VOLUME 3 ISSUE
2
SPRING
20 0 1
$ 5. 00 U S
Yield Management
S O L U T I O N S Process Module Control Strategies for the Semiconductor Industry
SPECIAL SPECIAL ISSUE: A A Focus Focus on on 300 300 mm mm 11 11 COVER COVER STORY STORY — — , M ICROECONOMICSOF OF METROLOGY ETROLOGY MICROECONOMICS YIELD IELD,, AND AND P PROFITABILITY ROFITABILITY IN IN 300 MM MM M MANUFACTURING ANUFACTURING 32 T TS SM MC C’’S S T TR RA AN NS SIIT TIIO ON NT TO O 300 300 M MM M— —A AN N INTERVIEW NTERVIEW WITH WITH D DR R.. N NUN UN-S -SIAN IAN T TSAI SAI 41 41 D DE EF FE EC CT TS SA AM MP PL LE E P PLLA AN NN NIIN NG G IIN N 300 300 F FABS ABS
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