CNC Video Measuring System VMZ-K6555
L Specifications Types
3x
7.5x
15x
30x
Confocal Imaging & Metrology
Objectives Magnification
3x
W.D.
7.5x
24mm
5mm
15x
30x
20mm
5mm
Confocal optics (Area height measurement) Maximum scan height Field of view
1mm
3.90 x 2.91mm
1.56 x 1.16mm
0.78 x 0.58mm
0.39 x 0.29mm
Height measurement repeatability (2σ)
0.35μm
0.25μm
0.25μm
0.20μm
Pixel size in CF image
2.5μm
1μm
0.5μm
0.25μm
Measurement time par FOV
1.5 sec./FOV at 80μm scan range with 3x objective lens
Lens Mold
Brightfield optics (2D measurement) Zooming method
5-step 15x zoom ratio
Field of view
3.90 x 2.92mm to 0.26 x 0.19mm
Illumination
5-step 12.8x zoom ratio
1.56 x 1.17mm to 0.10 x 0.078mm
1.26 x 0.95mm to 0.095 x 0.074mm
0.63 x 0.47mm to 0.05 x 0.037mm
White LED diascopic and episcopic illuminator for all types, White LED ring light for type 3x and 7.5x
Auto focus
Vision AF and TTL laser AF (Scan Mode available)
Main body Stroke (X, Y, Z)
650 x 550 x 150mm
Guaranteed loading capacity Maximum permissible error
30kg
MPEE1X, MPEE1Y MPEE2XY
Maximum permissible error of Z axis
MPEE1Z
1.5 + 2.5L / 1000 μm 2.5 + 2.5L / 1000μm
CNC Video Measuring System
1 + L / 1000μm
2D measurement repeatability (at 5x or higher)
CONFOCAL NEXIV
0.75μm (2σ)
Power source/power consumption
AC 100 to 240 V ± 10% 50/60 Hz / 13A to 6.5A
Operating condition
Temperature: 20 °C ± 0.5K, Humidity: 70% or less
Footprint & main unit weight
2500 x 1900mm, main unit 850kg, miscellaneous 100kg
Acquired standard
VMZ-K6555
CE marking (low voltage/EMC/laser)
Please contact Nikon for permissible floor vibration specifications.
n Dimensional diagram
Bonding Wire
1220 900 280
776
701
247.5
550 (Y Stroke)
247.5 300
27.5
96.5
850 456 1050 1600
73.5
760
165
1970 490
18xM6 Depth 10
100 x 6
650 (X Stroke)
950 1150
Fine Bump
Unit: mm
The products detailed in the brochure are controlled by the Japanese Foreign Exchange and Foreign Trade Law and the International Export Control Regime. If there is a possibility that they may be utilized for the development of weapons of mass destruction, etc., they shall not be exported without authorization from the government. Specifications and equipment are subject to change without any notice or obligation on the part of the manufacturer. December 2009 ©2009 NIKON CORPORATION WARNING
TO ENSURE CORRECT USAGE, READ THE CORRESPONDING MANUALS CAREFULLY BEFORE USING YOUR EQUIPMENT.
* Monitor images are simulated. Company names and product names appearing in this brochure are their registered trademarks or trademarks.
NIKON CORPORATION NIKON CORPORATION Fuji Bldg., 2-3, Marunouchi 3-chome, Chiyoda-ku, 6-3, Nishiohi 1-chome, Shinagawa-ku, Tokyo 140-8601, Japan Tokyo+81-3-3773-9026 100-8331, Japan phone: fax: +81-3-3773-9062 www.nikon.com/ http://www.nikon.com/products/instruments/ NIKON INSTRUMENTS INC. 1300 Walt Whitman Road, Melville, N.Y. 11747-3064, U.S.A. phone: +1-631-547-8500; +1-800-52-NIKON (within the U.S.A. only) fax: +1-631-547-0306 http://www.nikoninstruments.com/
NIKON INSTRUMENTS EUROPE B.V. Laan van Kronenburg 2, 1183 AS Amstelveen, The Netherlands phone: +31-20-44-96-222 fax: +31-20-44-96-298 http://www.nikoninstruments.eu/
NIKON INSTRUMENTS (SHANGHAI) CO., LTD. CHINA phone: +86-21-5836-0050 fax: +86-21-5836-0030 (Beijing branch) phone: +86-10-5869-2255 fax: +86-10-5869-2277 (Guangzhou branch) phone: +86-20-3882-0550 fax: +86-20-3882-0580
Printed in Japan (0912-05)T/NC
NIKON SINGAPORE PTE LTD SINGAPORE phone: +65-6559-3618 fax: +65-6559-3668
NIKON UK LTD. UNITED KINGDOM phone: +44-208-247-1717 fax: +44-208-541-4584
NIKON MALAYSIA SDN. BHD. MALAYSIA phone: +60-3-7809-3609 fax: +60-3-7809-3633
NIKON GMBH AUSTRIA AUSTRIA phone: +43-1-972-6111-00 fax: +43-1-972-6111-40
NIKON INSTRUMENTS KOREA CO., LTD. KOREA phone: +82-2-2186-8400 fax: +82-2-555-4415
NIKON BELUX BELGIUM phone: +32-2-705-56-65 fax: +32-2-726-66-45
NIKON CANADA INC. CANADA phone: +1-905-602-9676 fax: +1-905-602-9953 NIKON FRANCE S.A.S. FRANCE phone: +33-1-4516-45-16 fax: +33-1-4516-45-55 NIKON GMBH GERMANY phone: +49-211-941-42-20 fax: +49-211-941-43-22 NIKON INSTRUMENTS S.p.A. ITALY phone: +39-055-300-96-01 fax: +39-055-30-09-93 NIKON AG SWITZERLAND phone: +41-43-277-28-60 fax: +41-43-277-28-61
Code No. 2CE-IEMH-1
En This brochure is printed on recycled paper made from 40% used material.
