VOLUME I ISSUE
3
SPRING 1999
$5.00 US
Yield Management
S O L U T I O N S Yield Enhancement and Process Control Strategies for the Semiconductor Industry
6 6
COVER COVER STORY STORY — — CMP ECHNOLOGY T TRENDS RENDS CMP T TECHNOLOGY
12 VALUATING ALUATING IINSPECTION NSPECTION 12 E EV S STRATEGIES TRATEGIES USING USING A ADV DVANCED ANCED S STATISTICAL TATISTICAL M METHODS ETHODS 33 33 IIMPROVED MPROVED Y YIELD IELD L LEARNING EARNING IN IN CMP CMP