ITO - INDIUM TIN OXIDE Damage free sputtering at high throughput • For sensitive substrates and sub layers • Low temperature anneal for reduced downstream processing Radiance offers custom configurations for ITO sputter according to substrate type and application. From HB LEDs to Displays, Radiance enables damage free deposition onto both conventional and sensitive polymeric / inorganic semiconductor substrates. Simple tooling solutions exist for handling of 2, 4, 6 or 8 inch substrates at high throughput and the Radiance platform can be extended with additional process modules, cathodes and cassette stations as production demands grow. Evatec’s process solutions are tailored in collaboration with customers for the optimum balance of transmission and sheet resistance. Proprietary system design allows substrate materials and sub layers normally susceptible to plasma damage to be protected during sputter. Peak ITO performance can also be achieved without high temperature post anneal, protecting temperature sensitive substrates, reducing downstream processing times and increasing production throughput.
ITO Process Performance
Target Composition 90:10
Typical Deposition Rates
Up to 80Å/kWmin according to application
Typical Transmission Values (Film ONLY)
On Sapphire: > 90% On Corning; Eagle XG: > 95%
Typical Sheet Resistance Values
<70Ω/sq @ 600Å, <10Ω/sq @ 3200Å (2400Å)
Photo courtesy of OSRAM
ITO - INDIUM TIN OXIDE
Typical ITO deposition results Throughput of 2” wafers according to thickness and number of cathodes
Throughput of 4” wafers according to thickness and number of cathodes
Throughput of 6” wafers according to thickness and number of cathodes
Transmission according to wavelength at different film thicknesses
Evatec Ltd. Lochrietstrasse 14 CH-8890 Flums Switzerland Tel: + 41 81 720 1080 Fax: + 41 81 720 1081 info@evatecnet.com www.evatecnet.com Product descriptions, photos and data are supplied within the brochure for general information only and may be superseded by any data contained within Evatec quotations, manuals or specifications.