Fall05

Page 1

Yield Management VO L U M E 7 I S S U E

2

FALL

2005

$5.00 US

S O L UYield Acceleration T Strategies I O N S for the Semiconductor Industry

SPECIAL FOCUS: Pattern-Limited Yield 15

COVER STORY — WHERE HERE IN N THE THE WORLD ORLD IS S THE THE PROCESS ROCESS YIELD IELD WINDOW INDOW?

36

GETTING WHAT YOU’RE ENTITLED TO

49

CONSIDERING OVERLAY METROLOGY IN THE DFM DISCUSSION


Turn static files into dynamic content formats.

Create a flipbook
Issuu converts static files into: digital portfolios, online yearbooks, online catalogs, digital photo albums and more. Sign up and create your flipbook.
Fall05 by KLA Corporation - Issuu