NeoScope

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NeoScope Table Top SEM

Serving Advanced Technology

Simple Operation to 40,000


From 10 to 40,000 Table Top SEM NeoScope

Notebook PC version

Just plug it to a wall outlet after placing it on a table

Desktop PC version

Option 2

NeoScope


Just a few suggestions Application as wide as your imagination Observation at higher magnification

• Larger depth of focus • High magnification • High resolution Magnification 0.5 1,500

Magnification 10 40,000

Check a specimen before sending it out to analytical lab

Sampling inspection done with the ease of light microscope Good products Products Rejected products

1 Operation is easy. You can learn it in a short time. 2 High quality image by secondary electrons 3 Up to 70mm diameter 50mm height specimen 4 Measurement in nanometer 5 My recipe for reliable results 6 Smile View for quick report editing 7 Maintenance is easy

NeoScope

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Sharp image at high magnification Larger depth of focus A scanning electron microscope (SEM) has about 10 times larger depth of focus so that you can focus even on an extremely rough specimen. You can understand complicated structures easily.

Light microscope 500

Scanning electron microscope 500

50Âľm

Specimen : Fracture surface of brass screw

Continuous zoom up from the lowest magnification High magnification image in no time Mouse changes magnification continuously. No focus change when magnification is changed.

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15,000

200

2,000 Specimen : Zinc oxide

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NeoScope


NeoScope

Realistic high magnification

Table Top SEM

20,000 by secondary electron (SE) image in high vacuum

JCM-5000 NeoScope goes up to 20,000 and shows realistic surface image by secondary electron image at the high vacuum mode. The depth of focus is large enough to easily understand complicated morphology. The high vacuum mode keeps high performance for a long period of time.

Cement, Secondary electron image, original mag: 20,000 (with coating)

Zinc oxide, Secondary electron image, original mag: 20,000 (no coating)

This is cement mix for DIY mixed with water and set for 30 minutes. Cement crystals are growing on sand grains. Gold conductive coating has been applied by a sputter coater.

The specimen is conductive enough to be observed without conductive coating. You can observe particles smaller than 0.1micron (100nm).

Gypsum, Secondary electron image, original mag: 20,000 (with coating)

Gypsum, Secondary electron image, original mag: 10,000 (with coating)

Gypsum was mixed with water and set for a few minutes. Fine long crystals are observed. Gold conductive coating has been applied by a sputter coater.

A wider view was observed at a slightly lower magnification. Small particles are observed with long crystals.

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Large specimen can be observed A small specimen is observed by putting it on a specimen mount. A large specimen up to 70mm diameter and 50mm height can be set on the 70mm specimen holder. You can use carbon double sticky tape to fix a specimen on a mounting block or a holder. Then set the specimen holder on the specimen stage. Closing the specimen stage starts pumping automatically. The specimen stage moves 35mm on both X and Y axes. The specimen stage is stable enough to show a clear image at 20,000.

Pull out the specimen stage and set a specimen holder on it.

Maximum 70mm diameter 50mm height specimen.

Close the specimen stage starts pumping automatically.

Specimen holder and specimen mount Specimen holder Standard specimen holder 25mm diameter specimen holder 70mm diameter specimen holder

Optional specimen holder 35mm diameter specimen holder Tilting specimen holder

25mm diameter specimen holder*

70mm diameter specimen holder*

35mm diameter specimen holder

Specimen mount

25mmDia 10mmH 25mmDia 25mmH 35mmDia 10mmH Pre-tilt specimen mount (custom made)

25mmDia 25mmH*

25mmDia 10mmH*

Calibration specimen*

*Standard

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NeoScope


NeoScope

Observation

Table Top SEM

Let's observe in the high vacuum mode

A secondary electron image appears automatically on the monitor when the specimen chamber is pumped to high vacuum. The operation condition is the Standard Recipe, which give good results for most of specimens at 10kV. This condition reveals fine surface structures of a specimen clearly.

Observation monitor

Observation made easy by the recipe The optimum operation conditions may vary depending on the material or shape of a specimen, or magnification for observation. Some specimens may produce better results by using an accelerating voltage or probe current different from the Standard Recipe. When you find a better operation conditions for your specimen, you can store them in My Recipe and reuse it when you observe a similar specimen later.

15kV : Suitable for high magnification

10kV : Suitable for fine structures up to a few thousand times

5kV : Suitable for heat sensitive specimen Specimens : Business card

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Adjustment of image

The contrast and brightness of image can be controlled automatically or manually.

Automatic operation

Manual operation ● Image adjustment You can adjust contrast and brightness manually as well. ● Focus Focus can be manually adjusted as well as automatically. ● Astigmatism correction Fine astigmatism adjustment is available in addition to the automatic correction. ● Image shift You can shift the image by a mouse drag. This is convenient at high magnification. ● IImage Rotation You can rotate a live image on the monitor by 1 degree step or 90 degree step.

