Three Zones Tube Furnace Quartz Tube And Flanges

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THREE ZONES TUBE FURNACE QUARTZ TUBE AND FLANGES MODEL NO. - ACM- FT-73217

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THREE ZONE TUBE FURNACE QUARTZ TUBE AND FLANGES Three Zones Tube Furnace with 11" Quartz tube and Flanges is a CE certified three zone tube furnaces with 11"O.D quartz tube and vacuum flanges. Needle valves and, vacuum gauge are pre-installed for immediate use. Three 30 segment programmable controllers are built in with K type thermal couple. Microprocessor-based PID control provides excellent control without overshooting and +/- 1 ยบC accuracy. It has been widely used for materials or chemical lab for sintering all types of new material samples under vacuum or other gases conditions. It is an excellent tool for annealing, diffusing and sintering processes. Its structure is made up of Double layer steel case with two cooling fan, which ensure low surface temperature. High purity fibrous alumina insulation is for energy saving purpose.

Three heating zones are provided in the furnace. A stainless steel vacuum sealing flange with valve and meter is included. Two porous ceramic blocks are included for protecting flange from heating radiation. In order to increase the throughput and achieve high vacuum, you may replace the standard barbed hose fitting with the KF25 adapter. For supplying high pressure gas, you may replace the standard barbed hose fitting with the VCR Face Seal Fitting, Three digital controllers with microprocessor-based PID control and self-tuning. Two B type (one), S type (two) Thermal Couple are provided.

Microprocessor-based self-tuning PID control provides excellent control without overshooting and +/- 1 o C accuracy. It is an excellent furnace for annealing, diffusing and sintering sample in various atmospheres. Thermo-couple, Power cord and quartz tube and stainless steel sealing flange with gauge/valve are included for immediate use.

Furnace structure Double layer steel case with two cooling fan, which ensure low surface temperature. Energy saving high purity fibrous alumina insulation. Digital programmable control is provided with 30 segments per program. The controller also includes RS232 communications. The furnaces that use this control also utilize a mechanical Over Temperature Protection relay. Top quality SiC heating elements are used in these furnaces.

TECHNOCRACY PVT. LTD.

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Temperature control unit can be separated from furnace, and make moving at easy. Its PID automatic control via current limiting phase angle fired the resistor, e.g. SCR (Silicon Controlled Rectifier). It has a Power control with 30 segments programmableThis furnace has a Built in protection for over-heated and broken Thermal couple.

SALIENT FEATURES Ÿ Temperature Controller is 30 segments programmable with PID tuning & over

temperature protection with Temperature accuracy of +/-1°C. Ÿ Flowing rate accuracy: is 0.2% accuracy Ÿ Each has 30-segments programmable with protection for overheated and broken

thermo-couple Ÿ High quality Ni-Cr-Al resistance wire serves as heating element and can be heated up to

1200oC. Ÿ Max. Temperature is 1200 °C Ÿ Continuous Temperature is 200- 1000 o C. Max. Heating Rate is <= 20 °C /min

TECHNOCRACY PVT. LTD.

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TECHNICAL SPECIFICATIONS Fused quartz tube size

High purity quart tube Size: 279 O.D x 269 I.D x 1300mm Length (11" O.D x 10.6" I.D x 51" L). Warning: quartz tube is fragile, please handle with care.

Warranty does not cover broken tube by use

Furnace structure

Double layer steel casing with air cooling. Surface temperature of case is < 70°C. Refractory fibrous alumina insulation liner for maximum energy saving.

Heating element: NiCrAl Resistance Wire Two fibrous ceramic tube blocks are included for blocking heat radiation from inside tube. (Ceramic blocks must be fully inserted into the furnace chamber before heating). Quartz blocks (Optional) are available upon request for more clearness and higher vacuum processing.

This furnace can be used as annealing or diffusion furnace for 8" wafer use a quartz boat at related product below.

Heating zone

Total heating zone length 900 mm (36") Three zones: 300 mm + 300 mm + 300mm (12" per zone) Constant temperature zone: 500 mm (if three zones are in the same temperature)

Working temperature

Max heating temperature: 1100°C ( < 1 hour ) Normal working temperature: 200~1000°C Max heating & cooling rate: 10°C/min Temperature uniformity: please click the pic to enlarge

Temperature control

Three digital controllers with PID/self-tuning functions and 30 segments programmable.

Thermocouple: three K type thermocouples (one for each zone) Control accuracy: +/- 1°C SRC (Silicon Controlled Rectifier) power control Software for PC control is available as optional ( click picture below to order )

TECHNOCRACY PVT. LTD.

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TECHNICAL SPECIFICATIONS Vacuum sealing & Flange

A pair of stainless steel vacuum sealing flange (Hinged Type) and 4 pieces of high temp-resistance silicon O-ring are included in order to achieve the vacuum rate of 10^-2 torr via heavy duty mechanical pump.

Left Side Flange: Vacuum gauge, stainless steel needle valves and 1/4" barbed hose fitting. Right Side Flange: KF40 vacuum port with KF-40 Vacuum Right-Angle Valve for easy connection to KF40 bellows and pump. ( If use pump with KF25 port, you will need a adapter KF40-KF25.

One 1/4" OD thermal couple insert port is built in the flange for easy temperature calibration.

Calibration (Optional)

The tube furnace should be calibrated regularly to maintain the temperature accuracy and uniformity. We are providing a simple calibration kit for you to complete this job at extra costThe complete calibration kit includes One 48"L ( 1/4"OD) K type calibration thermocouple

Rated Voltage

Single Phase, 220V AC, 50/60 Hz AWG 8# Power cord is included (without plug)

Power consumption

Max. 8KW (50A breaker required)

Product Dimension

1300 L x 680W x 920 H mm (51" L x 24.5" W x 37" H) (without the vacuum flange) 1670 L x 680 W x 920 H mm (66" L x 24.5" W x 37" H) (with the vacuum flange and right angle valve)

Net weight

200kg

Shipping dimension

70" x 70" x 65"

Shipping weight

500Lbs (227kg)

Warranty

One year limited warranty for electrical parts. ( Consumable parts such as processing tubes, o-rings and quartz tube are not covered by the warranty). You may order replacement quartz tube at the link below

NOTE

In order to obtain accurate temperature inside the tube furnace, calibration of temperature is require before use TECHNOCRACY PVT. LTD.

An ISO 9001 : 2208 | ISO 14001 : 2008 | ISO 13485 WHO: GMP Products | GLP Compliant Products

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