 142

Yes

Remote, GUI

Closed-Loop Picomotor

Ethernet, USB, RS-485

NPC 3-Channel Piezo Amplifier see page 144

Front Panel

NPx Series Piezo Stack

USB, RS232

1 Analog In 1 Analog Out

Series

CONTROLLERS AND DRIVERS

HEXAPODS

MOTORIZED ACTUATORS

MOTORIZED ROTATION STAGES

MOTORIZED VERTICAL STAGES

Series

Front Panel, GUI DC and Stepper

* Drivers for each motor type must be purchased separately. The XPS-DRV00P is required to control the drivers of 3rd-party galvos and voice coil motors.

SPECIAL COLLECTIONS

MOTORIZED OPTICAL MOUNTS

Controllers with Integrated Stages Number of Axis

ESP Stage Detection

Display

Compatible Motors

Communications

I/O

CONEX Integrated Controller and Stage see page 137

Preconfigured

GUI

USB

FC Series Intelligent Stepper Motor Stages see page 56, 91

Preconfigured

GUI

Stepper

USB, RS422

Series

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For Controller GUI's, firmware updates, software drivers, programming examples and user manuals, please download from site.

MOTORIZED ROTATION STAGES

Dedicated controllers like, Agilis, iPico and NanoPZ are not included in this table, but additional information is available in the the respective product pages.

MOTORIZED VERTICAL STAGES

The following table lists all Newport positioners and the compatible Newport motion controllers. Most stages feature ESP technology that provides true plug and play compatibility, wherein the Newport controller recognizes the connected stage and automatically uploads the stage operating parameters. This eliminates the risk for incorrect setting of parameters. Listed also is the maximum power consumption for each stage when used at maximum speed, with full load and at maximum acceleration. In order to be able to operate all stages simultaneously, and at these values, the total power consumption of all stages connected to the same controller (same power supply for SMC100 and NSC200) must be less than the power of the controller's power supply: 500 W for XPS, 150 W for ESP301, 80 W for SMC100, 20 W for NSC200.

MOTORIZED LINEAR STAGES

Stage and Controller Compatibility

125

Compatibility ESP3011

XPS-DRV01

BGM120PE to BGM200PE

XPS-DRV01

BGM120PP to BGM200PP

XPS-DRV01

BGS50CC4

XPS-DRV01

BGS80CC

XPS-DRV01

BGS50PP

XPS-DRV01

BGS80PP

XPS-DRV01

FMS-CC

XPS-DRV01

FMS-PP

XPS-DRV01

• • • • • • • •

FMS-PPHA

XPS-DRV01

GTS Series

XPS-DRV01

ILS-CC

XPS-DRV01

ILS-CCL

XPS-DRV01

ILS-HA

XPS-DRV03 XPS-DRV01 XPS-DRV02

IMS-CC, IMS-CCHA

170*

XPS-DRV03

IMS-LM

220*

XPS-DRV02

IMS-PP

XPS-DRV01

IMS-V

XPS-DRV01

LTA-HL, LTA-HS4

XPS-DRV01

LTAxxPPV6

XPS-DRV01

MFA-CC

XPS-DRV01

MFA-PP

MFA-PPD

XPS-DRV01

MTN-CC

150

XPS-DRV01

MTN-PP

XPS-DRV01

NPxxx-D Series5

XPS-DRVP1

NSA12

XPS-DRV017

NSR1

XPS-DRV017

XPS-DRV01

PR50PP, SR50PP

XPS-DRV01

RGV100BL

100*

XPS-DRV02

RGV100HL

100*

XPS-DRV02 or EDBL

RGV160BL

EDBL

RV120CC to RV350CC

130*

XPS-DRV03

RV120CCHL

XPS-DRV03

Reduced2

• • •

Reduced3

• • •

• •

Reduced2

•

• • •

• •

•

Reduced3

•

• • Reduced2

SPECIAL COLLECTIONS

PR50CC, SR50CC4

• • • • •

NSC200

MOTORIZED OPTICAL MOUNTS

40 80

• • • • •

SMC100PP1

CONTROLLERS AND DRIVERS

ILS-PP ILS-LM

Reduced3

SMC100CC1

HEXAPODS

XPS1 driver module

BGM120CC to BGM200CC

MOTORIZED ACTUATORS

Family

Max. Power Consumption (W)

•

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MOTORIZED LINEAR STAGES

126

Compatibility

Max. Power Consumption(W)

XPS1 driver module

RV160CCHL to RV350CCHL

130*

XPS-DRV03

RV120HAT to RV350HAT

170*

XPS-DRV03

RV120HAHLT to RV350HAHLT

170*

XPS-DRV03

RV120PE to RV350PE

XPS-DRV01

RV120PP to RV350PP

XPS-DRV01

RVS80CC

XPS-DRV01

RVS80PP

XPS-DRV01

TRACC4

XPS-DRV01

TRAPPD

XPS-DRV01

TRBCC4

XPS-DRV01

MOTORIZED ROTATION STAGES

MOTORIZED VERTICAL STAGES

Family

TRBPP

XPS-DRV01

URB100CC

XPS-DRV01

URS50BCC

XPS-DRV01

URS50BPP

XPS-DRV01

URS50BPPV6

XPS-DRV01

• • • • • • • • • • • • • • • •

• • • • •

XPS-DRV01 XPS-DRV01

URS75BPP to URS150BPP

XPS-DRV01

UTSCC

XPS-DRV01

UTSPP

XPS-DRV01

Reduced3

HEXAPODS

MOTORIZED ACTUATORS

10 40

3 4 5 6 7

• Reduced2,3 Reduced2

• •

Reduced3 Reduced3

XPS-DRV01

Reduced

Reduced2,3

XPS-DRV01

UZM160PE.05, UZM160PP.05

• •

Reduced2

UZM160PE.05V6

XPS-DRV01

UZM160PE.05V6

XPS-DRV01

UZS80PP

XPS-DRV01

VP-25AA, VP-25XA, VP-5ZA

XPS-DRV01 or XPS-DRV03

XPS-DRV03

100

XPS-DRV02 or XPS-DRV02L

XPS-DRV01

ZVR-PP (Theta)

XPS-DRV01

ZVR-PC (Theta)

XPS-DRV01

ZVR-PP and ZVR-PC (Z-Axis)

•

UTSPPV6

XPS-DRV01

NSC200

Reduced3

UZM160CC.05

VP-25XL

SMC100PP1

Reduced2

URS75BPPV6

XMS CONTROLLERS AND DRIVERS

SMC100CC1

URS75BCC to URS150BCC

XML

MOTORIZED OPTICAL MOUNTS

ESP3011

• • • •

Reduced2

• •

• • •

•

Reduced2 Reduced2

•

Enhanced System Performance (ESP) Controller. Compatible, but speed is reduced by 2.5x of the rated speed (ie, 40% of rated speed). Compatible, but MIM is 1/20th of a full step. For integrated stage and controller products, see page 137. For NanoPositioning products and controllers,see page 127 or see page 144. 100N load and 0.6mm MIM. Custom connector and configurations required. Call for info.

For FC series intelligent stepper motor stages/controllers, see page 56. For Agilis piezo-motor products, see page 59, 99,153. For NanoPZ actuators and controllers, see page 139. For Picomotor controller products, see page 140, 142, 144. For CONEX products, see page 165 for examples.

SPECIAL COLLECTIONS

*When stages are not driven synchronously, consider the maximum power consumption only for the stage with the highest power consumption and use a 70% reduced RMS power for all other stages. Applies only for stages with this footnote. When stages are driven synchronously, consider the maximum power consumption for all stages. If higher speeds are needed for any of the linear motor driven stages, please contact Tech Support to identify the appropriate driver.

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127

XPS Series Motion Controllers MOTORIZED LINEAR STAGES

Universal High-Performance Motion Controller/Driver • High performance, 1-8 axes motion controller for steppers, DC servos, brushless motors, piezoelectric stacks, voice coils and other motors • High-speed 10/100 Base-T Ethernet TCP/IP communication interface

• Wide variety of motion modes including point-to-point, velocity profiling, line-arc trajectories, splines, PVT trajectories, electronic gearing and analog input tracking.

RoHS

Compliant scan QR code to watch video

• High speed data aquisition and event triggers for process development and synchronization

The XPS incorporates motion groups which are user defined as single axis positioners, spindles, gantry groups, XY groups, XYZ groups or multiple axis groups. All compensations, including the most sophisticated 3D mapping, are corrected dynamically during each servo cycle, which has an update rate of 10 kHz.

Advanced Trajectory and Servo Loop Features

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SPECIAL COLLECTIONS

The proprietary motion profiler (trajectory generator) automatically optimizes the S-Gamma trajectory jerk time for each commanded move profile, resulting in faster settling, more accurate trajectory execution, and an increased lifetime without sacrificing the move time. A sophisticated PID loop corrects for any variations of the actual motion from the commanded trajectory. In addition to the classical PID gain parameters, customers can optimize their motion system by applying feedforward gains, a deadband threshold, a derivative filter cut-off frequency, or up to two notch filters. Furthermore, the XPS features variable PID’s that automatically adjust their values proportional to the distance from final position, resulting in improved motion sensitivity and stability.

MOTORIZED OPTICAL MOUNTS

XPS’s on-board web based software supports system and driver configuration and when used with Newport stages and drivers, all settings can be set almost automatically using the auto-configuration function. Software tools include a manual mode screen with options to initiate simple motions, and a monitor for axis position and group status information. A motion tuning utility helps optimize all servo PID settings and allows simultaneous display of analog control signal, position error, integral error, target

Positioner Grouping and Compensation Features

CONTROLLERS AND DRIVERS

Powerful, Yet Easy To Use

For LabView users, we have developed an extensive library of LabView drivers, which includes VI’s for each individual API command. XPS also comes with a DLL for Windows as well as sample programs for C#, Phyton, MatLAB and Visual Basic program development in Windows.

HEXAPODS

Proprietary universal driver modules allow the XPS to drive 1 to 8 axes of any Newport actuator, linear, rotary or NanoPositioning stage. By using pass-through drive modules, the XPS is also capable of controlling many other motion devices, whether they use stepper, DC brush, DC brushless rotary or linear, piezoelectric stacks or voice coil actuation.

position, velocity, acceleration, and more. The command screen is convenient for learning XPS functions and allows for simple programming and code testing. Executable TCL scripts can also be generated from the command history.

MOTORIZED ACTUATORS

The XPS is an extremely high-performance, user-friendly, integrated motion controller/driver offering convenient, high-speed communication through 10/100 Base-T Ethernet. With outstanding motion profiling, complex trajectory control, positioning accuracy and powerful programming functionality, the XPS is capable of addressing the most demanding motion applications for up to 8-axes, while supporting 30 users working simultaneously. Multiple digital and analog I/O's, triggers and supplemental encoder inputs provide users with additional data acquisition, synchronization and control features that make the XPS an ideal control hub. When networked, users can access the same controller from any place in the world for remote control, code development (.NET, LabVIEW, C++, Python etc..), data transfer or diagnostics, all without the requirement to download any software. XPS hardware provides extensive analog and digital I/O, as well as a deep and intuitive command set, making applications deployment easy and efficient.

MOTORIZED ROTATION STAGES

• Extensive external device or system functionalities with 4 analog inputs, 4 analog outputs and 30 TTL inputs and outputs

MOTORIZED VERTICAL STAGES

• Advanced 10KHz servo loop with variable PID’s, low-pass and notch filters, linear error compensation and 3D error mapping

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MOTORIZED ACTUATORS

MOTORIZED ROTATION STAGES

MOTORIZED VERTICAL STAGES

MOTORIZED LINEAR STAGES

128

For Motion, Think Newport ™

High Speed Execution and Synchronization

stored locally, and are easily accessed via the user GUI. The part to be fabricated can be viewed and manipulated in the 3D display window for closer inspection.

Based on a real-time multi-tasking functionality, the XPS is capable of executing complex, internally stored, user-defined applications in real time using TCL scripts. The Pentium P4 2 GHz motion processor has enough bandwidth to support TCL program execution without adversely impacting higherpriority tasks. 30 digital inputs and 30 outputs (TTL, open collector) are available to read external switches or to control valves, switches, or other digital devices. When used within a TCL script these I/O's can provide the same functionality as a separate PLC device, all within the XPS. 4 channels of 16 bit uncommitted analog outputs increase flexibility to allow users to precisely monitor the position, velocity, or acceleration of any motion axis. The XPS allows to synchronize the triggering of I/O’s during a motion process using dedicated “event and action" API's. Users can direct the XPS to trigger an action upon the occurrence of an event, for example, initiating a TCL script when the motion is done. Once defined, the XPS autonomously monitors the status of the event with a latency of less than 100 ms!

Easily accessible connectors at the back. Handles and rack mounting brackets included.

The XPS is compatible with the Experimental Physics and Industrial Control System .

