VOLUME I ISSUE
2
AUTUMN 1998
$5.00 US
Yield Management
S O L U T I O N S Yield Enhancement and Process Control Strategies for the Semiconductor Industry
6
COVER STORY: LITHOGRAPHY DEFECTS — THE HIDDEN YIELD KILLERS
13 IDENTIFYING PROCESS DRIFT WITH CD SEMS 25 INSPECTION IMPLICATIONS A DESIGN RULE SHRINK
OF