Microscope Components by Nikon

Microscope Components for Reﬂected Light Applications

CFI60-2/CFI60 Optical System (for modular focusing unit)

System Diagram & Index CCTV Camera Adapters

P.30 C-mount Camera

ENG-mount Camera

C-mount TV Adapter A

C-0.7× DXM Relay Lens C-mount TV Relay Lens 4×

C-0.55× DS Relay Lens

C-mount TV Adapter C-mount Adapters 0.35×/0.45×/ 0.6×

C-mount TV Relay Lens 2.5×

1× Relay Lens

Straight Tubes

1× Relay Lens

2 LV-10×ESD CFI 10×/CFI 10×M/ CFI 10×CM/CFI 12.5×/ CFI 15×

P.27

1 2

LV-TT2 Tilting Trinocular Tube

LV-TI3 Trinocular Tube ESD

1 2

C-TT Trinocular Tube T

C-TF Trinocular Tube F

for Equipment

The development, manufacture, and evaluation of products require sub-micron precision, as symbolized by semiconductor manufacturing technology. Nikon's microscope units support such high precision and can be integrated with a variety of equipment. This catalog presents technical data on using Nikon's microscope units. Select a microscope unit to integrate with Nikon equipment – for experiments and research, as well as manufacturing and inspection.

4 6 7 8 9 9 10-14 14 15 15 16 16

CFI60-2 / CFI60 Revolving Nosepieces CF&IC Objectives Compact Reﬂected Microscopes CM Series Objectives for Measuring microscopes 2nd Objective Lens Units Filters CFI60-2 / CFI60 Eyepiece Tubes Double Port Straight Tubes Eyepiece Lenses CCTV Camera Adapters Glossary

C-TE2 Ergonomic Binocular Tube

C-TB Binocular Tube

P.14-16

Analyzers

Modular Focusing P.4 Unit IM-4

Modular Focusing Unit IM-4

Fixing Unit

P.17

P.27

Illuminators

C-ER Eyelevel Riser

for CCTV Systems

Revolving Nosepieces

Polarizers Universal Epi-Illuminator LV-UEPI-N

White LED Illuminator LV-EPILED

Filters

LED Controllor

*This can not be used together with Y-IDP Double-port

LV-LP Plate

LV-DIC DIC Slider A/B

Contents Modular Focusing Unit IM-4 LV-IM IM Modules LV-FM FM Modules LVDIA-N DIA Base N LV-ARM Basic Arm LV-ECON E Controller CFI60-2 / CFI60 Objectives LV-UEPI-N Universal Epi-Illuminator LV-UEPI2 Universal Epi-Illuminator 2 LV-UEPI2A Motorized Universal Epi-Illuminator 2 TI-PS100W/A Power Supply LV-EPILED White LED Illuminator

P.25

Ergonomic DSC Port *1

*1 For more information, see page 27.

Y-IDP Double Port

2nd Objective Lens Units

Filar Micrometer 10×N (Includes adapter)

C-CT Centering Telescope

Eyepiece Tubes / Double Port

Select a Nikon microscope unit for your manufacturing equipment and other systems that require high precision

ENG-mount Adapter 0.45×T/ 0.6×T

P.28-29

CFI UW 10× CFI UW 10×M

1 2

ENGmount TV Adapter

Zooming Lens

LV-TV Tube Adapter

ENG-mount for Zooming Lens

Eyepiece Lenses

V-T Photo Adapter

Y-TV55 TV Tube 0.55x

Y-T TV Tube

C-mount Adapter/ CCTV Zooming Lens

LV-NU5AI Motorized Universal Quintuple Nosepiece*2

LV-NU5AC Motorized Universal Quintuple Nosepiece*2

LV-NU5A Motorized Universal Quintuple Nosepiece ESD*2

LV-NU5I Intellijent Universal Quintuple Nosepiece ESD

LV-NU5 Universal Quintuple Nosepiece ESD

LV-NBD5 BD Quintuple Nosepiece ESD

C-N6 Sextuple Nosepiece

P-N Centering Quintuple Nosepiece

Light Sources

P.14-16

DIC Prisms

17 18-21 22-24 24 25 26 27 27 27 28-29 30 31

LV-HL50W 12V-50W-LL Halogen Lamp

*2 Requires separately available LV-NCNT-N Motorized Nosepiece Controller.

CFI60-2 / CFI60 Objectives

P.10-14

CFI TU Plan FLUOR EPI 5×/10×/20×/50×/100× CFI T Plan EPI 1×/2.5× CFI L Plan EPI 2.5×A/40× CFI TU Plan EPI ELWD 20×/50×/100× CFI T Plan EPI SLWD 10×/20×/50×/100× CFI TU Plan FLUOR BD 5×/10×/20×/50×/100× CFI TU Plan BD ELWD 20×/50×/100× CFI TU Plan Apo EPI 50×/100×/150× CFI TU Plan Apo BD 50×/100×/150× CFI LU Plan Apo EPI 150× CFI LU Plan Apo BD 100×/150× CFI L Plan EPI CR 20×CR/50×CR/100×CRA/100×CRB

CF IC EPI Plan DI *3 10×A/20×A/ 50×A/100×

CF IC EPI Plan TI 2.5×A/5×A

CF&IC Objectives P.21 *3 Requires separately available adapter.

LV-LH50PC Precentered Lamphouse

TI-PS100W/A Power Supply (YM-EPI3-3pin extension cord is required)

Modular Focusing Unit IM-4

CFI60-2/CFI60 Optical System (for LV modules)

Accommodates an epi-illuminator and motorized nosepiece or a maximum load of 10kg by adding a balancer. Accommodates the LV-UEPI-N or LV-EPILED universal illuminator as well as a motorized nosepiece.

System Diagram & Index CCTV Camera Adapters

P.30 C-mount Camera

• Attachment of the LV-UEPI-N Universal Epi-illuminator enables the use of brightﬁeld, darkﬁeld and, Nomarski DIC techniques. • The built-in balancer ensures smoother vertical motion, even when the arm is heavily loaded. • The standard maximum load is 4kg, which is expandable to 10kg by adding a balancer. • A coarse motion stroke of 5.2mm per revolution improves the equipment's load handling capability and increases durability. • The distance from the optical axis to the mounting surface is 141mm.

C-0.7× DXM Relay Lens C-0.55× DS Relay Lens

ENG-mount Adapter 0.45×T/ 0.6×T

1× Relay Lens

P.28-29

2 LV-10×ESD CFI 10×/CFI 10×M/ CFI 10×CM/CFI 12.5×/ CFI 15×

P.27

Filar Micrometer 10×N (Includes adapter)

C-CT Centering Telescope

62.5

1 2

R4 2.5

ENGmount TV Adapter

Zooming Lens

CFI UW 10× CFI UW 10×M

Straight Tubes

215

1× Relay Lens

LV-TV Tube Adapter

ENG-mount for Zooming Lens

Eyepiece Lenses

V-T Photo Adapter

Y-T TV Tube

67.5

C-mount Adapters 0.35×/0.45×/ 0.6×

C-mount TV Relay Lens 2.5×

C-mount TV Relay Lens 4×

C-mount Adapter/ CCTV Zooming Lens

C-mount TV Adapter

Y-TV55 TV Tube 0.55x

Note: For adding a balancer, consult your Nikon representative.

ENG-mount Camera

C-mount TV Adapter A

ø58

1 2

Modular Focusing Unit IM-4 MBD64010/2000g

ø62

Ergonomic DSC Port *1

1 2

Stroke

30mm

Coarse focusing Fine focusing

5.2mm/rotation 0.1mm/rotation

Scale

1µm

LV-TT2 Tilting Trinocular Tube

LV-TI3 Trinocular Tube ESD

C-TT Trinocular Tube T

C-TF Trinocular Tube F

C-TE2 Ergonomic Binocular Tube

C-TB Binocular Tube

Eyepiece Tubes / Double Port

Y-IDP Double Port

P.27 *1 For more information, see page 27.

C-ER Eyelevel Riser

LV Microscope Units

P.5-9

Illuminators

P.14-16

LV-ECON E Controller 141

4-W3/8 depth 10

42.7

Polarizers

67.5 36

Unit: mm

Filters

Motorized Universal Epi-Illuminator 2 LV-UEPI2A*4

White LED Illuminator LV-EPILED

LED Controllor

*This can not be used together with Y-IDP Double-port

Revolving Nosepieces

P.17 P.18

LV-DIC DIC Slider A/B

LV-NU5AI Motorized Universal Quintuple Nosepiece*2

LV-NU5AC Motorized Universal Quintuple Nosepiece*2 DIC Prisms

LV-NU5A Motorized Universal Quintuple Nosepiece ESD*2

LV-NU5I Intellijent Universal Quintuple Nosepiece ESD

*4 The ND filter combination that is attached at the time of the blight-field observation.

LV-NU5 Universal Quintuple Nosepiece ESD

LV-NBD5 BD Quintuple Nosepiece ESD

C-N6 Sextuple Nosepiece

P-N Centering Quintuple Nosepiece

Light Sources

LV-LH50PC Precentered Lamphouse

P.14-16 LV-HL50W 12V-50W-LL Halogen Lamp TI-PS100W/A Power Supply (YM-EPI3-3pin extension cord is required)

P.10-14

65 95

55 20

Universal Epi-Illuminator 2 LV-UEPI2

LVDIA-N DIA Base N

CFI60-2 / CFI60 Objectives

+0.05 0 22.7

3 LV-FMA FM Module A

LV-FM FM Module

*2 Requires separately available LV-NCNT-N Motorized Nosepiece Controller.

-0.020 ø24.5F8 -0.053

8 40 19±0.1

3 LV-IMA IM ModuleA

73.5 76.7 ~ 107.2

181

Used to attach the Modular Focusing Unit IM-4 to a ø24.5mm post.

