LINEA II Single Side Polish Etch
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SINGULUS TECHNOLOGIES Developer, Enabler and Supplier for the PV Market
SINGULUS TECHNOLOGIES is a supplier of manufacturing solutions and production equipment for the Markets Optical Disc, Semiconductor and Solar. With new machine concepts and manufacturing processes in the crystalline and thin-film solar technology SINGULUS TECHNOLOGIES establishes itself as development partner and equipment supplier for investments in new high-performance solar cell concepts. As market leader for Optical Disc production systems we have gained extensive know-how in vacuum coating, automation and process integration.
For crystalline solar cells SINGULUS TECHNOLOGIES offers →→ →→ →→ →→ →→ →→ →→ →→ →→ →→
Single Side Polish Etch with LINEA II PERCEUS production package for PERC cells LINEA II parasitic Emitter Etching and Edge Isolation LINEA II Isotexture or PSG removal Batch Wet Process Equipment for Poly Silicon Chunk Etching, Cleaning & Drying – MATERIA ICP-PECVD AR Coating Equipment – SINGULAR IPA-Free Wet Process Equipment – SILEX Evaporator for Metallization of High-efficiency Solar Cells Low-cost and high efficient Cleaning Process for Crystalline Solar Cells (Upgrade SILEX with ozone) Complete Production Lines – SOLARE
SINGULUS TECHNOLOGIES cooperates with cell manufacturers worldwide and develops processes, which improve the efficiency of solar cells and at the same time reduce production costs. Evolutionary improvement in cell concepts like PERC (PERL/PERT), n-type material, IBC cell or heterojunction cells will drive the future of crystalline solar cells. SINGULUS TECHNOLOGIES offers turn-key production lines for all cell types of today and tomorrow.
SDE/TEXTURE
DIFFUSION
SDE/TEXTURE
DIFFUSION
SDE/TEXTURE
PERCEUS Upgrade Package for PERC Cells
SDE/TEXTURE
Production Line for PERC Cells
SINGLE SIDE SINGLE POLISH SIDE POLISH
SELECTIVE EMITTER SELECTIVE EMITTER
PSG
PECVD
PRINTING
FIRING
PSG
PECVD
PRINTING
FIRING
REAR PECVD REAR PECVD
FRONT PECVD FRONT PECVD
REAR PECVD REAR PECVD
FRONT PECVD FRONT PECVD
DIFFUSION
PSG EE
DIFFUSION
PSG EE
SDE/TEXTURE
DIFFUSION
PSG
SDE/TEXTURE
DIFFUSION
PSG
SINGLE SIDE SINGLE POLISH/ SIDE CLEANING POLISH/ CLEANING
LINEA II Single Side Polish Etch Standard silicon solar cells have a textured front and rear side. In order to optimize the light trapping within the cell and the conditions for a good rear side passivation with local contacts, a planar rear surface is most suitable. The different structured front and rear surfaces of the wafer make the implementation of a single side etching process step essential. For the market of silicon solar cells SINGULUS presents a new production solution for rear side passivated silicon solar cells (e.g. PERC Passivated Emitter and Rear Cell). This solution was developed especially for the upgrade of existing cell production lines.
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LCO
PRINTING
FIRING
LCO
PRINTING
FIRING
LCO
PRINTING
FIRING
LCO
PRINTING
FIRING
For the upgrade of a production line three additional production steps, which SINGULUS offers solutions for, are required. Before coating the rear side it is smoothed with a wet-chemical polish in a LINEA II Single Side Polish Etch machine. The dielectric passivation layer is emitted in the ICP-PECVD machine SINGULAR. For the rear side contacts through a laser process, SINGULUS is closely cooperating with a partner. With the integration of these additional production steps into existing manufacturing lines PERCcells with levels of efficiency of up to 20 % can be achieved. SINGULUS TECHNOLOGIES offers for R&D single lanes up to 10 lanes for high throughput production tool. Rear Polishing: →→ Increase of internal reflection →→ Reduction of surface defects →→ Reduction of recombination centres →→ Longer carrier lifetime →→ Better passivation quality
Linea II SSE-PE Technical Data Linea II SSE-PE (Standard Production Tool)
Lanes
6
Dimensions
Process Compartment: 9500 * 1800 * 1400 Media Compartment: 9500 * 1000 * 2200
Throughput
3600 wph
Wafer
156 mm; > 150 µm; mono, multi, mono-cast
Utilities
N2, CDA, DI-water, PCW, Tap Water HF, KOH, HCl, HF, HNO3, Additives Waste Drains Exhaust Electrical Power 400 VAC 3/PE
Tool: →→ Compact process chambers with innovative organisation of media and process →→ Simple and robust „spider-chain“ wafer transport system with no mechanical contact on top side →→ Shadow free contact of the wafer surfaces with the process media →→ Friction-free, gentle wafer transport through the process media →→ Excellent accessibility of the process chamber from all sides by the separation process and installing modules
Subsidiaries Offices
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Headquarters
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04/2013 MetaCom - Printed in Germany - Technical alterations reserved
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