SILEX II
Batch Wet Processing System for Solar Cells
SILEX II Modular, Automated Wet Processing System for Batch Cleaning and Etching for Solar Cells
SINGULUS TECHNOLOGIES provides complete automated dry-in/dry-out solutions for wet-chemical treatments of Si-wafers in standard and high-efficiency cell lines. The modular SILEX II batch system offers a wide range of process options. With respect to highest flexibility in configuration, the SILEX II machines is characterized by a clear modular design and a compact footprint.
SILEX II
Batch Wet Processing Equipment
The SILEX II machine concept fulfills current and future requirements of capacity, flexibility and reliability for mass production. The SILEX II 4000 system achieves an output of up to 4000 wph. The SILEX II 8000 system with an upscaled batch size will cover a tool capacity of up to 8000 wph, running with very low scrap rates down to 0.01 % and a high process yield.
Common and Advanced Process Applications
→ Organic Cleaning → Metal Cleaning → Surface Conditioning → Cascade Overflow
CLEANING
→ Dump-Spray System → Combination Rinse
RINSE
ETCHING
DRY
→ Hot/Cold Water Treatment → Hot Air, N2 Drying
→ Alkaline Texturing → Acidic Texturing → Chemical Polishing/Thinning → Metal and Oxide Etch
SILEX II Batch Wet Processing Equipment
Typical Features
The SILEX II ALTEX machine is designed to apply IPA-free texturing processes, offering substantial cost advantages compared to traditional etching systems. This texturing process can be adjusted to the individual requirements of standard and advanced cell technologies.
→→ High throughput performance up to 8000 wph →→ High uptime up to 95 % →→ Low breakage rate down to 0.01 % →→ Wafer thickness down to 120 μm (<120 µm on request) →→ Individual, flexible process sequencing →→ Onboard scheduler software for throughput tuning →→ Onboard performance analyzer software →→ Ozone-enhanced cleaning and etching processes →→ Short and stable IPA-free texturing process →→ Appropriate and effective rinsing and drying
The SILEX II CLEANTEX combines common etching and cleaning steps of monocrystalline Si with advanced cleaning and conditioning processes. Efficient cleaning steps are an indispensable requirement to improve cell efficiencies and reduce operation costs. Ozone-based cleaning operations, applied on SILEX II wet bench, combine efficient organic and metal removal with an appropriate surface conditioning. Due to low chemical costs and consumption, simple process control and high metal removal efficiency, ozonized cleaning baths are the perfect substitute for traditional, expensive multi-step RCA cleanings, known from the semiconductor industry. The SILEX II CLEAN is provided to run dedicated cleaning sequences for pre- or post-deposition processes. Depending on cell process flow and requirement the configuration can be designed individually, involving RCA or Ozone based cleanings as well as slight etching steps.
SILEX II Technical Data Application
Heterojunction solar cells
Throughput
Up to 4000/8000 wph
Dimension (L/W/D)
SILEX II CLEAN3 8800 x 2150/26002 x 2600 mm 1 SILEX II ALTEX 13600 x 2150/26002 x 2600 mm SILEX II CLEANTEX1 18400 x 2150/26002 x 2600 mm
Processes
Pre-Clean SDE/Texture Cleaning Rinse Drying
Alkaline, acidic Alkaline (CellTex®) Alkaline, acidic DIW overflow rinse Hot Air, Hot N2
Wafer
Size Thickness
M1-M4 >120 μm post process
Facilities
Liquid media Gases Exhaust Electrical power
DI water, chemicals Compressed air, N2, O2
Options
1 2 3
400 VAC
DI water heater Chiller Extended load/unload buffer Chemical supply systems Waste water pump stations SINGULUS process carrier (100 wafers, Metal-free) Ozone system
Standard configuration for CellTex® Process (BKM SINGULUS) 200/400 wafer batch Standard configuration 2-steps clean
SILEX II Advanced Wet Processing Pyramid Rounding with Ozone
HIGH THROUGHPUT
HIGH UPTIME
Slight Etch-back
LOW BREAKAGE
BKM SINGULUS – CellTex®
CellTex® ULTRA 1-3 µm
CellTex® ULTRA M 2-5 µm
Alkaline Texturing
Ozone Cleaning
The core of the current and future batch process applications is the alkaline texturing process of mono-crystalline silicon, generating pyramidaletched surfaces with optimal light trapping, passivation and contacting properties.