1.8

LV-LP Plate

Fixing Unit (Option)

4-M6×12mm Allen bolt

LV-IM IM Module

Condensers

Unit: mm

ø24.5H9 +0.052 0

Stages

69.5

100

181

Fixing Unit MXA20681/240g

LV-ARM Basic Arm

28.5

6-M6 depth 7

Analyzers

Universal Epi-Illuminator LV-UEPI-N

183.5

CF IC EPI Plan DI*3 10×A/20×A/ 50×A/100×

CF IC EPI Plan TI*3 2.5×A/5×A

CF&IC Objectives

P.21

*3 Requires separately available adapter.

Fiber LV-HGFA HG Fiber Adapter

C-HGFI HG Precenterd Fiber Illuminator

LV-FM FM Modules

This focusing module is suitable for incorporation into systems. It enables the mounting of a universal illuminator (LV-UEPI-N/LV-UEPI2/LV-UEPI2A or LV-EPILED) and a motorized nosepiece.

This focusing module is suitable for incorporation into systems. It enables the mounting of a universal illuminator (LV-UEPI-N/ LV-UEPI2/LV-UEPI2A or LV-EPILED) and a motorized nosepiece.

2-M4 depth 8

114

80±0.1

60 80±0.1

120±0.1

80±0.1

Eyepiece tube mounting surface

126.5±0.1 308

31 28

170

80±0.1

Nosepiece mounting surface Vertical stroke: 19 upward, 1 downward

114

ø8

+0.001 0.041

260

+0 0 .01 5

Unit: mm

Vertical stroke

20mm

Resolution

0.05µm

Max. speed

2.5mm/sec

4-M6

8 +0.015 depth 3.4 0 80±0.1

ø9

4-M4 depth 8

60 80±0.1

120.7

114 31 28

Vertical stroke: 29 upward, 1 downward

18 26

104

95±0.1 114

Nosepiece mounting surface

114

55 ø8

+0.001 0.041

260

ø8

62±0.1 18

dep

.0 +0 0

2-ø

95 A

4-M6 depth 10

Eyepiece tube 48 mounting surface

126.5±0.1 308

113 163.5

104

120.7

120±0.1

80±0.1

4-M6

Scale

18 10

4-M6

1µm

Screw depth from surface 9mm or less

62±0.1

(2-

R4 )

ø8

+0 0 .01 5

Unit: mm

Stroke

30mm

Coarse focusing

5.2mm/rotation

Fine Focusing

0.1mm/rotation

Scale

1µm

(2-R4)

8 +0.015 0 depth 3.4

80±0.1

0.1mm/rotation

LV-FM FM Module (Manual) MBD65050/5000g

Fine Focusing

+0.015 0

LV-IM IM Module (Manual) MBD64080/4000g

depth 3.4

th 3

3.4

Screw depth from surface 9mm or less

170

2-M4 depth 8

5.2mm/rotation

80±0.1

• Only the bottom mounting surface is supported. • 30mm vertical stroke. • Creates a system with revolving up/down mechanism that has an ultra-long vertical stroke of 68mm when combined with the LVDIA-N DIA Base N. Optimal for operations such as semiconductor probe inspections. • The standard maximum permissible weight is 3-6kg, which is expandable to 9kg by adding a balancer.

Thickness of ﬁxing plate

Nosepiece mounting surface

LV-FM FM Module (Manual) 80±0.1

138.8

• Selectable mounting surface (back or bottom). • 30mm vertical stroke. • Dramatically improved rigidity enables the mounting of the LV-UEPI2A motorized universal illuminator, etc. • The standard maximum permissible weight is 4-7kg, which is expandable to 10kg by adding a balancer.

Eyepiece tube mounting surface

Vertical stroke: 29 upward, 1 downward

LV-IM IM Module (Manual)

Coarse focusing

95 55

30mm

Unit: mm

(Resolution 0.05µm)

Stroke

(Resolution 0.05µm)

225 (224~254)

2.5mm/sec

ø8

65.5

Max. speed

(2-R4)

LV-FMA FM Module A (Motorized) MBD65040/5000g

18 62±0.1 10 (2R4 )

49 (48~78) 25

0.05µm

depth 3.4

80±0.1

Resolution

+0.015 0

20mm

62±0.1 18

4-M6 Screw depth from surface 9mm or less

th 3

Vertical stroke

3.4

dep

LV-IMA IM Module A (Motorized) MBD64070/4000g

5 .01 +0 0

ø8

2-ø

Screw depth from surface 9mm or less

95±0.1 114

18 26

4-M6 depth 10

113 163.5

• Only the bottom mounting surface is supported. • 20mm vertical stroke. • Enables an enhanced system with motorized up/down mechanism when combined with the LVDIA-N DIA Base N. • External control is possible via the LV-ECON E Controller. • The standard maximum permissible weight is 3-6kg, which is expandable to 9kg by adding a balancer.

Thickness of ﬁxing plate

Nosepiece mounting surface

LV-FMA FM Module A (Motorized)

49 (48~68) 25

Eyepiece tube mounting surface

138.8

• Selectable mounting surface (back or bottom). • 20mm vertical stroke. • Dramatically improved rigidity enables the mounting of the LV-UEPI2A motorized universal illuminator, etc. • External control is possible via LV-ECON E Controller. • The standard maximum permissible weight is 4-7kg, which is expandable to 10kg by adding a balancer.

Vertical stroke: 19 upward, 1 downward

225 (224~244)

LV-IMA IM Module A (Motorized)

65.5

4-M4 depth 8

LV-IM IM Modules

ø9

Unit: mm

LVDIA-N DIA Base N

LV-ARM Basic Arm

This base unit is for the ECLIPSE LV series of modular microscopes. The attachment of an optional power source enables the incorporation of a transmission illuminator.

This arm unit is for the ECLIPSE LV series of modular microscopes.

3 Arm's reference plane Nosepiece mounting surface 0.5

2-ø9 2 R1

Counterbore of dia.13, depth 19 Counterbores have same dimensions in all six locations

0.5

60 80 114

90˚

ø72 +0.2 50 +0.1 25 251

114

116

60˚

+0.012

1-ø6H7 0 Reference hole

0.5

Enlarged view A

6 +0.012 0

62 ±0.1

3-ø7

118

132

R170

73.5

±0.015 0

R 2-

260 48

115

(40) 80 ±0.2 40 ±0.03

Reference hole

308

Eyepiece mounting surface

5.5

1-ø8H7 ( ±0.015 ) 0

LV-ARM Basic Arm MBD65030/1400g

245

Unit: mm

112

178.5

LV-ECON E Controller 80

251

100

This controller enables external control of various units from a PC and other devices. • Enables external control of motorized universal reﬂection illuminators and various light sources, universal motorized revolvers, and motorized focusing modules from a PC or other devices. • Communication with PC possible via USB. • Max. 11˚ inclination when using tilt (unit's feet).

55 362 388.5

165

109

LVDIA-N DIA Base N MBD65015/5600g Unit: mm

ø62

ø60

114

210

55.8

11˚

Unit: mm LV-ECON E Controller MBF12200/2000g

CFI T Plan EPI/CFI TU Plan Fluor EPI/CFI L Plan EPI

CFI TU Plan EPI ELWD

CFI60-2/CFI60 objectives for brightﬁeld use; Nomarski DIC is also possible with the TU type.

Dramatically extended working distances facilitate observations of samples having irregular surfaces. Working distances have been extended signiﬁcantly.

ø8.5

ø29

ø24 ø30

60 W.D.=4.5

W.D.=11

0. 5

W.D.=19

45 ˚ 30

45 ˚

W.D.=1.0

58.9 47.4

W.D.=1.0

58.9 47.4

45 ˚ ˚ 30

55.4

W.D.=4.5

˚ 60

W.D.=17.5

60 W.D.=23.5

ø9

ø22.5

ø21.5

ø29

ø27

ø30

CFI TU Plan EPI ELWD 50×

CFI TU Plan EPI ELWD 100×

CFI TU Plan EPI ELWD 20×

ø21.5

ø17

ø20

(55.4) 51

(48.9) 44.5

5 42.4

36.3

45 ˚

ø28.2 M25×0.75 ø23.8

ø27 M25×0.75 ø23.8

ø28.2 M25×0.75 ø23.8

ø27 M25×0.75 ø23.8

(40.9)

ø27 M25×0.75 ø23.8 5

ø27 M25×0.75 ø23.8

ø27 M25×0.75 ø23.8 5

Brightﬁeld Objectives

Long Working Distance Objectives for Brightﬁeld/Nomarski DIC Use

Unit: mm

CFI TU Plan Fluor EPI 20×

ø30

M25×0.75

CFI TU Plan EPI ELWD 20×

0.4

19.0

1.72

135

200×

1.10

3.50

200×

1.25

3.50

MUE21500

CFI TU Plan EPI ELWD 50×

0.6

11.0

0.76

130

500×

0.44

1.24

500×

0.50

1.24

MUE21900

CFI TU Plan EPI ELWD 100×

0.8

4.5

0.43

155

1000×

0.22

0.61

1000×

0.25

0.61

Ultra-long Working Distance Objectives for Brightﬁeld Use

ø27 M25×0.75 ø23.8

CFI 60-2/CFI 60 Objectives Objectives (Magniﬁcations)

length Physical depth W.D. (mm) Focal (mm) of focus (µm)

Weight (g)

Widefield CFI eyepieces Ultra-Widefield CFI eyepieces CFI 10× (F.N. 22) CFI UW10× (F.N. 25) Total magnifi- Actual field Depth of Total magnifi- Actual field Depth of cation (M) of view (ømm) focus (µm) cation (M) of view (ømm) focus (µm)

W.D.=10

˚ 45 (2.6)

45 (49.8)

60 W.D.=22

(2.7) C 0. 4

ø22

ø24.5

ø23

ø20

ø29

ø27 ø30

ø28 ø31

ø22.5 ø28 ø31

CFI T Plan EPI SLWD 10×

CFI T Plan EPI SLWD 20×

CFI T Plan EPI SLWD 50×

CFI T Plan EPI SLWD 100×

Unit: mm Code No.

