MetaTEX200 IPA-free Alkaline Texturing State-of-the-art Surface Etching for Monocrystalline Si-Wafers
SINGULUS TECHNOLOGIES Developer, Enabler and Supplier for the PV Market SINGULUS TECHNOLOGIES is a supplier of manufacturing solutions and production equipment for the Markets Optical Disc, Semiconductor and Solar. With new machine concepts and manufacturing processes in the crystalline and thin-film solar technology SINGULUS TECHNOLOGIES establishes itself as development partner and equipment supplier for investments in new highperformance solar cell concepts. As market leader for Optical Disc production systems we have gained extensive know-how in vacuum coating, automation and process integration. SINGULUS TECHNOLOGIES cooperates with cell manufacturers worldwide and develops processes, which improve the efficiency of solar cells and at the same time reduce production costs. Evolutionary improvement in cell concepts like PERC (PERL/PERT), n-type material, IBC cell or heterojunction cells will drive the future of crystalline solar cells. SINGULUS TECHNOLOGIES offers turn-key production lines for all cell types of today and tomorrow.
MetaTEX200 IPA-free Alkaline Texturing State-of-the-art Surface Etching for Monocrystalline Si-Wafers Advanced Texturing MetaTEX is a new texturing additive, opens the door for a robust new IPA-free texturing process, offering substantial cost advantages compared to traditional etching systems, completely refrains from using flammable, volatile solvents and enables a stable, wet-chemical texturing process for silicon wafers. With the application of this alkaline texturing process the etching solution lifetime is tripled for the modified SILEX etching system from SINGULUS STANGL SOLAR in combination with >> Shortening of the etching duration at the same time >> Simplified chemical disposal >> Wide process window
Benefits and Features >> Environmental-friendly >> IPA-free composition >> No solvent evaporation/emission >> Safe and easy handling of chemical, process and waste water >> Wide process window >> No analytical bath control required >> Improved etch and reflectance process stability >> Excellent bath lifetime >> Reduced process time >> Small, uniform and adjustable pyramide size >> Perfect surface compatibility with subsequent passivation and deposition processes >> Compatible with “as-cut” and etched wafers
MetaTEX200 Technical Data
Application
IPA-free alkaline texturing for mono Si-wafers
Chemicals
KOH/organic additive/DIW
Additive Concentration
1.5~2 wt % MetaTEX200 PreClean BKM* SINGULUS STANGL SOLAR Etch removal Process time Bath life time Pyramid size Reflectance
Features
Wafer
p-type, n-type mono wafer as cut (wire and diamond) saw damage etched
Environmental Data Process Solution
BOD = 36 mg/l COD = 556 mg/l
6-8 μm per side 15-20 min 30-40 runs** 2~5 μm < 12 % at 600 nm / < 12,5 % at 400 - 1100 nm
IPA-Process 130 mg/l IPA-Process 8700 mg/l
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09/2012 MetaCom - Printed in Germany - Technical alterations reserved
* best known method ** 30 runs as cut, 40 runs SD etched
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