Diamond Like Coatings

DIAMOND LIKE CARBON COATINGS DLC PROCESSES FOR 3-5µm AND 8-12µm INSIDE YOUR BAK

THE NEW WAY TO MAKE DLC COATINGS Evatec brings conventional PVD and PECVD processes together within the same system to enable high performance protected AR coatings on Si or Ge. REDUCE YOUR MANUFACTURING COSTS FOR HIGH PERFORMANCE IR COATINGS

CONTROLLING THE DEPOSITION PROCESS

sp2 + sp3 amorphous polymeric soft - hard

PVD and PECVD processes can now be brought together in the BAK platform. Save time and costs in the coating of DLC type layers used to protect thermal imaging and guidance systems for high performance consumer, industrial and military applications -- Eliminate the vacuum break required between conventional PVD and PECVD processes

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-- Low temperature processing <150˚C (compared with 300-600˚C for conventional DLC processes) to prevent substrate damage

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-- Reduce the number of manufacturing steps - eliminating the need for an additional DLC tool and saving cleanroom space

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Step 1: PVD Process(es) Multilayer stack deposition for high performance AR coatings using Evatec digital e gun technology Step 2: PECVD Deposition of hydrogenous amorphous carbon films of controlled refractive index using proprietary plasma source technology Process Control Combination of quartz and broadband optical monitoring for layer end point termination with “in situ” direct measurement of optical properties

DLC is not one material but refers to a whole class of amorphous hydrogen containing carbon materials with various degrees of cross linking, hydrogen content and stress. Evatec processes technology delivers films with a hybridisation between sp3 and sp2 in the range 0.07 to 0.72 at H contents of around 40at%

TAKE A LOOK AT THE RESULTS FT-IR measurement on Silicon Wedge with DLC Coating 30

25

20

%R

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-- C oat the whole batch of optics together for best process repeatability

15

10

- Layer thickness 362nm

5

- Refractive index 1.67@2160nm

0

1500 3500 5500 7500 9500 11500 13500 15500 17500 19500 Wl [nm]

Two sided AR Coating with additional DLC on single side 1

TYPICAL BAK1101 TOOL SET UP

0.9

-- Throw distance approx. 1000mm

0.8

-- 2 x Digital E-Gun ESQ212

0.7

-- Proprietary plasma source -- E nhanced gas throughput vacuum pumping system. DLC process in range 10-4 to 10-3 mbar -- 4 MFCs for process gases -- I ntegrated quartz and optical thickness monitoring

0.6 %R

-- 4 x Quartz front side heaters

0.5

— Specification:

0.4

absolute reflection 37204470nm<0.4%

0.3 0.2 0.1 0

3500 3700 3900 4100 4300 4500 4700 Wl [nm]

TYPICAL FILM PROPERTIES

WANT TO KNOW MORE

-- Film Hardness: >20 GPa

For more information contact your local Evatec sales office or visit us online at: www.evatecnet.com/markets/precision-optics

-- Intrinsic stress: <100MPa

Evatec AG Hauptstrasse 1a CH-9477 Trübbach Switzerland

Tel: + 41 81 403 80 00 Fax: + 41 81 403 80 01 info@evatecnet.com www.evatecnet.com

-- Refractive index : 1.67 -- Compatibility: “Bio & Blood” (stable against acids & alkalis)

-- Environmental & durability performance tested according to UK military tests TS1888 (water/sand wiper TS)

Product descriptions, photos and data are supplied within the brochure for general information only and may be superseded by any data contained within Evatec quotations, manuals or specifications.

Edition 1: Printed May 2014.