W.D.=30

W.D.=37

CFI L Plan EPI 40×

45 ˚

O C

CFI L Plan EPI 2.5×A

ø27 M25×0.75 ø23.8

ø27 M25×0.75 ø23.8 5

60 W.D.=1.0

25˚

2.25 (4.7)

4.6 3 45 ˚

W.D.=8.8

45 ˚ 6.5

ø27 M25×0.75 ø23.8

(37.8) 34

43.7 60 W.D.=6.5

C ø4.9 ø17.5 ø21.4 ø24

ø27

CFI T Plan EPI 2.5×

(g)

MUE21200

25 8 20.4 C 1. 5 60 ˚

W.D.=3.8

ø16

ø21.8

CFI T Plan EPI 1×

Weight

Ultra-long working distances. Particularly useful when observing the bottom of a depression in the sample. Working distances have been extended signiﬁcantly.

1.4

24.8

length Physical depth W.D. (mm) Focal (mm) of focus (µm)

(29.6) 27.5

1. 31

CFI T Plan EPI SLWD

C ø15.6

ø35

CFI 60-2/CFI 60 Objectives Objectives (Magniﬁcations)

ø28.2 M25×0.75

ø28 M25×0.75 ø23.8

Code No.

CFI TU Plan Fluor EPI 100×

ø29

ø29 M25×0.75 ø23.8 5

CFI TU Plan Fluor EPI 50×

22.5

CFI TU Plan Fluor EPI 10×

CFI TU Plan Fluor EPI 5×

MUE12050

CFI TU Plan Fluor EPI 5×

0.150

23.5

12.22

115.0

50×

4.40

31.27

50×

5.000

31.27

MUE12100

CFI TU Plan Fluor EPI 10×

0.300

17.5

3.06

120.0

100×

2.20

7.82

100×

2.500

7.82

MUE12200

CFI TU Plan Fluor EPI 20×

0.450

4.5

1.36

125.0

200×

1.10

2.95

200×

1.250

2.95

MUE12500

CFI TU Plan Fluor EPI 50×

0.800

1.0

0.43

150.0

500×

0.44

0.79

500×

0.500

0.79

MUE12900

CFI TU Plan Fluor EPI 100×

0.900

1.0

0.34

150.0

1000×

0.22

0.50

1000×

0.250

0.50

MUE12010

CFI T Plan EPI 1×

0.030

3.8

200

305.56

165.0

10×

22.00

781.75

10×

25.000

781.75

MUE31100

CFI T Plan EPI SLWD 10×

0.2

6.88

100×

2.20

14.02

100×

2.50

14.02

MUE12030

CFI T Plan EPI 2.5×

0.075

6.5

48.89

140.0

25×

8.80

125.08

25×

10.000

125.08

MUE31200

CFI T Plan EPI SLWD 20×

0.3

3.06

115

200×

1.10

5.44

200×

1.25

5.44

MUE00031

CFI L Plan EPI 2.5×A

0.075

8.8

48.89

167.5

25×

8.80

125.08

25×

10.000

125.08

MUE31500

CFI T Plan EPI SLWD 50×

0.4

1.72

120

500×

0.44

2.43

500×

0.50

2.43

MUE00400

CFI L Plan EPI 40×

0.650

1.0

0.65

200.0

400×

0.55

0.65

400×

0.625

0.65

MUE31900

CFI T Plan EPI SLWD 100×

0.6

0.76

135

1000×

0.22

1.00

1000×

0.25

1.00

Unit: mm Code No.

CFI 60-2/CFI 60 Objectives Objectives (Magniﬁcations)

length Physical depth W.D. (mm) Focal (mm) of focus (µm)

Weight (g)

CFI TU Plan Fluor BD

CFI TU Plan Apo EPI/CFI TU Plan Apo BD/ CFI LU Plan Apo EPI/CFI LU Plan Apo BD

Brightﬁeld/Darkﬁeld/Nomarski DIC Objectives

Perfect for brightﬁeld, darkﬁeld, and Nomarski DIC observations.

High-Resolution Objectives for Brightfield or for Darkfield/Brightfield

2.50

7.82

MUE42200

CFI TU Plan Fluor BD 20×

0.45

4.5

1.36

185

200×

1.10

2.95

200×

1.25

2.95

MUE42500

CFI TU Plan Fluor BD 50×

0.80

1.0

0.43

200

500×

0.44

0.79

500×

0.50

0.79

MUE42900

CFI TU Plan Fluor BD 100×

0.90

1.0

0.34

200

1000×

0.22

0.50

1000×

0.25

0.50

CFI TU Plan BD ELWD

ø37.5

ø40

length Physical depth W.D. (mm) Focal (mm) of focus (µm)

Weight (g)

W.D.= 2

54 (3.9)

40 ˚

60 W.D.= 2

M32×0.75

1.5

60 0.9

20˚

5 4.5 3 45

W.D.=1.5

54 (0.5) (4) 40 ˚ 60

˚ 30 ø37.5

CFI TU Plan EPI ELWD 50×

ø39

M32×0.75

ø8 ø18 ø22 ø24

1.8

ø7.6

CFI LU Plan Apo EPI 150×A

ø3.2

ø2.6 ø5.2

ø5.3 ø26 ø36.8

ø26 ø36.8

CFI LU Plan Apo BD 100×*

CFI LU Plan Apo BD 150×A*

Unit: mm

ø33

CFI 60-2/CFI 60 Objectives Objectives (Magniﬁcations)

40 ˚ ø39

M25×0.75

CFI TU Plan Apo BD 150×

Code No.

CFI 60-2/CFI 60 Objectives Objectives (Magniﬁcations)

CFI TU Plan EPI ELWD 100× Unit: mm

Code No.

(3.9)

ø30

ø30.8

W.D.=4.5

˚ 45

W.D.=19

(55.4)

60 W.D.=11

(49)

(40.8)

45 ˚

CFI TU Plan EPI ELWD 20×

ø35

.5 O

ø36

CFI TU Plan Apo BD 100×

M32×0.75

ø30 ø37 ø40

ø34

CFI TU Plan Apo BD 50×

ø32

W.D.=1.5

CFI TU Plan Apo EPI 150×

.5 5 O . C CO

ø35 M32×0.75 ø30.8

ø33.8 M32×0.75 ø30.8

CFI TU Plan Apo EPI 100×

Long Working Distance Objectives for Brightﬁeld/Darkﬁeld/Nomarski DIC Use

Extended working distances facilitate observations of samples having irregular surfaces.

CFI TU Plan Apo EPI 50×

W.D.= 0.42 60

100×

0.5 5

31.27

7.82

0.5

5.00

2.20

52.7

50×

100×

ø30 ø35 ø38

0.47 5.4 45 ˚

31.27

140

4.40

3.06

50×

W.D.= 0.51

150

15.0

0.5

12.22

0.30

53.7

CFI TU Plan Fluor BD 10×

ø30 ø35 ø38

(5.4)

18.0

MUE42100

ø10 ø25 ø31

59.1

0.15

(58.5) 47.4

ø13 ø20.3 ø27 ø30

CFI TU Plan Fluor BD 5×

ø11 ø20.2 ø27 ø30

MUE42050

CFI TU Plan Fluor BD 100×

W.D.= 2

CFI TU Plan Fluor BD 50×

20˚

CFI TU Plan Fluor BD 20×

ø30.8

(0.39)

ø30.8

W.D.= 0.3

Objectives (Magniﬁcations)

ø23.8

ø40

Weight (g)

ø23.8

W.D.= 2

ø40

length Physical depth W.D. (mm) Focal (mm) of focus (µm)

ø23.8

(57.9) 53

ø37

ø36

CFI 60-2/CFI 60 Objectives

ø36 M32×0.75

ø28.4

Unit: mm Code No.

ø36 M32×0.75

W.D.=1

˚ 35

60 ø37

ø29 M25×0.75

CFI TU Plan Fluor BD 10×

ø28.4

ø28.2 M25×0.75

(57.9) 51

ø33.4

ø28.2 M25×0.75

CFI TU Plan Fluor BD 5×

ø26.2

(5.1)

ø36

(5.1)

ø25

ø36

(4.4)

W.D.=1

60 W.D.=4.5

45 ˚

W.D.=18

45 ˚

W.D.=15 60

(41.7)

45 ˚

ø27.6

Apochromat-type objectives virtually eliminate chromatic aberration and feature excellent resolution. Nomarski DIC is also possible with the TU/LU type.

