Magazine autumn98 p22

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Yield Enhancement with Bitmap Analysis by Ken Bernstein, Program Manager

Review of failing bit data collected by automated test equipment (ATE) is an essential tool used by engineers to improve the yield of memory arrays. While visual inspection of this data provides the engineer with the locations of failing bits, analysis of the failing bit patterns can help pinpoint the cause of bit failures.

With the introduction of KLA-Tencor’s BitPower™ Analysis System, bitmap analysis has transitioned from an offline engineering function into an ongoing manufacturing process for yield improvement. With this system, bitmap data is collected during production test, failing bit patterns are automatically extracted, and the data is passed to Klarity™, KLA-Tencor’s automated analytical software module, where it is analyzed in conjunction with the physical defect data collected at in-line inspection points. Such analysis helps correlate defects detected earlier in the manufacturing process to an electrical failure identified at the end of the process. This bitmap line monitor is illustrated in figure 1. When off-line engineering analysis is required, KLA-Tencor’s BitPower System provides powerful bitmap review software for full reproduction and visualization of failing bit data and their exact topological locations, thus preserving the ability to view original and absolute bit coordinates.

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Autumn 1998

Fab

Wafer Sort Automated test equipment

Automated test equipment

Automated test equipment (a)

Inspection Tool

BitPower Analysis System

(b)

(c)

Klarity Automated Decision Flow Analysis

(d)

Figure 1. (a) KLA-Tencor’s BitPower system collects data from ATE. (b) Bitmap data is converted from electrical to physical coordinates and bit patterns are extracted. (c) Physical bit pattern data is transmitted to Klarity. (d) Klarity can analyze the bitmap data in conjunction with other data sources.

Bitmap line monitor step 1: Data collection

As the first step in implementing the bitmap line monitor, the KLA-Tencor BitPower system collects raw electrical bitmap data from the ATE. Memory testers are the traditional source of bitmap data; but with the memory content rising in non-memory devices, it has become increasingly common for logic and mixed signal testers to have the ability to produce bitmap data. KLA-Tencor’s BitPower system can accept data from any of these sources.

Yield Management Solutions


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