HIGH TECH & NATURE We provide the high technology & environment The leading company in business of contamination control
World
VISION “The leading company in business of contamination control �
+ ET
+ IT
+ BT
Professional corporation to purify semi-conductor manufacturing process, display manufacturing process and atmosphere environment
Table of Contents Gemvax & kael information ························································ 04 Product Information - Coating Resin ······················································· 08 Product Information - Chemical Filter ······················································ 10 Product Information - PLEATED Type ··················································· 14 Product Information - V-BANK Type, SEPARATED V-BED Type, TRAY Type, V-BED Type················ 16 Product Information - ROUND Type ······················································· 18 Chemical Filter Installation - FFU, Return Hall················································ 20 Chemical Filter Installation - OAC, Equipment··············································· 22 Chemical Filter Installation - LCD/ PDP, Semiconductor········································ 24 Environment System Field ······························································ 26
Corporation Profile ·Company Name : GemVax & KAEL Co.,Ltd. ·Establishment : Mar, 10, 1998 ·Representative : Lee Ike Woo ·Main office/factory : 894, Tamnip-dong, Yuseong, Taejeon, Korea ·R & D I n s t i t u t e : 1690-2, Shinil-dong, Daeduk-gu, Taejeon, Korea
Business Area
Global Clean Air Company
y Field
Material Fiel d:C oat
Se
s p la
·Bad smell / VOC removal system ·Filter for special air cleaner ·Removal of radioactive substance ·Military impregnated active carbon
ly st /D i
Environment System Field
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Semi/Display Field ·Chemical Filter [CA Filter] ·CY+1000,2000,3000,5000,6000 Series AL+1000,2000,3000,5000 Series ·Gas Scrubber [Resin] ·WFVOC(Water Fab Volatile Organic Compounds)
Core material
Awards and Recognitions ·OHSAS 18001 Certificate ·High technology company designation (Korea Ministry of Science and High Tech) ·ISO 14001:2004 Certificate ·Listed in KOSDAQ ·National Tax Service Commissioner Award for Excellent Taxpayer ·Selected as a technically innovated business (INNO-BIZ) ·Technical Innovation Golden Award (Prime Minister Award) ·ISO 9001:2000 Certificate
R&D Institute
GemVax & KAEL Group
GemVax & KAEL Daejeon, Korea
KAEL - GemVax Seongnam, Korea
Korea Stem Cell Bank Seoul, Korea
KSCB Yangsan, Gyeongnam
VaxOnco Seongnam, Korea GemVax Oslo, Norway Epimmune San Diego, USA
Main office/factory
www.kael.co.kr
04 I 05
GemVax & KAEL Main office Supplier facility
GemVax & KAEL R&D Institute
06 I GemVax & KAEL
‌to a wide range of customers
Sales & Distribution 1%
Semiconductor(Domestic)
38%
30%
Display(Domestic) 31%
Overseas The others
Global Network Netherlands
Germany
China
Japan
U.S.A
ASML
Infineon
Hynix-China SESS TS-LED SMIC
TKL(TEL) Canon Toshiba ELPIDA SOKUDO
Samsung C&T SAS Micron
Taiwan TSMC / UMC Promos Powerchip Rexchip PSC / AUO
Vietnam
Singapore
Malaysia
SEIKO
TECH SSMC Chartered AFPD Numonyx
Camfil 1' Silicon Silterra Infineon
* Global Clean Air Company
www.kael.co.kr
I 07
Product Information I Coating Resin
Chemical Filter : Raw Materials Coating Resin
Cl2 Inorganic adsorbent
HCl Inorganic adsorbent
PFC Resolution & catalyst
A/C(Impregnation)
A/C(Impregnation)
Cation Exchange Resin
Anion Exchange Resin
A/C(Impregnation)
Alumina & KMnO4
Ion Exchange Fiber
Make Everything
08 I GemVax & KAEL
Fundamental products Coating Resin(Impregnated Active Carbon) Features Features It is an active carbon that maximizes chemical active by adding specific chemical substances to the general active carbon and selectively absorbs and removes harmful substances or toxic substances. Application Features Field · Removal of harmful gas such as acid, chloride, neutral and radioactive gas · Water purifier to sterilize microbes · Catalysis for promoting chemical reaction
Coating Resin(inorganic Adsorbent) Features Features It is an active carbon that maximizes chemical active by adding chemical substances to inorganic adsorbent such as Alumina, Zeolite Application Features Field · Removal of toxic gas · Oxidation of catalysis · Selectively remove harmful substances or toxic substances in specific process
Application field GAS type Coating Resin
Target Gases NH3
CL2
HF
O3
H2 S
NOX
SOX
VOCS
CH3I
Active Carbon KIAC-01 KIAC-04 KIAC-05 KIAC-07 KIAC-14 Mixed Coating Resin Alumina • The others : TEOS, SiH4, DCS, PH3, NF3, BCl3, Cl2 removable
www.kael.co.kr
I 09
Product information I Chemical Filter
Pleat Type
V-BED Type
Round Type
Tray Type
V-Bank Type
V-BED Type (OPF)
Features - Have superior adsorbent efficiency for low-concentrated gas, and have an extended life. - Electric power expenses are reduced due to reduction of pressure loss. - Have superior endurance level and there is no concern that particles scatter during operation. - Loss of process may be reduced due to rapid delivery and A/S. - Various types of manufacturing are allowed upon customer request.