M32×0.75 ø30.8 5

M32×0.75 ø30.8

53.9

M32×0.75 ø30.8 5

M32×0.75 ø30.8

53.9

M32×0.75 ø30.8

ø35

ø33.6

(44.8)

ø33.6

length Physical depth W.D. (mm) Focal (mm) of focus (µm)

Weight (g)

MUC11500

CFI TU Plan Apo EPI 50×

0.80

2.00

4.00

0.43

150.0

500×

0.44

0.79

500×

0.50

0.79

MUC11900

CFI TU Plan Apo EPI 100×

0.90

2.00

0.34

175.0

1000×

0.22

0.50

1000×

0.25

0.50

MUC11150

CFI TU Plan Apo EPI 150×

0.90

1.50

1.33

0.34

160.0

1500×

0.15

0.45

1500×

0.17

0.45

MUC41900

CFI TU Plan Apo BD 50×

0.80

2.00

4.00

0.43

190.0

500×

0.44

0.79

500×

0.50

0.79

MUC41150

CFI TU Plan Apo BD 100×

0.90

2.00

0.34

220.0

1000×

0.22

0.50

1000×

0.25

0.50

MUC41500

CFI TU Plan Apo BD 150×

0.90

1.50

1.33

0.34

220.0

1500×

0.15

0.45

1500×

0.17

0.45

MUC10151

CFI LU Plan Apo EPI 150×A

0.95

0.30

1.33

0.30

217.5

1500×

0.15

0.40

1500×

0.17

0.40

MUE61200

CFI TU Plan BD ELWD 20×

0.4

19.0

1.72

155

200×

1.10

3.50

200×

1.25

3.50

MUC40900* CFI LU Plan Apo BD 100×

0.90

0.51

2.00

0.34

325.0

1000×

0.22

0.50

1000×

0.25

0.50

MUE61500

CFI TU Plan BD ELWD 50×

0.6

11.0

0.76

180

500×

0.44

1.24

500×

0.50

1.24

MUC50151* CFI LU Plan Apo BD 150×A

0.90

0.42

1.33

0.34

305.0

1500×

0.15

0.45

1500×

0.17

0.45

MUE61900

CFI TU Plan BD ELWD 100×

0.8

4.5

0.43

205

1000×

0.22

0.61

1000×

0.25

0.61

* This product have been discontinued, and only available from stock.

Universal Epi-Illuminator LV-UEPI2/LV-UEPI2A

Objectives for LCD Inspection

The CFI L Plan EPI CR series employs a correction system to cope with the thinner coverglass for FDP and the increased integration and mounting density of devices.

79.5

• Equipped with advanced optics suitable for a wide variety of observation methods, ranging from brightfield, darkfield, simple polarizing, sharp polarizing, and DIC, to epi-Fluorescence. • Includes a feature for automatically maintaining optimal illumination conditions for the field and aperture diaphragms, shutter, and UV cut filters, thereby reducing tedious microscope operations to an absolute minimum.

65 5

CFI L Plan EPI 20×CR

0.45

10.9~10.0

10.00

1.36

240

200×

1.10

2.95

200×

1.25

2.95

MUE35500

CFI L Plan EPI 50×CR

0.70

3.9~3.0

4.00

0.56

240

500×

0.44

0.97

500×

0.50

0.97

MUE35900

CFI L Plan EPI 100×CRA

0.85

1.2~0.85

2.00

0.38

260

1000×

0.22

0.55

1000×

0.25

0.55

MUE35910

CFI L Plan EPI 100×CRB

0.85

1.3~0.95

2.00

0.38

260

1000×

0.22

0.55

1000×

0.25

0.55

LU Nosepiece Adapter M32-25

ø30.8

(9.5)

M25×0.75

M32×0.75 4.5

Adapter for attaching an EPI Plan objective to a brightﬁeld nosepiece or universal nosepiece.

LU Nosepiece Adapter M32-25 MXA23017/25g

ø35

Unit: mm

110

• Accurate reproduction of illumination conditions thanks to the motorization of the illumination changeover turret and aperture diaphragm and control of the illumination voltage. • Automatic optimization of the aperture diaphragm according to the objective lens and illumination technique. Can also be changed manually depending on the sample and purpose. • Control possible from the microscope or a PC when combined with LV100DA-U. • External control also possible from a PC when combined with the LV-ECON E Controller.

130

Synchronized with B/D changeover

Illumination

12V-50W high-intensity halogen lamp illuminator

Filter

Supports insertion of four ø25mm ﬁlters (NCB11, ND4, ND16), a polarizer/analyzer. Also supports ESD.

Weight

1,750g

LV-UEPI2

LV-UEPI2A

Field diaphragm

Centerable and synchronized with B/D changeover

Aperture diaphragm

Centerable and synchronized with B/D changeover

Centerable and synchronized with motorized brightﬁeld/darkﬁeld changeover (Automatic optimization according to objective lens)

Illumination

12V-50W high-intensity halogen lamp illuminator

Motorized operation/control possible for 12V 50W high-intensity halogen lamp illuminator and illumination changeover turret

Filters

Supports insertion of four ø25mm ﬁlters (NCB11, ND4, ND16), two Fluorescence ﬁlter cubes, a polarizer/analyzer, λ plate, or an excitation light balancer. Also supports ESD.

105

260

Cable length: 220mm (Measured from where it enters cord bushing to where it enters connector)

Aperture diaphragm

Unit: mm

Universal Epi-Illuminator LV-UEPI2/MBE60300 Motorized Universal Epi-Illuminator LV-UEPI2A/MBE60310 13 60

Items

Centerable and synchronized with B/D changeover

400

100

Conﬁgured with LV-LH50PC Precentered Lamphouse

Field diaphragm

Cable length: 220mm (Measured from where it enters cord bushing to where it enters connector)

ø51

336 295

Universal Epi-Illuminator LV-UEPI-N/MBE60201

ø21 435

• Enables brightfield, darkfield, simple polarizing, and DIC observation. • Automatic opening of field and aperture diaphragms when observation is switched from brightfield to darkfield. • Return of field and aperture diaphragms to their original position when observation is switched back from darkfield to brightfield.

45˚ 54

This universal illuminator supports the CFI60-2 / CFI60 optical system.

25.5

370

Universal Epi-Illuminator LV-UEPI-N

510

LV-UEPI2A

(g)

MUE35200

105

Weight

Unit: mm

79.5

length Physical depth W.D. (mm) Focal (mm) of focus (µm)

Conﬁgured with LV-LH50PC Precentered Lamphouse

400

113.3

Objectives (Magniﬁcations)

Cable length: 220mm (Measured from where it enters cord bushing to where it enters connector)

ø51

CFI 60-2/CFI 60 Objectives

ø21

CFI L Plan EPI 100×CRB Unit: mm

Code No.

45˚

105

60.3

4 26° 6.5 5°

6.4

CFI L Plan EPI 100×CRA

110

ø14.5 ø19.8 ø24.8 ø27 ø32.5

1.8

ø11.5 ø19.8 ø24.8 ø27 ø32.5

25.5

370

81.3

(16 )°

(0.7) 13 14.3

60.1 0.3(CG)

25° 6.5 45°

CFI L Plan EPI 50×CR

58.2

(16 )°

13 22

W.D.=1.1

ø13 ø18.8 ø23.3 ø26 ø31.5

W.D.=1.2

(0.7) 14.3

30°

0.6(CG)

45°

60.2

58.7

(7 )°

(0.5)

56.1

3 6.5 15.5 3.1

0.6(CG)

CFI L Plan EPI 20×CR

W.D.=3.5

W.D.=10.5

ø31.5

ø29.5 M25×0.75

510

LV-UEPI2

0 ø4 4 ø5

ø20

ø35.5 ø34 ø29.5 ø28.5 M25×0.75

ø34

14.5

° 11

60.2

5 11.7 10.8

(0.5)

ø29.5 M25×0.75

21.1 (45 )°

49.1

ø33.5

ø35.5

0.9(CG)

ø33.5 ø32 ø29 ø27 M25×0.75

2.5 6.2

ø35

This universal illuminator supports the CFI60-2 / CFI60 optical system.

CFI L Plan EPI CR

LV-LH50PC Precentered Lamphouse YM-NCB ø25mm Filter Slider NCB11 YM-ND ø25mm Filter Slider ND4/ND16 LV-HL50W 12V50W Halogen Lamp LV-PO Polarizer L-AN Anaryzer L-DIC DIC Slider YM-GIF ø25mm GIF Filter YM-EPI 3-3PIN Extension Cable

Unit: mm

Code No.

Weight (g)

MBE65275 MBN66750 MBN66760 MXA23045 MBN66923 MBN66922 MBP60170 MBN66730 MXA29002

800 31 36 7 60 14 120 25 100

Weight

2,400g Items

LV-LH50PC Precentered Lamphouse YM-NCB ø25mm Filter Slider NCB11 YM-ND ø25mm Filter Slider ND4/ND16 LV-HL50W 12V-50W Halogen Lamp LV-PO Polarizer LV-FLAN FL Analyzer LV-LP λ Plate C-FL UV-2A

2,570g

Code No.

Weight (g)

MBE65275 MBN66750 MBN66760 MXA23045 MBN66923 MBN66925 MBN66924 MBE41201

800 31 36 7 60 20 15 40

Items C-FL V-2A Filter Cube C-FL BV-2A Filter Cube C-FL B-2A Filter Cube C-FL G-2A Filter Cube LV-PAB Polarizer/Analyzer Cube YM-GIF ø25mm GIF Filter YM-EPI 3-3PIN Extension Cable L-DIC DIC Slider

Code No.

Weight (g)

MBE42101 MBE43101 MBE44501 MBE45501 MBE64100 MBN66730 MXA29002 MBP60170

40 40 40 40 45 25 100 120

TI-PS100W/A Power Supply

Revolving Nosepieces

This transformer is for the LV-UEPI-N, LV-UEPI2, and LV-UEPI2A universal reﬂection illuminators.

Eight types of nosepieces – either manual or motorized – are available to choose from.

300

105.8

15˚

24.

93.7

50.6

6 ø10

ø127

C-N Sextuple Nosepiece MBP71315/450g

23˚

93.7

55.7

51.1

149.3

55.7

142

149.3

317

14 0

74.9

1 40

81.