SPECIAL COLLECTIONS

MOTORIZED OPTICAL MOUNTS

CONTROLLERS AND DRIVERS

HEXAPODS

High Speed Data Integration and Acquisition For applications that require the capture and analysis of analog data in real-time relation to the position, the XPS features gathering mode. In gathering, the XPS captures all important axis information and I/O’s with a time jitter of less than 50 ns and stores the data in a custom configured table, ideal for high speed, high data rate applications. Dedicated hardware on the XPS processor can also capture the axis positions and the I/O information based on an externally triggered TTL input with latency between the trigger input and the position acquisitions of less than 50 ns. External data acquisition tools or other devices can be synchronized to the motion as well. For this purpose, the XPS features one TTL trigger output per axis that can be either configured to output a single pulse when crossing a specified position or output continuous pulses at specified distance intervals. Output pulses at constant time or constant trajectory length are supported

XPS-GCODE interface showing a 3D Model generated from a G-CODE

XPS-GCODE XPS-GCODE software enables your XPS Universal Motion Controller to become a powerful, high-precision machining center that can read and convert G-codes, display the tool path, and execute trajectory routines with the power and precision of Newport Motion Control. The conversion process utilizes the advanced features of the XPS to generate smooth motion routines along optimized trajectories with controlled velocity. G-Codes are converted to native (TCL and PVT) format of the XPS,

The XPS-RC remote control allows advanced system diagnostics, incremental stepping, absolute positioning, or jogging of individual axis

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Number of Axes

1 to 8 axes of stepper, DC brush, DC brushless motors or piezoelectric stacks using internal drives. Other devices using external third-party drives Internet protocol TCP/IP

Communication Interfaces

MOTORIZED LINEAR STAGES

Specifications

129

Two Ethernet 10/100 Base-T (RJ45 connector). One with fixed IP address for local communication and one for networking, dynamic addressing with DHCP and DNS Typically 0.3 ms from sending a tell position command to receive the answer

Natural user defined units (no need to program in encoder counts) Real time execution of custom tasks using TCL scripts Multi-user capability using the concept of sockets

MOTORIZED VERTICAL STAGES

Optional XPS-RC remote control Powerful and intuitive, object-oriented command language

Distance spaced trigger output pulses, less than 50 ns latency between position crossing and trigger pulse; max. 2.5 MHz rate Time spaced trigger output pulses, 0.02 to 2.5 MHz rate, 50 ns accuracy Trigger output on trajectories with 100 ms resolution Data gathering at up to 10 kHz rate and up to 1,000,000 data entries User-defined “actions at events” monitored by the controller independently at a rate of 10 kHz User-definable system referencing with hardware position latch of reference signal transition and “set current position to value” capability Axis position or speed controlled by analog input Axis position, speed or acceleration copied to analog output

MOTORIZED ROTATION STAGES

Firmware Features

Trajectory pre-check function that returns travel requirement and max. possible speed Auto-tuning and auto-scaling Jogging mode including on-the fly changes of speed and acceleration

Gantry mode including XY gantries with variable load ratio Motion

Line-arc mode (linear and circular interpolation incl. continuous path contouring)

MOTORIZED ACTUATORS

Synchronized point-to-point motion Spindle motion (continuous motion with periodic position reset)

Splines (Catmull-Rom type) PVT (complex trajectories based on position, velocity and time coordinates) Analog tracking (using analog input as position or velocity command) Master-slave incl. single master-multiple slaves and custom gear ratio 2D and 3D error mapping All corrections are taken into account on the servo loop Servo Rate

HEXAPODS

Linear error, Backlash, 1D positioner error mapping Compensation

8 kHz Open loop, PI position, PIDFF velocity, PIDFF acceleration, PIDDualFF voltage

Control Loop

Variable PID’s (PID values depending on distance to target position) Deadband threshold; Integration limit and integration time 30 TTL inputs and 30 TTL outputs (open-collector)

I/O

4 synch. analog inputs +/- 10 V, 14 Bit, prog. gains x1, x2, x4, x8 (prog. gains not with all units. Call Newport for details.) 4 synch. uncommitted analog outputs, 16 Bit Watchdog timer and remote interlock

CONTROLLERS AND DRIVERS

Derivative cut-off filter; 2 user-defined notch filters

Hardware latch of all positions and all I/O’s; 10 kHz max. frequency Trigger In

< 50 ns latency on positions < 100 ms latency of analog input data One high-speed position compare output per axes that can be either configured for position synchronized pulses or for time synchronized pulses : <50 ns accuracy/latency, 2.5 MHz max. rate

Dedicated Inputs Per Axis

1 Vpp analog encoder input up to x32768 interpolation used for servo; amplitude, phase and offset correction; additional 2nd hardware interpolator used for synchronization; up to x200 interpolation

RS-422 differential inputs for A, B and I, Max. 25 MHz, over-velocity and quadrature error detection

MOTORIZED OPTICAL MOUNTS

Trigger Out

Forward and reverse limit, home, error input Dedicated outputs per axis (when using external drives)

2 channel 16-bit, +/- 10 V D/A Drive enable, error output Analog voltage, analog velocity, and analog acceleration (used with XPS-DRV01 and XPS-DRV03 for DC brush motor control)

Drive capability

Analog acceleration, sine acceleration and dual sine acceleration (used with XPS-DRV02 for brushless motor control) Step and direction and +/- pulse mode for stepper motors (XPS-DRV00P) 500 W total available drive power

Dimensions (W x D x H)

482 x 508 x 177(4U) mm

Weight

16 kg

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SPECIAL COLLECTIONS

Analog position (used with XPS-DRV01 for stepper motor control) Analog position (used with external drives for example for piezo control)

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MOTORIZED ACTUATORS

MOTORIZED ROTATION STAGES

MOTORIZED VERTICAL STAGES

MOTORIZED LINEAR STAGES

130

For Motion, Think Newport ™

Ordering Information Model

Description

XPS-Q2

2-axis Universal Controller/Driver, ethernet

XPS-Q4

4-axis Universal Controller/Driver, ethernet

XPS-Q6

6-axis Universal Controller/Driver, ethernet

For a complete list of compatible Newport stages, see page 125.

XPS-Q8

8-axis Universal Controller/Driver, ethernet

XPS-DRVP1

NanoPositioning drive module for piezo-stack based products

XPS-DRV01

PWM drive module for DC brush and stepper motors, 3A/48V max.

XPS-DRV02

PWM drive module for brushless motors, 5A/44Vpp max.

XPS-DRV02L

For XM Series: 1nm MIM. Low Noise drive module for brushless motors, 2A/44Vpp max.

XPS-DRV02P

For XM Series: 3nm MIM. Low Noise drive module for brushless motors, 7A/44Vpp max.

XPS-DRV03

High performance PWM drive module for DC motors, 5A/48V max.

XPS-DRV00P

Pass-through driver module with pulse and direction capability

XPS-CONKIT

Connector kit with 6 GPIO connectors

XPS-TG5

Trigger output cable, LEMO/flying leads, 5m

XPS-RC

Remote Control for XPS controller, 3.8 inch Touch Screen

XPS-GCODE

Software to convert laser machining G-codes for the XPS controller

XPS-QKIT

QNX CPU Kit for XPS

1) Drive modules are ordered seperately. Below is an example of part numbers for an 8-Axis XPS controller with 3 drive modules for ILS stages, 1 drive module for an IMS300CCHA stage and 1 pass-through module: 1 x XPS-Q8 3 x XPS-DRV01 1 x XPS-DRV03 1 x XPS-DRV00

HEXAPODS

2) Call Newport for the following special XPS features: - Dual power supply for safer shut down - Option for additional I/O’s - Error mapping of stages for the best accuracy

XPS

SPECIAL COLLECTIONS

MOTORIZED OPTICAL MOUNTS

CONTROLLERS AND DRIVERS

Training and Support

Newport Motion offers product training and telephone support. For customers who need a quick introduction or require a deeper and effective utilization of controller products, Newport Motion can provide training at your facility or in Irvine, whichever is more convenient. In addition to remote troubleshooting services via Ethernet, Newport Motion application engineers can call and help you in real time. If you prefer a customized training, installation or support, please contact techsupport@newport.com or (800) 222-6440.

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ESP301 Series MOTORIZED LINEAR STAGES

3 Axis Motion Controller/Driver • 1 to 3 axes motion controller using universal driver technology for DC servo and 2-phase stepper motors up to 3A per axis

• 1000x programmable micro-step resolution for ultrasmooth low speed stepper positioning

RoHS

• USB2.0, RS232 and optional GPIB communications link for easy computer interfacing

The ESP301 controller/driver can drive and control up to three axes of motion using any combination of DC or 2-phase stepper motors up to 3 A per axis. This enables driving a large selection of Newport stages and actuators. Featuring an integrated front panel interface and Newport's unique ESP stage auto-configuration, the ESP301 is the easiest controller to use with excellent functionality at an affordable price.

The ESP301 uses a 64-bit, floating point, DSP processor for high precision synchronized control. A digital PID-FF (feedforward) servo loop ensures precise velocity profile tracking and accurate positioning. A 1000x programmable micro-step resolution provides ultra-smooth, low-speed stepper positioning capability, and 18-bit DC motor command output ensures improved stability for precision applications.

The ESP301 makes programming complex motions easy using a powerful programming language with over 100 commands. Each ESP301 features a standard USB and RS232-C communication link for easy computer interfacing. An optional IEEE-488 (GPIB) interface is available for high speed parallel communication. Newport recommends using National Instruments GPIB hardware for full compatibility. 64kB Flash non-volatile user program memory allows for storage of up to 100 user-defined programs for computer independent usage. A complete library of LabVIEW™ drivers and communication DLL’s are available and continually updated.

Motion

Auto-Configuration

Front panel

16 bi-directional digital I/O can be user programmed as either inputs or outputs for internal or external event synchronization. When configured as inputs, they can be used to execute a program or to stop a motion. When configured as outputs, they can monitor the status of a motion to provide a hardware interface for external equipment. An additional watchdog timer and remote interlock are supplied as an invaluable safety feature.

ESP301 options include a user-friendly front panel interface providing an intuitive menu system from which you can execute motion programs, initiate manual moves, and configure operating parameters. The position of all axis is displayed in a LCD screen. A digital joystick can provide convenient jog control.

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SPECIAL COLLECTIONS

Inputs/Outputs

MOTORIZED OPTICAL MOUNTS

When used with ESP compatible motion devices, the ESP301 motion controller will automatically configure itself, providing true plug-and-play compatibility. PID parameters, motor types and gear ratios are automatically set for you at power up — there are no parameters to set and hence no risk of damage by inappropriate parameter settings. The ESP301 can also be configured to operate non-Newport stages that fit within driver module specifications.

CONTROLLERS AND DRIVERS

The ESP301 provides several modes of positioning including synchronized and non-synchronized point-to-point, jogging, linear or circular interpolation, and continuous path contouring. With electronic gearing, any axis of the ESP301 can be “slaved” to any other axis, even if they have different motor/gear ratios or lead screw pitches. Other sophisticated motion features include on-the-fly position, velocity, or trajectory changes for complex motion and alignment routines. Software limits can be set to improve systems safety. An advanced origin search routine includes encoder index pulse consideration for precision homing. Backlash and linear error compensation eliminate repeatable system errors.

HEXAPODS

Programming

MOTORIZED ACTUATORS

Technology

MOTORIZED ROTATION STAGES

Compliant

• Synchronized circular/linear interpolation and continuous path contouring for complex motion profiling

MOTORIZED VERTICAL STAGES

• ESP technology, Newport's exclusive “plug-and-play” compatibility with ESP stages for easy setup

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MOTORIZED LINEAR STAGES

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Specifications 400 ms servo cycle up to 3 axes Computing Power

64 bits floating point DSP, with a peak performance of 1200 MFLOPS Digital PID servo loop with velocity and acceleration feed forward Trapezoidal and s-curve velocity profile

MOTORIZED VERTICAL STAGES

Synchronized and non-synchronized point-to-point Jogging, Continuous moves

Motion

3D Linear interpolation, 2D Circular Interpolation Master-slave, Electronic gearing On-the-fly changes of target position, speed, acceleration, and PID

Contouring

2D Contouring with continuous buffer loading Program execution depending on TTL I/O status

External Event Synchronization

Real-time command execution via computer interfaces Stand-Alone Execution of Programs

MOTORIZED ROTATION STAGES

Operating Modes

Front panel manual motion command execution Digital joystick (optional) USB2.0 (32-bit), RS-232-C Optional IEEE-488-1 included in ESP301-1G, -2G and -3G

Computer Interfaces

100+ intuitive, 2 letter ASCII commands Programming

Command set includes: User defined units, software limits, home search (with and w/o top zero), linear error and backlash compensation, etc.

MOTORIZED ACTUATORS

Typical time to send a command and to read the repsonse: RS-232-C: 7-30 ms; USB: 3.5 ms; IEEE-488-1: 1 ms Communication DLL for Windows 95/98/2000/NT/ME/XP, example.net (serial communication) Drivers for LabView

Software Drivers

Software development tools compatible with Windows 95/98/2000/NT/ME/XP: Setup, PID tuning program, Motion Wizard (used to configure non-ESP compatible stages) 16 user programmable TTL I/O (programmed in groups of 8)

I/O Memory

“Watchdog” timer and remote interlock 64KB Flash Non-Volatile User Program Memory (last for approx. 6,000 commands)

HEXAPODS

Front Panel Display

Backlit LCD display, 4 lines x 20 characters, 21 mm x 70 mm DC brush motors at 48 V, 3 A max. Closed-loop operation

Motor Control

16-bit DAC resolution

The digital joystick provides convenient manual jog control

5 MHz max. encoder input frequency 2-phase stepper motors at 48 V, 3 A max. Open- or closed-loop operation

CONTROLLERS AND DRIVERS

Stepper Motor Control

10 kHz commutation rate 1000x max. (programmable) micro-step resolution 150 W, 48 V, 3 A max per axis

Total Available Motor Power Power Requirements

115/230 V, 50/60 Hz wide input range 429.5 x 436.0 x 76.2 mm

Dimensions (W x D x H) SAT-Weight (kg)

ESP301 Rear Panel. All connections to motors, computer and other devices are found in the rear panel

SPECIAL COLLECTIONS

MOTORIZED OPTICAL MOUNTS

*Newport recommends using National Instruments GPIB hardware for full compatibility. Other GPIB products may not provide acceptable performance.

