Product News iSupport™
iSupport is a fast, comprehensive and secure on-line customer support offering that enables KLA-Tencor’s technical support and applications engineers to remotely access data from KLA-Tencor tools and operate them in real time to diagnose and rapidly resolve problems when they occur—all via a secure on-line connection controlled by the customer at all times. iSupport is much broader than remote diagnostics, providing continuous, automated monitoring, problem detection and notification, equipment run-time and real-time performance reports and analysis, secure and safe remote diagnostics and problem resolution. With iSupport, any assistance that doesn’t require parts replacement can be quickly and completely resolved on-line. This is accomplished by installing a diagnostic server to monitor KLA-Tencor tools in the customer’s fab. The diagnostic server is connected to KLA-Tencor’s On-line Support Center where authorized support personnel provide immediate help at the first sign of an equipment problem. The ability to provide rapid on-line assistance to our customers, as well as real-time equipment performance and process data will result in higher KLA-Tencor tool productivity, improving our customers’ Cost of Ownership and asset utilization. iSupport connectivity is designed into the most recent KLA-Tencor tools and will be engineered into all future KLA-Tencor product lines. circle RS#033
AIT III
The AIT III is the newest member of KLA-Tencor’s production-proven AIT family, and has the increased sensitivity needed to meet the production pattern tool monitoring requirements of the 0.13 micron technology node. It features improved low-angle illumination and low-angle optics, as well as new noise suppression techniques, to deliver higher throughput darkfield inspection. Customizable hard mask apertures enable optical filtering to enhance defect capture at specific process layers. These features, as well as an additional smaller laser spot size and a collection channel for high angle scatter, improve defect detection on dense patterns as well as enhance defect capture of CMP microscratches and low profile (flat) pattern defects. The AIT III is 300 mm capable and customers can upgrade their AIT II tools to AIT III performance. circle RS#046
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Spring 2000
Yield Management Solutions