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NeoScope

Focus

Brightness

First click on the Auto Contrast & Brightness for automated adjustment. You can adjust contrast and brightness manually as well. Then click on the Auto Focus to focus the image. At high magnifications you may need to compensate astigmatism.


NeoScope

Table Top SEM

Measurement mode You can measure a distance between two points just by a click on each point. The result is pasted on the image.

5.8 m 19ยบ

5.1 m 33ยบ

5.3 m 38ยบ

Click on two points on a image.

The result is pasted on the image.

Report Creation (Option) Images obtained by the SEM are pasted on a layout sheet of Smile View (Option) to create a report. The acquired images are displayed in small thumb nail images. Simply drag and drop these image onto a layout sheet. You can freely edit your own layout by changing the size of each image and position. Magnification is automatically calibrated and displayed as you change the size of image. SMile View also has a measurement mode. You can measure on a layout sheet and result is pasted on the report.

Thumb nail images

Layout sheet to edit a report

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Large Depth of Focus

Complicated morphology observed by SE image in high vacuum

A scanning electron microscope (SEM) is unique due to its large depth of focus together with high resolution. You can observe clearly a rough specimen difficult for a light microscope to focus. The lowest magnification is 10. You can find an area located by a light microscope easily.

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NeoScope

BNC connector, Secondary electron image, original mag: 15 (no coating)

BNC connector, Secondary electron image, original mag: 11 (no coating)

Tap, Secondary electron image, original mag: 17 (no coating)

Drill, Secondary electron image, original mag: 30 (no coating)


NeoScope

Industrial Products

Table Top SEM

Quality control by high quality SE and BSE images

An SEM lets you observe complicated structures clearly in details with high resolution. This unique feature of an SEM is widely used in the industry from research to quality control.

Electronic board, Secondary electron image, original mag: 10 (with coating)

Electronic board, Secondary electron image, original mag: 20 (with coating)

Integrated circuit, Secondary electron image, original mag: 2,400 (no coating)

Solder, Backscattered electron image, original mag: 3,000 (no coating)

Contaminated contact surface, Secondary electron image, original mag: 100 (no coating)

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Industrial Products

Quality control by high quality SE image in high vacuum

An SEM is widely used in the industry from research to quality control.

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NeoScope

Medicine surface, Secondary electron image, original mag: 30 (with coating)

Medicine cross section, Secondary electron image, original mag: 1,000 (with coating)

Business card (left: printed, right: paper), Secondary electron image,original mag: 500 (with coating)

Wool, Secondary electron image, original mag: 1,000 (with coating)

Metal fracture, Secondary electron image, original mag: 5,000 (with coating)

Optical film, Secondary electron image, original mag: 5,000 (with coating)


NeoScope

Plant Product

Table Top SEM

High quality SE image with conductive coating

Plant products such as lumber do not have electric conductivity. You can observe the surface structures in high precision with secondary electron image in the high vacuum mode by applying conductive coating.

Dry wood cross section, Secondary electron image, original mag: 3,000 (with coating)

Dry wood cross section, Secondary electron image, original mag: 270 (with coating)

Dried tobacco leaf, Secondary electron image, original mag: 240 (with coating)

Bamboo charcoal, Secondary electron image, original mag: 700 (with coating)

Bamboo charcoal, Secondary electron image, original mag: 100 (with coating)

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Insects

Realistic image in SE image in high vacuum

Fine structures of insects can be observed clearly in details at high magnification. The SE image is most suitable for observation of insects.

Butterfly scale, Secondary electron image, original mag: 20,000 (with coating)

Butterfly scale, Secondary electron image, original mag: 150 (with coating)

Fruit fly, Secondary electron image, original mag: 24 (with coating)

Fruit fly, Secondary electron image, original mag: 800 (with coating)

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NeoScope

Larva of butterfly, Secondary electron image, original mag: 200 (with coating)


NeoScope

Animal Organism

Table Top SEM

SE image in high vacuum

Animal organism contains water and not suitable for observation in SEM. These specimens are prepared by chemical fixation, dehydration, and drying by freeze dry or by critical point dry. A dried specimen is applied with conductive coating and observed with SE image in high vacuum.

Glomerulus, Secondary electron image, original mag: 5,000 (with coating)

Lung alveolus of rat, Secondary electron image, original mag: 500 (with coating)

Red blood cell of rat, Secondary electron image, original mag: 8,000 (with coating)

Egg shell is observed. You can observe the fine inner network. You can observe fine holes on the crystal structures in the shell.

