Dual Zones CVD Tube Furnace

DUAL ZONES CVD TUBE FURNACE MODEL NO. - ACM- FT-73314

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DUAL ZONES CVD TUBE FURNACE Dual Zones CVD Tube Furnace with 8.5" Quartz Tube & Slidable is a two heating zone 8.5" O.D quartz tube furnace with slidable vacuum flange and multi-gas fed through SS tube for LPCVD processing, It is designed for depositing various film on wafers up to 6" under multi-gas condition. The tubing furnace's max working temperature is 1100°C, which is controlled by a precision controller with accuracy +/-1°C and 30 segments programmable.

Furnace structure is made up of Double wall steel casing with forced air cooling.

Two cooling fan inside to keep temperature of outside case < 70 ºC. High purity alumina fibrous insulation is provided in the furnace for max energy saving. One sliding rail to support flange to load sample at easy. Vacuum sealed stainless steel flanges with double high temperature silicone O-ring are included to achieve high vacuum (Usually 10-2 torr by mechanical pump and 10-4 torr by molecular pump).

Vacuum pump is not included. Right-side flange is hinge-type and KF25 vacuum port. One need though port is in built one flange for insert a thermal couple to calibrate furnace temperature. One quartz block is included, which must put right end of tube to block heat radiation. Left-side flange is installing on slidable table to make moving at easy. There are five stainless steel feed though pipes and needle valve is installed on the flanges to feed multi-CVD gases. 4 pcs quartz plate is built in left side flange for thermal block is built in left-side flange.

TECHNOCRACY PVT. LTD.

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SALIENT FEATURES Ÿ Two heating zone are there to achieve longer constant temperature zone or a

certain temperature gradient.

Ÿ Heating element is NiCrAl Resistance Wire.

Ÿ Two precision temperature controllers with PID function and 30 segments

programmable.

Ÿ One extra temperature monitor is built in to shut down power when temperature

out of control by accident.

Ÿ Double K type thermal couple installed with Temperature accuracy of +/-1°C.

TECHNOCRACY PVT. LTD.

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TECHNICAL SPECIFICATIONS Furnace structure

Double wall steel casing with forced air cooling.

Two cooling fan inside to keep temperature of outside case < 70 ºC High purity alumina fibrous insulation for max energy saving One sliding rail to support flange to laod sample at easy Two heating zone to achieve longer constant temperture zone or a certain temperature gradient

Input voltage

220VAC Single phase

Voltage

5500 W 8.5" O.D x 8.2" I.D x 40" Length

Fused quartz tube size

One quartz tube is included, and spare tube is availble as option ( click picture below to order )

Heating element

NiCrAl Resistance Wire

Working Temperature

Max. heating temperature: 1100°C Continuous working temperature: 400 -1000°C Max. heating/cooling rate: 10°C/min

Heating zone

Total heating zone length 600 mm (24") Two zones: 300 mm + 300 mm (12" per zone) Constant temperature zone: 300 mm (if three zones are in the same temperature)

Temperature controller

Two recision temperature controller with PID function and 30 segments programmable. One extra temperature monitor is built in to shunt down power when temperature out of control by accident Double K type thermal couple installed.

Temperature accuracy: +/-1°C Software and PC interface module is available at extra cost Optional: PC interface & software

TECHNOCRACY PVT. LTD.

Vacuum Flange and gas

Vacuum sealed stainless steel flanges with double high temperature

feedthough ports

silicone O-ring are included to achieve high vacuum (Usually 10-2

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TECHNICAL SPECIFICATIONS torr by mechanical pump and 10-4 torr by molecular pump). Vacuum pump is not included.

Right-side flange is hinge-type and Vacuum Right-Angle Valve

KF25 vacuum port. KF25

and 1.2 meter long KF-40 Flexible

Stainless Steel Vacuum Hose ( Bellows ), are included. One 1/4" diameter feedthough port is in built one flange for insert a thermal couple to calibrate furnace temperature. ( please order 36" length x 1/4"dia K type thermal couple to insert the feedthough at related product or click underlined ) One quartz block is included, which must put right end of tube to blcok heat radiation Left-side flange is install on slidable table to make moving at easy.

There are five stainless steel feed though pipes and needle valve are installed on the flanges to feed multi-CVD gases.

4 pcs quartz plate is built in leftside flange for thermal block is built in left-side flange.

Please use a recirculating .water chiller for water

cooling to save environmental The leftside falnge can be customized upon request Product dimension

Furnace: 660 L x 700 W x 1060 H mm Sliding Table: 350 mm L Note: You must put furnace and sliding table on flat surface. Must make good alignment between sliding flange and furnace ( We ship sliding table and furnace sapeartely

Net weight

354Kg

Shipping dimension

70" x 70" x 65"

Shipping weight

354Kg

Warranty

One year limited warranty for electronic and mechanical part, excluding heating element and ceramic tube damaged by user

Certificate

CE certified

TECHNOCRACY PVT. LTD.

An ISO 9001 : 2208 | ISO 14001 : 2008 | ISO 13485 WHO: GMP Products | GLP Compliant Products

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