The advanced confocal metrology capabilities of the NEXIV VMZ-K6555 provide new measurement possibilities for demanding applications.
Fine Bump
HDD Slider
Main Features • Multiple field-of-view (FOV) height measurements with advanced Nikon confocal optics • New high magnification optical head for surface metrology requirements • 650mm x 550mm measurement range • Long-life white LED illuminator light source for brightfield microscopy • 10nm resolution scale for precise and accurate Z axis motion control
The new Nikon Confocal NEXIV VMZ-K6555 was developed on the strength of Nikon's leading opto-mechatronics (optical, mechanical and electronic) technologies. It incorporates a variety of confocal optics for fast and accurate evaluation of fine three-dimensional surface metrology, image processing technology, and TTL laser autofocus. It allows both 2D and height measurements in the same field of view. The Confocal NEXIV VMZ-K6555 is used for the inspection and measurement of critical dimensions of highly complex structures on advanced semiconductor devices, probe cards, substrate patterns on circuit boards, MEMS and a variety of other demanding applications.
n Principle of confocal optics Light passes through a pinhole on a spinning Nipkow disk at a focal point of the optical path and is reflected by an object at the focal point of the lens. The light then passes again through a pinhole on the same disk and is detected as a very narrow DOF image by the camera. However, if there is no object at the focal point, the light does not reflect back through the pinhole. By moving the focal plane in the vertical direction, the Confocal NEXIV samples multiple images and combines them to reconstruct a 3D confocal image with height information using Nikon's specialized interpolation technology.
Light passes through a pinhole
Camera
Main applications • Micro bumps on advanced IC packages • Probe cards • Substrate pattern height and size • Advanced glass and polymer components (micro lens, contact lens) • Laser marks on semiconductor wafers • MEMS • Wire bonding, advanced fine interconnection technology
n 3D Surface Metrology Analysis Software - MountainsMap X (Option)
n Confocal optics allows wide-area height measurement in one scan of the field of view
The MountainsMap X is powerful software for surface metrology analysis. It provides the rich functionality of 3D visualization, cross-sectional view, 2D and 3D roughness, and other parameters based on the latest ISO standards.
Nikon’s customized confocal optics, in combination with newly developed ZC objective lenses for height measurement, can obtain height data for every pixel in the field of view in a single scan. This allows fast, accurate, repeatable and reproducible wide-area height measurements. This is made possible by Nikon's precision control technologies and superior optics.
n Wide range of magnifications
Tooling Surface by cBN Micro Ball-endmill
Four models are available: With 3x, 7.5x (below left), 15x, and 30x (below right) high NA and long working distance objective lenses. These options allow for optimum magnification and measurement of a variety of applications.
Light source Pinholes on spinning Nipkow disk
Probe Card
n Core technologies for Confocal NEXIV metrology
8μm Step Height Standard
n Image Archiving and Processing Software EDF/Stitching Express (Option)
Objective lens
Scan
Workpiece
Focused
Not focused
n Nikon Confocal Metrology Software - NEXIV VMR Advanced AutoMeasure
Confocal images captured by Z scan are reconstructed in real time into 3D contour map and EDF (Extended Depth of Focus) images.
2
Lens Mold
The EDF/Stitching Express software creates an image archiving library for confocal and brightfield images and provides post-image processing functionality such as EDF (Extended Depth of Focus) and large-area image stitching.
The versatile metrology functionality of the NEXIV VMR Advanced AutoMeasure software makes 3D FOV feature measurements in real-time 3D confocal images possible. 3
CNC Video Measuring System VMZ-K6555
L Specifications Types
3x
7.5x
15x
30x
Confocal Imaging & Metrology
Objectives Magnification
3x
W.D.