Inner film of egg shell, Secondary electron image, original mag: 1,000 (with coating)

Egg shell cross section, Secondary electron image, original mag: 2,000 (with coating)

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Non conductive specimens

Observed with SE image in high vacuum

You can observe a non-conductive specimen by using low voltage where the numbers of incident electrons and emitted electrons from a specimen are close or in the low vacuum mode by introducing small amount of air in the specimen chamber. In the low vacuum mode gas molecules are ionized by the incident electrons and neutralize the electrons accumulated on the specimen surface.

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Mold grown on paulowia leaf (no coating, frame accumulation), Secondary electron image, original mag: 100

Powdery mildew on horse chestnut (no coating, frame accumulation), Secondary electron image, original mag: 900

Alumina powder (no coating, frame accumulation), Secondary electron image, original mag: 2,000

Paper (no coating), Secondary electron image, original mag: 500

NeoScope


NeoScope

Non conductive specimens

Table Top SEM

Observed in low vacuum

When you introduce small amount of air into the specimen chamber to increase the pressure to 30Pa, about 10% of the incident electrons collide with gas molecules and generate ions. The ions neutralize the electrons accumulated on a non-conductive specimen surface. The electrons collieded with gas molecules are scattered and reach over a wide area on the specimen. You observe backscattered electron (BSE) image in the low vacuum mode. BSE images are of slightly poorer resolution due to larger generation volume of backscattered electrons.

Face powder (no coating), BSE image in low vacuum, original mag: 1,000

Concrete cross section (no coating), BSE image in low vacuum, original mag: 200

Cloth (no coating), BSE image in low vacuum, original mag: 100

Paper (no coating), BSE image in low vacuum, original mag: 500

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Self Test and Simple Maintenance Neo Scope can be easily maintained by a user. When the SEM is not functioning properly, you can find the reason on the Self test window.

Carbon specimen without conductive coating

NeoScope

Ring to hold electron gun

Electron gun with filament

(Option)

You can obtain a sharp and good quality image of a non-conductive specimen easily by applying conductive coating on a specimen. The conductive coating is only a few nm thick so that fine surface structures are not hidden. A sputter coater is used to apply conductive coating. You can form uniform coating film in a short time.

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It is simple to change a filament. NeoScope uses cartridge electron source, which is composed of electron gun and filament. Remove an old electron source and plug in a new one. You can change filament by simple procedure in a short time.

when a filament is burnt out, this window appears automatically.

Self test

NeoCoater

Neo cartridge

NeoCoater ● Compact ● Easy to use ● Affordable Price

Carbon specimen with conductive coating of gold


NeoScope

Table Top SEM

Principal Specifications

Specifications Magnification

NeoScope 10 40,000

Installation requirement Single phase AC100V (400VA) 240V (1,100VA)

Electric power

Observation mode High vacuum mode, Low vacuum mode

50Hz/60Hz

Electron source

Small cartridge electron source

Power fluctuation

Less than ±10%

Accelerating voltage

15kV, 10kV, 5kV

Grounding terminal

One, 100 Ω or less

Specimen stage

Manual, X 35mm, Y 35mm

Specimen exchange Specimen stage draw out

Installation room Room temperature

15ºC 30ºC

Humidity

70% or less

Maximum specimen size

70mm Diameter 50mm Height

Detector

Secondary electron detector, Backscattered electron detector

Computer

Portable PC

Main console

Approximately 69kg

OS

Windows Vista, Windows 7

PC

Approximately 11kg

Digital image

1,280 1,024 pixels, bmp, tif, jpg

RP

Approximately 16kg

Data display

Accelerating voltage, magnification, micron bar, micron value

Automatic operation

Electron source, focus, brightness, contrast, and astigmatism

Evacuation time

Approximately 3 minutes

Evacuation system

TMP, RP

Main console dimensions

W492 D458 H434mm

Weight

Wagon to add mobility (Option)

NeoScope composition

Main console

Rotary pump

PC

NeoCoater composition

Specifications

NeoCoater

Main console

Rotary pump

NeoCoater

Composition

Main console + RP (20L/min)

Specimen table size

70mm diameter

Specimen table height

32mm to 73mm to the target

Power

Single phase

Weight

Main console 9.3kg + RP9kg

Operation vacuum

4Pa

Sputter time

1 min (standard), 2 min, 3 min selectable

Target

Au

Target size

ø49 0.05mm

Main console dimension

W200 D230 H325mm

100V 50/60Hz 440W

*Specifications subject to change without notice.

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NeoScope Table Top SEM

Specifications and equipment are subject to change without any notice or obligation on the part of the manufacturer. Š2009 NIKON CORPORATION The products detailed in the brochure are controlled by the Japanese Foreign Exchange and Foreign Trade Law and the International Export Control Regime. If there is a possibility that they may be utilized for the development of weapons of mass destruction, etc., they shall not be exported without authorization from the government.

