WAFER LEVEL OPTICS THE FUTURE IN PHOTO SENSOR MANUFACTURING
WAFER LEVEL OPTICS Evatec brings semiconductor wafer handling capability and precision optics thin film know how together for the perfect production solution on silicon or glass wafers. Enhance your process yields and reduce your costs. THE NEW APPROACH TO PHOTODIODE MANUFACTURING From the ambient light and proximity sensors used in mobile phone applications to the filters in photo detectors for high speed sorting or authentication, high performance optical filters are critical components in today’s consumer electronics and industrial control applications. Simplify the traditional sensor production steps of bonding the coated filter glass wafer to the silicon detector wafer by coating directly on the silicon wafer. Eliminate wafer cleaning, alignment and bonding steps, reduce the overall number of process steps, improve yield and reduce production costs for mass production on high added value 6 & 8 inch wafers.
WAFER HANDLING AND PROCESS CONTROL ARE KEY
Next generation devices will integrate new capabilities like 3D sensing and gesture recognition
Evatec offers secure glass and silicon wafer handling, high stability sputtered films and techniques in thin film process control specifically for spectral accuracy and repeatability in deposition of optical films.
A CHOICE OF SPUTTER TOOLS DEPENDING ON YOUR NEEDS
CONTROL TECHNOLOGIES THAT ENHANCE YIELD AND REDUCE COSTS
CLUSTERLINE® RAD SPUTTER CLUSTER TOOL Cassette to cassette handling eliminates manual handling Integrated flip for double sided processes
PLASMA EMISSION MONITORING Closed loop control for film structure and stoichiometry Optically stable, dense films High deposition rates
Process Start
1. Layer deposition
The reoptimisation loop
2. Check spectrum
3. Recalculate remaining layers or continue without changes
MSP DRUM SPUTTER COATER System sizes up to 2.2m2 coating area per batch Up to 6 sputter cathodes plus integrated plasma source
GSM OPTICAL MONITORING Broadband monitoring for layer termination Complex stacks in UV, VIS and IR Direct wafer measurement and control
Process End
IN SITU REOPTIMISATION Automatic tuning of your thin film recipe during deposition Narrower process tolerances Recover from unexpected production errors e.g. power outage
WAFER TRACKING & CONTROL ON CLUSTERLINE® RAD Cassette to cassette wafer handling Batch or individual wafer tracking
LIKE TO KNOW MORE? Contact your local Evatec sales office or visit us online at www.evatecnet.com/markets/photonics
Evatec AG Hauptstrasse 1a CH-9477 Trübbach Switzerland
Tel: + 41 81 403 80 00 Fax: + 41 81 403 80 01 info@evatecnet.com www.evatecnet.com
Product descriptions, photos and data are supplied within the brochure for general information only and may be superseded by any data contained within Evatec quotations, manuals or specifications. Edition 3: Printed November 2017 (Edition 2: Printed Sep 2017, Edition 1: Printed Nov 2013)