7.5x
24mm
5mm
15x
30x
20mm
5mm
Confocal optics (Area height measurement) Maximum scan height Field of view
1mm
3.90 x 2.91mm
1.56 x 1.16mm
0.78 x 0.58mm
0.39 x 0.29mm
Height measurement repeatability (2σ)
0.35μm
0.25μm
0.25μm
0.20μm
Pixel size in CF image
2.5μm
1μm
0.5μm
0.25μm
Measurement time par FOV
1.5 sec./FOV at 80μm scan range with 3x objective lens
Lens Mold
Brightfield optics (2D measurement) Zooming method
5-step 15x zoom ratio
Field of view
3.90 x 2.92mm to 0.26 x 0.19mm
Illumination
5-step 12.8x zoom ratio
1.56 x 1.17mm to 0.10 x 0.078mm
1.26 x 0.95mm to 0.095 x 0.074mm
0.63 x 0.47mm to 0.05 x 0.037mm
White LED diascopic and episcopic illuminator for all types, White LED ring light for type 3x and 7.5x
Auto focus
Vision AF and TTL laser AF (Scan Mode available)
Main body Stroke (X, Y, Z)
650 x 550 x 150mm
Guaranteed loading capacity Maximum permissible error
30kg
MPEE1X, MPEE1Y MPEE2XY
Maximum permissible error of Z axis
MPEE1Z
1.5 + 2.5L / 1000 μm 2.5 + 2.5L / 1000μm
CNC Video Measuring System
1 + L / 1000μm
2D measurement repeatability (at 5x or higher)
CONFOCAL NEXIV
0.75μm (2σ)
Power source/power consumption
AC 100 to 240 V ± 10% 50/60 Hz / 13A to 6.5A
Operating condition
Temperature: 20 °C ± 0.5K, Humidity: 70% or less
Footprint & main unit weight
2500 x 1900mm, main unit 850kg, miscellaneous 100kg
Acquired standard
VMZ-K6555
CE marking (low voltage/EMC/laser)
Please contact Nikon for permissible floor vibration specifications.
n Dimensional diagram
Bonding Wire
1220 900 280
776
701
247.5
550 (Y Stroke)
247.5 300
27.5
96.5
850 456 1050 1600
73.5
760
165
1970 490
18xM6 Depth 10
100 x 6
650 (X Stroke)
950 1150
Fine Bump
Unit: mm
The products detailed in the brochure are controlled by the Japanese Foreign Exchange and Foreign Trade Law and the International Export Control Regime. If there is a possibility that they may be utilized for the development of weapons of mass destruction, etc., they shall not be exported without authorization from the government. Specifications and equipment are subject to change without any notice or obligation on the part of the manufacturer. December 2009 ©2009 NIKON CORPORATION WARNING
TO ENSURE CORRECT USAGE, READ THE CORRESPONDING MANUALS CAREFULLY BEFORE USING YOUR EQUIPMENT.
* Monitor images are simulated. Company names and product names appearing in this brochure are their registered trademarks or trademarks.
NIKON CORPORATION NIKON CORPORATION Fuji Bldg., 2-3, Marunouchi 3-chome, Chiyoda-ku, 6-3, Nishiohi 1-chome, Shinagawa-ku, Tokyo 140-8601, Japan Tokyo+81-3-3773-9026 100-8331, Japan phone: fax: +81-3-3773-9062 www.nikon.com/ http://www.nikon.com/products/instruments/ NIKON INSTRUMENTS INC. 1300 Walt Whitman Road, Melville, N.Y. 11747-3064, U.S.A. phone: +1-631-547-8500; +1-800-52-NIKON (within the U.S.A. only) fax: +1-631-547-0306 http://www.nikoninstruments.com/
NIKON INSTRUMENTS EUROPE B.V. Laan van Kronenburg 2, 1183 AS Amstelveen, The Netherlands phone: +31-20-44-96-222 fax: +31-20-44-96-298 http://www.nikoninstruments.eu/
NIKON INSTRUMENTS (SHANGHAI) CO., LTD. CHINA phone: +86-21-5836-0050 fax: +86-21-5836-0030 (Beijing branch) phone: +86-10-5869-2255 fax: +86-10-5869-2277 (Guangzhou branch) phone: +86-20-3882-0550 fax: +86-20-3882-0580
Printed in Japan (0912-05)T/NC
NIKON SINGAPORE PTE LTD SINGAPORE phone: +65-6559-3618 fax: +65-6559-3668
NIKON UK LTD. UNITED KINGDOM phone: +44-208-247-1717 fax: +44-208-541-4584
NIKON MALAYSIA SDN. BHD. MALAYSIA phone: +60-3-7809-3609 fax: +60-3-7809-3633
NIKON GMBH AUSTRIA AUSTRIA phone: +43-1-972-6111-00 fax: +43-1-972-6111-40
NIKON INSTRUMENTS KOREA CO., LTD. KOREA phone: +82-2-2186-8400 fax: +82-2-555-4415
NIKON BELUX BELGIUM phone: +32-2-705-56-65 fax: +32-2-726-66-45
NIKON CANADA INC. CANADA phone: +1-905-602-9676 fax: +1-905-602-9953 NIKON FRANCE S.A.S. FRANCE phone: +33-1-4516-45-16 fax: +33-1-4516-45-55 NIKON GMBH GERMANY phone: +49-211-941-42-20 fax: +49-211-941-43-22 NIKON INSTRUMENTS S.p.A. ITALY phone: +39-055-300-96-01 fax: +39-055-30-09-93 NIKON AG SWITZERLAND phone: +41-43-277-28-60 fax: +41-43-277-28-61
Code No. 2CE-IEMH-1
En This brochure is printed on recycled paper made from 40% used material.