Ordering Information Model

Description

ESP301-1N

ESP301 Motor Controller/Driver, 1 axis, USB

ESP301-1G

ESP301 Motor Controller/Driver, 1 axis, w/ GPIB and USB

ESP301-2N

ESP301 Motor Controller/Driver, 2 axis, USB

ESP301-2G

ESP301 Motor Controller/Driver, 2 axis, w/ GPIB and USB

ESP301-3N

ESP301 Motor Controller/Driver, 3 axis, USB

ESP301-3G

ESP301 Motor Controller/Driver, 3 axis, w/ GPIB and USB

ESP300-J

Joystick (digital joystick)

ESP300-R

19 in. Rack Mount Brackets

To view compatible Newport stages and actuators, see page 125.

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SMC100 MOTORIZED LINEAR STAGES

Single-Axis Motor Controller/Driver • Affordable single-axis control for DC or Stepper motors • Advanced Hysteresis compensation mode

• Internal RS-485 link allows networking up to 31 controllers

MOTORIZED VERTICAL STAGES

• RS-232-C or USB communication for easy user interfacing

• Convenient multi-axis programming • Enhanced system safety by reading parameters from Newport ESP compatible stages

Compliant

The SMC100CC and SMC100PP are single axis motion controllers/drivers for DC servo motors (SMC100CC) and 2-phase stepper motors (SMC100PP) up to 48 VDC at 1.5 A rms. They provide a very compact and low-cost solution for driving most of Newport’s stages, including the popular GTS and ILS linear stages, URS rotation stages, and LTA actuators.

MOTORIZED ACTUATORS

Communication with the SMC100 is achieved via the integrated RS-232-C interface, or from a USB port using the external adapter SMC-USB (requires Windows™ operating system). Intuitive, Windows-based software supports all configurations and enables basic motion. Advanced application programming is simplified by an ASCII command interface and a set of two-letter mnemonic commands.

SMC-PS80

SMC-232 or SMC-USB Example of a single-axis system configuration

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SPECIAL COLLECTIONS

SMC100CC FIRST

MOTORIZED OPTICAL MOUNTS

VP-25XA

CONTROLLERS AND DRIVERS

Up to 31 controllers can be networked through the internal RS-485 communication link. This internal multi-drop full-duplex serial link simplifies communication to several units, without the need for sending “address selection commands”. This results in enhanced multi-axes management with improved program readability and faster communication compared to alternative systems based on an RS-232-C chain. The typical execution time for a tell position command, for instance, is only in the range of 10 to 20 ms. The SMC100 also features advanced “multi-axes” commands, such as “Stop all” or “Start a motion of all axes” and performs at a 57,600 baud rate communication speed. Furthermore, for an efficient process control, the SMC100 features dedicated digital outputs for "In Motion" and "Not referenced".

The SMC-RC is an affordable remote control for the SMC100 controller. It features a 16-characters LCD for position display and 4 push buttons for +/- jog motion, configuration, homing, motor on and motor off.

HEXAPODS

When used with Newport ESP enhanced positioners, the SMC100 will detect the connected product automatically for the most straightforward system configuration. This exclusive Newport feature does not only reduce configuration time, but provides also the best protection of your equipment from any accidental damage.

MOTORIZED ROTATION STAGES

RoHS

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Specifications SMC100CC

Description Controller Capability

DC servo motors in open or closed loop operation

Motor Output Power

48 VDC @ 1.5 A rms, 3 A peak

Control Loop

Floating point digital PID loop with velocity and friction feedforward, 2kHz servo rate Point-to-point motion with s-gamma motion profiler allowing acceleration and jerk time control; Backlash and Hysteresis compensation mode

Motion MOTORIZED VERTICAL STAGES

RS-232-C with 57,600 baud rate USB compatible with external adapter SMC-USB (requires Windows™ operating system)

Computer Interface

RS-485 internal link for chaining up to 31 controllers from the same COM port 40+ intuitive, 2 letter ASCII commands

Programming

Command set includes software limits, user units, synchronized motion start, stop all 4 TTL out (open collector) 4 TTL in (2.21 kW pull up to 5 V)

I/O MOTORIZED ROTATION STAGES

1 analog input, ±10 V, 8-Bit RS-422 differential encoder input for A, B, and I, max. 2 MHz rate (SMC100CC only)

Dedicated Inputs

Forward and reverse limit, home switch and index pulse 1 open-collector output for “InMotion”

Dedicated Outputs

1 open collector output for “NotReferenced”

Display

Two color LED

Internal Safety Feature

Watchdog timer Windows Utiltiy program LabView™ drivers

MOTORIZED ACTUATORS

Software Dimensions (W x D x H)

161 x 140 x 33 mm

To view compatible Newport stages and actuators, see page 125.

CONTROLLERS AND DRIVERS

HEXAPODS

Ordering Information

Model

Description

SMC100CC

SMC100 controller for DC servo motors. Includes 0.2m long power and RS-485 cables

SMC100PP

SMC100 controller for 2-phase stepper motors. Includes 0.2m long power and RS-485 cables

SMC-RC

Remote Control, SMC100, 16-Character LCD Display

SMC-PS80

Power Supply, SMC100 Series, 80W, 100-240 VAC, 47-63 Hz, 1.9 A max.

SMC-232

RS-232-C cable, 3 m length, DB9F to DB9F

SMC-USB

USB Interface, Includes USB to COM Port Adapter & RS-232-C Cable

SMC-CB1(1)

RS-485 Cable for SMC100 Series, 1 m Length

SMC-CB3(1)

RS-485 Cable for SMC100 Series, 3 m Length

Only required when RS-485 cable included with SMC100 is too short.

For a complete list of compatible Newport stage, see page 125.

MOTORIZED OPTICAL MOUNTS

VP-25XA

SMC-PS80 LTA-HS LTA-HS

SMC100CC FIRST

VP-25XA

SMC-PS80

SMC-PS0.2

SMC-232 or SMC-USB

SMC-PS0.2

SPECIAL COLLECTIONS

SMC-CBx SMC-CBx SMC-CBx Example of a multi-axis system configuration

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SMC100CC LAST

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NSC200 MOTORIZED LINEAR STAGES

NewStep Expandable Motion Controller System • Compact, hand held, single axis controller for NewStep NSA12 actuators, MFA-PP linear stages, TRA-PPM actuators and NSR1 rotators

• RS232 communications link for computer control • Manual adjustment knob allows convenient remote control at variable speeds and increments

MOTORIZED ROTATION STAGES

RoHS

Compliant

The NSC200 is an integrated, hand-held stepper motor controller-driver offering affordable, single axis control of the NSA12 micrometer replacement actuators, MFA-PP linear stage and the NSR1 rotation stage. The handheld NSC200 has a convenient single control knob and features a 64x microstepping ratio for ultrasmooth, high resolution positioning. Adding an external NSC-SB switchbox allows a single NSC200 to control up to eight positioners, one axis at time.

CONTROLLERS AND DRIVERS

NSC200 Specifications Function Number of Axes Motion Operating Modes

Single axis, open loop stepper motor controller/driver for 2 phase motors 1. up to 8 when used with NSC-SB Point-to-point Jogging, Continuous moves NewStep Utility, HyperTerminal

NSC-JB junction box. MOTORIZED OPTICAL MOUNTS

Jogging with adjustable speed or incremental moves via manual knob 20+ intuitive, 2 letter ASCII commands

Programming

Command set includes: software limits, home search (negative travel limit), backlash compensation, etc.

Software Drivers

LabView Drivers available

Utility Programs

LabView utility application for configuration and motion control

Computer Interfaces Max. continious current Stepper Motor Control

RS-232, USB (adapters required) 0.4 A at 15 VDC continuous 64x micro-stepping Minimum travel limit, maximum travel limit, home

Power Requirements

115/230V, 50/60 Hz

Dimensions (W x D x H)

50 x 150 x 50 mm

SAT-Weight

SPECIAL COLLECTIONS

Dedicated inputs

HEXAPODS

NSC-SB 1 to 8 axis switchbox.

MOTORIZED ACTUATORS

NSC200 Hand held controller.

Two primary control modes are selectable whether or not a switchbox is used: Local (manual control) and Remote (computer control). Selection of Local or Remote is easily accomplished by pressing the knob of the NSC200. Rotating the knob in one direction moves the positioner in that direction. The NSC200 has a RS485 interface that allows a network of up 256 units in parallel. The NSC200 RS485 interface can be accessed by using the RS485 to RS232 converter NSC-485232-I that plugs directly into the PC's RS232 port. For USB control, use the USB232 adapter in addition to the NSC-485-232-l. The controller comes with LabView VI's and Windows based software that supports configurations and enables convenient remote computer control. Applications can also be automated using LabView or other software by sending basic commands to NewStep controller through the integrated RS485 interface.

MOTORIZED VERTICAL STAGES

• Expandable - the NSC-SB allows control of up to 8 axes with one NSC200 controller

0.25 kg max

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NSC-485-232-I converter.

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MOTORIZED LINEAR STAGES

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Ordering Information

NSC-SB Specifications Function

1 to 8 channels switchbox for NSC200

Actuator Output Channels

8 (one channel active at a time)

Channel Status Indication

One tri-color LED per axis

MOTORIZED VERTICAL STAGES

Dimensions (H x W x D)

35 x 182 x 151 mm

Typical Configurations Motion Controller #2 NSC200

Motion Controller #1 NSC200

Actuator #2 NSA12

MOTORIZED ROTATION STAGES

Actuator #1 NSA12

RS485 Cable NSC-CB1 (1m) NSC-CB3 (3m)

MOTORIZED ACTUATORS

Power Cable NSC-PSC1 (1m) NSC-PSC3 (3m)

RS485 Junction Box NSC-JB

Model

Description

NSC200*

NewStep Single Axis, Stepper Motor Controller / Driver, Hand-held

NSC200-KT

NewStep Kit, Includes NSC200, NSA12, NSC-PS25 & NSC-PSC3

NSC-PS25*

NewStep Power Supply, Connect Up To 4 Motors

NSC-PSC1

Power Supply Cable, 1 m, Branch to Connect Additional Motor

NSC-PSC3

Power Supply Cable, 3 m, Branch to Connect Additional Motor

NSC-CB1

RS-485 Cable, 6-wire, 1 ft. Length, NewStep

NSC-CB3

RS-485 Cable, 6-wire, 9 ft. Length, NewStep

NSC-JB

RS-485 Junction Box, 1 x 5

NSC-485-232-I

RS-485 to RS-232 Converter, 6-wire Cable, NewStep

NSC-SB

NewStep 8-axis Switchbox, Includes 41791-01, 15769-02 & NSC-CB2

NSC-PP

Adaptor Cable, NSC200, 25-pin to 9-pin

USB-232

USB to RS232 converter

NSC-INT-KT

NewStep Computer Interface Kit, NSC-CB1,NSC-CB3, NSC-485-232-I, USB-232, NSC-JB

NSA12

Motorized Linear Actuator, 11 mm Travel, Micro Step Drive

NSA12V6

Motorized Linear Actuator, 11 mm Travel, Vacuum Compatible

MFA-PP

Miniature linear stage, stepper motor, 9-pin mini-DIN connector, RoHS

NSR1

Rotary Positioner, 1 in. Theaded Aperature

For a complete list of compatible Newport stages, see page 125.

RS232 to RS485 Converter NSC-CB-485-232

Power Cable NSC-PSC1 (1m) NSC-PSC3 (3m)

To RS232 Computer Port

HEXAPODS

Power Cord Power Supply NSC-PS25

Connection diagram for two controllers, two actuators, one power supply, with computer control.

Power Supply NSC-PS25

CONTROLLERS AND DRIVERS

Power Cord

Power Cable 41791-01 (2m) Motion Controller NSC200

MOTORIZED OPTICAL MOUNTS

Driver Cable 15769-02 (2m) RS485 Cable NSC-CB2 (2m) RS485 Cable NSC-CB1 (1m) NSC-CB3 (3m)

SPECIAL COLLECTIONS

RS232-to-RS485 Converter NSC-485-232-I To RS232 Computer Port Actuator #1 NSA12 Actuator #2 NSA12

Connection diagram for one controller, one switchbox, two actuators, with computer control.

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CONEX-CC MOTORIZED LINEAR STAGES

CONEX DC-Servo Controller and Accessories • Easily Daisy chain additional modules

• Base plate is universal for all CONEX modules

RoHS

MOTORIZED VERTICAL STAGES

• Power supply can provide power for 5 modules

Compliant

The linear amplifier of the CONEX-CC provides the optimum drive solution for low-power motors. Compared to other solutions relying on cheaper PWM amplifiers, the CONEX-CC delivers much smoother motion, with less electrical noise and significantly less motor heating.

MOTORIZED ACTUATORS

CONEX CC Controller accessories include the base plate, power supply, and power chain cable. The base plate is universal to all CONEX modules to allow easy mounting to Newport standard tables. The power supply is a 24 Volt DC power supply for all CONEX CC devices. For added convenience, the power can be shared with up to 5 modules using the optional CONEX-PS-CB power chain cable.

MOTORIZED ROTATION STAGES

The CONEX-CC is a very compact and inexpensive driver for Newport’s low power DC servo motor driven devices. For out-of-the box control, the CONEX-CC is preconfigured and delivered with the motion device. Available configurations include TRA and LTA Series actuators, MFA linear stages, SR50 and PR50 rotation stages and BGS50 goniometers.

