잼벡스&카엘

HIGH TECH & NATURE We provide the high technology & environment The leading company in business of contamination control

World

VISION “The leading company in business of contamination control �

+ ET

+ IT

+ BT

Professional corporation to purify semi-conductor manufacturing process, display manufacturing process and atmosphere environment

Table of Contents Gemvax & kael information ························································ 04 Product Information - Coating Resin ······················································· 08 Product Information - Chemical Filter ······················································ 10 Product Information - PLEATED Type ··················································· 14 Product Information - V-BANK Type, SEPARATED V-BED Type, TRAY Type, V-BED Type················ 16 Product Information - ROUND Type ······················································· 18 Chemical Filter Installation - FFU, Return Hall················································ 20 Chemical Filter Installation - OAC, Equipment··············································· 22 Chemical Filter Installation - LCD/ PDP, Semiconductor········································ 24 Environment System Field ······························································ 26

Corporation Profile ·Company Name : GemVax & KAEL Co.,Ltd. ·Establishment : Mar, 10, 1998 ·Representative : Lee Ike Woo ·Main office/factory : 894, Tamnip-dong, Yuseong, Taejeon, Korea ·R & D I n s t i t u t e : 1690-2, Shinil-dong, Daeduk-gu, Taejeon, Korea

Business Area

Global Clean Air Company

y Field

Material Fiel d:C oat

Se

s p la

·Bad smell / VOC removal system ·Filter for special air cleaner ·Removal of radioactive substance ·Military impregnated active carbon

ly st /D i

Environment System Field

in, Ca ta

mi

in

es gR

Semi/Display Field ·Chemical Filter [CA Filter] ·CY+1000,2000,3000,5000,6000 Series AL+1000,2000,3000,5000 Series ·Gas Scrubber [Resin] ·WFVOC(Water Fab Volatile Organic Compounds)

Core material

Awards and Recognitions ·OHSAS 18001 Certificate ·High technology company designation (Korea Ministry of Science and High Tech) ·ISO 14001:2004 Certificate ·Listed in KOSDAQ ·National Tax Service Commissioner Award for Excellent Taxpayer ·Selected as a technically innovated business (INNO-BIZ) ·Technical Innovation Golden Award (Prime Minister Award) ·ISO 9001:2000 Certificate

R&D Institute

GemVax & KAEL Group

GemVax & KAEL Daejeon, Korea

KAEL - GemVax Seongnam, Korea

Korea Stem Cell Bank Seoul, Korea

KSCB Yangsan, Gyeongnam

VaxOnco Seongnam, Korea GemVax Oslo, Norway Epimmune San Diego, USA

Main office/factory

www.kael.co.kr

04 I 05

GemVax & KAEL Main office Supplier facility

GemVax & KAEL R&D Institute

06 I GemVax & KAEL

‌to a wide range of customers

Sales & Distribution 1%

Semiconductor(Domestic)

38%

30%

Display(Domestic) 31%

Overseas The others

Global Network Netherlands

Germany

China

Japan

U.S.A

ASML

Infineon

Hynix-China SESS TS-LED SMIC

TKL(TEL) Canon Toshiba ELPIDA SOKUDO

Samsung C&T SAS Micron

Taiwan TSMC / UMC Promos Powerchip Rexchip PSC / AUO

Vietnam

Singapore

Malaysia

SEIKO

TECH SSMC Chartered AFPD Numonyx

Camfil 1' Silicon Silterra Infineon

* Global Clean Air Company

www.kael.co.kr

I 07

Product Information I Coating Resin

Chemical Filter : Raw Materials Coating Resin

Cl2 Inorganic adsorbent

HCl Inorganic adsorbent

PFC Resolution & catalyst

A/C(Impregnation)

A/C(Impregnation)

Cation Exchange Resin

Anion Exchange Resin

A/C(Impregnation)

Alumina & KMnO4

Ion Exchange Fiber

Make Everything

08 I GemVax & KAEL

Fundamental products Coating Resin(Impregnated Active Carbon) Features Features It is an active carbon that maximizes chemical active by adding specific chemical substances to the general active carbon and selectively absorbs and removes harmful substances or toxic substances.