Ozone is one of the most powerful oxidizing agents. Effective Ozone-gas injection, low chemical concentrations and ambient process temperatures guarantee stable and highly effective process sequences for oxidation, cleaning and etching.
State-of-the-Art Texturing Additive
→→ Reduced CoO cost saving effect vs. RCA cleaning (high chemical cost) →→ Higher Minority Carrier Lifetime (combined Si etch-back and advanced cleaning) →→ Smaller machine footprint (reduced number of process tanks) →→ Improved surface passivation →→ Environmentally friendly process using “Green chemical Ozone”
→→ Commercially available product, worldwide supported →→ Multiple pyramid size tuning options →→ Short and robust etching process with large process window and close uniformity range →→ Stable composition with long bath lifetime →→ Non-hazardous, non-flammable, non-dangerous →→ Readily biodegradable
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Subsidiaries Offices
Headquarters SINGULUS TECHNOLOGIES AG Hanauer Landstrasse 103 D - 63796 Kahl, Germany Tel. +49 6188 440-0 Fax +49 6188 440-130 sales@singulus.de www.singulus.de Production Site for Wet Processing Systems SINGULUS TECHNOLOGIES AG Branch Office Fuerstenfeldbruck Fraunhoferstr. 9 82256 Fuerstenfeldbruck, Germany Tel. +49 8141 3600-0 Fax +49 8141 3600-100 sales@singulus.de Subsidiaries China SINGULUS TECHNOLOGIES CHINA Room B412-413, No. 1400 Jiangchang Road, Jingan District, Shanghai, China Zip Code: 200072 Tel. +86 13916990710
France SINGULUS TECHNOLOGIES FRANCE S.A.R.L. Tel. +33 3 893111-29 singulus@club-internet.fr Latin America SINGULUS TECHNOLOGIES LATIN AMERICA LTDA. Tel. +55 1121 6524-10 sales@singulus.com.br Singapore SINGULUS TECHNOLOGIES ASIA PACIFIC PTE LTD. Tel. +65 674 119-12 sales@singulus.com.sg Taiwan SINGULUS TECHNOLOGIES TAIWAN LTD. Tel. +886 2 2748-3366 sales@singulus.com.tw United States, Mexico and Canada SINGULUS TECHNOLOGIES INC. Tel. +1 860 68380-00 sales@singulus.com
Contact: Greens Pan Tel. +86 13822138376 greens.pan@singulus.com.cn
THIN FILM DEPOSITION
SURFACE ENGINEERING
THERMAL PROCESSING
WET CHEMICAL
SINGULUS TECHNOLOGIES – Innovations for New Technologies SINGULUS TECHNOLOGIES has built equipment for the Semiconductor, Solar, Optical Disc, Decorative Coatings, and Medical Technology industries for more than 20 years, satisfying the high-quality requirements of each industry. The core competencies of SINGULUS TECHNOLOGIES include vacuum coating, surface processing, wet-chemical and thermal production processes. SINGULUS TECHNOLOGIES’ machines incorporate the latest technological developments and follow the guiding principles of industry 4.0, the current trend of automation and data exchange in manufacturing technologies. SINGULUS TECHNOLOGIES builds innovative machines and systems for efficient and resource-friendly production processes. For all of its machines, processes and applications, SINGULUS TECHNOLOGIES demonstrates its automation and process technology expertise with quick, substantial return on investment.
2_008 - 1/2019 MetaCom - Printed in Germany - Technical alterations reserved
Contact: Michael Han Tel. +86 13917382315 michael.han@singulus.de