CONEX-CC Specifications Single-axis motion controller/driver for low-power DC servo motors

Motor Output Power Control Loop Motion

24 VDC @ 0.15 A rms, 0.3 A peak, linear amplifier Floating point digital PID loop with velocity and friction feedforward, 2 kHz servo rate Point-to-point motion with S-gamma motion profiler allowing acceleration and jerk time control; Backlash and Hysteresis compensation mode

Computer Interface

USB2.0, 1.8 m long USB-A to Mini-B cable included

Programming

40+ intuitive, 2 letter ASCII commands

CONEX controllers mounted on CONEX-BP

Encoder input for A, B, and I, max. 2 MHz rate, single ended Forward and reverse limit, home switch and index pulse

Display

Two-color LED

Safety Feature

Watchdog timer

Power Requirements

24 V, 8 W, female Ø 2.1 x Ø 5.5 x11 mm

Dimensions [in. (mm)]

3.67 x 2.09 x 0.90 (93.2 x 53 x 23)

Cable Length [ft. (m)]

3 (9.8)

CONTROLLERS AND DRIVERS

Dedicated Inputs

HEXAPODS

Description

Model CONEX-TRA6CC

TRA6CC Actuator Integrated with CONEX Controller

CONEX-TRA12CC

TRA12CC Actuator Integrated with CONEX Controller

CONEX-TRA25CC

TRA25CC Actuator Integrated with CONEX Controller

CONEX-LTA-HL

LTA-HL actuator Integrated with CONEX Controller

CONEX-LTA-HS

LTA-HS actuator Integrated with CONEX Controller MFA-CC Linear Stage Integrated with CONEX Controller SR50CC Rotation Stage Integrated with CONEX Controller

CONEX-PR50CC

PR50CC Rotation Stage Integrated with CONEX Controller

CONEX-BGS50CC

BGS50CC goniometer with CONEX-CC controller

CONEX-PS

CONEX 24 V Power Supply

CONEX-PS-CB

CONEX Power Chain Cable, 100 mm length

CONEX-BP

CONEX Base Plate, For Mounting Multiple CONEX devices.

CONEX-PS-CB Cable Chain (Included in every CONEX-CC order)

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SPECIAL COLLECTIONS

CONEX-MFACC CONEX-SR50CC

CONEX-PS Power Supply

MOTORIZED OPTICAL MOUNTS

Ordering Information

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MOTORIZED LINEAR STAGES

Agilis™ Motion Controllers • Compatible with all Agilis piezo motor-driven products

MOTORIZED VERTICAL STAGES

• Available in: 2-channel hand-held AG-UC2 or the 8-channel AG-UC8, both with USB interface • Available in the 8-channel AG-UC8PC, with USB, RS232 and RS485 interfaces • ASCII commands, Windows DLL’s and LabView VI’s included

MOTORIZED ACTUATORS

MOTORIZED ROTATION STAGES

• Optional USB power supply

RoHS

Compliant

Agilis piezo motor controllers are available in 2 or 8 channel versions. The 2-channel, hand-held, AG-UC2, can be driven through a USB port or from the independent USB-CH power supply. Both Agilis AG-UC8 and AG-UC8PC controllers have the capability to drive up to 8 piezoelectric motors. They can be powered through the USB port directly from the computer and the AG-UC8PC version can also be powered from an external power supply. A software utility allows driving two selected motors (1&2, 3&4, etc) at a time and switching to another motor pair. A set of ASCII-commands, Windows DLL and LabViewVI's for all functions are provided.

Specifications AG-UC2

AG-UC8

Interface

Push buttons and USB

USB

USB, RS-232 and RS-485

Power input

Through USB interface

USB: Through USB RS-232 and RS-485: 5 V through HE10 connector

177 x 57 x 19

135 x 90 x 25

130 x 85

HEXAPODS

Number of axes

Size (mm)

AG-UC8PC

CONTROLLERS AND DRIVERS

AG-UC2 Hand-held 2-axes controller

Ordering Information Description

AG-UC2

Compact Piezo Motor Controller, 2 Axis, Hand-held

AG-UC8

Compact Piezo Motor Controller, 8 Axis

AG-UC8PC

8 Axis OEM Agilis Piezo Controller, USB/RS232/RS485

USB-CH1

USB Power Supply, Includes clips for US, EU, UK & Australia, 2m Cable

The USB-CH is required only with the AG-UC2 and only if power is not available from a PC.

AG-UC8 Compact 8-axes controller

SPECIAL COLLECTIONS

MOTORIZED OPTICAL MOUNTS

Model

AG-UC8PC 8-axes PC Card controller

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139

NanoPZ MOTORIZED LINEAR STAGES

PZC200 Controller • High reliable operation with 30 nm motion sensitivity over 12.5 mm travel

• No loss of position with removal of power; ideal for set-and-forget applications

RoHS

MOTORIZED VERTICAL STAGES

• 10x faster speed (> 0.2mm/s)

Compliant

The PZC200 single axis, controller/driver provides convenient one hand speed control,and easy-to-use push button channel control for up to 8 axis when used with the PZC-SB switchbox. The PSC200 is equipped with a serial RS-485 computer link for computer control of up to 256 x PZA12 actuators in parallel. RS-485 is accessed by using the RS-485 to RS-232 converter NSC-CB-485-232-1 plugged into the PC's RS-232 port. For USB connectivity, use optional the SMC-USB RS-232 to USB converter.

MOTORIZED ACTUATORS

The PZC200 controller is dedicated to the PZA12 Piezo Motor Actuator (see page 114).

MOTORIZED ROTATION STAGES

Newport’s NanoPZ family of piezo motor actuators and controllers were designed to provide cost-effective, nanometer-scale remote positioning of manual stages and optical mounts in a wide range of opto-mechanical systems.

PZC-SB Switchbox

Ordering Information

PZC200 Specifications Number of Controlled Axes

Controls, Local (manual) Mode Controls, Remote (computer) Mode

Mechanical Dimensions (H x W x D) [in. (mm)] Weight [lb (kg)]

Local (manual) control mode Remote (computer) control mode Rotate knob to adjust speed Select active switchbox channel Toggle between local and remote mode Set current position to zero ASCII commands I/O via RS-485 port

Model

Description

PZC200

Hand-held controller for PZA12

PZC200-KT

PZA12 Actuator Kit, PZC200 Cont. NSC-PS25 Power Supply, NSCPSC3 Cable

PZA12

NanoPZ Ultra-High Resolution Actuator, 12.5mm Travel

PZC-SB

Mirco-steps, 1 micro-step equals approx. 10 nm of linear motion of a PZA12 depending on load, speed and other parameters 2 x 6 x 2 (50 x 150 x 50) 0.55 (0.250)

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SPECIAL COLLECTIONS

PZC200 controller with PZA12 actuator.

MOTORIZED OPTICAL MOUNTS

Motion Commands

1 without PZC-SB switchbox 8 with PZC-SB switchbox

CONTROLLERS AND DRIVERS

Operating Modes

HEXAPODS

The PZC-SB allows control of up to 8 NanoPZ actuators from the same PZC200 controller. LEDs indicate which actuator is active, inactive, connected or disabled. The two buttons on the PZC200 controller allow the selection of the active actuator. The PZC-SB is controllable via PC using the same RS-485/RS-232 interface as the PZC200.

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MOTORIZED LINEAR STAGES

140

For Motion, Think Newport ™

Open-Loop Picomotor™ Controller/Driver Modules • Intelligent 4-axis open-loop control and 2-axis closedloop control • Compact, integrated controller and driver design

MOTORIZED VERTICAL STAGES

• Innovative Picomotor auto-detection technology • Plug-and-play USB 2.0 communication • Advanced 10/100 Ethernet connectivity (Sockets interface, TCP/IP, DHCP, UDP)

MOTORIZED ROTATION STAGES

• Embedded dynamic HTTP server

Intelligent Open-Loop PicomotorTM Controller / Driver Module – 12 Channels

• Easy to use WindowsTM application with advanced device auto-discovery

RoHS

Compliant

HEXAPODS

MOTORIZED ACTUATORS

The model 8742 is a 4-axis open-loop intelligent motion controller/driver that provides a compact and low cost solution for driving New Focus open-loop Picomotor products. It is a single-box solution that can be computer controlled via USB and Ethernet communication interfaces using Newport Motion Control Language (NMCL) command set. Both interfaces are well supported via WindowsTM DLL, sample LabVIEWTM VIs, and intuitive graphical user interface (GUI) WindowsTM application with device auto-discovery feature. Each model 8742 controller/driver can control one of four 4-pin RJ-22 single output ports for use with any single-channel Picomotor actuator at any given time. The model 8725 multi-axis adapter can be used to connect the 4-pin RJ-22 output ports on the drivers to New Focus Picomotor products with 6-pin RJ-11 connectors.

Model 8742 Open-Loop Picomotor™ Controller/Driver

CONTROLLERS AND DRIVERS

Model 8758 control functions are organized into four basic groups: (1) controller selection, (2) motor selection, (3) variable speed jog control, and (4) forward/reverse single-step & continuous jog control. When daisy-chained in a master and slave configuration, the 8758 is capable of interfacing with up to 31 Picomotor controllers/drivers. It draws its electrical power from the Picomotor controller via USB interface thus does not require a separate power supply and it is ergonomically designed to be compatible for both right or left handed users.

SPECIAL COLLECTIONS

The 8758 hand control pad facilitates local (non-computer) control of Picomotor positioners connected to the 8742 or the 8743-CL Picomotor controller/drivers. Therefore it is a perfect solution when you need to run a quick test or just want a straightforward handheld controller device.

MOTORIZED OPTICAL MOUNTS

PicomotorTM Hand Control Pad

Model 8758 PicomotorTM Hand Control Pad

For applications where it is desirable that the model 8758 Hand control pad be securely fastened to an optical table surface, there is an accessory Model 8758MTG-KIT available. This kit provides all the necessary hardware to accomplish that objective.

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For Motion, Think Newport ™

To control more picomotors, there are 8-axis 8742-8-KIT and 12-axis 8742-12-KIT kits which include the 8745-RS485-CBL.

8742

Specifications Number of Channels

Maximum Pulse Rate

Up to 2 kHz

Input Voltage (VDC)

12 (Nominal), 10.5 to 14.5

Interface

MOTORIZED ROTATION STAGES

Controller Specifications

MOTORIZED VERTICAL STAGES

The 8742-4-KIT Four-Axis Open-Loop Picomotor Controller/Driver Module Kit has everything you need to get started quickly. We've bundled our picomotor controller/driver and accessories together to provide a simple-to-use 4-axis driver kit. Just plug in the included power supply and you're ready to go. The kit includes the following components: 1x Model 8742 module and software, 1x Model 8745-PS power supply, and 1x Model 8745-USB-CBL USB cable.

MOTORIZED LINEAR STAGES

Open-Loop PicomotorTM Controller/Driver Kits

141

10/100 Ethernet, USB 2.0

Power Consumption

11 Watts @ 2 kHz Sustained Speed kW, 2 Watts Idle

Size

5.45 in x 3.61 in x 1.02 in (148.3 mm x 91.7 mm x 25.8 mm) 0°C to 65°C

Storage Temperature

-40°C to 95°C

Weight

0.6 lb (272 g)

MOTORIZED ACTUATORS

Operating Temperature

Hand Pad Specifications Interface

USB 2.0

Number of Motors

31 Drivers

Cable Length (m)

Variable Speed Jog Control

Yes

Single Step Control

Yes

On/Off Switch

HEXAPODS

8758

Specifications

Yes 4 axis for 8742, 2 axis for 8743-CL

Ordering Information Model

Description

8742

Open-Loop Picomotor Controller / Driver Module, 4 Channels Four-Axis 8742 Picomotor Controller/Driver Kit

8742-8-KIT

Eight-Axis 8742 Picomotor Controller/Driver Kit

8742-12-KIT

Twelve-Axis 8742 Picomotor Controller/Driver Kit

8758

Hand Control Pad for 874X Picomotor Controller/Drivers

8725

Multi-Axis Adapter, Picomotor, 6 pin to 3x 4 pin

MOTORIZED OPTICAL MOUNTS

8742-4-KIT

CONTROLLERS AND DRIVERS

Axis per Controller/Driver

SPECIAL COLLECTIONS

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MOTORIZED LINEAR STAGES

142

Closed-Loop Picomotor™ Controller/Driver Module

MOTORIZED VERTICAL STAGES

• Intelligent 2-axis closed-loop control • Compact, integrated controller and driver design • Innovative Picomotor auto-detection technology • Plug-and-play USB 2.0 communication

MOTORIZED ROTATION STAGES

• USB 2.0, RS-485, and advanced 10/100 Ethernet connectivity • Embedded dynamic HTTP server • Easy to use WindowsTM application with advanced device auto-discovery

RoHS

• LabVIEWTM and WindowsTM DLL support

Compliant

HEXAPODS

MOTORIZED ACTUATORS

Intelligent Closed-Loop PicomotorTM Controller / Driver Module – 2 Channels

• Newport Motion Control Language (NMCL) command set

The most recent addition to the new Picomotor controller/driver family, model 8743-CL is a 2-axis closed-loop intelligent motion controller/driver that provides fine tuning, absolute positioning, compact and low cost solution for driving New Focus closed-loop Picomotors products. It is a single-box solution that can be manually controlled with the New Focus 8758 hand control pad or computer controlled via USB, RS-485, or Ethernet communication interfaces using the Newport Motion Control Language (NMCL) command set. All three computer interfaces are well supported via WindowsTM DLL, sample LabVIEWTM VIs, and intuitive graphical user interface (GUI) WindowsTM application with device auto-discovery feature. Each model 8743-CL controller/driver has two 4-pin RJ-22 single output ports and two 25-pin D connector for the encoder signal that can be used with any single-channel closed loop Picomotor actuator at any given time.

