VOLUME 2 ISSUE
1
AUTUMN 1999
$5.00 US
Yield Management
S O L U T I O N S Yield Enhancement and Process Control Strategies for the Semiconductor Industry
SPECIAL: SPECIAL: A A F FOCUS OCUS O ON N C COPPER OPPER C-3 C-3 COVER COVER STORY STORY — — C COPPER OPPER IINTERCONNECT NTERCONNECT — — A AN N E ENABLING NABLING T TECHNOLOGY ECHNOLOGY FOR FOR F FUTURE UTURE S SCALING CALING C-8 C-8 IIMPROVING MPROVING COPPER COPPER P PROCESS ROCESS IINTEGRATION NTEGRATION U USING SING E-B E-BEAM EAM IINSPECTION NSPECTION