30.9

15˚

LV-NBD5 BD Quintuple Nosepiece ESD MBP60125/580g

LV-NU5 Universal Quintuple Nosepiece ESD MBP60115/580g

Unit: mm 15˚

149 93.7

70.5

91.7

LV-EPILED White LED Illuminator

55.7

)

55.7

)

93.7

)

(182

149 55.7

147.1

(89)

160 100

(182

Weight (g)

(182

Code No. MBF11250/MBF11300 MXA29002

Cable length: 160mm from ﬁxed portion

(89)

Items Power Cord BJ/BE YM-EPI 3-3PIN Extension Cable

15˚

Cable length: 160mm from ﬁxed portion

TI-PS100W/A Power Supply MEF52251/2000g

This LED illuminator supports the CFI60-2 / CFI60 optical system. • Light-weight, compact white LED illuminator developed specially for brightﬁeld observation. • Operated via an attached power source controller. • Can also be externally controlled via the LV-ECON E controller. • Includes ND4 and ND16 ﬁlters. • Standard cable length : 2.8m

ø43.5 ø127

LV-NU5A Motorized Universal Quintuple Nosepiece ESD MBP60105/800g

266.7 207

ø43.5 ø127

LV-NU5AC Motorized Universal Quintuple Nosepiece MBP60102/800g

LV-NU5AI Motorized Universal Quintuple Nosepiece MBP60107/890g

6.3

(89)

20˚

22.5

53.6 48

48 88

65.5

ø86 50

110

ø51.2

125 41

ø11

Unit: mm 28

ø43.5 ø127

10˚ 48

100.5

93.7 15

LV-EPILED White LED Illuminator MBE60500/1500g

) (182

149 55.7

) (103

ø8.85

15˚

LV-NU5I Intellijent Universal Quintuple Nosepiece ESD MBP60108/600g

ø16

100

111

LV-NCNT-N Motorized Nosepiece Controller MBF65331/400g

P-N Centering Quintuple Nosepiece MDP44205/600g

(Standard cable length : 1.5m)

Unit: mm Items

116.8

Power Cord BJ/BE AC Adapter 2

Controller

Code No.

Weight (g)

MBF11250/MBF11300 MQF52055

160 200

Items Power Cord BJ/BE AC Adapter 2/CN

Code No.

Weight (g)

MBF11250/MBF11300 MQF52055

160 200

CF IC EPI Plan ELWD Long Working Distance Objectives for Brightﬁeld Use CF&IC Optical System

ø26

ø24

ø20.32,1inch P=36

45 ø25

ø20.32,1inch P=36

200×

1.0

3.50

200×

1.25

3.50

MUL03501

CF IC EPI Plan ELWD 50×A

0.55

8.7

0.91

105

500×

0.4

1.43

500×

0.50

1.43

MUL03901

CF IC EPI Plan ELWD 100×A

0.80

2.0

0.43

120

1000×

0.2

0.61

1000×

0.25

0.61

ø28 ø25 ø20.32,1inch P=36

Weight (g)

W.D.=4.7

3.3

24˚

1.3 0. 7 C 0. 7

W.D.=13.8

14.7

45 W.D.=20.5

ø21 ø25

ø22.6 ø24 ø27

ø22.6 ø24 ø25.6 ø27

ø14.2 ø24 ø27

CF IC EPI Plan SLWD 10×A

CF IC EPI Plan SLWD 20×A

CF IC EPI Plan SLWD 50×A

CF IC EPI Plan SLWD 100×A

CF IC EPI Plan 100×A

Widefield CF eyepieces Ultra-Widefield CFI eyepieces CFWN 10× (F.N. 20) CFI UW10× (F.N. 25) Total magnifi- Actual field Depth of Total magnifi- Actual field Depth of cation (M) of view (ømm) focus (µm) cation (M) of view (ømm) focus (µm)

1.3 12 45 C 0. ˚ 5

ø21.5

W.D.=20.3

ø18.8

ø27

13.7

ø16.8

ø21.5

3 0˚

ø18.8

2.5 2.2

1.4

W.D.=0.3

20˚

6 45 0˚ ˚

ø28 ø25 ø20.32,1inch P=36 7 5.3

ø26 ø24 ø20.32,1inch P=36

ø5.4 ø14

length Physical depth W.D. (mm) Focal (mm) of focus (µm)

W.D.=2.0

˚ 45

3 0˚

2 2.5 1 2

1.72

W.D.=0.54

30˚

45 ˚

60 ˚

11.0

2.5

0.40

CF IC EPI Plan ELWD 20×A

W.D.=3.1

(g)

MUL03201

49.7

5 7 8

Weight

10.4 60 ˚

length Physical depth W.D. (mm) Focal (mm) of focus (µm)

Ultra-long working distances. Particularly useful when observing the bottom of a depression in the sample.

ø13

CF IC EPI Plan 50×A

ø8.5

CF IC Objectives Objectives (Magniﬁcations)

CF IC EPI Plan ELWD 100×A

CF IC EPI Plan SLWD Ultra-long Working Distance Objectives for Brightﬁeld Use

Unit: mm Code No.

CF IC EPI Plan ELWD 50×A

CF IC Objectives

ø27

CF IC EPI Plan 20×A

ø25

Code No.

5 0.

5 0. 46.8

W.D.=16.5

1.5

ø28

ø25

7 33.8 8 13.5 45 ˚

ø28

ø24

ø26

ø22

ø14 ø19

Objectives (Magniﬁcations)

CF IC EPI Plan 10×A

ø15

ø17 ø22

Unit: mm

ø25

CF IC EPI Plan 5×A

45˚

ø17 ø25

CF IC EPI Plan ELWD 20×A

ø22

ø25

CF IC EPI Plan 2.5×A

C 16.5

1.3

5.3

7 4

W.D.=22.5 ø25

W.D.=8.8

45˚

4.5

16.7

11.5

5 0.

ø16

8 23.5

W.D.=8.7

ø20.32,1inch P=36

W.D.=11

ø20.32,1inch P=36

7 8 ø24

ø20.32,1inch P=36

ø26

45 ˚

ø24

ø26

ø24

ø26

CF&IC objectives for brightﬁeld use.

ø26

Brightﬁeld Objectives

CF IC EPI Plan

Extended working distances facilitate observations of samples with irregular surfaces.

Unit: mm Code No.

CF IC Objectives

MUL00031

CF IC EPI Plan 2.5×A

0.075

8.80

80.00

48.89

108

25×

8.00

125.08

25×

10.00

125.08

MUL00051

CF IC EPI Plan 5×A

0.130

22.50

40.00

16.27

50×

4.00

38.25

50×

5.00

38.25

MUL00101

CF IC EPI Plan 10×A

0.300

16.50

20.00

3.06

100×

2.00

7.82

100×

2.50

7.82

MUL04101

CF IC EPI Plan SLWD 10×A

0.21

20.3

6.24

100×

2.0

13.04

100×

2.50

13.04

MUL00201

CF IC EPI Plan 20×A

0.460

3.10

10.00

1.30

120

200×

1.00

2.85

200×

1.25

2.85

MUL04201

CF IC EPI Plan SLWD 20×A

0.35

20.5

2.24

200×

1.0

4.29

200×

1.25

4.29

MUL00501

CF IC EPI Plan 50×A

0.800

0.54

4.00

0.43

145

500×

0.40

0.79

500×

0.50

0.79

MUL04501

CF IC EPI Plan SLWD 50×A

0.45

13.8

1.36

110

500×

0.4

1.99

500×

0.50

1.99

MUL00901

CF IC EPI Plan 100×A

0.950

0.30

2.00

0.30

140

1000×

0.20

0.46

1000×

0.25

0.46

MUL04901

CF IC EPI Plan SLWD 100×A

0.73

4.7

0.52

135

1000×

0.2

0.71

1000×

0.25

0.71

Objectives (Magniﬁcations)

length Physical depth W.D. (mm) Focal (mm) of focus (µm)

Weight (g)

CF IC EPI Plan DI

Double beam interference objectives that have large numerical aperture, long working distance and high optical performance.

0.95

0.35

4.00

0.3

170

500×

0.40

0.61

500×

0.50

0.61

MUT10101

CF IC EPI Plan Apo 100×A

0.95

0.32

2.00

0.3

170

1000×

0.20

0.46

1000×

0.25

0.46

MUT10153

CF IC EPI Plan Apo 150×B

0.95

0.20

1.33

0.3

160

1500×

0.13

0.40

1500×

0.17

0.40

* This product have been discontinued, and only available from stock.

ø28.5 ø27.5 ø26 ø23.4 ø20.32,1inch P=36 2.8

length Physical depth W.D. (mm) Focal (mm) of focus (µm)

5 5.5 5

(g)

19.78

3.06

125

100×

2.00

3.04

100×

2.50

3.04

MUL40201

CF IC EPI Plan DI 20×A

0.40

4.7

9.97

1.72

130

200×

1.00

1.71

200×

1.25

1.71

MUL40501

CF IC EPI Plan DI 50×A

0.55

3.4

4.00

0.90

200

500×

0.40

0.90

500×

0.50

0.90

MUL40900

CF IC EPI Plan DI 100×

0.70

2.2

2.00

0.56

200

1000×

0.20

0.56

1000×

0.25

0.56

Interference Objectives ø44 ø31

Weight (g)

0.40

(10.18)*

1.72

140

200×

1.00

3.50

200×

1.25

3.50

CF IC LCD Plan CR 50×

0.55

(7.78)*

0.91

170

500×

0.40

1.43

500×

0.50

1.43

Objective magniﬁcation

Coverglass thickness 1.2-0.6mm

20×

10.11 - 10.54

50×

7.71 - 8.15

38 31.1 87

18.4

39.6

ø19

20 10.2

13.5 16

49.9

CF IC EPI Plan TI 5×A

CF IC Objectives Objectives (Magniﬁcations)

ø23

D20.32 1/P=36

Unit: mm

8.5

51.1

Code No.

