VOLUME 4 ISSUE
1
WINTER
2002
$5.00 US
Yield Management
S O L U T I O N S Yield Acceleration Strategies for the Semiconductor Industry
SPECIAL ISSUE: A Focus on Cu/low-κ 15 15 COVER COVER STORY STORY — — A ANOTHER NOTHER D DAY AY,, A ANOTHER NOTHER Y YIELD IELD L LEARNING EARNING C CYCLE YCLE 8 8 VOIDS, PITS,
AND
COPPER
54 54 CMP: W WHERE HERE D DOES OES
IT IT
E END ND? ?