NIKON METROLOGY EUROPE NV

NIKON CORPORATION

Geldenaaksebaan 329, 3001 Leuven, Belgium Shin-Yurakucho Bldg., 12-1, Yurakucho 1-chome, Chiyoda-ku, NIKON CORPORATION phone: +32-16-74-01-00 fax: +32-16-74-01-03 Tokyo 100-8331, Japan 6-3, Nishiohi 1-chome, Shinagawa-ku, E-mail: sales_europe@nikonmetrology.com phone:+81-3-3216-2384 fax:+81-3-3216-2388 Tokyo 140-8601, Japan www.nikonmetrology.com www.nikon.com/instruments phone: +81-3-3773-9026 fax: +81-3-3773-9062 http://nikon.com/products/instruments/

NIKON METROLOGY, INC. 12701 Grand River Avenue, Brighton, MI 48116 U.S.A. NIKON INSTRUMENTS INC. phone: +1-810-220-4360 fax: +1-810-220-4300 1300 Walt Whitman Road, Melville, N.Y. 11747-3064, U.S.A. E-mail: sales_us@nikonmetrology.com phone: +1-631-547-8500; +1-800-52-NIKON (within the U.S.A. only) http://us.nikonmetrology.com/

fax: +1-631-547-0306

NIKON METROLOGY GMBH http://www.nikoninstruments.com/ GERMANY phone: +49-6023-91733-0 fax: + +49 6023 91 733-229 NIKON INSTRUMENTS EUROPE B.V. E-mail: sales_germany@nikonmetrology.com

Laan van Kronenburg 2, 1183 AS, Amstelveen, The Netherlands phone: +31-20-44-96-222 fax: +31-20-44-96-298 NIKON METROLOGY UK LTD. http://www.nikoninstruments.eu/ UNITED KINGDOM phone: +44-1332-811-349 fax: +44-1332-639-881 NIKON INSTRUMENTS (SHANGHAI) CO., LTD. Email: sales_uk@nikonmetrology.com CHINA phone: +86-21-5836-0050 fax: +86-21-5836-0030 NIKON SARL (BeijingMETROLOGY branch) phone: +86-10-5869-2255 fax: +86-10-5869-2277 FRANCE phone:branch) +33-1-60-86-09-76 fax: +33-1-60-86-57-35 (Guangzhou phone: +86-20-3882-0550 fax: +86-20-3882-0580 Email: sales_fr@nikonmetrology.com

More offices and resellers at www.nikonmetrology.com Printed in Japan

NIKON INSTRUMENTS (SHANGHAI) CO., LTD. CHINA phone: +86-21-6841-2050 fax: +86-21-6841-2060

NIKON SINGAPORE PTE LTD. fax: +86-10-5831-2026 NIKON UK LTD. (Beijing branch) phone: +86-10-5831-2028 SINGAPORE phone:phone: +65-6559-3618 fax: +65-6559-3668 (Guangzhou branch) +86-20-3882-0552 fax: +86-20-3882-0580UNITED KINGDOM phone: +44-20-8247-1717 fax: +44-20-8541-4584 NIKON GMBH AUSTRIA NIKON MALAYSIA SDN. BHD. AUSTRIA phone: +43-1-972-6111-00 fax: +43-1-972-6111-40 NIKON MALAYSIA SDN BHD MALAYSIA phone: +60-3-7809-3609 fax: +60-3-7809-3633 MALAYSIA phone: +60-3-7809-3688 fax: +60-3-7809-3633 NIKON BELUX NIKON INSTRUMENTS KOREA CO., LTD. BELGIUM phone: +32-2-705-56-65 fax: +32-2-726-66-45 KOREA phone: +82-2-2186-8400 fax: +82-2-555-4415 NIKON INSTRUMENTS KOREA CO., LTD.

NIKON CANADA INC. fax: +82-2-555-4415 KOREA phone: +82-2-2186-8400 CANADA phone: +1-905-602-9676 fax: +1-905-602-9953 NIKON INDIA PRIVATES.A.S. LIMITED NIKON FRANCE INDIA phone: +91-124-4688500 fax: +91-124-4688527 FRANCE phone: +33-1-45-16-45-16 fax: +33-1-45-16-45-55 NIKON GMBH NIKON SINGAPORE PTE LTD GERMANY phone: +49-211-9414-220 fax: +49-211-9414-322 SINGAPORE phone: +65-6559-3618 fax: +65-6559-3668 NIKON INSTRUMENTS S.p.A. ITALY phone: +39-55-3009601 fax: +39-55-300993 NIKON AG SWITZERLAND phone: +41-43-277-2860 fax: +41-43-277-2861


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