C-OA 15mm Adapter MXA20750/45g

22.6

Shutter closed (brightﬁeld observation)

Unit: mm

C O

4.5

An adapter for attaching CF & IC objectives to the C-N Sextuple Nosepiece (page 17) that supports the CFI optical system.

ø38 ø39

25.1 ø29

3.5

CF IC EPI Plan TI 2.5×A

M25×0.75

14.7 60 ˚

Working distance varies by coverglass thickness (W.D. : mm)

ø30

C-OA 15mm Adapter 0.3

* Figures in parentheses are the working distance for a coverglass thickness of 1.1mm. The correction range for cover glass thickness is 1.2 to 0.6mm at all magniﬁcations. The working distance varies by coverglass thickness. (See table below)

80.1

26.6

CF IC LCD Plan CR 20×

MUL50500

MUL50200

Unit: mm

24.5 ø20.32,1inch P=36

49 35.4

6.9

ø31 5.8

0.8

M27×0.75

6.8

5.8

6.9

ø44

20.8

length Physical depth W.D. (mm) Focal (mm) of focus (µm)

7.4

W.D.=9.3

W.D.=2.0

0.30

Objectives (Magniﬁcations)

0.4

CF IC EPI Plan DI 10×A

ø45

CF IC LCD Plan CR 50×

CF IC Objectives

3.5

MUL40101

W.D.=10.3

Code No.

11.5 (17.4)

Weight

(Standard with roundness)

C.G.t=1.1

CF IC LCD Plan CR 20×

(47.9)

CF IC EPI Plan DI 100×

˚ 45

ø26.5 ø28.5

W.D.=3.4

CF IC EPI Plan DI 50×A

CF IC Objectives

45.38

W.D.=7.78

5 11.3

4.4 2.5 4.5 5.6 4.5

35˚

CF IC EPI Plan DI 20×A

CF IC EPI Plan TI

ø17.8 ø22 ø26.5 ø28.5

20 °

5 (46.6)

5.15

ø27.8 ø31

Unit: mm

0.9

41.5

1.9

13.1

45.38

W.D.=10.18

4.4 4.5

ø30

˚ 60

5.6 4.5

9.5

34.1

11.3

2.8

ø28.5 ø27.5 ø26 ø23.4 ø20.32,1inch P=36

ø13.5 ø15.5

ø26

Objectives (Magniﬁcations)

for LCD Inspection

These objectives, developed specially for LCD inspection, enable the observation of a clear image under the coverglass.

13.1

W.D.=7.4

CF IC EPI Plan DI 10×A

Code No.

CF IC LCD Plan CR

5 5 45.3 23

22.5 5.1

CF IC EPI Plan Apo 50×A

ø27

(g)

MUT10051

ø22 ø26

ø14

85 ˚

Weight

ø10 ø21.6

0.6

length Physical depth W.D. (mm) Focal (mm) of focus (µm)

ø10 ø17.5

Unit: mm

5.8

Objectives (Magniﬁcations)

40˚

CF IC EPI Plan Apo 150×B

ø27 ø20.32,1inch P=36

ø20.32,1inch P=36

5.3

CF IC EPI Plan Apo 100×A CF IC Objectives

50 ˚

16˚

CF IC EPI Plan Apo 50×A Code No.

45 60 ˚

W.D.=0.2

25 4.8 3 1.1

1.8

60 ˚

1.7

16˚

4.8

W.D.=0.32

45 W.D.=0.35

25 2.5 2.15

ø18.8 ø28

ø26

˚ 60

ø20.8 ø29

ø33

ø25 ø20.32,1inch P=36

ø5.4 ø13 ø18.8 ø27

45˚

ø13

5 1. C

ø16

ø35

ø28

5.3

ø20.32,1inch P=36

ø34 ø28

0.5

ø28 ø25

45˚

49.6

ø28 ø25 ø20.32,1inch P=36

W.D.=4.7

ø29 ø26.7 ø25 ø20.32,1inch P=36

ø30 ø25 ø20.32,1inch P=36

Apochromat-type objectives for brightﬁeld use virtually eliminate chromatic aberration and feature excellent resolution.

Double Beam Interference Objectives

(16.4)

High-Resolution Brightﬁeld Objectives

CF IC EPI Plan Apo

length Physical depth W.D. (mm) Focal (mm) of focus (µm)

Weight (g)

MUL42031

CF IC EPI Plan TI 2.5×A*

0.075

10.3

48.5

440

25×

8.00

48.6

MUL42051

CF IC EPI Plan TI 5×A

0.13

9.3

16.2

280

50×

4.00

16.2

* 2.5×A supported up to a ﬁeld number of ø22.

50×

5.00

16.2

CM-10A/CM-10L

CM-20A/CM-20L

• Basic model with a tube lens focal length of f/200mm (1×)

ø40

4-M4 depth 5

C-mount ﬁxing screw

(Light guide adapter ﬁxing screw)

1-M3

(installation screw)

TV monitor

CCD camera with C-mount

(Light guide installation hole)

Sample side

CM-70L

CM-30A/CM-30L • Compact model based on the CM-10 that features a short tube length.

(Light guide installation hole)

1-M3 (Light guide ﬁxing screw)

4-M4 depth 5

17.526

ø54

1-M3

(Light guide ﬁxing screw)

42.3 5

156.1

ø7

ø40

Objective port

(installation screw)

ø8 Light guide adapter (exchange type)

(1×)

4-M4 depth 5 (installation screw) (same position on the opposite side)

102.2

Sample side

(0.5×)

2-M3 (Light guide adapter ﬁxing screw)

ø27 22

(1×)

ø37

3-M3

Objective port

42.3

C-mount port

C-mount ﬁxing screw

ø40

2-M3 (Light guide adapter ﬁxing screw)

Image formation

1× plane

ø38

103.3

(installation screw) (same position on the opposite side)

ø27 22

ø23

4-M4 depth 5 30

30 6

C-mount port

(installation screw) (same position on the opposite side)

CM-10A:45 CM-10L:60

CM-10A CM-10L

CM-5A

CM-30A CM-30L

(0.4×/1×)

73 C-mount 0.4×

ø23

4-M4 depth 5

C-mount ﬁxing screw

CM-70L

Image formation plane

C-mount

1-M3

(Flange focal distance: 38.48mm)

ø31

• Enables simultaneous observation at different imaging magniﬁcations (1×/0.4×). For CFI60-2 / CFI60 EPI Plan.

17.526

ENG-mount*2

CM-20A CM-20L

17.526

ø7

CM-10A:45 CM-10L:60

CCD camera with ENG-mount

121.5

Sample side ø8 Light guide ø7 adapter (exchange type) (Light guide installation hole)

Objective port ø8 Light guide adapter (exchange type)

(Light guide ﬁxing screw)

Objective port

2-M3 (Light guide adapter ﬁxing screw)

1-M3

42.3

ø40 ø30

ø23 ø27 22

220.5

42.3 5

2-M3

(Light guide ﬁxing screw)

(installation screw)

8-M4 depth 5 (installation screw) (same position on the opposite side)

ø37

ø23

(installation screw) (same position on the opposite side)

4-M4 depth 5

ø37

C-mount ﬁxing screw

2-M3

8-M4 depth 5

2-M3

C-mount port

ø38

• Ultra-compact and lightweight. • C-mount video cameras having 1/4 to 1-inch CCDs are attachable as standard. ENG-mount video cameras can also be mounted via optional ENG-mount adapters. • The Koehler Illumination Optical System offers a uniformly bright viewﬁeld. • Tread holes ideally located on the surface of the microscope facilitate attachment of virious auxiliary equipment.

Image formation plane

C-mount

C-mount port

CM-10A:45 CM-10L:60

Image formation plane

C-mount

ø27

Ultra-compact reﬂected microscopes designed for integration into production lines to provide onmonitor observations.

• Features a tube shorter than the CM-10, by setting the tube lens focal length at f/100mm (0.5×)

17.526

CM-Series Compact Reﬂected Microscopes

ø7(ø8) (Light guide installation hole)

Sample side

ø8 light guide adapter (exchange type)

CF IC EPI Plan*1

CFI60-2 / CFI60 EPI Plan*1

ø8

26.3

ø8 Light guide Adapter

ø21

Objectives for measuring microscopes*1

(Light guide installation hole)

*1 Use a objective for measuring microscopes on the CM-5A and a CF IC EPI Plan lens on other A series units. In addition, use an EPI Plan lens from the CFI60-2 / CFI60 series on L series units. *2 The ENG-mount for CM is a made-to-order product. When ordering, please inform us of the ﬂange focal distance of the camera that will be used. Unit: mm CM-20A/CM-20L

CM-10A/CM-10L

CM-30A/CM-30L

CM-70L C-mount

Camera mount

C-mount (ENG-mount possible with option)

Tube lens focal length

200mm

100mm

200mm

1×

0.5×

1×

0.4×/1×

Same as objective magniﬁcation

Objective magniﬁcation × 0.5

Same as objective magniﬁcation

Same as objective magniﬁcation and 0.4×

Tube lens magniﬁcation Magniﬁcation on CCD surface

A series: CF IC EPI Plan objectives / L series: CFI60-2 / CFI60 EPI Plan objectives

Compatible objectives*

Koehler illumination (high-quality telecentric illumination)

Illumination optical system Attachment surfaces Dimensions (W×D×H); Weight (Approx.)

80/200mm

3 40 × 40 × 224.5mm ; 440g

40 × 40 × 125.5mm ; 290g

42 × 72 × 107.3mm ; 400g

40 × 117 × 156.1mm ; 690g

Manufactured by: Nikon Engineering Co.,Ltd.

* On the above-mentioned A series and L series, use CF IC EPI Plan and CFI60-2 / CFI60 series EPI Plan Objectives, respectively.