CONTROLLERS AND DRIVERS

Specifications 8743-CL

Specifications Number of Channels

Maximum Pulse Rate

Up to 2 kHz

Input Voltage (VDC)

12 (Nominal), 10.5 to 14.5

Interface

10/100 Ethernet, USB 2.0, RS-485

MOTORIZED OPTICAL MOUNTS

Power Consumption

11 Watts @ 2 kHz Sustained Speed kW, 2 Watts Idle

Size

5.45 in x 3.61 in x 1.02 in (148.3 mm x 91.7 mm x 25.8 mm)

Operating Temperature

0°C to 65°C

Storage Temperature

-40°C to 95°C

Weight

0.6 lb (272 g)

SPECIAL COLLECTIONS

Ordering Information Model

Description

8743-CL

Closed-Loop Picomotor Controller & Driver Module, 2 Channel

8743-CL-2-KIT

Two-Axis Picomotor Controller & Driver Kit, 8743-CL

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• Kit for table mounting

MOTORIZED VERTICAL STAGES

• Convenient communication cables for interfacing with the modules

MOTORIZED LINEAR STAGES

8742 and 8743-CL Picomotor™ Controller/Driver Module Accessories

143

• Stacking kit for multiple modules

Hand Control Pad Mounting Kit

The 8745-STK-KIT includes a mounting bracket and screws for stacking multiple controller/driver modules.

The 8758-MTG-KIT provides all the necessary hardware for the model 8758 Hand control pad to be securely fastened to an optical table surface.

MOTORIZED ACTUATORS

L-Shaped Stacking Plate Kit

MOTORIZED ROTATION STAGES

These accessories allow you to customize your 8742 and 8743-CL module setup to meet your specific needs. Accessories include additional cables, power supplies, and even small kits for stacking modules, table mounting, and PC interfacing.

HEXAPODS CONTROLLERS AND DRIVERS

Optical Table Mounting Plate Kit The 8745-MTG-KIT includes a mounting plate and 1/4-20 screws for securing your controller/driver module onto your non-metric optical table. The mounting plate allows the controller/driver to be mounted either horizontally or vertically.

Ordering Information Power Supply, 8742 and 8743-CL Controller/Driver, 12V

8745-PWR-CBL

Power Cable, 6 in. Length, 8742 and 8743-CL Controller/Driver

8745-USB-CBL

USB Cable, 3 Meters Length, 8742 and 8743-CL Controller/Driver

8745-STK-KIT

L-Shaped Stacking Plate Kit, 8742 and 8743-CL Controller/Driver

8745-MTG-KIT

Optical Table Mounting Plate Kit, 8742 and 8743-CL Controller/Driver

8758-MTG-KIT

Optical Table Mounting Plate Kit, 8758 Hand Control Pad

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SPECIAL COLLECTIONS

Description

8745-PS

MOTORIZED OPTICAL MOUNTS

Model

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MOTORIZED LINEAR STAGES

NPC3/NPC3SG

3-channel Piezo Amplifier • Compact, 3-channel piezoelectric amplifier

MOTORIZED VERTICAL STAGES

• Manual, analog and computer control • RS232 and USB interface • Low-noise voltage output (0.3 mV rms@500 Hz) • QVGA color display

MOTORIZED ROTATION STAGES

RoHS

Compliant

The NPC3 and NPC3SG are 3-channel piezoelectric amplifiers for precision control of all Newport NanoPositioning products and other low voltage PZTs. Optimized for usability and versatility, these low-noise piezoelectric amplifiers can supply a permanent current of 40 mA per channel in a voltage range of -20 VDC to 130 VDC.

MOTORIZED ACTUATORS

The piezoelectric amplifiers are available in two versions: • The model NPC3SG is designed for NanoPositioning products with strain gauge position feedback (model numbers ending in SG). It supports open-loop (voltage) control and closed loop (position) control. In both cases, the monitor output provides a voltage signal proportional to the actual position (0-10V). Since the open-loop response of a piezoelectric element is faster than the closed-loop response, it can be advantageous for certain applications to use open-loop voltage control while monitoring the position via the monitor output.

HEXAPODS

• The model NPC3 can operate in open-loop only and doesn’t read feedback from strain gauges. Use this model for all NanoPositioning products not ending with SG.

Specifications

NPC3 NPC3SG

Number of channels

Output voltage

-20V to 130V DC

Output voltage noise

0.3 mV RMS @ 500 Hz

CONTROLLERS AND DRIVERS

DC Voltage offset

Via 30-step encoder knob

Continuous output current

3 x 40 mA

Input impedance

10 kW Strain gauge, pre-amplified, -5V to +5V

Position feedback1 Typical non-linearity closed-loop1

0.1%

Analog input

0V to 10V

Monitor output

0V to 10V

Inside resistance monitor output

< 100W

MOTORIZED OPTICAL MOUNTS

Display

QVGA color screen

Computer interface

RS232, USB

Digital interface resolution

16 Bit

Dimensions (W x D x H)

210 mm x 240 mm x 88 mm

Weight

2.1 kg

Main supply voltage

SPECIAL COLLECTIONS

24 VDC/2.5A (wide range power supply 90-264 VAC included

Applies to model NPC3SG only.

Ordering Information Model

Description

NPC3

3-channel piezo stack amplifier, open-loop control

NPC3SG

3-channel piezo amplifier, strain-gauge position control

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For Motion, Think Newport ™

Newport offers a large selection of Motorized Optical Mounts to fulfill virtually any research or laboratory need. With the addition of New Focus, we have added the complete line of world class Picomotor driven optical mounts. Motorized optical mounts are great for automating sensitive lab or production optical systems, as well as making adjustments in tight spaces where manual adjustment is not possible.

For OEM or special applications, contact our sales and application engineers.

0.7 mrad

Picomotor™ Series Motorized Optical Mounts see page 147

0.5 (12.7) to 2.0 (50.8)

±4

0.7 mrad

Large Aperture Picomotor Optical Mounts see page 149

2.0 (50.8) to 4.0 (101.6)

±5°

0.7 mrad

Stability™ Series Piezomotor Optical Mounts see page 150

1.0 (25.4)

±4

0.7 mrad

Pint-Sized Series Picomotor Optical Mounts see page 151

0.5 (12.7) to 1.0 (25.4)

±4

1.5 mrad

Motorized Flipper Mounts see page 152

1.0 (25.4) to 2.0 (50.8)

±2

87 to 183 mrad (resolution/5° turn)

Agilis™ Series Piezo Motor Driven Optical Mounts see page 153

0.5 (12.7) to 1.0 (25.4)

±2

1 to 2 mrad

PSM2 Ultrafast Piezo Steering Mirror see page 155

Up to 1.0 (25.4)

±0.115

X, Y 0.004 mrad Z 0.03 nm

NPO Series Objective NanoFocusing Stages see page 156

Standard Objective Thread

100 to 250 mm (linear)

0.3 to 0.5 nm (open loop)

GuideStar II Laser Beam Steering Correction System see page 157

1.0 (25.4)

±3

<1 mrad

FSM Series Fast Steering Mirrors see page 158

1.0 (25.4)

±1.5

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SPECIAL COLLECTIONS

±3

MOTORIZED OPTICAL MOUNTS

1.0 (25.4)

CONTROLLERS AND DRIVERS

Picomotor™ Mount with Controller Kits see page 146

HEXAPODS

Resolution

MOTORIZED ACTUATORS

Angular Range (°)

MOTORIZED ROTATION STAGES

Optic Diameter [in. (mm)]

Series

MOTORIZED VERTICAL STAGES

Many of our standard mirror and optical mounts can be converted to motorized by adding our linear actuators. For a list of the options, see the motorized actuator and manual positioner compatibility guide on page 103.

MOTORIZED LINEAR STAGES

Motorized Optical Mount Selection Guide

145

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Picomotor™ Mount with Controller Kits

MOTORIZED LINEAR STAGES

146

Kits Includes: • 1x Model 8742 Module and Software

MOTORIZED VERTICAL STAGES

• 1x Model 8745-PS Power Supply • 1x Model 8745-USB-CBL USB Cable • 2x Model 8821 Mounts (Left handed versions available)

RoHS

MOTORIZED ROTATION STAGES

Compliant

The New Focus Picomotor™ Mount with Controller Kits utilize Model 8821 motorized optical mounts to combine the precision of standard mounts with the resolution of a Picomotor actuator to provide the ultimate in precision motorized optical alignment. The 8821 offers true set and forget stability, remote adjustment down to sub-urad, all in a very compact size that fits very well into tight spaces, including laser cavities.

MOTORIZED ACTUATORS

For a complete and affordable solution to motorized tip and tilt alignment, use the Model 8742-4-8821-XX kits.

CONTROLLERS AND DRIVERS

HEXAPODS

Model

Optic Diameter [in. (mm)]

Motorized Axes

Type

8742-4-8821-LL

1.0 (25.4)

Clear Edge Center Mount

8742-4-8821-RL

1.0 (25.4)

Clear Edge Center Mount

8742-4-8821-RR

1.0 (25.4)

Clear Edge Center Mount

Specifications 8821 Optic Diameter [in. (mm)]

1.0 (25.4)

Motorized Axes

Connector Type

4-Pin

MOTORIZED OPTICAL MOUNTS

Type

Clear Edge Center Mount

Angular Range (°)

±3

Resolution- Angular (mrad)

0.7

Cable Length [ft. (m)]

7 (2.1)

Thread Type

8-32 (M4) Thru

SPECIAL COLLECTIONS

Ordering Information Model

Description

8742-4-8821-LL

Picomotor Controller/Driver Kit, Inc. (2) 8821-L Picomotor Mounts

8742-4-8821-RL

Picomotor Controller/Driver Kit, Inc. 8821 & 8821-L Picomotor Mounts

8742-4-8821-RR

Picomotor Controller/Driver Kit, Inc. (2) 8821 Picomotor Mounts

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Picomotor™ Series MOTORIZED LINEAR STAGES

Motorized Optical Mounts

MOTORIZED VERTICAL STAGES

• Compact • 0.7-mrad resolution • Ideal for polarizers and wave plates

RoHS

MOTORIZED ROTATION STAGES

Compliant

Left to right: Models 8809, 8853 and 8807

The New Focus Model 88xx motorized optical mounts combine the precision of New Focus standard mounts with the resolution of New Focus Picomotor™ actuator to provide the ultimate in precision motorized optical alignment. The compact Picomotor actuator housing adds only 0.75" (19.1 mm) to the overall thickness of these mounts. The angular resolution of these mounts is 0.7 mrad.

Specifications 8806 Optic Diameter [in. (mm)]

8808

8807

8809

8812

8821

8852

8853

8854

2.0 (50.8)

1.0-2.0 (25.4-50.8)

0.5 (12.7)

1.0 (25.4)

2.0 (50.8)

Connector Type

4-Pin

6-Pin

4-Pin

6-Pin

4-Pin

6-Pin

Blank Plate Mount

Corner Mount

Center Mount

Corner Mount

Gimbal Mount

Clear Edge Center Mount

Corner Mount

Gimbal Mount

Opti-Claw Mount

±4

±3

±4

Type Angular Range (°) Resolution- Angular (mrad)

0.7

Cable Length [ft. (m)]

7 (2.1)

Thread Type

8-32 (M4) Thru

Description

8806

Picomotor Motorized Blank Plate

8807

Picomotor Center Mount, 1.0 in. Diameter

8808

Picomotor Corner Mount, 0.5 in. Diameter

8809

Picomotor Corner Mount, 1.0 in. Diameter Picomotor Gimbal Mount, 1.0 in. Diameter Clear Edge Picomotor Mount, 1.0 in. Diameter

8821-L

Left-handed Clear Edge Picomotor Mount, 1.0 in. Diameter

8852

Picomotor Corner Mount, 2.0 in. Diameter

8853

Picomotor Gimbal Mount, 2.0 in. Diameter

8854

Picomotor Opti-Claw Mount, 0.1 to 2.0 in. Diameter

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SPECIAL COLLECTIONS

8812 8821

MOTORIZED OPTICAL MOUNTS

Ordering Information Model

CONTROLLERS AND DRIVERS

Motorized Axes

HEXAPODS

The popular self-centering Opti-Claw mounts are even more versatile with Picomotor™ actuator adjustment capability. The Opti-Claw mount can hold any component with a diameter of 0.10" (2.54 mm) to 2.0" (50.8 mm), to a concentricity of <0.005" (0.127 mm). The tilting capability on this mount is motorized, while the claw used to grip the optic is not. The built-in setscrew locks the jaws as solidly as a fixed-diameter mount.

MOTORIZED ACTUATORS

For an affordable solution to motorized tip and tilt alignment, use the Model 8807 motorized version of this popular 1" center mount. Unlike other New Focus motorized mounts, this mount has Picomotor actuators on just two of its three adjustment axes.

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MOTORIZED LINEAR STAGES

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Model 8807

Model 8853

U.S. Patent #5,410,206

nylon-tipped setscrew for holding 1" or 25-mm optics

MOTORIZED ROTATION STAGES

MOTORIZED VERTICAL STAGES

4-pin connector

1.0 (25 0" .5)

2x 8-32 (M4) through holes 1.00" (25.0) offset from optic center

3.1 (80 6" .3)

retaining ring holds 2"or 50-mm-diameter optics

2.1 1.0 (54 3" 0 .0) " (25 .4)

2.0 (50 0" .8) 2x 8-32 (M4) through holes 1.00" (25.0) offset from optic center

2.1 (54 3" .0)

2.0 (50 0" .8)

3.1 (80 6" .3)

4" 2.1 ) .4 4 5 (

4-pin connector

5" 2.5 ) .8 4 6 (

HEXAPODS

MOTORIZED ACTUATORS

6-pin connector

Model 8809

Model 8854

U.S. Patents #5,140,470 & #5,410,206

U.S. Patents #5,410,206, #5,140,470, & #5,168,168

2.6 (66 2" .5)

nylon-tipped setscrew for holding 1" or 25-mm optics

3.4

4" (87 max .4)

2.0 (50 0" .8)

MOTORIZED OPTICAL MOUNTS

CONTROLLERS AND DRIVERS

2.0 (50 0" .8)

locking screw 2.6 (66 2" .5)

2x 8-32 (M4) through holes 1.00" (25.0) offset from optic center

0" 3.2 ) .9 5 (5

6-pin connector

SPECIAL COLLECTIONS

6-pin connector

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3.3 6 ma " x 2.0 (85.3 ) (50 0" .8)

0" 2.7 ) .6 8 6 (

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MOTORIZED LINEAR STAGES

Picomotor™ Large Aperture Optical Mounts

149

• Kinematic Mechanism • Θx, Θy Adjustments MOTORIZED VERTICAL STAGES

• Angular Resolution <0.7 mrad • Set-and-Forget Long-Term Stabilty • Clear Edge or Center Mount

RoHS

Compliant

This new series is available in aperture versions 2.0, 3.0, or 4.0 in (50.8, 76.2, 101.6 mm) diameter optics. With the thick front and rear plates, carbide seats, and optimized stiff springs, the 882X provides for smooth, reliable motorized adjustment while maintaining a high level of thermal and mechanical stability. The Picomotor offers the additional advantage of sub mrad resolution or just utilizing the integrated knobs for quick, manual adjustment.

