Spring99

Page 1

VOLUME I ISSUE

3

SPRING 1999

$5.00 US

Yield Management

S O L U T I O N S Yield Enhancement and Process Control Strategies for the Semiconductor Industry

6 6

COVER COVER STORY STORY — — CMP ECHNOLOGY T TRENDS RENDS CMP T TECHNOLOGY

12 VALUATING ALUATING IINSPECTION NSPECTION 12 E EV S STRATEGIES TRATEGIES USING USING A ADV DVANCED ANCED S STATISTICAL TATISTICAL M METHODS ETHODS 33 33 IIMPROVED MPROVED Y YIELD IELD L LEARNING EARNING IN IN CMP CMP


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