2nd Objective Lens Units

Image formation plane

(Light guide adapter ﬁxing screw)

1-M3 (Light guide ﬁxing screw)

ø40 182.5

89.2

Built-in Type 2nd Objective Lens Unit ø7(ø8)

CM-5A

(Light guide installation hole)

ø28 ø34

(installation screw)

8-M4 depth 5 (installation screw) (same position on the opposite side)

ø37

4-M4 depth 5

2-M3

ø23

2-M3

Used to focus parallel light beams coming through CFI60-2 / CFI60 objectives and CF&IC objectives onto the image plane.

C-mount port

ø38

Objective port

Measuring microscope objectives

Compatible objectives

Koehler illumination (high-quality telecentric illumination)

Illumination optical system

Image plane

40 × 40 × 186.5mm ; 410g

Dimensions (W×D×H); Weight (Approx.)

Sample side

• Compatible with CFI60-2, CFI60 and CF&IC inﬁnity objectives. • Focal length: f/200mm. • To obtain the optimal objective performance, keep the distance between the lens unit and the objective's shoulder within 100-200mm as shown in the diagram at right.

Attachment surfaces

W.D.

Measuring microscope objectives

Tube lens focal length 126

Light guide adapter (exchange type)

C-mount (ENG-mount possible with option)

Camera mount

Built-in Type 2nd Objective Lens Unit MXA20696/70g

151.2

C-mount

C-mount ﬁxing screw

17.526

CM-5A

Unit: mm

ø36 f7

Manufactured by: Nikon Engineering Co.,Ltd.

-0.025 -0.050

ø43

M26×0.75

ø43

M26×0.75

21.85

5 0. C

Objectives for Measuring Microscopes ø43

M26×0.75

ø47

20×A

50×A

100×

1×

3×A

5×A

10×A

20×A

50×A

100×

158.2

66.2

42.3

20.2

10.98

4.3

2.15

0.03

0.09

0.13

0.2

0.4

0.55

0.75

W.D. (mm)

75.5

20.3

15.1

4.1

Depth of focus (µm)

322

1.8

0.5

650

600

550

Weight (g)

150

200

MQD42000 C-mount TV Adapter A (optional)

Image plane

ø38

146.7 162.2 175.7

100

86.5

ø38

ø68

ø53 ø68

126 120

Image plane

ø53

Unit: mm

Focal length (mm)

Parfocal distance (mm)

MQD42000 C-mount TV Adapter A (optional)

TV Relay Unit 1× MXK60147/500g

ø38

4.1

15.1

ø38

20.3

ø38

TV-Use 2nd Objective Lens Unit 0.5× MXA20714/100g

• Image plane magnification: 0.5×; Focal length: f/100mm. • Image plane magnification: 1×; Focal length: f/200mm. • With a field number of 11mm, this lens unit can be used with CCD cameras smaller than 2/3-inch types. • Distance between the lens unit and the objective's shoulder: 60-160mm (110mm optimum). • Compatible with Universal Epi-Illuminators (LV-UEPI-N, LV-UEPI2, LV-UEPI2A, and LV-EPILED).

126

129.4

TV-Use 2nd Objective Lens Unit 0.5×/ TV Relay Unit 1×

126

118.4

100 ~ 200 126

10×A M26×0.75

126

Unit: mm

48.0

5×A ø47

M26×0.75

113.2

M26×0.75

Objective point ø35.5

3×A ø47

99.6

83.7 ø34

75.5

1×

126

ø34

126

ø34

84.6

M38×0.5

Unit: mm

Sleeve diameterø (mm)

Filters

Eyepiece Tubes/Double Port/Straight Tubes

A color balance compensation ﬁlter and neutral density ﬁlter are available.

These lens tubes can be combined with illuminators such as the LV-UEPI, LV-UEPI2, LV-UEPI2A and LV-EPILED. The trinocular eyepiece tube supports both ultrawide and wide ﬁelds of view with a change of the eyepiece lens. 192.7

65.5 ø60

264.6

ø50

137

ø52

138

30 ˚

ø59

E.P.

GIF Filter

NCB11 Filter

Allows only a green spectrum near the 546nm wavelength to pass through. Effective for increasing the contrast of monochrome photographs and black-and-white TV images.

This compensation filter maximizes the color reproduction of daylight-type color film, when the halogen lamp voltage of the brightfield light source is set to 9V.

204

C-TT Trinocular Tube T

ND Filters

C-mount

91 42.8

131

Straight Tubes ø52 ø51

ø59 ø50 ø52 30

ø52

ø38 ø59

57.5

Y-T TV Tube MBB73520/250g ø51

Installed between the epiilluminator and the trinocular tube, the double port enables simultaneous attachment of CCTV and 35mm cameras.

Unit: mm

285.5 175

50.5

ø12

Double Port

36 25

MBN66760 MBN66730

C-TB Binocular Tube

76.5

YM-ND ø25mm Filter Slider ND4/ND16 YM-GIF ø25mm GIF Filter

25˚ 74

Weight (g)

MBN66750

100

3.5

Items

200

Code No.

YM-NCB ø25mm Filter Slider NCB11

C-TEP2 DSC Port For Ergonomic

E.P.

13.5

ø25mm Filter Slider

160

40)

C-TE2 Ergonomic Binocular Tube

* The numbers (xx) in NDxx signify the light reduction. For example, 4 means a 1/4 reduction and 16 and 1/16 reduction.

(0~

25˚(10˚~30˚)

190.5 (174.5~231.4)

198

This ﬁlte such as illumination light and spectral properties (color balance).

E.P.

ø38 ø52

ø40 ø50

V-T Photo Adapter MAB53410/190g

LV-TV Tube Adapter MBB63435/100g

8.5

46.5 67

700.0

9.3

600.0

C-TF Trinocular Tube

ø43 ø30

500.0

169 .6 ( 159 40mm .6~ 199 10mm .6) 0mm

82.8

400.0

25˚

0.0

157.3 (92.6~192.3) 10˚

700.0

600.0

100 83

500.0

204

LV-TT2 Tilting Trinocular Tube

247

400.0

100 83

ø51 202.5

LV-TI3 Trinocular Tube ESD

0.0

104

75 98.5

20˚

73.7

54.5 82 92.5 103 118

20˚

96.8

ø51 60

ø59

E.P.

55 4 42.5

% 100.0

2 5˚

% 100.0

Illuminators

ø38

Y-TV55 TV Tube 0.55x MBB73550/300g

These attachments are used to change the format of the straight tube of a trinocular tube.

Unit: mm E.P.: Eyepoint Code No.

Items

Weight (g)

Type

MBB63425 MBB61000 MBB93100 MBB93110 MBB93800 MBB92100

LV-TI3 Trinocular Tube ESD LV-TT2 Tilting Trinocular Tube C-TF Trinocular Tube F C-TT Trinocular Tube T C-TE2 Ergonomic Binocular Tube C-TB Binocular Tube

1800 2580 1850 2260 2100 950

Siedentopf Siedentopf Siedentopf Siedentopf Siedentopf Siedentopf

Image type Field number Tube's tilt angle Beam split ratio (observation:photo) Interpupillary distance Erect Erect Inverted Inverted Inverted Inverted

22/25 22/25 22/25 22/25 22 22

20˚ 10˚~ 30˚ 25˚ 25˚ 10˚~ 30˚ 25˚

100:0/0:100 100:0/20:80 100:0/0:100 100:0/20:80/0:100

50~75mm 50~75mm 50~75mm 50~75mm 50~75mm 50~75mm

Focal distance of tube in the inﬁnity corrected optics: 200mm, Equipment magniﬁcation:1×, Diameter of the circular dovetail mount to the body: 51mm.

MBB96800 MBB74100 MBB74105

C-TEP2 DSC Port For Ergonomic Y-IDP Double Port Y-IDP Double Port 0/100

350 1300 1300

Specially for C-TE Binocular Ergonomic Tube, Equipment magnification: 0.7×, Beamsplit ratio (binocular: port) 50:50/100:0 Equipment magnification: 1×, Beamsplit ratio (observation: photo) 55:45/100:0 Equipment magnification: 1×, Beamsplit ratio (observation: photo) 100:0/0:100

* For attaching TV/video equipment to eyepiece tubes or Double Port, refer to the system diagram on page 3. * CFI UW 10× and CFI UW 10×M are not suitable for use.

Eyepieces

Sleeve diameterø (mm)

These eyepieces have a 30mm sleeve diameter and maximize the performance of objective lenses.

Sleeve diameterø (mm)

These eyepieces have a 23.2mm sleeve diameter and maximize the performance of objective lenses. ø35

ø34

ø35

ø40

E.P.

E.P

E.P 17

E.P

ø34

ø30

ø39

LV-10×ESD

CFI 10×

CFI 10×M

14.5 18.1 22.5

ø23.2 ø32

CFWN 10×

CFWN 15×

ø35

32.5

60 ø6 4

ø30

(standard)

31.2

(standard)

22.5

E.P.

ø35 E.P.

31.5

22.5

31.5

15.1 22.5

(standard)

ø35

ø30

22.5

ø23.5

E.P.

E.P

(standard)

ø34

(standard)

E.P

ø30

10mm (in 100um increment)

ø38.8

CFI 10×CM

CFI 10×CM eyepiece reticle

CFI 12.5×

ø34

ø23.2 ø32

CFWN 10×M

E.P 17

E.P

ø35

ø23.2 ø32

CFWN 10×CM

121.6

ø39

Clamp screw

ø34

ø50

Eyepiece ring (M30-50)

22.5

ø30

ø38.8

ø39

CFI 15×

CFI UW10×

CFI UW10×M

ø23.2 ø42

22.5

17.5

(standard)

15.3

E.P

Filar Micrometer 10×N (Includes an objective micrometer to initialize the objective's magniﬁcation.)