10 I GemVax & KAEL
Application field/Purpose Filter for removing chemical pollution substances such as NH3, O3, SOx, NOx, TOC and harmful gas in semiconductor and LCD/PDP manufacturing process.
Device precision, minuteness
Particle, Molecule Gas / Chemical Contaminant → Haze Phenomenon on the Wafer
Gate Oxide Layer Isolation, Corrosion..., → Badness of Layer Pattern on the Wafer 50
CA Filter (Chemical filter) 40 Conc .(ppb)
Medium Filter
Untreated air Medium Particulate
Hazardou s gase s
HEPA Filter
30
Treated air (Clean air)
20
Productivity Rises
HEPA-siz e particulat e
10 0
0
20
40
60
Particulate Ga s
80 100 Period (day )
120
140
160
Field Test Result 50
50
output(ppb) input(ppb)
30 Other companies
20 10 0
20
40
60
80 100 Period (day )
30 20 10
KAEL Filter change
0
input(ppb)
40 Con c .(ppb)
Conc .(ppb)
40
output(ppb)
120
FIG.1 NH3 in Field Test Result (Stepper-ASML)
140
160
0
0
20
40
60
80 100 Period (day )
120
140
FIG.2 NH3 in Field Test Result (Track)
www.kael.co.kr
50
160
I 11
Product Information I Chemical Filter Chemical contaminants and effects in clean room Impurity
Effects
Condensable organic
MW.120↑, BP.150℃↑ Organic Compounds
- Adsorption on Lens / Reticle - Pollution of Reticle backside
Refractory
Siloxane, HMDS Silano Organophosphate, Organosulfate
Acids
SO2, HCl, Cl2, HF, H2S
Bases
NH3, Amines, NMP
Aromatic hydrocarbon
Toluene, Xylene
- Pellicle polymer attack
Ozone
O3
- Pellicle polymer attack
- Pollution of Non-cleanable Lens / Reticle - Oxidation with DUV on Lens / Reticle Surface - Adsorption of salt type - Corrosion - Bad PR Performance
Chemical Filter & Target Gases Target Gases
Application Area
Model
Type
FFU (Fan Filter Unit)
1000 Series
Pleat / Round / V-Bank
Return Hall
2000 Series
Pleat
OAC (Out Air Controller)
3000 Series
Pleat / Tray / V-Bank
Equipment
5000 Series
Pleat / V-Bed
Display Air Controller
6000 Series
Tray
The others
9000 Series
• MA : Molecular Acids(SOx, NOx, HCl, Cl2, HF, H2S..,) • MC : Molecular Condensable(MW.120, BP.150℃ Organic material • Ozone : O3
12 I GemVax & KAEL
MA
MB
MC
MD Ozone VOCs
Customization • MB : Molecular Bases(NH3, Amine, NMP..,) • MD : Dopants(Arsine, Boric Acid, Phosphorus..,) • VOCs : Volatile organic compounds
Model designators Target gas code
AL Target gas
Type
Application
Code 路 AL : ALPLUS Series 路 CY : CYPLUS Series
Application code
CODE
Target gases
10
NH3
11
NH3 + ACID
12
NH3 + Organic
13
NH3 + Acid + O3
14
NH3 + NMP
20
O3
21
O3 + Organic
22
O3 + NOx
23
O3 + NOx + SOx
24
O3 + Acid + Organic
30
NH3+SOx+NOx+Amine+NMP
31
MA+MB+MC
32
NH3+Amine+NMP
33
ACID
40
Organic
41
Organic + ACID
42
Organic + ACID + O3
90
The others
Type code
CODE
Application
CODE
Type
1000
FFU (Fan Filter Unit)
0
Round
2000
Return Hall
100
Pleat
3000
OAC (Out Air Controller)
200
Tray
5000
Equipment
300
V-Bed
6000
Display Air Controller
400
Mix
9000
The others
500
Form-Bed
600
V -Bank(A line)
700
V -Bank (Foam)
900
The others
www.kael.co.kr
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Product Information I Chemical Filter - PLEATED TYPE
PLEATED type Equipment(Track / Scanner‌) General technical data Filter type
Tray type
Frame material
SUS/Aluminum
Size[mm]
610 x 610 x 150/ 770 x 220 x 150
(Height x Width x Depth)