MOTORIZED ACTUATORS

The 8822 and 8823 versions, with the clear quadrant design, for mounting 2.0 and 3.0 in mirrors provide greater beam access. The 8822-AC, 8823-AC, and 8824-AC versions, with its low-distortional axial clamping technique, minimizes mountinduced wavefront distortions.

MOTORIZED ROTATION STAGES

The New Focus 882X series provides the precision and stability of Picomotor™ actuators with the industry leading and proven Ultima Precision Optical Mounts.

Specifications Type

8822

8822-L

8822-AC

8823

8823-AC

8824-AC

2.0 (50.8)

3.0 (76.2)

4.0 (101.6)

Clear Edge

Center Mount

Clear Edge

Center Mount

±5

±3.5

Angular Range (°) Cable Length [ft. (m)]

7 (2.1)

Resolution- Angular (mrad)

HEXAPODS

Optic Diameter [in. (mm)]

0.7

Mounting

Post

Thread Type

8-32 (M4) CLR 2 (Θx, Θy)

Connector Type

4-Pin

CONTROLLERS AND DRIVERS

Motorized Axes

Ordering Information Model

Description Picomotor Clear Edge Mirror Mount, 2.0 in. Diameter

8822-L

Picomotor Clear Edge Mirror Mount, 2.0 in. Diameter, Left-Handed

8822-AC

Picomotor Center Mirror Mount, 2.0 in. Diameter

8823

Picomotor Clear Edge Mirror Mount, 3.0 in. Diameter

8823-AC

Picomotor Center Mirror Mount, 3.0 in. Diameter

8824-AC

Picomotor Center Mirror Mount, 4.0 in. Diameter

MOTORIZED OPTICAL MOUNTS

8822

SPECIAL COLLECTIONS

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For Motion, Think Newport ™

MOTORIZED LINEAR STAGES

Stability™ Series

Picomotor™ Optical Mounts

CONTROLLERS AND DRIVERS

HEXAPODS

MOTORIZED ACTUATORS

MOTORIZED ROTATION STAGES

MOTORIZED VERTICAL STAGES

• Ultrastable • Unique optic-retention system for minimizing distortion of the optic • Model 8817-V ultraclean Stability mount is vacuum compatible to 10–6 Torr

RoHS

Model 8816-6 U.S. Patent #5,410,206

Compliant

The Model 8816-X combines the stability of New Focus Stability™ mounts with the precision and stiffness of New Focus Picomotor™ actuators to provide the ultimate in precision motorized optical alignment. The compact Picomotor actuator housing adds only 0.75" (19.1 mm) to the overall thickness of these mounts. With two standard Picomotor actuators to provide tip and tilt adjustment, a complete remote control is provided. The unique optic-retention system minimizes wavefront distortion of the mounted optic as well as maximizes overall mechanical stability. Mirror installation and removal is simple and fast, requiring no adhesives. The Model 8817-X is the vacuum-compatible version of the Model 8816-X. It offers ultraclean materials and components along with vacuum-compatible Picomotor™ actuators. Two “-V” vacuum-compatible Picomotor actuators provide full remote-control tip and tilt adjustment. As all New Focus vacuum-compatible products, the Model 8817-V is characterized using standard Gas Chromatography-Mass Spectrometry analysis (GCMS). It has been measured to outgas less than 0.1 ppm of volatile mass at 85 °C over three hours. Mass spectrograms detailing the exact outgassing compounds are available on request. 0.07" (1.7)

Specifications 8816-6

8816-8

8817-6-V

8817-8-V

Optic Diameter [ in. (mm)]

1 (25.4)

Max Optic Thickness (mm)

Motorized Axes

Angular Range (°)

±4

Angular Resolution

0.7

Vacuum Compatibility (Torr)

10-6

Cable Length [ft. (m)] Connector Type

7 (2.1)

4-pin RJ-22

plunger holds 1.00" (25.4) optics radially. 3x 1/16" (M1.5) Hex

0.07" (1.7)

spring plate holds optic axially

Model

Description

8816-6

Motorized Stability™ Mount, 1.0 in. Diameter, 6 mm Thick

8816-8

Motorized Stability™ Mount, 1.0 in. Diameter, 8 mm Thick

8817-6-V

Vacuum Motorized Stability™ Mount, 1.0 in. Diameter, 6 mm Thick

8817-8-V

Vacuum Motorized Stability™ Mount, 1.0 in. Diameter, 8 mm Thick

plunger holds 1.00" (25.4) optics radially.

SPECIAL COLLECTIONS

MOTORIZED OPTICAL MOUNTS

Model 8817-V U.S. Patent #5,410,206

Ordering Information

3x 1/16" (M1.5) Hex

spring plate holds optic axially Model 8816

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151

Pint Sized Series MOTORIZED LINEAR STAGES

Picomotor™ Optical Mounts

MOTORIZED VERTICAL STAGES

• Motorized for hands-off alignment

RoHS

Compliant

Model 8885

• Angular resolution of 1.5 mrad • Compact and compatible

The ultra-high vacuum version of the 8885 with two UHV rated Picomotor actuators, the 8885-UHV, is designed for use in ultrahigh vacuum applications down to base pressures of 10-9 Torr which eliminates virtual leaks and utilizes materials with very low outgassing properties. The outgassing rate of this product is less than 5 ppm of volatile mass at 85°C over three hours. Kapton leads make this design more suitable in environments including vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) applications. This pint-sized mount is fully compatible with standard posts, pedestals, and mounts.

MOTORIZED ACTUATORS

Specifications 8886

8887

0.5 (12.7)

1.0 (25.4)

Resolution- Angular (mrad)

1.5

Angular Range (°)

±4

4-Pin

7 (2.1)

Motorized Axes

Connector Type Cable Length [ft. (m)]

7 (2.1)

Type

Pint Sized Center Mount

Thread Type

#8 or M4 Counterbore

Model 8885-UHV

HEXAPODS

8885 0.5 (12.7)

Optic Diameter [in. (mm)]

Pint Sized Corner Mount Pint Sized Corner Mount #8 or M4 Counterbore

MOTORIZED ROTATION STAGES

By adding New Focus Tiny Picomotor actuators to the popular Pint-sized mirror mounts, this results in an extremely small package, adding only 0.5" to the package, but with 1.5-urad resolution. These motorized mounts eliminate problems usually associated with small systems where there is little room to make adjustments and requires highly sensitive adjustments by hand. These Pint-sized mounts are fully compatible with the posts, pedestals, and mounts already owned.

#8 or M4 Counterbore

Ordering Information Description

CONTROLLERS AND DRIVERS

Model 8885

Picomotor Pint-Sized Center Mount, 0.5 in. Diameter

8886

Picomotor Pint-Sized Corner Mount, 0.5 in. Diameter

8887

Picomotor Pint-Sized Corner Mount, 1.0 in. Diameter

8885-UHV

Ultra High Vacuum Picomotor Pint-Sized Center Mount, 0.5 in. Diameter

Model 8887

Model 8886 U.S. Patents #5,140,470 & #5,410,206

2x 0.10" (2.5) ref min cable bend

0.50" (12.7)

accept 0.50" (12.7) optic

2x 0.10"

accept 0.50"

1.625" (41.28)

(12.7) optic

1.562" (39.67) 0.07" (1.8)

(2.5) ref min

1.60"

cable bend

1.625" (41.28)

1.31" (40.6)

1.16" (29.5)

1.00"

(33.4)

1.00" (25.4)

(25.4)

motorized

0.50" (12.7) 1.22" (30.9)

axes hex size 1/16" (1.59)

1.00" (25.4)

1.00" (25.4) 1.31" (33.4)

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2x 0.10" (2.5) ref min cable bend

motorized axes hex size 1/16" (1.59)

SPECIAL COLLECTIONS

motorized axes hex size 1/16" (1.59)

accepts 0.50" (12.7) optic

MOTORIZED OPTICAL MOUNTS

Model 8885 U.S. Patents #5,140,470 & #5,410,206

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MOTORIZED LINEAR STAGES

152

MOTORIZED VERTICAL STAGES

Motorized Flipper Optical Mounts

• Flip-to-flip repeatability to better than 25 mrad • Patented design • Fast and stable

RoHS

MOTORIZED ROTATION STAGES

Compliant

MOTORIZED ACTUATORS

Remotely flip an optic in and out of the beam path with a transit time of less than half a second. Originally designed for demanding commercial applications, Model 8892-K motorized Flipper mount offers excellent stability and repeatability. Optic tilt is adjusted with precision 80-pitch screws, and locking nuts preserve settings during flips. The Flipper mount’s included handpad allows simple thumb control from a distance or more remotely via its TTL interface.

Specifications Optic Diameter [in. (mm)] Angular Range (°)

HEXAPODS

Connector Type Type Thread Type

8892-K

8892-K-M

8893-K

8893-K-M

1.0 (25.4)

2.0 (50.8)

±2

4 Pin

Flipper Mount

8-32

CONTROLLERS AND DRIVERS

Ordering Information Model

Description

8892-K (8892-K-M)

Motorized Flipper Mount, 1.0 in. Diameter, Allen-Key Adjustment, 8-32

8892-K-M

Motorized Flipper Mount, 1.0 in. Diameter, Allen-Key Adjustment, M4

8893-K (8893-K-M)

Motorized Flipper Mount, 2.0 in. Diameter, Allen-Key Adjustment, 8-32

8893-K-M

Motorized Flipper Mount, 2.0 in. Diameter, Allen-Key Adjustment, M4

SPECIAL COLLECTIONS

MOTORIZED OPTICAL MOUNTS

Model 8892-K

Model 8893-K

6-80 adjustment screws and lock nuts

2x 8-32 (M4) counterbored through holes

accept 2.00" (50.8) optics 4.94" (125.4)

clear aperture 0.90" (48.3)

2.3 7 (60 " .1)

3.75" (95.3)

cable to handpad

3" 2.9 ) .4 4 7 ( 1.4 (37 8" .6)

2.13" (54.0) 2.88" (73.3)

3x 8-32 (M4) tapped holes

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0.50" (12.7)

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153

Agilis™ Series MOTORIZED LINEAR STAGES

Piezo Motor Driven Optical Mounts • Outstanding adjustment sensitivity • Convenient remote operation • Ultra-compact

• CONEX-Agilis with integrated strain gauge and controller • Manual control and programmable USB interface

MOTORIZED VERTICAL STAGES

• Set-and-forget long-term stability

• Vacuum Compatible Versions

Agilis optical mounts feature Newport’s proven, proprietary, non-resonant piezo motors. These highly integrated motors are directly coupled to the moving optics holder for robust and predictable performance. When idle, the motor spring force locks the mirror in place, providing true set and forget stability. Agilis mounts also have a fast adjustment speed and are free of issues associated with backlash or hysteresis. In contrast to ultrasonic motors, the Agilis non-resonant motors makes small adjustments more predictable. With 50 nm minimum incremental motion capability on each motor, Agilis mounts are ideal for sensitive alignment and optical adjustments.

HEXAPODS

Specifications for Agilis Mirror Mounts AG-M050N

AG-M100N

AG-M050L

AG-M100L

0.5 (12.7)

1.0 (25.4)

0.5 (12.7)

1.0 (25.4)

Angular Range (°)

±2

Limit Switches

Optic Diameter [ in (mm) ]

Proprietary electrical switches

0.0001

0.00006

0.0001

0.00006

Absolute Position Accuracy(°)

0.05(1)

Maximum Speed (°/s)

0.75

0.5

0.75

0.5

Temperature Stability (°/°C)

0.0004

0.0002

0.0004

0.0002

Weight (kg)

0.025

0.085

0.025

0.085

Cable (1)

CONTROLLERS AND DRIVERS

Adjustment Sensitivity (°)

MOTORIZED ACTUATORS

CONEX-Agilis mirror mounts have been designed with an integrated strain gauge to provide absolute positioning performance. Delivered with a compact, preconfigured CONEX controller, the CONEX-AG-M100D delivers repeatable positioning and is ideal for applications that require a return to a saved position. The CONEX-AG-M100D can also be power cycled without a loss to posiiton feedback. This means that the position of the mount can be used as a diagnostic tool for alignment, while never requiring a reset of position. The integrated controller, also provides a full command set and only requires USB for power. CONEX-Agilis motorized mirror mounts are ideal for systems integration and remote adjustment of optics.

MOTORIZED ROTATION STAGES

RoHS

Compliant

1.2 m length, 4-wire mini-DIN connector

Maximum position deviation between before an MA command (measure absolute current position) and after a PA command (move to absolute position).