Application Features Field · Removal of harmful gas such as acid, chloride, neutral and radioactive gas · Water purifier to sterilize microbes · Catalysis for promoting chemical reaction

Coating Resin(inorganic Adsorbent) Features Features It is an active carbon that maximizes chemical active by adding chemical substances to inorganic adsorbent such as Alumina, Zeolite Application Features Field · Removal of toxic gas · Oxidation of catalysis · Selectively remove harmful substances or toxic substances in specific process

Application field GAS type Coating Resin

Target Gases NH3

CL2

HF

O3

H2 S

NOX

SOX

VOCS

CH3I

Active Carbon KIAC-01 KIAC-04 KIAC-05 KIAC-07 KIAC-14 Mixed Coating Resin Alumina • The others : TEOS, SiH4, DCS, PH3, NF3, BCl3, Cl2 removable

www.kael.co.kr

I 09

Product information I Chemical Filter

Pleat Type

V-BED Type

Round Type

Tray Type

V-Bank Type

V-BED Type (OPF)

Features - Have superior adsorbent efficiency for low-concentrated gas, and have an extended life.

- Electric power expenses are reduced due to reduction of pressure loss.

- Have superior endurance level and there is no concern that particles scatter during operation.

- Loss of process may be reduced due to rapid delivery and A/S. - Various types of manufacturing are allowed upon customer request.

10 I GemVax & KAEL

Application field/Purpose Filter for removing chemical pollution substances such as NH3, O3, SOx, NOx, TOC and harmful gas in semiconductor and LCD/PDP manufacturing process.

Device precision, minuteness

Particle, Molecule Gas / Chemical Contaminant → Haze Phenomenon on the Wafer

Gate Oxide Layer Isolation, Corrosion..., → Badness of Layer Pattern on the Wafer 50

CA Filter (Chemical filter) 40 Conc .(ppb)

Medium Filter

Untreated air Medium Particulate

Hazardou s gase s

HEPA Filter

30

Treated air (Clean air)

20

Productivity Rises

HEPA-siz e particulat e

10 0

0

20

40

60

Particulate Ga s

80 100 Period (day )

120

140

160

Field Test Result 50

50

output(ppb) input(ppb)

30 Other companies

20 10 0

20

40

60

80 100 Period (day )

30 20 10

KAEL Filter change

0

input(ppb)

40 Con c .(ppb)

Conc .(ppb)

40

output(ppb)

120

FIG.1 NH3 in Field Test Result (Stepper-ASML)

140

160

0

0

20

40

60

80 100 Period (day )

120

140

FIG.2 NH3 in Field Test Result (Track)

www.kael.co.kr

50

160

I 11

Product Information I Chemical Filter Chemical contaminants and effects in clean room Impurity

Effects

Condensable organic

MW.120↑, BP.150℃↑ Organic Compounds

- Adsorption on Lens / Reticle - Pollution of Reticle backside

Refractory

Siloxane, HMDS Silano Organophosphate, Organosulfate

Acids

SO2, HCl, Cl2, HF, H2S

Bases

NH3, Amines, NMP

Aromatic hydrocarbon

Toluene, Xylene

- Pellicle polymer attack

Ozone

O3

- Pellicle polymer attack

- Pollution of Non-cleanable Lens / Reticle - Oxidation with DUV on Lens / Reticle Surface - Adsorption of salt type - Corrosion - Bad PR Performance

Chemical Filter & Target Gases Target Gases

Application Area

Model

Type

FFU (Fan Filter Unit)

1000 Series

Pleat / Round / V-Bank

Return Hall

2000 Series

Pleat

OAC (Out Air Controller)

3000 Series

Pleat / Tray / V-Bank

Equipment

5000 Series

Pleat / V-Bed

Display Air Controller

6000 Series

Tray

The others

9000 Series

• MA : Molecular Acids(SOx, NOx, HCl, Cl2, HF, H2S..,) • MC : Molecular Condensable(MW.120, BP.150℃ Organic material

• Ozone : O3

12 I GemVax & KAEL

MA

MB

MC

MD Ozone VOCs

Customization • MB : Molecular Bases(NH3, Amine, NMP..,) • MD : Dopants(Arsine, Boric Acid, Phosphorus..,) • VOCs : Volatile organic compounds

Model designators Target gas code

AL Target gas

Type

Application

Code 路 AL : ALPLUS Series 路 CY : CYPLUS Series

Application code

CODE

Target gases

10

NH3

11

NH3 + ACID

12

NH3 + Organic

13

NH3 + Acid + O3

14

NH3 + NMP

20

O3

21

O3 + Organic

22

O3 + NOx

23

O3 + NOx + SOx

24

O3 + Acid + Organic

30

NH3+SOx+NOx+Amine+NMP

31

MA+MB+MC

32

NH3+Amine+NMP

33

ACID

40

Organic

41

Organic + ACID

42

Organic + ACID + O3

90

The others

Type code

CODE

Application

CODE

Type

1000

FFU (Fan Filter Unit)

0

Round

2000

Return Hall

100

Pleat

3000

OAC (Out Air Controller)

200

Tray

5000

Equipment

300

V-Bed

6000

Display Air Controller

400

Mix

9000

The others

500

Form-Bed

600

V -Bank(A line)

