Precision Optics System
Beam splitter, BBAR, Band Pass filter, Laser mirror 등과 같은 정밀 박막에 적합한 증착 시스템. OPM 및 IAD를 이용해 재현성과 신뢰성을 확보함.
Application BBAR
Beam Splitter
Camera
BBAR, Edge Filter, NBPF, Band (short/long) Pass filter, IR cut-off filter, Cold Mirror, Laser Mirror
Filter
Reproducibility & Reliability by precise control & monitor 70 65
721 722
60
723 724
55
Transmittance (%)
725
100
726
50 45 40 35 30
90
25 20 645
646
647
648
649
650
651
652
653
654
655
656
657
658
659
660
661
Wavelength (nm)
80 746 747
70
748
Transmittance (%)
Quartz Crystal Monitoring (QCM), in which deposited mass is converted into thickness, cannot read and control in real time the change of the refractive index of material which is caused by the change of parameters (vacuum level, temperature, deposition rate and so on) in vacuum chamber, so that the precision become lower as the number and the complexity of layers increase. So we developed our own OPM system, HOMS, which can overcome the above problem by measuring the optical thickness and characteristics of each layer under the change of the parameters and compensating errors in real time, so that accuracy and repeatability of coating process can be secured.
749 60
750 751
50
40
30
20
10
0 350
400
450
500
550
600
650
700
750 800 850 Wavelength (nm)
900
950
1000
1050
1100
1150
1200
Waveband
380 to 2,000nm
Resolution
1nm
Grating
Multiple Grating Turret
Detector
Si Photodiode (VIS), PbS (NIR)
Monitoring
Back Reflectance
Monitor Glass
60 points
Process Control
PC & HOPE
Minimizing band shift through IAD Using IAD during evaporation process, density and adhesiveness of films are increased to minimize band shift at the atmosphere after coating. Another advantage of using IAD, the process temperature can be lowered than conventional process temperature.
Narrow Band Pass Filter
Band Pass Filter 95 90
90 80
Transmittance(%) / Wavelength (nm)
400
Transmittance(%) / Wavelength (nm)
600
500
400
500
600
700
Cold Mirror
Broadband Polarizing Cube BS 90 80 P-Pol S-Pol
100
Reflectance (%) / Wavelength (nm)
Transmittance(%) / Wavelength (nm) 400
500
600
700
800
900
400
700
1,100
Specification Chamber size
Dia. 800 ~ 1800
Low Vacuum Pumping
Oil Rotary Pump (Option: Dry Pump), Mechanical Booster Pump
High Vacuum Pumping
Oil Diffusion Pump (Option: Cryo Pump, TMP), Cryo Cold Trap (Polycold)
Evaporation Source
Electron Beam Source, RHS
Ion Beam Source
Optional: Mark II / RF Ion Source
Heating System
Optional: Halogen Heater / Micro Sheathed Heater
Deposition Control
QCM (Option: OPM)
Substrate Fixture
Optional: Single Dome, Segment Dome, Flat Planetary Fixture
Control System
HOPE (process control & monitor – PC system)
For more information and consulting with us, please contact us. hanil@vacuum-coater.com