manWPS
Manual Wet Process Station
Manual Wet Process Station manWPS Manual Wet Chemical Processing →→ Full modular design →→ Cost effective and customer-orientated →→ Flexible process applications →→ Optimized footprint
→→ PLC controlled operation →→ Touch display at operating panel with text menu, with main features: →→ Process bath timer →→ Temperature and further bath settings →→ Chemical dosage management →→ Rinse management (QDR) →→ Compliant with all Major Design Standards (CE, UL, SEMI)
Application IC manufacturing in Si, III/V materials, compound semiconductors →→ MEMS →→ CMOS →→ Sensor →→ Wafering →→ R&D (Semiconductor and PV Technology) Product customization available
Processes
Optional →→ FM 4910 proofed material →→ Internal supply and disposal system with/without carboy →→ Chemical recirculation-/filtration system →→ Ultrasonic or megasonic enhancement →→ Chemical recirculation-/filtration system →→ Internal chemical management system (feed-/and bleed) →→ Carrier movement (stroke) at process bathes →→ Exhaust reduction system →→ Execution as fumehood
Cleaning-, etching-, solvent- and photoresist processes at pilot-line, mid-size production and R&D applications →→ Executed for operator-friendly processing of semiconductor applications →→ Design features to guarantee all safety aspects for manual operation →→ Fast installation and start-up according one connection interface feature and modular design →→ Easy maintenance access from grey area side
Substrate
max. 8“ wafer
Batch Size
max. 2 x 8“ (50 wafers)
Available Process Tank
PP/PVDF/PTFE/PFA, Quartz or Stainless Steel
Rinse Tank
Quick-Dump-Rinser
Thin Film Deposition
Surface Engineering
Thermal Processing
Wet Chemical
SINGULUS TECHNOLOGIES – Innovations for New Technologies SINGULUS TECHNOLOGIES builds machines for economical and resourceefficient production processes. SINGULUS TECHNOLOGIES’ strategy is based on the use and expansion of its existing core competencies. The application areas include coating technology, surface processing, wet-chemical applications as well as the related chemical and physical processing steps. The company’s target is to reach a technologically leading position in the Solar division.
SINGULUS TECHNOLOGIES AG Hanauer Landstrasse 103 D - 63796 Kahl, Germany Tel. +49 6188 440-0 | Fax +49 6188 440-110 sales@singulus.de | www.singulus.de
For all machines, processes and applications SINGULUS TECHNOLOGIES draws upon its know-how in the areas of automation and process technology.
3_003_B- 4/2017 MetaCom - Printed in Germany - Technical alterations reserved
Specification and Benefits
Manual Wet Process Station Technical Data