700

V -Bank (Foam)

900

The others

www.kael.co.kr

I 13

Product Information I Chemical Filter - PLEATED TYPE

PLEATED type Equipment(Track / Scanner‌) General technical data Filter type

Tray type

Frame material

SUS/Aluminum

Size[mm]

610 x 610 x 150/ 770 x 220 x 150

(Height x Width x Depth)

(Customizable)

Typical air flow rate

0~3,000m3/H

Media

Coating Resin / Ion-Exchange Resin

F.F.U(Fan Filter Unit) / ULPA General technical data Filter type Frame material

Aluminum

Size[mm]

1167 x 534 x 80 1167 x 572 x 150

(Height x Width x Depth)

14 I GemVax & KAEL

Pleated type

(Customizable)

Typical air flow rate

0~1,200m3/H

Media

Coating Resin / Ion-Exchange Resin

OAC(Out Air Controller) / RETURN HALL General technical data Filter type

Tray type

Frame material

SUS/Aluminum

Size[mm]

610 x 610 x 200 / 595 x 595 x 150

(Height x Width x Depth)

(Customizable)

Typical air flow rate

0~3,000m3/H

Media

Coating Resin / Ion-Exchange Resin

www.kael.co.kr

I 15

Product Information I Chemical Filter - V-BANK TYPE, SEPARATED V-BED TYPE, TRAY TYPE,

V-BANK type OAC (Out Air Controller) / Return Hall / FFU(Fan Filter Unit) General technical data Filter type

V-Bank type

Frame material

Polystyrene

Size[mm]

595 x 595 x 300

Typical air flow rate

0~3,000m3/H

Media

Coating Resin / Ion-Exchange Resin

(Height x Width x Depth)

(Customizable)

SEPARATED V-BED type OPF Filter for ASML, Canon, Nikon Scanner General technical data Filter type Frame material

Aluminum

Size[mm]

960x485x250 600x570x250

(Height x Width x Depth)

Typical air flow rate Media

16 I GemVax & KAEL

Separated V-Bed type

(Customizable)

0 ~ 1700 m3/H

(Variable Flow Rates Available)

Impregnated carbon

, V-BED TYPE

TRAY type OAC(Out Air Controller) General technical data Filter type

Tray type

Frame material

SUS

Size[mm]

610 x 610 x 450 / 610 x 305 x 450

(Height x Width x Depth)

(Customizable)

Typical air flow rate

0~3,000m3/H

Media

Coating Resin

V-BED type Equipment [TRACK / SCANNER...]

General technical data Filter type

V-Bed type

Frame material

Aluminum

Size[mm]

(Height x Width x Depth)

720 x 275 x 150 555 x 430 x 185 515 x 405 x 150

Typical air flow rate

0~600m3/H

Media

Coating Resin / Ion-Exchange Resin

(Customizable)

www.kael.co.kr

I 17

Product Information I Chemical Filter - ROUND TYPE

ROUND type F.F.U(Fan Filter Unit) / ULPA General technical data Filter type Frame material

Aluminum

Size[mm]

Φ620 x 400(H)

Typical air flow rate

0~2,500m3/H

Media

Coating Resin / Ion-Exchange Resin

(Diameter×Height)

18 I GemVax & KAEL

Round type

(Customizable)

WFVOC System; Removal Equipment as High Conc. VOCs

HEPA Filter

Medium Filter 1

Demister

Medium Filter 1

Washer Filter 3

Washer Filter 2

Demister

Control Panel

Base

Clean Air

Contaminated Air Door

Washer Filter 1

Water Spray(by Nozzle)

Fan & Motor

WFVOC System; Removal Efficiency for High conc. Orgarnic

C/R Environment (Inlet) Total peak area count: 1,058,570,844 = 1.5ppmV TVOCs in Toluene equivalents

WFVOC System (Outlet) Total peak area count: 25,236,084 = <0.1ppmV TVOCs in Toluene equivalents

www.kael.co.kr

I 19

Chemical Filter Installation I FFU, Return Hall

FFU Chemical Filter Installation (FFU)

Items

NH3

Acid

NH3 + Acid

Frame material

620(O.D)*400(H)

620(O.D)*400(H)

620(O.D)*400(H)

Air Flow (m/s)

@ 0.4

@ 0.4

@ 0.4

20↓(2mmAq)

20↓(2mmAq)

20↓(2mmAq)

15↓

13↓

14↓

Pressure Drop (Pa) Filter Weight (Kg)

20 I GemVax & KAEL

Specification

Return Hall Chemical Filter Installation (Return Hall)

www.kael.co.kr

I 21

Chemical Filter Installation I OAC, Equipment

OAC Chemical Filter Installation (OAC)

