LINEX

LINEX Inline Wet Process Equipment for Cleaning of New Cell Formats Like PERC - HJT – TOPCon – Tandem & more

LINEX Inline Wet Process Equipment for Cleaning, Alkaline & Acidic Etching, Single Side Treatment, Polish Etch & PSG Removal & Inline Ozone Applications PV Technology Powers the World

Future Cell Concepts: TOPCon Solar Cells

SINGULUS TECHNOLOGIES provides technology solutions for both crystalline and thin-film highperformance solar cell platforms.

Tunnel oxide passivated contacts (TOPCon Solar Cells) are based on an ultrathin tunnel oxide capped by a doped Si film exhibiting excellent passivation and contact properties. This cell design has so far resulted in efficiencies of up to 25.7 %.

SINGULUS TECHNOLOGIES is an established equipment supplier with customers producing crystalline and CIGS/CdTe solar cells. SINGULUS TECHNOLOGIES cooperates with cell manufacturers worldwide and develops processes, which improve the efficiency of solar cells and at the same time reduce production costs. Evolutionary improvement in cell concepts like PERC - HJT – TOPCon – Tandem will drive the future of crystalline solar. SINGULUS TECHNOLOGIES’ expertise includes vacuum thin-film coating (PECVD, physical vapor deposition (PVD), evaporation), surface engineering, wet chemical processes and thermal processing.

LINEX

Inline Wet Process Equipment

SINGULUS TECHNOLOGIES provides for the production of TOPCon high performance solar cells the important manufacturing steps: inline wet processing and vacuum deposition (PVD & PECVD).

TOPCon Solar Cells

LINEX Inline Wet Process Equipment SINGULUS TECHNOLOGIES provides complete automated dry-in/dry-out solutions for wet-chemical treatment of Si-wafers in standard high-efficiency cell lines.

The ongoing evolution of proven concepts in process management and the integration of innovative approaches are the basis for the development of a new generation of horizontal wet processing systems.

LINEX is an inline wet processing platform with horizontal substrate transport for Si wafers. The SINGULUS TECHNOLOGIES LINEX system combines an advanced transportation system and sustainable/ innovative processing modules with proven and efficient chemical treatment.

In addition to proven processes, the focus is on new applications such as single side treatment, polish etching, emitter etching and ozone applications.

The highly integrated design, high throughput, high availability and low breakage rates make LINEX very attractive for solar cell manufacturers worldwide.

Typical Performance Characteristics →→ Inline from R & D tool to the fully integrated 10 lane system →→ Alkaline process up to 90 °C possible in 5 or 10 lane systems →→ Polish etch up to 10 µm →→ Integration of ozone →→ Uniform media flow on wafer surface →→ Consistent flow conditions from lane to lane →→ Easy integration of new or additional process options →→ High uptime up to 98 % →→ High throughput and best performance →→ Low cost of ownership →→ Low breakage rate down to 0.01 % →→ Best footprint →→ SSE application up to 5 µm

Controlled – Precise – Intelligent →→ Fully automated inline wet process equipment with integrated process control →→ Compact process modules with innovative media and process management →→ Simple and robust wafer transport system →→ Shadow-free contact of the wafer top surface with the process media →→ Wafer tracking and wafer thickness measurement

Safe – Clean – User Friendly →→ Safe for operators, environment and for reliable processing →→ Cleanroom compatible design according to ISO and SEMI standards →→ Gentle wafer transport through the process media →→ Excellent accessibility of the process modules from all sides

LINEX Final Clean Load

Alkaline/ Additive Ultrasonic

Rinse

Postclean

Rinse

Dry

Unload

LINEX Process Applications

Advanced Production Methods for Crystalline Solar Cells

Final Clean (Mono & Multi): Wafer cleaning after separation, with ultrasonic & additives

Final Clean LINEX ALTEX

Alkaline Texture (Mono): Ultra short process time, superior aesthetics Single Side Etching: Single side etching of a-Si for TOPCon applications Single Side Polish (Mono & Multi): Acidic or alkaline rear side polishing up to 5 µm

Load

Rinse

Postclean Alkaline Tex

Rinse

Dry SINGOZON

Unload Rinse

Dry

Unload

Rinse

Alkaline SINGOZON

Rinse

SINGOZON Dry

Rinse Unload

Dry

Unload

Rinse

SINGOZON

Rinse

Dry

Unload

Rinse

SINGOZON

Rinse

Dry

Unload

ALTEX LINEX DW Load

Preclean DW-Tex

Tex

DW SSE LINEX ALKALINE SSE/PSG Load

DW-Tex Single Side Etching

LINEX SSE/PSG Load

Ozone: Advanced cleaning technology

Alkaline/ Preclean Additive Ultrasonic

Single Side Etching

LINEX Technical Data LINEX FINAL CLEAN

5 Lane (Mono)

5 Lane (Multi)

Throughput

5000 wph

5000 wph

Velocity

3 m/min

3 m/min

Footprint

9800 mm

6400 mm

LINEX ALTEX Mono

5 Lane*

10 Lane*

Throughput

5000 wph

10000 wph

Footprint

15000 mm

17000 mm

LINEX SSE/Polish/PSG

5 Lane*

10 Lane

Throughput

5000 wph

10000 wph

Footprint

9800 mm

9800 mm

* LINEX Ozone option available

←

Subsidiaries Offices

Headquarters SINGULUS TECHNOLOGIES AG Hanauer Landstrasse 103 D - 63796 Kahl, Germany Tel. +49 6188 440-0 Fax +49 6188 440-130 sales@singulus.de www.singulus.de Production Site for Wet Processing Systems SINGULUS TECHNOLOGIES AG Branch Office Fuerstenfeldbruck Fraunhoferstr. 9 82256 Fuerstenfeldbruck, Germany Tel. +49 8141 3600-0 Fax +49 8141 3600-100 sales@singulus.de Subsidiaries China SINGULUS TECHNOLOGIES CHINA Room B412-413, No. 1400 Jiangchang Road, Jingan District, Shanghai, China Zip Code: 200072 Tel. +86 13916990710

France SINGULUS TECHNOLOGIES FRANCE S.A.R.L. Tel. +33 3 893111-29 singulus@club-internet.fr Latin America SINGULUS TECHNOLOGIES LATIN AMERICA LTDA. Tel. +55 1121 6524-10 sales@singulus.com.br Singapore/South East Asia SINGULUS TECHNOLOGIES ASIA PACIFIC PTE LTD. Tel. +65 674 119-12 sales@singulus.com.sg Taiwan SINGULUS TECHNOLOGIES TAIWAN LTD. Tel. +886 2 2748-3366 sales@singulus.com.tw United States, Mexico and Canada SINGULUS TECHNOLOGIES INC. Tel. +1 860 68380-00 sales@singulus.com

Contact: Greens Pan Tel. +86 13822138376 greens.pan@singulus.com.cn

THIN FILM DEPOSITION

SURFACE ENGINEERING

THERMAL PROCESSING

WET CHEMICAL

SINGULUS TECHNOLOGIES – Innovations for New Technologies SINGULUS TECHNOLOGIES develops and assembles innovative machines and systems for efficient and resource-saving production processes, which are used worldwide in the solar, semiconductor, medical technology, consumer goods and optical disc sectors.

The company‘s core competencies include various processes of coating technology, surface treatment and wet-chemical and thermal production processes.

2_007 - 5/2019 MetaCom - Printed in Germany - Technical alterations reserved

Contact: Michael Han Tel. +86 13917382315 michael.han@singulus.de