(Customizable)
Typical air flow rate
0~3,000m3/H
Media
Coating Resin / Ion-Exchange Resin
F.F.U(Fan Filter Unit) / ULPA General technical data Filter type Frame material
Aluminum
Size[mm]
1167 x 534 x 80 1167 x 572 x 150
(Height x Width x Depth)
14 I GemVax & KAEL
Pleated type
(Customizable)
Typical air flow rate
0~1,200m3/H
Media
Coating Resin / Ion-Exchange Resin
OAC(Out Air Controller) / RETURN HALL General technical data Filter type
Tray type
Frame material
SUS/Aluminum
Size[mm]
610 x 610 x 200 / 595 x 595 x 150
(Height x Width x Depth)
(Customizable)
Typical air flow rate
0~3,000m3/H
Media
Coating Resin / Ion-Exchange Resin
www.kael.co.kr
I 15
Product Information I Chemical Filter - V-BANK TYPE, SEPARATED V-BED TYPE, TRAY TYPE,
V-BANK type OAC (Out Air Controller) / Return Hall / FFU(Fan Filter Unit) General technical data Filter type
V-Bank type
Frame material
Polystyrene
Size[mm]
595 x 595 x 300
Typical air flow rate
0~3,000m3/H
Media
Coating Resin / Ion-Exchange Resin
(Height x Width x Depth)
(Customizable)
SEPARATED V-BED type OPF Filter for ASML, Canon, Nikon Scanner General technical data Filter type Frame material
Aluminum
Size[mm]
960x485x250 600x570x250
(Height x Width x Depth)
Typical air flow rate Media
16 I GemVax & KAEL
Separated V-Bed type
(Customizable)
0 ~ 1700 m3/H
(Variable Flow Rates Available)
Impregnated carbon
, V-BED TYPE
TRAY type OAC(Out Air Controller) General technical data Filter type
Tray type
Frame material
SUS
Size[mm]
610 x 610 x 450 / 610 x 305 x 450
(Height x Width x Depth)
(Customizable)
Typical air flow rate
0~3,000m3/H
Media
Coating Resin
V-BED type Equipment [TRACK / SCANNER...] General technical data Filter type
V-Bed type
Frame material
Aluminum
Size[mm]
(Height x Width x Depth)
720 x 275 x 150 555 x 430 x 185 515 x 405 x 150
Typical air flow rate
0~600m3/H
Media
Coating Resin / Ion-Exchange Resin
(Customizable)
www.kael.co.kr
I 17
Product Information I Chemical Filter - ROUND TYPE
ROUND type F.F.U(Fan Filter Unit) / ULPA General technical data Filter type Frame material
Aluminum
Size[mm]
Φ620 x 400(H)
Typical air flow rate
0~2,500m3/H
Media
Coating Resin / Ion-Exchange Resin
(Diameter×Height)
18 I GemVax & KAEL
Round type
(Customizable)
WFVOC System; Removal Equipment as High Conc. VOCs
HEPA Filter
Medium Filter 1
Demister
Medium Filter 1
Washer Filter 3
Washer Filter 2
Demister
Control Panel
Base
Clean Air
Contaminated Air Door
Washer Filter 1
Water Spray(by Nozzle)
Fan & Motor
WFVOC System; Removal Efficiency for High conc. Orgarnic
C/R Environment (Inlet) Total peak area count: 1,058,570,844 = 1.5ppmV TVOCs in Toluene equivalents
WFVOC System (Outlet) Total peak area count: 25,236,084 = <0.1ppmV TVOCs in Toluene equivalents
www.kael.co.kr
I 19
Chemical Filter Installation I FFU, Return Hall
FFU Chemical Filter Installation (FFU)
Items
NH3
Acid
NH3 + Acid
Frame material
620(O.D)*400(H)
620(O.D)*400(H)
620(O.D)*400(H)
Air Flow (m/s)
@ 0.4
@ 0.4
@ 0.4
20↓(2mmAq)
20↓(2mmAq)
20↓(2mmAq)
15↓
13↓
14↓
Pressure Drop (Pa) Filter Weight (Kg)
20 I GemVax & KAEL
Specification
Return Hall Chemical Filter Installation (Return Hall)
www.kael.co.kr
I 21
Chemical Filter Installation I OAC, Equipment