22 I GemVax & KAEL

Equipment Chemical Filter Installation (Equipment) ASML Scanner

NIKON Scanner

CA Filter CA Filter

Clean Room

Clean Room

R/P=SUBFAB

R/P=SUBFAB

CA Filter

CA Filter

www.kael.co.kr

I 23

Chemical Filter Installation I Display, Semiconductor

Display Chemical Filter Installation(LCD/PDP/FPD/OLED)

TFT ZONE

COLOR FILTER ZONE

W.S.S

W.S.S

OUT Air

OUT Air

PRE+MEDIUM

HEPA

HEPA

PHOTO ZONE

PRE+MEDIUM

DIFFUSION/CVD ZONE

W.S.S

W.S.S

OUT Air

OUT Air

PRE+MEDIUM

24 I GemVax & KAEL

HEPA

HEPA

PRE+MEDIUM

Semiconductor Chemical Filter Installation (Semi conductor) TFT ZONE

COLOR FILTER ZONE

W.S.S

W.S.S

OUT Air

OUT Air

PRE+MEDIUM

HEPA

HEPA

PHOTO ZONE

PRE+MEDIUM

DIFFUSION/CVD ZONE

W.S.S

W.S.S

OUT Air

OUT Air

PRE+MEDIUM

HEPA

HEPA

PRE+MEDIUM

www.kael.co.kr

I 25

Environment System Field

Environment System Field Special Business ·Coating Resin ·Coating Resin removing toxic gas ·Military Coating Resin

System Business ·Total Off-Gas Control System ·Bad Smell Removal System ·VOC Recovery System

Equipment/Filter Business ·Special Air Cleaner ·RI Filter Unit ·Charcoal Filter ·WFVOC

26 I GemVax & KAEL

Jump into the World

Sintanjin TG

Meister

Singugyo Bridge

Samseong Bending

Sintanjin

Yongsingyo Bridge

Giheung Precision

路R & D I n s t i t u t e : 1690-2, Shinil-dong, Daeduk-gu, Taejeon, Korea TEL : (+82-42)935-3046~8 FAX(+82-42)935-3049

Lotte Mart

bu[Se oul-Bus y an] Expresswa

路Main office/factory : 894, Tamnip-dong, Yuseong, Taejeon, Korea TEL : (+82-42)931-6287~9 FAX(+82-42)931-9190

Halla Climate Corp.

Gyeo ng

R&D Institute

IDIS

Donghwa Middle School Jiam Meditech

Baeul Elementary School

Intelligence Robot Commercialization Center Hwain Tech

Cheongbyeoksan - Mountain Unam Neomia APT

Bukdaejeon TG

the Honam[Daejeon-Suncheon] Expre sswa y Neopharm

Main office/factory

High Tech Mentors of Biem

Hanbit Bridge

www.kael.co.kr

I 27

Environment System Field

Environment System Field Special Business ·Coating Resin ·Coating Resin removing toxic gas ·Military Coating Resin

System Business ·Total Off-Gas Control System ·Bed Smell Removal System ·VOC Recovery System

Equipment/Filter Business ·Special Air Cleaner ·RI Filter Unit ·Charcoal Filter ·WFVOC

26 I 27 GemVax & KAEL

Sintanjin TG

Map Meister

Singugyo Bridge

Halla Climate Corp.

Samseong Bending

Sintanjin

Yongsingyo Bridge

Giheung Precision

Lotte Mart

Gyeo n g b u [ SeoulBusan] Expressway

R&D Institute

IDIS

Donghwa Middle School Jiam Meditech

Baeul Elementary School

Intelligence Robot Commercialization Center Cheongbyeoksan - Mountain

Hwain Tech

Unam Neomia APT

Bukdaejeon TG

the Honam[Daejeon-Suncheon] Expre sswa y Neopharm

Main office/factory

High Tech Mentors of Biem

Hanbit Bridge

路Main office/factory : 894, Tamnip-dong, Yuseong, Taejeon, Korea TEL : (+82-42)931-6287~9 FAX(+82-42)931-9190 路R & D I n s t i t u t e : 1690-2, Shinil-dong, Daeduk-gu, Taejeon, Korea TEL : (+82-42)935-3046~8 FAX(+82-42)935-3049

The leading company in business of contamination control

路Main office/factory : 894, Tamnip-dong, Yuseong, Taejeon, Korea TEL : (+82-42)931-6287~9 FAX(+82-42)931-9190 路R & D I n s t i t u t e : 1690-2, Shinil-dong, Daeduk-gu, Taejeon, Korea TEL : (+82-42)935-3046~8 FAX(+82-42)935-3049

www.kael.co.kr