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Enhancing Overlay Metrology Productivity and Stability Using an Off-line Recipe Database Manager by Stephen J. DeMoora, Stephanie Hilbun, George P. Beck III, Kristi L. Bushmana, Russell D. Fields, Texas Instruments Incorporated Robert M. Peters, Todd E. Calvert, KLA-Tencor Corporation
Tool cost of ownership and manufacturing productivity continue to be key factors in equipment selection discussions. Products that differentiate themselves by maximizing tool utilization and minimizing engineering resources make the best economic impact in a time of increasing fab capital costs. This paper will demonstrate the use of a single off-line recipe database manager (RDM) in conjunction with multiple optical misregistration measurement tools for the purpose of misregistration recipe creation and management in a high volume ASIC manufacturing line.
The manufacturing environment that exists in today’s high volume ASIC production fabs presents multiple logistic challenges to the photolithography sector. In such fabs, it is common to have hundreds of independent devices running concurrently. This, in turn, corresponds to having thousands or even tens of thousands of reticles active at any one time. Typically, each individual reticle will require independent recipes for stepper exposure, and the subsequent misregistration and critical dimension metrology steps. In such an environment, recipe creation and management become very large and critical tasks. In order to maximize tool utilization and minimize cycle time impact, recipe setup time must be minimal. Furthermore, in order to ensure the robustness and stability of a large number of recipes, the number of personnel involved in recipe creation and maintenance should be minimized. To meet these requirements, the recipe management system must be fast, simple to use, and capable of easy replica44
Summer 2000
Yield Management Solutions
tion and/or distribution of recipes to multiple process tools within the fab. In an ideal case, the system should be capable of creating recipes off-line from the production tool without requiring a wafer, and be able to distribute recipes to process tools via network connections. Historically, metrology tools have not been capable of meeting this ideal case, mainly due to restrictions placed on metrology equipment vendors by their customers. With limited real estate available in scribe lines, chip manufacturers have pushed metrology vendors to design flexible pattern recognition systems that do not require a specific alignment target to be placed in the scribe. As a result, most metrology systems on the market today require that recipe setup be performed on the tool using a production wafer in order to acquire the necessary pattern recognition and measurement site templates with the proper illumination and other setup conditions. The limitations described above can be overcome to a large degree by using a system that allows for storage of “master� templates for pattern recognition and measurement site setup. Furthermore, by using some forethought, a standard pattern recognition structure can be designed for use by multiple types of metrology