BAK501_iWEB

BAK1101+501_01.10.07:501

12.7.2008

13:40 Uhr

Page 1

The small machine for big ideas

BAK

501

Micro Optics R&D Custom Optics Optoelectronics Semiconductor Prototypin R&D Custom Optics Optoelectronics Semiconductor Prototyping Micro Optic tom Optics Optoelectronics Semiconductor Prototyping Optics R&D Custom Semiconductor Prototyping Micro Optics R&D Custom Optics Optoelectronic Micro Optics R&D Custom Optics Optoelectronics Semiconductor Optoelectr ping Micro Optics R&D Custom Optics Optoelectronics Semiconductor Proto Micro Optics R&D Custom Optics Optoelectronics Semiconductor Prototypin R&D Custom Optics Optoelectronics Semiconductor Prototyping Micro Optic ics Custom Optics Optoelectronics Semiconductor Prototyping Custom Optic Semiconductor Prototyping Micro Optics R&D Custom Optics Optoelectronic Micro Optics R&D Custom Optics Optoelectronics Semiconductor Prototypin rototyping Semiconductor Micro Optics R&D Custom Optics Optoelectronics Optics R&D Custom Optics Optoelectronics Semiconductor Prototyping Micr Micro R&D Optics Custom Optics Optoelectronics Semiconductor Prototypin R&D Custom Optics Optoelectronics Semiconductor Prototyping Micro Opt Optics Optoelectronics Semiconductor Prototyping Micro Optics R&D Custom

www.evatecnet.com

BAK1101+501_01.10.07:501

12.7.2008

13:40 Uhr

Evatec Ltd. Lochriet CH-8890 Flums Switzerland Telephone + 41 81 720 1080 Telefax + 41 81 720 1081 info@evatecnet.com

Page 2

Ideal for process development or production in small substrate sizes or volumes, the BAK 501 comes with all the capability of its bigger brothers in the BAK family, at a footprint and cost to meet the tightest requirements. Simple process transfer to larger members of the BAK family makes future scale up simple. The BAK 501 can then be easily reconfigured for your next big idea.

■ ■ ■ ■ ■ ■

Complete range of process components The BAK 501 is compatible with Evatec’s range of production proven process accessories including: The EBS 500 electron beam gun Thermal sources Sputter sources Back and front side heating Glow discharge cleaning Custom substrate holder and handling systems

BAK

Professional process control From pump down to system vent, Evatec’s user friendly Khan platform is easy to configure and ensures all process sequences conform within strict limits for best overall repeatabilities and yields.

■ Quartz and Optical Monitoring including broadband ■ RGA integration possible ■ Full SECS GEM compatibility

Substrate size

Capacity

2 inch

Up to 32

4 inch

Up to 8

6 inch

Up to 4

Footprint only 2 m 2

www.evatecnet.com

Document No: 133405

501