Autumn99

Page 1

VOLUME 2 ISSUE

1

AUTUMN 1999

$5.00 US

Yield Management

S O L U T I O N S Yield Enhancement and Process Control Strategies for the Semiconductor Industry

SPECIAL: SPECIAL: A A F FOCUS OCUS O ON N C COPPER OPPER C-3 C-3 COVER COVER STORY STORY — — C COPPER OPPER IINTERCONNECT NTERCONNECT — — A AN N E ENABLING NABLING T TECHNOLOGY ECHNOLOGY FOR FOR F FUTURE UTURE S SCALING CALING C-8 C-8 IIMPROVING MPROVING COPPER COPPER P PROCESS ROCESS IINTEGRATION NTEGRATION U USING SING E-B E-BEAM EAM IINSPECTION NSPECTION


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