Adapter for CFN Filar Micrometer Unit: mm E.P.: Eyepoint Code No. MBJ62105 MAK10100 MAK11100 MAK12100

Items (ﬁeld number) LV-10×ESD CFI 10× CFI 10×M CFI 10×CM

(22) (22) (22) with Photomask (22) with crosshair reticle

Weight (g)

Code No.

70 75 80 77

MAK10120 MAK10150 MAK30100 MAK31100

CFI 12.5× CFI 15× CFI UW10× CFI UW10×M

Unit: mm E.P.: Eyepoint

Items (ﬁeld number)

Weight (g)

Code No.

(16) (14.5) (25) (25) with Photomask

63 48 100 105

MBJ20100 MBJ20150 MBJ21100 MBJ04102

Items (ﬁeld number)

Weight (g)

Code No.

Items (ﬁeld number)

CFWN 10× (20) 50 MBJ22100 CFWN 10×CM (20) with crosshair reticle CFWN 15× (14) 50 MXA23010 Adapter for CFN Filar Micrometer CFWN 10×M (20) with Photomask 50 Filar Micrometer 10×N Combinable with objectives from 10 to 100×. When using 100× objective, 0.01 banya reading at 0.1µm

Weight (g) 50 40 250

Glossary

CCTV Camera Adapters Both C-mount and ENG-mount types are available.

Working Distance (W.D.) and Parfocal Distanece Working distance is the distance between the top lens of the objective and the surface of the specimen (or the cover glass) when the specimen is focused. The distance between the objective's shoulder and the

Image plane U1-2A C-mount thread

Image plane

C-mount TV Adapter MQD12012/200g

ø30

1X Relay Lens MQD12011/100g

C-mount TV Adapter A MQD42000/180g

Relay Lens 1×l MQD12014/100g

Note:The ENG-mount TV Adapter and C-Mount TV Adapter are used in conjunction with the Relay Lens 1xl.

Note: The Relay Lens 1×l is not necessary.

30.8

13 13.8 ø40

C-0.7× DXM Relay Lens MQD42070/155g

Specimen

Numerical aperture is generally indicated by the equation below. 4

4 1.58

ø38

Working Distance (W.D.)

Numerical aperture (NA)

ø50 ø25.4

31.08

11.47

25.5

75 31

27.3

ø23.2

ø42 ø46

ENG-mount TV Adapter MQD12013/200g

64.5 91.8 95.8

61.3 64.3 27.3 ø42 ø47

ø48 Image plane

25.5

ø50 ø25.4

17.526

ø34

115

Image plane

17.526

ø31

inﬁnity objectives have a parfocal distance of 45mm, while its CFI60-2 / CFI60 objectives feature a parfocal distance of 60mm.

ø25.4

17.526

Image plane

ø63 ø42

Parfocal Distance

specimen (or the cover glass) when the specimen is focused is referred to as parfocal distance. Nikon's CF

Image plane

Where,

NA = n × sin θ

n = Refractivity of the substance existing between the specimen and the objective. (n=1 for air) sinθ = Angle that is formed by the optical axis and the light ray that passes to the extreme periphery of the objective lens.

Numerical aperture is the most important factor in judging the objective's resolving power, brightness, and depth of focus.

C-0.55× DS Relay Lens MQD42055/300g Note: For DS-Vi1 series.

Objective Lens

n=1 (air) Specimen

Resolving Power The closest proximity of two objects that can be seen as two distinct regions of the image. Resolving power is generally indicated by the equatuon below, where the larger the NA the greater the resolving power.

Resolving Power = 0.61 ×

Image plane Image plane

38 4

Depth of Focus (When observing with eyepieces)

ø44 ø54

ENG-mount for Zooming Lens* MQD12023/180g

C-mount Adapter/ CCTV Zooming Lens MQD12022/330g

ø23.1 ø42 ø53

ø42

Zooming Lens MQD12021/830g

ENG-mount Adapter 0.45×T* MQD41041/500g

122.8

ENG-mount Adapter 0.6×T* MQD41061/500g

The pupil diameter of the objective lens is expressed by the following equation:

Pupil diameter = 2 × f × NA

f = Focal distance of objective lens NA = Numerical aperture of objective

Refer

Total Magniﬁcation

C-mount Adapter 0.45× MQD42040/620g

116.8

When viewed on monitors Monitor observation magnification = objective's magnification × TV adapter magnification × monitor magnification

30.7

30.7 ø23.1 ø42 ø53

When viewed through eyepieces Eyepiece observation magnification (M) = objective's magnification × eyepieces magnification

27.3 100.1

84.8

λ = Light source's wavelength (generally 0.55μm) NA = Numerical aperture of objective M = Total magniﬁcation n = Refractivity of the substance existing between the specimen and the objective. (n=1 for air)

Pupil Diameter

C-mount Adapter 0.35× MQD51040/300g

n×λ n Depth of focus = 2 × (NA)2 + 7 × NA× M × 1000

Nikon Corporation Instruments Company / Nikon Instec Web site at http://www.nikon.com/instruments/

17 30.8 ø23.1 ø42

power of the human eye varies from person to person, so does depth of focus. Depth of focus is indicated by the equation below.

17.526

ø32

Image plane

ø23.1 ø42 ø53

These ENG-Mount adapters feature a built-in reduction relay lens, enabling areas equivalent to those seen through the eyepiece to be viewed on the monitor. Adapters for 1/2-inch (0.45×) and 2/3-inch (0.6×) CCD cameras are available. * This products have been discontinued, and only available from stock.

17.526

Note: The ENG Mount for Zooming Lensand C-Mount Adapter/CCTV Zooming Lens are used in conjunction with 0.9-2.25× TV zoom lenses. * ENG Mount for Zooming Lens have been discontinued, and only available from stock.

Image plane

30.2

22.8

12.3 ±0.05

54.3 42.8

111.2

130.2

89.8

The range in fron

ø42

ø44 ø57

Where, λ = Light source's wavelength (generally 0.55μm) NA = Numerical aperture of objective

3.3

ø57

λ NA

Monitor magniﬁcati

ø23.1 ø42 ø53

Imaging device size

C-mount Adapter 0.6× MQD42060/650g

These C-mount adapters f Adapters for 1/3-inch(0.35×), 1/2-inch(0.45×), and 2/3-inch(0.6×) CCD cameras are available.

Monitor magniﬁcation Monitor Size

Type

Diagonal length

Longer side

Shorter side

1/3-inch

6.0mm

4.8mm

3.6mm

Imaging device size

9-inch

14-inch

20-inch

1/2-inch

8.0mm

6.4mm

4.8mm

1/3-inch

38.1×

59.2×

84.6×

2/3-inch

11.0mm

8.8mm

6.6mm

1/2-inch

28.6×

44.4×

63.5×

2/3-inch

20.8×

32.3×

46.2×

Unit: mm

Speciﬁcations and equipment are subject to change without any notice or obligation on the part of the manufacturer. September 2013 ©2006-2013 NIKON CORPORATION N.B. Export of the products* in this catarlg is controlled under the Japanese Foreign Exchange and Foreign Trade Law. Appropriate export procedures shall be required in case of export from Japan. *Products: Hardware and its technical information (including software)

NIKON CORPORATION Shin-Yurakucho Bldg., 12-1, Yurakucho 1-chome Chiyoda-ku, Tokyo 100-8331 Japan phone: +81-3-3216-2384 fax: +81-3-3216-2388 http://www.nikon.com/instruments/

NIKON METROLOGY, INC.

12701 Grand River Avenue, Brighton, MI 48116 U.S.A. phone: +1-810-220-4360 fax: +1-810-220-4300 E-mail: sales_us@nikonmetrology.com http://www.nikonmetrology.com/

NIKON METROLOGY EUROPE NV Geldenaaksebaan 329, 3001 Leuven, Belgium phone: +32-16-74-01-00 fax: +32-16-74-01-03

NIKON SINGAPORE PTE LTD.

NIKON METROLOGY UK LTD.

NIKON MALAYSIA SDN. BHD.

E-mail: sales_uk@nikonmetrology.com

NIKON INSTRUMENTS KOREA CO., LTD.

FRANCE phone: +33-1-60-86-09-76 fax: +33-1-60-86-57-35

SINGAPORE phone: +65-6559-3618 fax: +65-6559-3668 MALAYSIA phone: +60-3-7809-3688 fax: +60-3-7809-3633 KOREA phone: +82-2-2186-8400 fax: +82-2-555-4415

NIKON INDIA PRIVATE LIMITED

Email: sales_europe@nikonmetrology.com http://www.nikonmetrology.com/

INDIA phone: +91-124-4688500 fax: +91-124-4688527

NIKON INSTRUMENTS (SHANGHAI) CO., LTD.

CANADA phone: +1-905-602-9676 fax: +1-905-602-9953

CHINA phone: +86-21-6841-2050 fax: +86-21-6841-2060 (Beijing branch) phone: +86-10-5831-2028 fax: +86-10-5831-2026 (Guangzhou branch) phone: +86-20-3882-0550 fax: +86-20-3882-0580

Printed in Japan (1309-08) Am/M

NIKON CANADA INC.

NIKON INSTRUMENTS S.p.A.

ITALY phone: +39-055-300-96-01 fax: +39-055-30-09-93

Code No. 2CE-KXQH-7

UNITED KINGDOM phone: +44-1332-811-349 fax: +44-1332-639-881

NIKON METROLOGY SARL

E-mail: sales_france@nikonmetrology.com

NIKON METROLOGY GMBH

GERMANY phone: +49-6023-91733-0 fax: +49-6023-91733-229 E-mail: sales_germany@nikonmetrology.com