R&D World Fall 2023

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analytical / test WINNERS

EUV N&K and Phase Measurement Tool EUV Tech The EUV N&K and Phase Measurement Tool is an angle-resolved spectroscopic reflectometer for the precise measurement of optical properties of thin films using an actinic laser-produced plasma light source. Before the development of this tool, such measurements were only possible at a handful of arena-sized accelerator-based light sources (synchrotrons) at massive, expensive government research facilities. This constraint made producing EUV phaseshift masks in high-volume amounts nearly impossible. However, this new EUV N&K and Phase Measurement Tool creates a cost-effective pathway for the high-volume production of phase-shift masks with the added benefit of allowing the continued scaling of EUV Lithography tools.

FusionScope Quantum Design Microscopy FusionScope is the first true correlative microscopy platform designed from the ground up to seamlessly add the benefits of SEM imaging to a wide range of AFM measurement techniques inside one vacuum chamber. An innovative shared coordinate system automatically aligns AFM and SEM operations for measurement and sample positioning within a single software interface. Users can easily identify the area of interest, measure the sample, and combine the data in real-time, which was partly impossible in the past. In addition, the FusionScope Cantilever Technology is based on self-sensing cantilevers that allow for high-quality, low-noise detection of different surface properties without optical alignment.

Intelligent Radio Frequency Ablation is a Highly Effective and Precise Radiofrequency Ablation Technology ITRI The advantages of radiofrequency ablation (RFA) over remission are fewer wounds and reduced risk of postoperative bleeding. However, various phenotypes and locations of liver tumors are challenging to the surgeon performing this minimally invasive procedure. ITRI’s iRFA considers both effective and precise ablation needs and is the first RFA system integrating radiofrequency ablation with ultrasound imaging. Its adjustable electrode needle treats tumors of various sizes and locations and increases the effectiveness of tumor therapy with a closed-loop ablation control mode. It also has real-time imaging navigation and monitoring during the entire ablation procedure to achieve the precision tumor target and postoperative evaluation.

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High Throughput Sequencer DNBSEQ-T20×2 MGI and Complete Genomics

DNBSEQ-T20×2 was developed to make affordable whole genome sequencing (WGS) available, enabling individuals to sequence their inherited genomes for genetic mutations. At less than $100 per genome, scientists and medical doctors will be able to switch from partial genome analysis, such as WE7S, to whole genome analysis. Additionally, it will enable broader use on a larger number of samples and deeper sequencing per sample to get more informative results in genome sequencing, deep cell-free DNA sequencing, or yearly gene expression monitoring in thousands of single cells per person. Now many more samples can be sequenced, or deeper, more informative, and accurate sequencing can be afforded per sample.

R&D WORLD | FALL 2023

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