18EI3013 Smart system Design 3:0:0 3

References:

1. Thomas Bräunl, Embedded Robotics ,Springer, 2003. 2. Grimm, Christoph, Neumann, Peter, Mahlknech and Stefan, Embedded Systems for Smart Appliances and Energy Management , Springer 2013. 3. Raj Kamal, Embedded Systems - Architecture, Programming and Design" , McGraw- Hill, 2008 4. Nilanjan Dey, Amartya Mukherjee, Embedded Systems and Robotics with Open Source Tools, CRC press, 2016. 5. Karim Yaghmour, Embedded Android , O'Reilly, 2013. 6. Steven Goodwin ,Smart Home Automation with Linux and Raspberry Pi, Apress, 2013 7. Robert Faludi,”Wireless Sensor Networks”,O’Reilly,2011.

Course Objectives:

1. To teach the students properties of materials, microstructure and fabrication methods. 2. To teach the design and modeling of Electrostatic sensors and actuators. 3. To teach the characterizing thermal sensors and actuators through design and modeling 4. To teach the fundamentals of piezoelectric sensors and actuators through exposure to different MEMS and NEMS devices

Course outcomes:

1. Familiar with micro fabrication and materials 2. Compare various sensors and actuators 3. Develop embedded application based on MEMS 4. Explain the features of NEMS device in real time applications 5. Describe various medical application based on MEMS 6. Distinguish various sensors and actuators depending on the application

Module 1: Micro-Fabrication, Materials And Electro-Mechanical Concepts :(7 Hours)

Overview of micro fabrication – Silicon and other material based fabrication processes – Concepts: Conductivity of semiconductors-Crystal planes and orientation-stress and strain-flexural beam bending analysis-torsional deflections-Intrinsic stress- resonant frequency and quality factor.

Module 2: Electrostatic Sensors And Actuation :(8 Hours)

Principle, material, design and fabrication of parallel plate capacitors as electrostatic sensors and actuators-Applications

Module 3: Thermal Sensing And Actuation :(8 Hours)

Principle, material, design and fabrication of thermal couples, thermal bimorph sensors, thermal resistor sensors-Applications.

Module 4: Piezoelectric Sensing And Actuation : (8 Hours)

Piezoelectric effect-cantilever piezo electric actuator model-properties of piezoelectric materialsApplications. Piezoresistive sensors, Magnetic actuation Module 5: Microsystems Design, assembly and packaging : (6 Hours) Micro system Design - Design consideration, process design, Mechanical design, Mechanical design using MEMS. Mechanical packaging of Microsystems, Microsystems packaging, interfacings in Microsystems packaging, packaging technology, selection of packaging materials, signal mapping and transduction. Module 6: Case Studies :Micro fluidics applications, Medical applications, Optical MEMS.-NEMS Devices- multisensor module for embedded design with IOT- web based system

18EI3014 MEMS TECHNOLOGY FOR EMBEDDED DESIGN L 3 T 0 P 0 C 3

Reference Books

1. Chang Liu, “Foundations of MEMS”, Pearson International Edition, 2006. 2. Marc Madou , “Fundamentals of micro fabrication”,CRC Press, 1997. 3. Boston , “Micromachined Transducers Sourcebook”,WCB McGraw Hill, 1998. 4. M.H.Bao “Micromechanical transducers: Pressure sensors, accelerometers and gyroscopes”, Elsevier, Newyork, 2000.