CONEX-AG-M100D Optic Diameter [in. (mm)]

1.0 (25.4)

Dual Axis Travel Range (°)

±0.75 0.001

Open Loop MIM (°)

0.0001

Repeatability (°) Maximum Speed (°/s) Temperature Stability (°/°C)

0.01 0.4 0.0003

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SPECIAL COLLECTIONS

Closed Loop MIM (°)

MOTORIZED OPTICAL MOUNTS

Specifications for CONEX-Agilis Mirror Mounts

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Ordering Information Model

Description

AG-M050N

Compact Piezo Driven Optical Mount, 0.5 inch Optic

AG-M050NV6

Compact Piezo Driven Optical Mount, 0.5 in., Vacuum Compatible

AG-M100N

Compact Piezo Driven Optical Mount, 1 inch Optic

AG-M100NV6

Compact Piezo Driven Optical Mount, 1 in., Vacuum Compatible

AG-M050L

Compact Piezo Motor Driven Optical Mount, 0.5 in., Limit Switches

AG-M050LV6

Piezo Driven Mount, 0.5 in., Limit Switches, Vacuum Compatible

AG-M100L

Compact Piezo Driven Optical Mount, 1 inch Optic, Limit Switches

AG-M100LV6

Piezo Driven Mount, 1 in., Limit Switches, Vacuum Compatible

CONEX-AG-M100D

Piezo Motor Mirror Mount, Absolute Positioning, Integrated Controller

Dimensions Model AG-M050L

Model AG-M050N OPTIC MOUNTING NYLON TIP SET SCREW 5/64 OR 2MM HEX

OPTIC MOUNTING NYLON TIP SET SCREW 5/64 OR 2MM HEX

ø.50” OPTICS

MOTORIZED ACTUATORS

MOTORIZED ROTATION STAGES

MOTORIZED VERTICAL STAGES

MOTORIZED LINEAR STAGES

154

1.27 (32.2) AG-M050N

1.27 (32.2)

.50 (12.7)

1.27 (32.2)

.50 (12.7)

HEXAPODS

1.27 (32.2)

CONTROLLERS AND DRIVERS

Model AG-M100N

Model AG-M100L OPTIC MOUNTING NYLON TIP SET SCREW 5/64 OR 2MM HEX

OPTIC MOUNTING NYLON TIP SET SCREW 5/64 OR 2MM HEX

ø1” OPTICS

2.14 (54.3)

MOTORIZED OPTICAL MOUNTS

2.14 (54.3)

AG-M100N 1.00 (25.4)

2.14 (54.3)

SPECIAL COLLECTIONS

2.14 (54.3)

1.00 (25.4)

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1.00 (25.4)

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155

PSM2 MOTORIZED LINEAR STAGES

Ultra-fast Piezo Steering Mirror

• Piezoelectric travel range of 2 mrad or16 mm • Direct piezo design provide high-bandwidth control

MOTORIZED VERTICAL STAGES

• Ultra-fast, two-axis rotation and linear z-motion for up to 50 mm diameter optics

• Ultra-compact

RoHS

Compliant

MOTORIZED ACTUATORS

Fast and reliable motion is supplied by three multi-layer, low-voltage piezo stacks (PZT) in a triangle configuration. The length of each piezo stack can be controlled individually. Applying a voltage to one stack, results in a rotation. Changing the length of all three stacks simultaneously, results in a linear z-displacement.

MOTORIZED ROTATION STAGES

The PSM2 is a high-speed, tip, tilt, and z motion piezoelectric stage for mirrors, gratings and other optics with submicroradian resolution. Equipped with a direct piezoelectric actuation system, minus the lever arm transmission, the PSM2 is ideally suited for high bandwidth laser beam steering, switching and stabilization, beam scanning, image stabilization, and laser cavity tuning.

The PSM2 models are internally preloaded and can be mounted in any orientation. The PSM2 supports mirrors up to 50 mm diameter and can be glued directly to the top plate.

Specifications

PSM2SG Closed Loop

Active Axes

Θx, Θy, Z

Angular Range, x, y (± 10%) (mrad)

2 (1, 4)

1.6 (1, 2, 4)

Travel Range, Z (± 10%) (mm)

16 (1, 4)

12(1, 2, 4)

Resolution, x, y (mrad)

0.004(3)

0.04(2)

Resolution, Z (nm)

0.03(3)

3(2)

Typ. Repeatability, x, y (mrad)

1.3(2)

Typ. Repeatability, Z (nm)

12 (2)

Capacitance (± 20%) (mF)

1.8

Resonant frequency, unloaded (Hz)

5400

Stiffness in Z (N/mm)

Max load (N)

Weight (kg)

0.085

Ordering Information Model

Description

PSM2

Piezo Steering Mirror, 2 mrad x 2 mrad x 16 mm, open-loop

PSM2SG

Piezo Steering Mirror, 2 mrad x 2 mrad x 16 mm, with strain gauge sensors

Order the -D version with an XPS controller.

Description

NPC3

3-channel piezo stack amplifier, open-loop control

Typical value measured with NPC3 and NPC3SG, (-20 V to +130 VDC range). Applies to PSM2SG in closed-loop control only. 3 Equal to rms noise value measured with NPC3 and NPC3SG controller. 4 Linear travel and angular travel are interdependent. The values provided here are for pure linear or pure angular motion. 2

NPC3SG

3-channel piezo amplifier, strain-gauge position control

Dimensions TILTING PLATE

SQR .79 (20)

1.30 (33) Z*

PSM2(SG): 3 CABLES AND 3 SUB-D15 CONNECTORS PSM2(SG)-D: 3 CABLES AND 3 SUB-D25 CONNECTORS CABLE LENGTH PSM2(-D): 3.3 FT (1 M) PSM2SG(-D): 3.9 FT (1.2 M)

– BOTTOM PLATE – 2 HOLES M3 THD C’BORED ø.16 (4)

4 HOLES ø.08 (2) USABLE DEPTH: .20 (5)

SQR .98 (25)

.20 (5) 2 HOLES M2 THD USABLE DEPTH: .08 (2)

DIMENSIONS IN INCHES (AND MILLIMETERS)

* NOTE: ROTATION AXES

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SPECIAL COLLECTIONS

4 HOLES M3 THD USABLE DEPTH: .16 (4)

MOTORIZED OPTICAL MOUNTS

Model

CONTROLLERS AND DRIVERS

Controller Ordering Information

– TOP PLATE –

HEXAPODS

PSM2 Open Loop

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156

MOTORIZED LINEAR STAGES

NPO Series

Objective NanoFocusing Stages • Sub-nanometer piezoelectric positioning resolution

MOTORIZED VERTICAL STAGES

• Piezoelectric travel range of 140 or 250 mm • High resonant frequency for dynamic applications • Precision parallelogram design minimizes beam offsets

RoHS

MOTORIZED ACTUATORS

MOTORIZED ROTATION STAGES

Compliant

The NPO Series NanoFocusing Objectives are high-speed, piezoelectric-driven devices providing fast focusing and scanning over long travel ranges of up to 250 mm and are compatible with most microscopes and objective lenses. Typical applications include surface profilometry, high-resolution imaging, auto-focusing, scanning interferometry, and confocal microscopy. NPO stages feature highly reliable, multi-layer, low-voltage, piezoelectric transducer (PZT) stacks. NPO NanoFocusing stages are available as open-loop (no position feedback) or closed-loop versions with integrated position feedback. The closed-loop systems (model numbers ending in SG) feature high resolution strain-gauge position sensors for highly accurate and repeatable motion. The -D version is compatible with the XPS controller and must be ordered with the XPS-DRVP1. The NPO NanoFocusing objective mount between the turret and the microscope objective and add only 11.5 mm to the optical path length. All models can be used for standard and inverted microscopes.

Dimensions

HEXAPODS

Specifications NPO100 NPO100SG

NPO140 (-D) NPO140SG (-D)

NPO250 (-D) NPO250SG (-D)

Open loop travel per axis (± 10%), (mm) (1)

100

140

250

Closed loop travel per axis (mm) (1, 2)

100

200

Open loop resolution (nm) (3)

0.2

0.3

0.5

Typ. Repeatability (nm) (2)

Capacitance (± 20%) (mF)

7.2

3.4

10.2

Resonant frequency, unloaded (Hz)

SPECIAL COLLECTIONS

MOTORIZED OPTICAL MOUNTS

CONTROLLERS AND DRIVERS

Closed loop resolution (nm)

(2)

890

370

310

With 80 g load (Hz)

390

300

270

With 105 g load (Hz)

330

270

250

With 300 g load (Hz)

240

210

155

Axial stiffness (N/mm)

1.4

0.4

Max lens weight (g)

300

500

Typ. Tilt, full travel (mrad)

<10

Weight (g)

105

150

255

.800”-36 THD ADAPTER .16 (4) .45 (11.5) NPOxxx: .93 (23.5) NPOxxxSG: 1.39 (35.3)

.22 (5.5) MOTION MAX. OBJECTIVE DIAMETER: 1.57 (40) 1.59 (40.5) ø.59 (15) R.79 (20)

Typical value measured with NPC3 and NPC3SG, (-20 V to +130 VDC range). Applies to devices ending with SG in closed-loop control only. 3) Equal to rms noise value measured with NPC3 and NPC3SG controller.

1.97 (50)

Ordering Information Model

Description

NPO100

Nanofocusing Open-loop Objective Stage, 100 mm

NPO100SG

Nanofocusing Objective Stage, 100 mm, Strain-gauge

NPO140

Nanofocusing Open-loop Objective Stage, 140 mm

.800”-36 THD

NPO140SG

Nanofocusing Objective Stage, 140 mm, Strain-gauge

NPO250

Nanofocusing Open-loop Objective Stage, 250 mm

NPO250V6

Vacuum Nanofocusing Open-loop Objective Stage, 250 mm

NPO250SG

Nanofocusing Objective Stage, 250 mm, Strain-gauge

NPO250SGV6

Vacuum Nanofocusing Objective Stage, 250 mm, Strain-gauge

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CABLE AND SUB-D15 CONNECTOR CABLE LENGTH NPOxxx: 3.3 FT (1 M) NPOxxxSG: 3.9 FT (1.2 M) DIMENSIONS IN INCHES (AND MILLIMETERS)

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• Picomotor™ Mirror Mount Actuators provide High Precision control with outstanding Intrinsic Stability

• Model 8784 GuideStar™ II Camera Sensors provide complete position pointing and profile tracking

MOTORIZED VERTICAL STAGES

• Model 8783 GuideStar™ II Controller provides user friendly and fliexible intelligent position sensing that never mis-steers

MOTORIZED LINEAR STAGES

GuideStar II Laser Beam Steering Correction System

157

RoHS

MOTORIZED ACTUATORS

The GuideStar™ II provides high-reliability high-precision compensation of laser pointing and position drift. Two independent New Focus™ Picomotor™ actuated motorized mirror mounts provide both manual and active 4-axis control with excellent passive stability. Two miniature position-sensing cameras provide continuous tracking of both laser beam positions and laser beam profiles. The position data is fed back to the mirror motion using our patented control algorithm (US Patent # 7,528,364 Optical Beam Steering and Sampling Apparatus and Method, 2009), the only technique that completely corrects the laser beam alignment in both x and y in near and farfield. The system is anchored by the small GuideStar™ II Controller and controlled through a computer with a host of user-friendly and convenient features. Full beam profiles and position and shape date are available in real time or can be tracked, stored and analyzed. An easy Setup Menu guides new users through the install and simple settings menus allow complete control of a wide range of camera and beam stabilization parameters, including >100:1 dynamic camera exposure time adjustment to optimize profile levels and complete control of beam position target sizes and signal time averaging.

MOTORIZED ROTATION STAGES

Compliant

Designed for accuracy, reliability, and ease-of-use, the GuideStar™ II System is the answer to laser beam drift correction for the most demanding laser applications.

GuideStar II System Components

GuideStar II System Specifications*

HEXAPODS

Specifications GuideStar II Controller Model 8783

Laser 355 nm - 1200 nm

Laser Repetition Rate

>500 Hz** to CW

Laser Beam Size

<10 mm diameter

Detected Power Required Position

<1 mW

Beam Pointing Adjustment Range

+/-3 degrees, +/-50 mrad

Gains

Adjustable Target Sizes, Positions and Loop Gains

Minimum Pointing Step Size

<1 mrad

Pointing Stabilization

<10 mrad

Time <10 seconds

Time Averaging

Adjustable Time Averaging

Refresh rate for beam profile and display

>3 Hz

Executable GUI installer provided for user computer

Camera Connections

USB connections to Cameras and Computer

Mount Connections

RJ-22 connections to Picomotor Mirror Mounts

WxHxD

140 x 80 x 200 mm

Power 12 VDC via 100-220 VAC power adapter provided GuideStar II Camera Sensor Model 8784 Camera

1 Megapixel CMOS

Interface

USB 2.0

Image Size

>10 mm diameter

Beam Position Resolution

<1 mm

Computer Controlled Exposure Range

20 dB

Manually Controlled 50 dB Exposure Range WxHxD 50 x 50 x 75 mm Picomotor Mirror Mounts Model 8807*

*Specifications are subject to change. **Trigger option available for <500 Hz.

Ordering Information

*Alternate Model #s User Computer

8816, 8852, 8885, 8886, 8887

Description

Full HD Display

1920 x 1080

8783

8783 GuideStar™ II Controller

Operating System

64 and 32 Bit Windows 7

8784

8784 GuideStar II Camera Sensor (2 of)

8807

Picomotor Center Mount, 1.0 in. Diameter(2 of)

The GuideStar™ II requires one Model 8783 Controller, two Model 8784 Camera Sensors, and two Model 8807 Picomotor Mirror Mount Actuators. Other compatible Picomotor Mirror Mount Actuators include Models 8809, 8812, 8816, 8852, 8885, 8886, and 8887.

