Spring06

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Yield Management Vo l u m e 8 I s s u e

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S O L UYield Acceleration T Strategies I O N S for the Semiconductor Industry

SPECIAL FOCUS: Data to Decisions: Moving up the Knowledge Hierarchy for Enhanced Metrology Decision-making 15 6

COVER STORY — From rom Data ata to to Decisions ecisions Optimizing ptimizing Fin inFET Structures tructures with with Design esign-based based Metrology etrology

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When hen to to Raise aise the the Red ed Flag lag 警告を出すタイミングを見極める

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Automating utomating Investigation nvestigation Line ine Width idth Roughness oughness

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Spring06 by KLA Corporation - Issuu