INTELLIGENT SAMPLE FIXTURES POLISH TO OPTIMAL FLATNESS & PARALLELISM The ULTRA TEC Precision Polishing Jigs, allow the user to produce the finest results of sample flatness and parallelism. Precision Jigs work in conjunction with suitable "true flat lapping" machines such as the MULTIPOL range. The jigs provide the means to achieve sample parallelism down to a few seconds of arc (when used with the 6183.1 Autocollimator) They incorporate a 'hard stop' to prevent additional material removal after the process end-point. Jigs are fully sealed to prevent abrasives jamming any moving parts during or between processes and are chemically resistant and capable of polishing with all techniques
Product Highlights
A wide range of holders is available to suit wafer polishing, edge polishing (of waveguides, electronic packages and dice etc) and ‘quick release’ preparation for optical and electron microscopy. Vacuum fixtures are also available for 'no-cement' mounting
Jig controls sample orientation, linear position and pressure
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In-built sample removal gauge provides accurate, or preset, m material removal
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Suits wafer polishing, edge polishing, circuit delayering. Special workholders extend application range.
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Jig is fully sealed from polishing media – avoids crossm contamination and seizure problems seen with other jigs
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Jig’s Conditioning ring rides the lapping/polishing surface to ensure high levels of optical flatness can be achieved
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Advanced construction provides means for parallelism down to a few seconds of arc to be achieved on double-sided
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Can be used on other polishing systems with suitable roller bar . arrangements, such as Strasbaugh, Logitech & Lapmaster
Schematic of precision polishing jig. Shows key internal features that allow for the jig to achieve and maintain special orientation and position, whilst at the same time, exerting a precise load at the interface with the polishing surface.
1025 E. Chestnut Ave., Santa Ana, CA 92701 T: 1.714.542.0608 F: 1.714.542.0627 Toll Free (US): 1.877.542.0609
www.ultratecusa.com
Product Specifications Order Codes
6166.2 - 2 inch (max.sample diameter) Polishing Jig Kit 6166.3 - 3 inch (max.sample diameter) Polishing Jig Kit 6166.4 - 4 inch (max.sample diameter) Polishing Jig Kit Each kit includes: main jig housing, depth ring, sample removal gauge, stand, weight kit, 2 sample plates
Removal Gauge Accuracy Sample Loading Range
1 micron 0 to 5000g (fully variable)
Key Accessories Order Code
Details
Application
6245.1 6184.1 6183.1 6190.1
Precision Micromount Sample Loading Gauge Autocollimator Fiezo Interferometer
Allows precise alignment of sample face to preparation plane Allows for precise sample loading pressure to be achieved Allows for high level of sample parallelism to be achieved Optical Flatness Measurement
Order Code
Details
Application
6304.1 6304.8 6170.1 6170.5 6161.1 6307.1
Vise Holder Vise Holder, 80 Angled Quick Release Plate Quick Release Interface Quick Release Vise Stub-type Quick Release fixture
Edge polishing of waveguides, packages, connectors etc Angled edge polish for waveguides and optical compoents Microscopy applications, allows repeatable mounting & demounting Enabling interface for 6170.1 Cross-sectioning of electronic packages, with fast mount/demount Cross-sectioning of a single electronic die
Key Workholders
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1025 E. Chestnut Ave., Santa Ana, CA 92701 T: 1.714.542.0608 F: 1.714.542.0627 Toll Free (US): 1.877.542.0609 ULTRA TEC is proud to operate a continuous product improvement program. Product specification and appearance are subject to modification without prior notification.
www.ultratecusa.com