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SPECIAL COLLECTIONS

Model

MOTORIZED OPTICAL MOUNTS

Response Time

GUI

CONTROLLERS AND DRIVERS

Laser Wavelength

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Fast Steering Mirrors

MOTORIZED LINEAR STAGES

158

• Fast steering on a single pivot point for X and Y rotation

MOTORIZED VERTICAL STAGES

• Steering mirror is suspended on a flexure, eliminating friction • Angular range of ±3° with ≤2 mrad rms resolution • Field replaceable 1 in. mirror assemblies • Larger angular range than piezo-driven mirrors

MOTORIZED ACTUATORS

MOTORIZED ROTATION STAGES

Model FSM-300-01

The Fast Steering Mirror (FSM Series) provides two-axis, high-bandwidth tip/tilt with sub-microradian resolution using voice-coil technology. The FSM's that are economically viable for widespread commercial use for applications such as laser beam stabilization, laser pointing, tracking and image stabilization. By utilizing a unique flexure suspension design to confine the motion of the mirror, it eliminates the bearing surfaces often used with galvanometer scanners, along with their associated stiction and wear. This results in ultra-smooth tip/tilt motion about a common pivot point, with very high accuracy, and practically infinite lifetime. Newport offers a standard FSM-300 with a 1” (25.4mm) diameter mirror. A position transducer is included in the FSM mirror head to provide position feedback with reference to the support frame. A wide range of 1” mirror assemblies (mirror on carrier) with different coatings are offered. This allows the user to field replace the standard mirror with another mirror that best fits the specific application. The 1" mirror assemblies are sold separately.

HEXAPODS

Typical Specifications FSM-300-01

Mirror Assembly Number of Axes

2 (tip-tilt)

Angular Range from ±10 V (mrad)

±26.2 (±1.5°), Mechanical(1)

Resolution, rms (mrad)

1, Mechanical(1)

Repeatability, rms (mrad)

3, Mechanical(1)

CONTROLLERS AND DRIVERS

Accuracy from ±26.2 mrad, 25°C(1) (mrad)

0.262 (0.015°), Mechanical(1)

Linearity from ±26.2 mrad, 25°C(1)

1.0%

Resolution of Local Position Sensor (mrad)

0.5

1) Optical angular range is equal to twice the mechanical angular range. 2) Optical parameters apply to central 80% of mirror aperture. FSM-300 Mirror Assembly

Controller/Driver

SPECIAL COLLECTIONS

MOTORIZED OPTICAL MOUNTS

Command Input and Position Output

Analog, ±10 V yields ±26.2 mrad

Peak Operating Power to Mirror (W)

Continuous Maximum Operating Power to Mirror (W)

Envelope, w x h x d [in (mm)]

9 x 3.45 x 10 (229 x 88 x 254)

Ordering Information Model

Description

FSM-300-01

Fast Steering Mirror and controller, 1in Removable Mirrors w/ ER.1 Coating

FSM-300-02

Fast Steering Mirror and controller, 1in Removable Mirrors w/ ER.4 Coating

Front panel of the FSM-300 controller/driver.

For ordering information of spare mirror assemblies, visit Newport.com.

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CONEX-LDS MOTORIZED LINEAR STAGES

Electronic Autocollimator • Compact and Portable Design • 0.01 mrad Sensitivity

• Easy Alignment with an Integrated, ±0.85° Field of View, Eyepiece and Mounting Accessories

MOTORIZED VERTICAL STAGES

• Analog Output at 2 kHz Sampling Frequency Ideal for Vibration Measurements

• RS-422 interface for USB communication

The CONEX-LDS is a versatile electronic autocollimator with integrated controller for non-contact alignment or high resolution angular measurements. Using advanced optics and electronics technology with simplified design, the CONEXLDS offers a high level of reliability for demanding metrology and industrial applications. With convenient features like the integrated controller, an eyepiece for rough alignment and mounting accessories, the CONEX-LDS enables quick convenient setups on-site or at the production floor. CONEX-LDS can be interfaced via USB or Ethernet for network communication.

The CONEX-LDS is an ideal tool for:

CONEX-LDSElectronic Autocollimator Source

Visible laser diode modulated at 5 KHz; circular polarized

Wavelength (nm)

670

Peak Power (mW)

1 (Class II)

Beam Diameter (mm)

22.5

Beam Divergence (mrad)

100 500 250

Measurement Field (mrad)

±2000

Ocular Field (mrad)

±15 (±0.85°)

Sensitivity (mrad)

0.01*

Analog Output Rate (Hz)

2000

Sensor Processing Rate (Hz)

5000 ±1 (±0.02 x measurement) (i.e. 2%)

Reflector

Min. 2% reflectivity

Noise

0.003 mrad/Ã Hz (at 100% reflectivity)

Weight (kg)

1.1

• Wobble control • Rotation stage accuracy measurements • Settling time and stage damping analysis • Vibration analysis • Concentricity alignments of multirotational setups • Rotation axis orthogonality measurements • Repeatability of XY stages • Machine alignments

Operating Temperature Range (°C)

+15 to +25

• Surface flatness measurements

Storage Temperature Range (°C)

-10 to + 50

• Beam set-up and alignment

CONTROLLERS AND DRIVERS

Measurement Distortion (mrad)

• Pitch and yaw measurements

HEXAPODS

Beam Direction (mrad) Equivalent Focal Length (mm)

MOTORIZED ACTUATORS

Specifications

MOTORIZED ROTATION STAGES

RoHS

Compliant

* Sensitivity is based on 3s of noise taken @ 1 Hz MOTORIZED OPTICAL MOUNTS

Ordering Information Model

Model

CONEX-LDS

Autocollimator, Optical Head with Integrated Controller

CONEX-LDS-PS

Autoranging Power Supply, CONEX-LDS Autocollimator, 90-264 VAC

CONEX-LDS-SL

Precision Adjustable Two Axis Mount, CONEX-LDS Series

CONEX-LDS-SLXY

Precision Adjustable Four Axis Mount, CONEX-LDS Series

CONEX-USB-RS422

USB Interface converter for CONEX-LDS RS422 Cable, CONEX-LDS Autocollimator, 5 m RS422 Cable, CONEX-LDS Autocollimator, 20 m

CONEX-LDS-VER

Calibration Verification Kit, CONEX-LDS Autocollimator

The CONEX-LDS comes with a CONEX-LDS-CABLE5 only. The CONEX-PS and CONEX-USB-RS422 must be ordered separately.

The CONEX-LDS-SL is a convenient mounting tool for CONEX-LDS with two angular mount adjustments.

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SPECIAL COLLECTIONS

CONEX-LDS-CABLE5 CONEX-LDS-CABLE20

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Dimensions

ø1.496-0.0008 -0.004 (38-0.02 -0.1 )

2.83 (72) SQR 1.57 (40)

.35 (9)

.32 (8.1)

SQR 1.57 (40) HOLE M3 THD USABLE DEPTH: .12 (3) FOR GROUNDING

MOTORIZED VERTICAL STAGES

MOTORIZED LINEAR STAGES

160

1.035”-40 THD

0 ø1.378-0.004 0 (35-0.1 )

1.89 (48)

MOTORIZED ROTATION STAGES

5.39 (137) 10.60 (269)

AUTOCOLLIMATOR CONEX-LDS

CALIBRATED OPTICAL WEDGE

MIRROR 10D20ER.1-PF

MIRROR MOUNT U100-A-LH-2K

RAIL CARRIERS M-CN26-12

RAIL X26-384

SPACER

RAIL CARRIER M-CN26-40

The CONEX-LDS-VER kit enables users to periodically perform a calibration verification of the CONEX-LDS autocollimator.

SPECIAL COLLECTIONS

MOTORIZED OPTICAL MOUNTS

CONTROLLERS AND DRIVERS

HEXAPODS

MOTORIZED ACTUATORS

FLANGE MOUNT

The CONEX-LDS can be used with Ethernet communication or USB via the CONEX-USB-RS422 converter.

The CONEX-LDS-SLXY provides a versatile mount for CONEX-LDS, offering four axes of control (two angular and two translation).

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MOTORIZED LINEAR STAGES

Vacuum Compatible Products

161

MOTORIZED VERTICAL STAGES MOTORIZED ROTATION STAGES

To learn more about special environmental preparation for motion products and systems, visit Newport.com

HEXAPODS

Newport also provides solutions for applications requiring special environmental preparation such as clearn room, extreme high or low temperature, non magnetic and high energy, and EUV.

MOTORIZED ACTUATORS

Newport has expanded its standard product offering for use in vacuum 10-6 hPa (7.5*10-7 Torr) and Ultra-High Vacuum 1.3*10-8 hPa (10-9 Torr). Vacuum compatible stages, actuators and optical mounts are prepared with special surface treatment, selected materials and components, and vacuum compatible lubricants and grease. Many of the vacuum compatible products have been designed specifically for semiconductor-capital-equipment manufacturers and the vacuum community.

Vacuum Compatible Motorized Stages, Actuators and Mirror Mounts CONTROLLERS AND DRIVERS

HXP100-MECAV6 hexapod

8817 mirror mount

8081-UHV 5-axis picomotor kinematic stage

SPECIAL COLLECTIONS

URS75BPPV6 rotation stage

MOTORIZED OPTICAL MOUNTS

NSA12V6 actuator

MFA-CCV6 linear stage

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All Steel Construction Linear Stages

Steel

Aluminum

Young's modulus (stiffness), E, (GPa)

210

Thermal Expansion, a (min/in/°F)

5.6

12.4

Thermal Conduction, c (BTU/hr-ft-°F)

15.6

104

For applications requiring high flatness and straightness, excellent thermal stability and minimal deformation under load, Newport's all-steel stages offer advantages unmatched by competing designs that use a combination of steel and aluminum. Newport Steel Stages minimize thermally induced positioning errors endemic to bi-metallic construction, especially in environments that are not well controlled. With excellent load capacities and minimal deformation under load, Newport steel stages can move large payloads without loss of positioning performance. Newport steel stages are an excellent option for applications that include: surface metrology, inspection systems, bio-medical applications, laser systems, vacuum applications and many more. Newport steel stages can be integrated in custom motion systems, or provided with application specific modifications. To learn more, visit Newport.com.

Travel Range (mm)

Minimum Incremental Motion (mm)

Maximum Speed (mm/s)

Normal Load Capacity (N)

FMS Series Linear Metrology Stage See page 48

100-300

0.1-0.5

20-100

150

MTN Series Mid-travel Steel Linear Stages See page 50

100-300

0.3

20-100

1000

UTS Series Mid-Travel Steel Linear Stages See page 52

50-150

0.3

20-40

200

MFA-Series Miniature Steel Linear Stages See page 54

0.1

0.3-2.5

Series

SPECIAL COLLECTIONS

MOTORIZED OPTICAL MOUNTS

CONTROLLERS AND DRIVERS

HEXAPODS

MOTORIZED ACTUATORS

MOTORIZED ROTATION STAGES

MOTORIZED VERTICAL STAGES

MOTORIZED LINEAR STAGES

162

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MOTORIZED VERTICAL STAGES

The FC series stages use the Newport-proprietary iPPTM intelligent stepper motor. The iPPTM technology completely eliminates controller or driver set up by integrating the electronics into the stepper motor housing. Just connect power and communication and install the GUI. Up to 4 FC stages can be daisy-chained and controlled with the same GUI. The FCL linear stage is an evolution of the industry proven ILS stage and is available in 50, 100 and 200 mm travel. The FCR100 combines a precision rotation stage and the fully integrated stepper motor controller in a small footprint.

MOTORIZED LINEAR STAGES

iPP™ Technology – Intelligent Stepper Motor Stages

163

MOTORIZED ROTATION STAGES MOTORIZED ACTUATORS

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CONEX™ – DC-Servo or Piezo Controller and Driver HEXAPODS

Newport's CONEXTM product families are integrated solutions that are easy to use, compact and inexpensive. CONEX control extends to linear, rotary stages and actuators with a DC servo motor, piezo stages, mirror mounts, beam positioners and a general I/O module. Ideal for system integration and precision application automation, CONEX controllers are fully programmable with simple, intuitive command sets that can perform a variety of basic and advanced functions. These compact integrated controllers provide plug-and-play operation with the convenience of immediate connectivity and operation. CONEX-AG-GON-UP

CONTROLLERS AND DRIVERS

CONEX-MFACC

CONEX-AG-LS25-27P CONEX-TRAxxCC MOTORIZED OPTICAL MOUNTS

CONEX-AG-PR100P CONEX-SR50CC

CONEX-PSD9

CONEX-LTA-HL CONEX-AG-M100D

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SPECIAL COLLECTIONS

CONEX-BGS50CC

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Agilis™ – Piezo Motor Driven Positioners The new Agilis™ series of piezo motor driven miniature positioners took a novel approach to the adjustments needed for many optical setups. The Agilis series provides the ultra-high adjustment sensitivity and convenient remote operation of a motorized positioner at the price and size of a high quality manual component.

MOTORIZED VERTICAL STAGES

MOTORIZED LINEAR STAGES

164

• Convenient, hands-off remote or computer automated adjustment of critical optical setups • Impressive 50 nm (0.2 arcs) adjustment sensitivity

MOTORIZED ROTATION STAGES

• Ultra-compact, ideal for space constrained setups and system integration • Set and forget long term stability

MOTORIZED ACTUATORS

• Comparably priced to a high quality manual component

HEXAPODS

Picomotor™ – Piezo Motor Actuators • <30 nm resolution in a compact design

• Lifetimes of 1,000,000,000 steps

Picomotor™ actuators are ideal devices for motorizing fine-positioning stages and mounts in your optical or mechanical systems. Use them with our opto-mechanical translation stages or your own custom devices. They have better than 30 nm resolution with minimal backlash, and can exert a 22 N (5 lb) force. Moreover, they have exceptional long-term stability and the ability to hold their position with no power applied. These last two features make the Picomotor actuators unique among motion-control devices and ideal for typical set-and-hold applications.

SPECIAL COLLECTIONS

MOTORIZED OPTICAL MOUNTS

CONTROLLERS AND DRIVERS

• Set-and-forget long-term stability– these actuators stay put

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For Motion, Think Newport

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