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Yield Management Seminar Series A valuable venue for innovative ideas Decreasing silicon allowance for silicides places new requirements on the quality of the silicon/silicide interface for minimal roughness. Porous low-k materials are inherently non-homogeneous in structure, unlike SiO2. Singh explained that tantalumbased barrier materials for copper may introduce stress-related reliability concerns, and pinholes and non-uniformity-related defects in barrier layers become a greater issue below 40 nm in thickness. Table 1 illustrates the expected extension of current patterned wafer inspection methods and the timeline for bringing new technologies into R&D phases, yield ramp-up and volume production. In the interest of minimizing thermal budget, processes must be created to reduce the activation energy and use in-situ measurements to maximize performance, throughput and yield (figure 1), expecially for large diameter wafers. â?ˆ Reproduced with permission from SEMICONDUC TOR INTERNATIONAL, November 1998. Copyright 1998 Cahners Business Information. SEMICONDUCTOR INTERNATIONAL is a trademark of Cahners Business Information. All rights reserved.
KLA-Tencor’s Yield Management Solutions Seminars (YMS2) focus on value-added, integrated solutions for yield management and process control. Key topics include CMP, lithography, in-line monitoring and yield strategies, with an emphasis on copper. To reserve your space at the upcoming YMS2, contact Judy Dale by email at: judy.dale@kla-tencor.com. Date: Time: Location:
Wednesday, October 20th 9:00 a.m. to 6:00 p.m. Hyatt Regency Austin on Town Lake
For future YMS 2, please complete and return the enclosed business reply card. Call for future papers
Papers should focus on using KLA-Tencor tools and solutions to enhance yield through increased productivity and performance. Topics of interest include defect inspection, lithography, CMP, film measurement and yield management strategies. If you are interested in presenting a paper at one of our upcoming yield management seminars, please submit a one page abstract to: Judy Dale by fax at (408) 875-4144 or email at: judy.dale@kla-tencor.com.
YMS2 at a Glance DATE December 2 February 16 April 5
LOCATION Makuhari, Japan Seoul, Korea Munich, Germany
Autumn 1999
ABSTRACT DEADLINE September 1, 1999 November 1, 1999 January 7, 2000
Yield Management Solutions
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