OAC Chemical Filter Installation (OAC)
22 I GemVax & KAEL
Equipment Chemical Filter Installation (Equipment) ASML Scanner
NIKON Scanner
CA Filter CA Filter
Clean Room
Clean Room
R/P=SUBFAB
R/P=SUBFAB
CA Filter
CA Filter
www.kael.co.kr
I 23
Chemical Filter Installation I Display, Semiconductor
Display Chemical Filter Installation(LCD/PDP/FPD/OLED)
TFT ZONE
COLOR FILTER ZONE
W.S.S
W.S.S
OUT Air
OUT Air
PRE+MEDIUM
HEPA
HEPA
PHOTO ZONE
PRE+MEDIUM
DIFFUSION/CVD ZONE
W.S.S
W.S.S
OUT Air
OUT Air
PRE+MEDIUM
24 I GemVax & KAEL
HEPA
HEPA
PRE+MEDIUM
Semiconductor Chemical Filter Installation (Semi conductor) TFT ZONE
COLOR FILTER ZONE
W.S.S
W.S.S
OUT Air
OUT Air
PRE+MEDIUM
HEPA
HEPA
PHOTO ZONE
PRE+MEDIUM
DIFFUSION/CVD ZONE
W.S.S
W.S.S
OUT Air
OUT Air
PRE+MEDIUM
HEPA
HEPA
PRE+MEDIUM
www.kael.co.kr
I 25
Environment System Field
Environment System Field Special Business ·Coating Resin ·Coating Resin removing toxic gas ·Military Coating Resin
System Business ·Total Off-Gas Control System ·Bad Smell Removal System ·VOC Recovery System
Equipment/Filter Business ·Special Air Cleaner ·RI Filter Unit ·Charcoal Filter ·WFVOC
26 I GemVax & KAEL
Jump into the World
Sintanjin TG
Meister
Singugyo Bridge
Samseong Bending
Sintanjin
Yongsingyo Bridge
Giheung Precision
路R & D I n s t i t u t e : 1690-2, Shinil-dong, Daeduk-gu, Taejeon, Korea TEL : (+82-42)935-3046~8 FAX(+82-42)935-3049
Lotte Mart
bu[Se oul-Bus y an] Expresswa
路Main office/factory : 894, Tamnip-dong, Yuseong, Taejeon, Korea TEL : (+82-42)931-6287~9 FAX(+82-42)931-9190
Halla Climate Corp.
Gyeo ng
R&D Institute
IDIS
Donghwa Middle School Jiam Meditech
Baeul Elementary School
Intelligence Robot Commercialization Center Hwain Tech
Cheongbyeoksan - Mountain Unam Neomia APT
Bukdaejeon TG
the Honam[Daejeon-Suncheon] Expre sswa y Neopharm
Main office/factory
High Tech Mentors of Biem
Hanbit Bridge
www.kael.co.kr
I 27
Environment System Field
Environment System Field Special Business ·Coating Resin ·Coating Resin removing toxic gas ·Military Coating Resin
System Business ·Total Off-Gas Control System ·Bed Smell Removal System ·VOC Recovery System
Equipment/Filter Business ·Special Air Cleaner ·RI Filter Unit ·Charcoal Filter ·WFVOC
26 I 27 GemVax & KAEL
Sintanjin TG
Map Meister
Singugyo Bridge
Halla Climate Corp.
Samseong Bending
Sintanjin
Yongsingyo Bridge
Giheung Precision
Lotte Mart
Gyeo n g b u [ SeoulBusan] Expressway
R&D Institute
IDIS
Donghwa Middle School Jiam Meditech
Baeul Elementary School
Intelligence Robot Commercialization Center Cheongbyeoksan - Mountain
Hwain Tech
Unam Neomia APT
Bukdaejeon TG
the Honam[Daejeon-Suncheon] Expre sswa y Neopharm
Main office/factory
High Tech Mentors of Biem
Hanbit Bridge
路Main office/factory : 894, Tamnip-dong, Yuseong, Taejeon, Korea TEL : (+82-42)931-6287~9 FAX(+82-42)931-9190 路R & D I n s t i t u t e : 1690-2, Shinil-dong, Daeduk-gu, Taejeon, Korea TEL : (+82-42)935-3046~8 FAX(+82-42)935-3049
The leading company in business of contamination control
路Main office/factory : 894, Tamnip-dong, Yuseong, Taejeon, Korea TEL : (+82-42)931-6287~9 FAX(+82-42)931-9190 路R & D I n s t i t u t e : 1690-2, Shinil-dong, Daeduk-gu, Taejeon, Korea TEL : (+82-42)935-3046~8 FAX(+82-42)935-3049
www.kael.co.kr